AEROGEL-BASED MOLD FOR MEMS FABRICATION AND FORMATION THEREOF
    4.
    发明申请
    AEROGEL-BASED MOLD FOR MEMS FABRICATION AND FORMATION THEREOF 有权
    用于MEMS制造及其形成的基于AIRGEL的模具

    公开(公告)号:US20140349078A1

    公开(公告)日:2014-11-27

    申请号:US14455745

    申请日:2014-08-08

    摘要: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

    摘要翻译: 本发明涉及用作至少部分微机电特征的模具的图案化气凝胶基层。 气凝胶的密度小于MEMS制造中使用的典型材料的密度,例如多晶硅,氧化硅,单晶硅,金属,金属合金等。 因此,可以以明显高于在较致密的材料中形成结构特征的速率的速率在气凝胶层中形成结构特征。 本发明还包括一种图案化气凝胶层以产生这种基于气凝胶的模具的方法。 本发明还包括使用基于气凝胶的模具制造微机电特征的方法。 该方法包括将致密材料层直接沉积在已经形成在气凝胶层中的微机电特征的至少一部分的轮廓上。

    REFERENCE LEAK GENERATING DEVICE AND ULTRA-FINE LEAK TESTING DEVICE USING SAME
    8.
    发明申请
    REFERENCE LEAK GENERATING DEVICE AND ULTRA-FINE LEAK TESTING DEVICE USING SAME 审中-公开
    参考泄漏发生装置和使用相同的超微细泄漏测试装置

    公开(公告)号:US20150323408A1

    公开(公告)日:2015-11-12

    申请号:US14443904

    申请日:2013-11-12

    IPC分类号: G01L27/00 G01M3/26 B81B7/00

    摘要: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p1 is obtained in accordance with a product of C and p1.

    摘要翻译: 提供了能够精确地产生超细参考泄漏的参考泄漏产生装置。 适于连接到测量室的上游侧的参考泄漏产生装置包括通过具有分子流导度C和压力的孔口或多孔塞连接到测量室的室,以建立分子流动条件 并且其特征在于,通过使用静态膨胀法一次或多次精确地确定要引入到室中的测试气体的压力p1,并且根据压力p1获得压力p1处的基准泄漏的泄漏率 C和p1的产物。