公开(公告)号：US11520113B1

公开(公告)日：2022-12-06

申请号：US17356898

申请日：2021-06-24

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Abdelsalam Aboketaf ,  Yusheng Bian ,  Edward Kiewra ,  Brett Cucci

IPC: G02B6/42 ,  H01L31/0232 ,  H01L31/0203 ,  G02B6/136

Abstract: Structures for a photodetector or terminator and methods of fabricating a structure for a photodetector or terminator. The structure includes a waveguide core, a light-absorbing layer having a sidewall, and a taper positioned adjacent to the sidewall of the light-absorbing layer. The taper extends laterally from the sidewall of the light-absorbing layer to overlap with the waveguide core, and the taper has a thickness that varies with position relative to the sidewall of the light-absorbing layer. For example, the thickness of the taper may decrease with increasing distance from the sidewall of the light-absorbing layer.

公开(公告)号：US20220381988A1

公开(公告)日：2022-12-01

申请号：US17816804

申请日：2022-08-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/26

Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.

公开(公告)号：US11495700B2

公开(公告)日：2022-11-08

申请号：US16798417

申请日：2020-02-23

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: H01L31/0232 ,  H01L31/028 ,  G02B6/122 ,  G02B6/12 ,  G02B6/42

Abstract: The present disclosure generally relates to structures for use in optoelectronic/photonic applications and integrated circuit (IC) chips. The present disclosure also relates to semiconductor devices having a photodetector coupled with a waveguide, more particularly, a photodetector with a butt-end coupled waveguide. The present disclosure provides a structure having a substrate, a photodetector arranged above the substrate, the photodetector having a core body and a coupler that is adjacent to the core body, in which the core body is configured to absorb light received by the coupler, and the coupler including a plurality of grating structures having respective widths that vary as a function of position relative to the core body.

公开(公告)号：US20220344523A1

公开(公告)日：2022-10-27

申请号：US17241525

申请日：2021-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Asif J. Chowdhury ,  Yusheng Bian ,  Abdelsalam Aboketaf ,  Andreas D. Stricker

IPC: H01L31/0232 ,  G02B6/24

Abstract: Structures for a photodetector or light absorber and methods of forming a structure for a photodetector or light absorber. The structure includes a pad, a waveguide core adjoined to the pad, and a light-absorbing layer on the pad. The waveguide core includes a first longitudinal axis, and the light-absorbing layer includes a second longitudinal axis and an end surface intersected by the second longitudinal axis. The end surface of the light-absorbing layer is positioned adjacent to the waveguide core. The first longitudinal axis of the first waveguide core is inclined relative to the second longitudinal axis of the light-absorbing layer and/or the end surface slanted relative to the second longitudinal axis.

公开(公告)号：US11474383B2

公开(公告)日：2022-10-18

申请号：US17092793

申请日：2020-11-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bartlomiej J. Pawlak ,  Yusheng Bian

IPC: G02F1/035 ,  G02F1/01

Abstract: Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A waveguide core includes a longitudinal axis, a first section, and a second section spaced from the first section along the longitudinal axis. An active layer includes a portion positioned along the longitudinal axis between the first section and the second section of the waveguide core. The active layer contains a material configured to have a first state with a first refractive index in response to an applied stimulus and a second state with a second refractive index different from the first refractive index.

公开(公告)号：US20220291126A1

公开(公告)日：2022-09-15

申请号：US17195887

申请日：2021-03-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Steven M. Shank ,  Anthony K. Stamper ,  John J. Ellis-Monaghan ,  John J. Pekarik ,  Yusheng Bian

IPC: G01N21/64 ,  H01L31/12 ,  H01L31/02 ,  H01L31/0232 ,  G01N21/85

Abstract: A “lab on a chip” includes an optofluidic sensor and components to analyze signals from the optofluidic sensor. The optofluidic sensor includes a substrate, a channel at least partially defined by a portion of a layer of first material on the substrate, input and output fluid reservoirs in fluid communication with the channel, at least a first radiation source coupled to the substrate adapted to generate radiation in a direction toward the channel, and at least one photodiode positioned adjacent and below the channel.

公开(公告)号：US11415744B1

公开(公告)日：2022-08-16

申请号：US17170203

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alec Hammond ,  Yusheng Bian ,  Michal Rakowski ,  Won Suk Lee ,  Asif J. Chowdhury ,  Roderick A. Augur ,  Abdelsalam Aboketaf

IPC: G02B6/293 ,  G02B6/12 ,  G02B6/13 ,  G02B1/00

Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.

公开(公告)号：US20220252790A1

公开(公告)日：2022-08-11

申请号：US17169971

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Kevin K. Dezfulian ,  Yusheng Bian ,  Kenneth J. Giewont ,  Karen Nummy

IPC: G02B6/30

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The structure includes a dielectric layer including an edge, a waveguide core region on the dielectric layer, and multiple segments on the dielectric layer. The waveguide core region has an end surface, and the waveguide core region is lengthwise tapered toward the end surface. The segments are positioned between the waveguide core region and the edge of the dielectric layer. A waveguide core has a section positioned over the waveguide core region in an overlapping arrangement. The waveguide core has an end surface, and the section of the waveguide core is lengthwise tapered toward the end surface.

公开(公告)号：US20220221714A1

公开(公告)日：2022-07-14

申请号：US17146509

申请日：2021-01-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Won Suk Lee ,  Thomas G. Weeks, III ,  Michal Rakowski ,  Yusheng Bian ,  Roderick A. Augur ,  Alexander L. Martin ,  Petar I. Todorov

IPC: G02B27/00 ,  G02B6/125

Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.

公开(公告)号：US20220221650A1

公开(公告)日：2022-07-14

申请号：US17146864

申请日：2021-01-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Kenneth J. Giewont ,  Karen Nummy ,  Edward Kiewra ,  Steven M. Shank

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/34

Abstract: Structures including a grating coupler and methods of fabricating a structure including a grating coupler. The structure includes structure includes a dielectric layer on a substrate, a first waveguide core positioned in a first level over the dielectric layer, and a second waveguide core positioned in a second level over the dielectric layer. The second level differs in elevation above the dielectric layer from the first level. The first waveguide core includes a tapered section. The structure further includes a grating coupler having a plurality of segments positioned in the second level adjacent to the second waveguide core. The segments of the grating coupler and the tapered section of the first waveguide core are positioned in an overlapping arrangement.