公开(公告)号：US07671515B2

公开(公告)日：2010-03-02

申请号：US11594525

申请日：2006-11-07

Applicant: Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

Inventor： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

IPC: H01L41/053

CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

公开(公告)号：US20090166330A1

公开(公告)日：2009-07-02

申请号：US12006377

申请日：2007-12-31

Applicant: Gary Yama

Inventor： Gary Yama

IPC: H01L21/308

CPC classification number: B81C1/00595 ,  B81C2201/0132 ,  B81C2201/014 ,  H01L21/0475

Abstract: A method of etching a device in one embodiment includes providing a silicon carbide substrate, forming a silicon nitride layer on a surface of the silicon carbide substrate, forming a silicon carbide layer on a surface of the silicon nitride layer, forming a silicon dioxide layer on a surface of the silicon carbide layer, forming a photoresist mask on a surface of the silicon dioxide layer, and etching the silicon dioxide layer through the photoresist mask.

Abstract translation: 在一个实施例中蚀刻器件的方法包括提供碳化硅衬底，在碳化硅衬底的表面上形成氮化硅层，在氮化硅层的表面上形成碳化硅层，在二氧化硅层上形成二氧化硅层 碳化硅层的表面，在二氧化硅层的表面上形成光致抗蚀剂掩模，并且通过光致抗蚀剂掩模蚀刻二氧化硅层。

公开(公告)号：US07449355B2

公开(公告)日：2008-11-11

申请号：US11115828

申请日：2005-04-27

Applicant: Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

Inventor： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

IPC: H01L21/00 ,  H01L21/461

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

公开(公告)号：US07401517B2

公开(公告)日：2008-07-22

申请号：US11506712

申请日：2006-08-18

Applicant: Zhiyu Pan ,  Christoph Lang ,  Gary Yama

Inventor： Zhiyu Pan ,  Christoph Lang ,  Gary Yama

IPC: G01P9/04

CPC classification number: G01C19/5607

Abstract: A dual-axis tuning fork gyroscope includes four open-ended tuning forks arranged coplanarly in two opposite pairs, a first pair of open-ended tuning forks being arranged opposite one another along a first axis, a second pair of open-ended tuning forks being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another. The four open-ended tuning forks are mechanically coupled together so that all four tuning forks vibrate in the same manner in terms of frequency and phase.

Abstract translation: 双轴音叉陀螺仪包括四个以两对相对共面布置的开放式调谐叉，第一对开放式调谐叉沿着第一轴线彼此相对布置，第二对开放式调音叉为 沿着第二轴线彼此相对布置，第一轴线和第二轴线彼此垂直。 四个开放式调谐叉机械耦合在一起，使得所有四个调谐叉在频率和相位方面以相同的方式振动。

公开(公告)号：US20120264301A1

公开(公告)日：2012-10-18

申请号：US13232012

申请日：2011-09-14

Applicant: Andrew B. Graham ,  Gary Yama ,  Gary O'Brien

Inventor： Andrew B. Graham ,  Gary Yama ,  Gary O'Brien

IPC: H01L21/306

CPC classification number: B81C1/00103 ,  B81B2203/0376 ,  B81C2201/0104

Abstract: A method of shaping a substrate in one embodiment includes providing a first support layer, providing a first shaping pattern on the first support layer, providing a substrate on the first shaping pattern, performing a first chemical mechanical polishing (CMP) process on the substrate positioned on the first shaping pattern, and removing the once polished substrate from the first shaping pattern.

Abstract translation: 在一个实施例中，成形衬底的方法包括提供第一支撑层，在第一支撑层上提供第一成形图案，在第一成形图案上提供衬底，在定位的衬底上执行第一化学机械抛光（CMP）工艺 在第一成形图案上，并且从第一成形图案去除一次抛光的基板。

公开(公告)号：US20120264250A1

公开(公告)日：2012-10-18

申请号：US13232073

申请日：2011-09-14

Applicant: Andrew B. Graham ,  Gary Yama ,  Gary O'Brien

Inventor： Andrew B. Graham ,  Gary Yama ,  Gary O'Brien

IPC: H01L21/302

CPC classification number: B81B3/0072 ,  B81B2201/0264 ,  B81C1/00666 ,  G01L9/0042

Abstract: A method of modifying stress characteristics of a membrane in one embodiment includes providing a membrane layer, determining a desired stress modification, and forming at least one trough in the membrane layer based upon the determined desired stress modification.

Abstract translation: 在一个实施方案中，改进膜的应力特性的方法包括提供膜层，确定所需的应力改性，以及基于确定的所需应力改变在膜层中形成至少一个槽。

公开(公告)号：US08187903B2

公开(公告)日：2012-05-29

申请号：US12353080

申请日：2009-01-13

Applicant: Gary Yama ,  Beth Pruitt ,  Arnoldus Alvin Barlian

Inventor： Gary Yama ,  Beth Pruitt ,  Arnoldus Alvin Barlian

IPC: H01L21/00

CPC classification number: G01C19/56 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0817

Abstract: A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.

Abstract translation: 本文公开了一种用压电电阻器形成器件的方法。 在一个实施例中，该方法包括提供衬底，蚀刻衬底中的沟槽以形成垂直壁，在垂直壁上外延生长压敏电阻层，以及将垂直壁与沿着水平延伸的衬底的下层分离 使得压电电阻层相对于水平面内的下层是可移动的。

公开(公告)号：US20090058561A1

公开(公告)日：2009-03-05

申请号：US11850625

申请日：2007-09-05

Applicant: Zhiyu Pan ,  Robert Candler ,  Markus Lutz ,  Aaron Partridge ,  Gary Yama

Inventor： Zhiyu Pan ,  Robert Candler ,  Markus Lutz ,  Aaron Partridge ,  Gary Yama

IPC: H03H9/00

CPC classification number: H03H9/2431 ,  H03H9/02338 ,  H03H9/505 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: A system and method are provided which includes ring resonator structures coupled together with beam structure(s). The ring resonators are configured to operate in the contour or breathe mode. The center of the coupling beam structure is used as a nodal anchor point for anchoring the ring resonators and the beam structures, and also provides a reflecting interface. In an embodiment, the coupling beam structure includes two quarter-wavelength matched beams and an anchor located at a nodal point for coupling the two quarter-wavelength matched beams and ring resonator structures. The symmetric ring design also provides a differential drive and sense configuration while balancing the driving forces about the anchor located at the center of the beam structure. The system exhibits low energy losses while providing large sensing signals and a high quality factor (Q) of about 186,000 at a resonant frequency of about twenty-nine (29) MHz.

Abstract translation: 提供了一种系统和方法，其包括与光束结构耦合在一起的环形谐振器结构。 环形谐振器被配置为在轮廓或呼吸模式下操作。 耦合梁结构的中心用作锚定环形谐振器和梁结构的节点锚点，并且还提供反射界面。 在一个实施例中，耦合波束结构包括两个四分之一波长匹配的波束和位于节点处的用于耦合两个四分之一波长匹配的波束和环形谐振器结构的锚。 对称环设计还提供差速驱动和感测构造，同时平衡位于梁结构中心处的锚的驱动力。 该系统在大约二十九（29）MHz的谐振频率下提供大的感测信号和约186,000的高质量因子（Q），表现出低能量损失。

公开(公告)号：US20080053228A1

公开(公告)日：2008-03-06

申请号：US11513669

申请日：2006-08-30

Applicant: Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

Inventor： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

IPC: G01P15/00

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

Abstract: A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

Abstract translation: 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

公开(公告)号：US07319372B2

公开(公告)日：2008-01-15

申请号：US11182299

申请日：2005-07-15

Applicant: Zhiyu Pan ,  Rob Norris Candler ,  Markus Lutz ,  Aaron Partridge ,  Volker Materna ,  Gary Yama ,  Wilhelm Frey

Inventor： Zhiyu Pan ,  Rob Norris Candler ,  Markus Lutz ,  Aaron Partridge ,  Volker Materna ,  Gary Yama ,  Wilhelm Frey

IPC: H03H9/50 ,  H03H9/21

CPC classification number: H03H9/505 ,  H03H9/0023 ,  H03H9/02338 ,  H03H9/2468 ,  H03H2009/02496

Abstract: There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.

Abstract translation: 这里描述和示出了许多发明，以及这些发明的许多方面和实施例。 在一个方面，本发明涉及一种包括机械耦合以提供例如差分信号输出的多个平面内振动微机电谐振器（例如，2或4个谐振器）的谐振器结构。 在一个实施例中，本发明包括四个通常形状的微机电音叉谐振器（例如，具有两个或更多个矩形或正方形形状的叉的音叉谐振器）。 每个谐振器机械耦合到该架构的另一谐振器。 例如，该架构的每个谐振器在其中一个侧面的一侧或拐角上机械耦合到另一个谐振器。 以这种方式，所有谐振器在被感应时以相同的频率振动。