Abstract:
A procedure in the formation of semiconductor devices for depositing TiN wherein silane and preferably SiH4 is substituted for the hydrogen in the prior art procedures to provide the approximate twofold to fivefold increase in TiN deposition rate at 400 degrees C. It is believed that the reason for the deposition rate increase is that there is a larger free energy change in the reaction which is believed to occur according to the equation: TiCl4+SiH4+NH3.fwdarw.TiN+SiCl4+(7/2)H2. The above described reaction provides cleaner films when performed in a cold wall CVD reactor than is provided by the prior art procedures as described above. Resistivity of 100 microohm-cm has been measured, this being typical of sputtered TiN films.
Abstract:
Deposition in an RIE type plasma reactor of interlevel oxide at high power and low pressure yielding a topography similar to reflowed PSG is disclosed. Deposition rates and film purity are limited by purity and the rate of flow of reactant gases through the plasma reactor and not by the thermal conductivity and expansion properties of quartz as in bias sputtering.
Abstract:
A mesh structure to which is mounted one or more ornamental stones. The mesh structure includes a series of chain links that are inter-woven. A thin metallic film in the form of a solder layer is hardened onto the surface of the mesh structure so as to make the mesh structure rigid. One or more settings are drilled into the rigid mesh structure, and a stone is disposed in each of the settings that are provided. A series of prongs are formed about the periphery of each of the so-disposed stones by up-setting the mesh.
Abstract:
A user interface for multimedia centers advantageously utilizes hand-held inertial-sensing user input devices to select channels and quickly navigate the dense menus of options. Extensive use of the high resolution and bandwidth of such user input devices is combined with strategies to avoid unintentional inputs and with dense and intuitive interactive graphical displays.
Abstract:
A user interface for multimedia centers advantageously utilizes hand-held inertial-sensing user input devices to select channels and quickly navigate the dense menus of options. Extensive use of the high resolution and bandwidth of such user input devices is combined with strategies to avoid unintentional inputs and with dense and intuitive interactive graphical displays.
Abstract:
A blade opening arrowhead having an actuator moveably mounted with respect to a blade carrying body. The actuator can move each blade between a closed position and an opened position. During flight, the blade is in the closed position. Upon target penetration, for example, the actuator moves the blade into the opened position.
Abstract:
The invention provides a system and program product for attenuating a radio frequency identification (RFID) reader. In one embodiment, the system includes optimizing a coverage area of an RFID reader.
Abstract:
Acoustic emissions are detected by reflecting microwave radar signals off of an object, receiving reflected radar signals, generating an intermediate frequency, and filtering the intermediate frequency to remove low frequency signals associated with object movement and not acoustic emissions. A microwave Doppler radar detector provides the signals, a band-pass filter filters the intermediate frequency signal, and resulting signal is collected and analyzed to establish a relationship between the acoustic emission and the filtered signal. One application described is detecting tool wear using a microwave Doppler-based acoustic emission sensor and predicting tool wear based on the detected acoustic emission.
Abstract:
An archery component mountable with respect to an archery bow. The archery component includes a sensor that senses a movement of an archery arrow with respect to the archery bow and/or a movement of the archery bow. The sensor transmits a signal, upon sensing at least one movement, to a signal processor housed within a body of the archery bow and in communication with the sensor. The signal processor receives the signal and activates the archery component in response to the received signal.
Abstract:
The contact opening through an insulating layer is formed having a straight sidewall portion and a bowl shaped sidewall portion. The bowl shaped sidewall portion is near the top of the insulation layer to provide an enlarged diameter of the contact opening at the top relative to the bottom. A conductive material is then formed in the contact opening in electrical contact with a lower conductive layer. The conductive material forms a plug having an enlarged head, such as a nail head or a flat heat screw shape. The enlarged head protects the silicon and a barrier layer, if present, within the contact from being etched by any subsequent anisotropic etches. Thus, when an electrical interconnection layer such as aluminum is formed overlying the contact plug, the plug acts as an etch stop to prevent etching of a barrier layer of the barrier layer within the contact opening.