TWO-DIMENSIONAL, POSITION-SENSITIVE SENSOR-BASED SYSTEM FOR POSITIONING OBJECT HAVING SIX DEGREES OF FREEDOM IN SPACE
    31.
    发明申请
    TWO-DIMENSIONAL, POSITION-SENSITIVE SENSOR-BASED SYSTEM FOR POSITIONING OBJECT HAVING SIX DEGREES OF FREEDOM IN SPACE 有权
    用于定位具有六个自由度空间的物体的二维,位置敏感传感器系统

    公开(公告)号:US20140160495A1

    公开(公告)日:2014-06-12

    申请号:US14234870

    申请日:2012-07-26

    IPC分类号: G01B11/14

    CPC分类号: G01B11/14 G03F7/70775

    摘要: A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser 1, an optical fiber collimator 2, optical fibers 3, 7, 10, and 13, an optical fiber splitter 4, filter plates 6, 9, and 12, three PSD sensors 5, 8, and 11, and a signal processing system. Laser emitted by the semiconductor laser 1 is irradiated onto the optical fiber collimator 2, then transmitted respectively via three paths, and received by the PSD sensors 5, 8, and 11 after having background light filtered out by the filter plates 6, 9, and 12, while the positions of laser spots on the three PSD sensors 5, 8, and 11 are processed by the signal processing system to acquire the position and orientation.

    摘要翻译: 一种二维,位置敏感的基于传感器的系统,用于定位具有六个自由度的物体,用于定位硅平台和光刻机的掩模台。 该系统主要包括半导体激光器1,光纤准直器2,光纤3,7,10和13,光纤分路器4,滤光板6,9和12,三个PSD传感器5,8和11 ,以及信号处理系统。 由半导体激光器1发射的激光照射到光纤准直器2上,然后分别通过三条路径传输,并且由背景光被过滤板6,9滤掉后由PSD传感器5,8和11接收, 在图12中,三个PSD传感器5,8和11上的激光点的位置由信号处理系统处理以获取位置和方位。

    DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE
    32.
    发明申请
    DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE 有权
    用于雕刻机的双波段切换系统

    公开(公告)号:US20140071422A1

    公开(公告)日:2014-03-13

    申请号:US14009289

    申请日:2012-03-23

    IPC分类号: G03F7/20

    CPC分类号: G03F7/70725 G03F7/70733

    摘要: Disclosed is a dual wafer stage switching system for a lithography machine. The system comprises a base stage (30), a wafer stage (16.1) running at a pre-processing workstation, and a wafer stage (16.2) running at an exposure workstation. A rotating motor (41) is mounted under the base stage (30) for rotating the two wafer stages after the wafer stages have completed pre-processing and exposure operations in order to complete position switch of the wafer stages, wherein the base stage (30) is kept stationary during the switch. The present invention avoids rotation of a large inertia base stage and has low requirement for motor power, while eliminating a guide rail docking device and an auxiliary device and greatly simplifying system configuration. The system is easy and convenient to operate and easy to control.

    摘要翻译: 公开了一种用于光刻机的双晶片级切换系统。 该系统包括基台(30),在预处理工作站处运行的晶片台(16.1)和在曝光工作站运行的晶片台(16.2)。 旋转马达(41)安装在底座(30)的下面,用于在晶片台完成预处理和曝光操作之后旋转两个晶片台,以便完成晶片台的位置切换,其中基台 )在开关期间保持静止。 本发明避免了大惯性基台的旋转,并且对电机功率的要求较低,同时消除了导轨对接装置和辅助装置,并大大简化了系统配置。 该系统操作简便,易于控制。

    System and Method for Scaling IPv6 on a Three-Tier Network Architecture at a Large Data Center
    33.
    发明申请
    System and Method for Scaling IPv6 on a Three-Tier Network Architecture at a Large Data Center 有权
    在大数据中心三层网络架构上扩展IPv6的系统和方法

    公开(公告)号:US20140023080A1

    公开(公告)日:2014-01-23

    申请号:US13555354

    申请日:2012-07-23

    IPC分类号: H04L12/28

    摘要: Some implementations provide a method for managing switches in a data center that includes: (1) establishing a connection from one switch to another switch in the data center, the data center providing a plurality of virtual local area networks (VLANs), each VLAN including at least one Virtual Machine and capable of spanning across more than one of the plurality of switches; (2) provisioning device prefixes for IPv6 addresses, a given device prefix corresponding to a particular VLAN on a particular switch in the data center, the given device prefix included in a host address of a particular virtual machine, the particular virtual machine hosted on a server computer, the sever computer connected to the particular switch without additional intervening switches; (3) configuring a hardware memory to include prefix information and address information; and (4) transferring packets by using the prefix information and the address information.

    摘要翻译: 一些实现提供了一种用于管理数据中心中的交换机的方法,包括:(1)建立从一个交换机到数据中心的另一个交换机的连接,数据中心提供多个虚拟局域网(VLAN),每个VLAN包括 至少一个虚拟机并能跨越所述多个交换机中的一个以上的交换机; (2)为IPv6地址提供设备前缀,对应于数据中心中特定交换机上的特定VLAN的给定设备前缀,包括在特定虚拟机的主机地址中的给定设备前缀,托管在特定虚拟机上的特定虚拟机 服务器计算机,连接到特定交换机的服务器计算机,而不需要附加的中间交换机; (3)配置硬件存储器以包括前缀信息和地址信息; 和(4)通过使用前缀信息和地址信息传送分组。

    Methods of processing units comprising crystalline materials, and methods of forming semiconductor-on-insulator constructions
    35.
    发明授权
    Methods of processing units comprising crystalline materials, and methods of forming semiconductor-on-insulator constructions 有权
    包括结晶材料的处理单元的方法以及形成绝缘体上半导体结构的方法

    公开(公告)号:US08524572B2

    公开(公告)日:2013-09-03

    申请号:US13267522

    申请日:2011-10-06

    申请人: Shu Qin Ming Zhang

    发明人: Shu Qin Ming Zhang

    IPC分类号: H01L21/30

    摘要: Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.

    摘要翻译: 一些实施方案包括处理含有结晶材料的单元的方法。 可以在结晶材料内形成损伤区域,并且该单元的一部分可能在损伤区域之上。 可以使用卡盘来弯曲单元,从而沿着损伤区域引起切割,以从损伤区域上方的单元部分形成结构。 一些实施例包括形成绝缘体上半导体结构的方法。 单元可以形成为具有超过单晶半导体材料的电介质材料。 可以在单晶半导体材料内形成损伤区域,并且单晶半导体材料的一部分可以在损伤区域和电介质材料之间。 该单元可以结合到具有把手部件的组件中,并且卡盘可以用于扭曲组件,从而引起沿着损伤区域的切割。

    Constructing an inference graph for a network
    37.
    发明授权
    Constructing an inference graph for a network 有权
    为网络构建推理图

    公开(公告)号:US08443074B2

    公开(公告)日:2013-05-14

    申请号:US12039714

    申请日:2008-02-28

    IPC分类号: G06F15/16 G06F17/00

    CPC分类号: H04L41/5058 H04L41/12

    摘要: Constructing an inference graph relates to the creation of a graph that reflects dependencies within a network. In an example embodiment, a method includes determining dependencies among components of a network and constructing an inference graph for the network responsive to the dependencies. The components of the network include services and hardware components, and the inference graph reflects cross-layer components including the services and the hardware components. In another example embodiment, a system includes a service dependency analyzer and an inference graph constructor. The service dependency analyzer is to determine dependencies among components of a network, the components including services and hardware components. The inference graph constructor is to construct an inference graph for the network responsive to the dependencies, the inference graph reflecting cross-layer components including the services and the hardware components.

    摘要翻译: 构造推理图与创建反映网络中依赖关系的图形有关。 在示例实施例中,一种方法包括确定网络的组件之间的依赖关系,并响应于依赖关系构建网络的推理图。 网络的组件包括服务和硬件组件,推理图反映了跨层组件,包括服务和硬件组件。 在另一示例实施例中,系统包括服务依赖性分析器和推理图构造器。 服务依赖性分析器是确定网络组件之间的依赖关系,包括服务和硬件组件在内的组件。 推理图构造函数是响应于依赖关系构建网络的推理图,反映包括服务和硬件组件在内的跨层组件的推理图。

    Distributed IPv6 Neighbor Discovery for Large Datacenter Switching Systems
    38.
    发明申请
    Distributed IPv6 Neighbor Discovery for Large Datacenter Switching Systems 有权
    用于大数据中心交换系统的分布式IPv6邻居发现

    公开(公告)号:US20130091269A1

    公开(公告)日:2013-04-11

    申请号:US13270904

    申请日:2011-10-11

    IPC分类号: G06F15/173

    摘要: A distributed neighbor discovery module is disclosed where all neighbor discovery operations and functionalities may be distributed to a switch device processor. Each neighbor discovery process on a switch device may run as an individual neighbor discovery router node. There may be no coordination between neighbor discovery processes occurring on different switch devices. All other traffic, including both IPv6 control traffic and data traffic destined to the router may be processed by the central controller processor.

    摘要翻译: 公开了一种分布式邻居发现模块,其中所有邻居发现操作和功能可以被分发到交换设备处理器。 交换机设备上的每个邻居发现过程可以作为单独的邻居发现路由器节点运行。 在不同交换机设备上发生的邻居发现过程之间可能没有协调。 所有其他流量,包括IPv6控制流量和去往路由器的数据流量都可能由中央控制器处理器处理。

    Method for phase mismatch calibration for an array microphone and phase calibration module for the same
    40.
    发明授权
    Method for phase mismatch calibration for an array microphone and phase calibration module for the same 有权
    阵列麦克风和相位校准模块的相位不匹配校准方法

    公开(公告)号:US08351617B2

    公开(公告)日:2013-01-08

    申请号:US12352666

    申请日:2009-01-13

    申请人: Ming Zhang Xiaoyan Lu

    发明人: Ming Zhang Xiaoyan Lu

    IPC分类号: H04R3/00

    摘要: The invention provides a phase calibration module, calibrating phase mismatch between microphone signals output by a plurality of microphones of an array microphone. In one embodiment, the phase calibration module comprises a subband filter, a delay calculation module, and a delay compensation filter. The subband filter extracts a high frequency component and a low frequency component from each of the microphone signals to obtain a plurality of high-frequency component signals and a plurality of low-frequency component signals. The delay calculation module calculates delays between the low-frequency component signals. The delay compensation filter then compensates the low-frequency component signals for phase mismatches therebetween according to the calculated delays to obtain a plurality of calibrated low-frequency component signals.

    摘要翻译: 本发明提供一种相位校准模块,用于校准由阵列麦克风的多个麦克风输出的麦克风信号之间的相位失配。 在一个实施例中,相位校准模块包括子带滤波器,延迟计算模块和延迟补偿滤波器。 子带滤波器从每个麦克风信号中提取高频分量和低频分量,以获得多个高频分量信号和多个低频分量信号。 延迟计算模块计算低频分量信号之间的延迟。 延迟补偿滤波器然后根据所计算的延迟来补偿低频分量信号之间的相位失配,以获得多个校准的低频分量信号。