摘要:
A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser 1, an optical fiber collimator 2, optical fibers 3, 7, 10, and 13, an optical fiber splitter 4, filter plates 6, 9, and 12, three PSD sensors 5, 8, and 11, and a signal processing system. Laser emitted by the semiconductor laser 1 is irradiated onto the optical fiber collimator 2, then transmitted respectively via three paths, and received by the PSD sensors 5, 8, and 11 after having background light filtered out by the filter plates 6, 9, and 12, while the positions of laser spots on the three PSD sensors 5, 8, and 11 are processed by the signal processing system to acquire the position and orientation.
摘要:
Disclosed is a dual wafer stage switching system for a lithography machine. The system comprises a base stage (30), a wafer stage (16.1) running at a pre-processing workstation, and a wafer stage (16.2) running at an exposure workstation. A rotating motor (41) is mounted under the base stage (30) for rotating the two wafer stages after the wafer stages have completed pre-processing and exposure operations in order to complete position switch of the wafer stages, wherein the base stage (30) is kept stationary during the switch. The present invention avoids rotation of a large inertia base stage and has low requirement for motor power, while eliminating a guide rail docking device and an auxiliary device and greatly simplifying system configuration. The system is easy and convenient to operate and easy to control.
摘要:
Some implementations provide a method for managing switches in a data center that includes: (1) establishing a connection from one switch to another switch in the data center, the data center providing a plurality of virtual local area networks (VLANs), each VLAN including at least one Virtual Machine and capable of spanning across more than one of the plurality of switches; (2) provisioning device prefixes for IPv6 addresses, a given device prefix corresponding to a particular VLAN on a particular switch in the data center, the given device prefix included in a host address of a particular virtual machine, the particular virtual machine hosted on a server computer, the sever computer connected to the particular switch without additional intervening switches; (3) configuring a hardware memory to include prefix information and address information; and (4) transferring packets by using the prefix information and the address information.
摘要:
Systems and methods are provided to enhance the ARP software implementation. Conversational Directly Connected Host routes may be discovered and used to implement conversational forwarding which improves hardware scalability.
摘要:
Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.
摘要:
Some embodiments include methods in which microwave radiation is used to activate dopant and/or increase crystallinity of semiconductor material during formation of a semiconductor construction. In some embodiments, the microwave radiation has a frequency of about 5.8 gigahertz, and a temperature of the semiconductor construction does not exceed about 500° C. during the exposure to the microwave radiation.
摘要:
Constructing an inference graph relates to the creation of a graph that reflects dependencies within a network. In an example embodiment, a method includes determining dependencies among components of a network and constructing an inference graph for the network responsive to the dependencies. The components of the network include services and hardware components, and the inference graph reflects cross-layer components including the services and the hardware components. In another example embodiment, a system includes a service dependency analyzer and an inference graph constructor. The service dependency analyzer is to determine dependencies among components of a network, the components including services and hardware components. The inference graph constructor is to construct an inference graph for the network responsive to the dependencies, the inference graph reflecting cross-layer components including the services and the hardware components.
摘要:
A distributed neighbor discovery module is disclosed where all neighbor discovery operations and functionalities may be distributed to a switch device processor. Each neighbor discovery process on a switch device may run as an individual neighbor discovery router node. There may be no coordination between neighbor discovery processes occurring on different switch devices. All other traffic, including both IPv6 control traffic and data traffic destined to the router may be processed by the central controller processor.
摘要:
An idler having an axis of rotation. The idler may include a hub with a flange. A plurality of rim members are positioned along a perimeter of the flange and have generally axially facing, opposite side surfaces. At least one of the side surfaces has a first interlocking formation. A clamping plate is connected to the flange. The clamping plate has a second interlocking formation coupled with the first interlocking formation. A dampening member interposes the first and second interlocking formations.
摘要:
The invention provides a phase calibration module, calibrating phase mismatch between microphone signals output by a plurality of microphones of an array microphone. In one embodiment, the phase calibration module comprises a subband filter, a delay calculation module, and a delay compensation filter. The subband filter extracts a high frequency component and a low frequency component from each of the microphone signals to obtain a plurality of high-frequency component signals and a plurality of low-frequency component signals. The delay calculation module calculates delays between the low-frequency component signals. The delay compensation filter then compensates the low-frequency component signals for phase mismatches therebetween according to the calculated delays to obtain a plurality of calibrated low-frequency component signals.