DUAL SIDED GLASS INTERCONNECT DUAL DAMASCENE VIAS

    公开(公告)号:US20220406617A1

    公开(公告)日:2022-12-22

    申请号:US17349673

    申请日:2021-06-16

    Abstract: Embodiments disclosed herein include a package substrate and methods of fabricating such package substrates. In an embodiment a package substrate comprises a core with a first surface and a second surface opposite from the first surface, and a via through the core. In an embodiment a first pad is over the via, and the first pad is embedded within the core with a third surface that is substantially coplanar with the first surface of the core. In an embodiment, a second pad is over the via, where the second pad is embedded within the core with a fourth surface that is substantially coplanar with the second surface of the core.

    CAPACITORS IN A GLASS SUBSTRATE
    34.
    发明申请

    公开(公告)号:US20220406523A1

    公开(公告)日:2022-12-22

    申请号:US17350164

    申请日:2021-06-17

    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related to creating capacitors at the interface of a glass substrate. These capacitors may be three-dimensional (3-D) capacitors formed using trenches within the glass core of the substrate using laser-assisted etching techniques. A first electrode may be formed on the glass, including on the surface of trenches or other features etched in the glass, followed by a deposition of a dielectric material or a capacitive material. A second electrode may then be formed on top of the dielectric material. Other embodiments may be described and/or claimed.

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