公开(公告)号：US07545837B2

公开(公告)日：2009-06-09

申请号：US11109912

申请日：2005-04-19

申请人： Michio Oka

发明人： Michio Oka

IPC分类号： H01S3/10

CPC分类号： H01S3/109 ,  H01S3/005 ,  H01S3/0615 ,  H01S3/0816 ,  H01S3/094084 ,  H01S3/09415 ,  H01S3/1611 ,  H01S3/1643 ,  H01S5/4012 ,  H01S5/4031 ,  H04N9/3129

摘要： A one-dimensional transverse multiple mode laser is used for a one-dimensional illumination apparatus. A pumping light source, and a laser medium and a wavelength conversion device (nonlinear optical crystal or a nonlinear optical device) which are disposed in a resonator, are provided, and the nonlinear optical crystal or a nonlinear optical device is irradiated with a line beam obtained by exciting the laser medium in an elliptic transverse mode pattern. Then, a one-dimensional light modulation device is irradiated with the wavelength-converted line beam, and scanning with the beam modulated by the modulation device is conducted to produce a two-dimensional image. For example, in a green illumination optical system, in the case where the nonlinear optical device for obtaining visible rays through second harmonic generation from IR rays oscillated by a solid state laser medium has a periodical poling structure, stoichiometric composition periodical poling lithium tantalate having been subjected to vapor transport equilibration is used, whereby reliability is enhanced and a reduction in cost can be achieved through mass production.

摘要翻译： 一维横模多模激光器用于一维照明装置。 提供了一种泵浦光源，以及设置在谐振器中的激光介质和波长转换装置（非线性光学晶体或非线性光学装置），并且将非线性光学晶体或非线性光学装置用线束 通过以椭圆横模式图案激发激光介质获得。 然后，用波长转换线束照射一维光调制装置，进行用调制装置调制的光束进行扫描，生成二维图像。 例如，在绿色照明光学系统中，在通过由固体激光介质振荡的IR光获得二次谐波产生的可见光的非线性光学装置具有周期性极化结构的情况下，化学计量组成周期性极化钽酸锂 使用蒸气输送平衡，从而可靠性得到提高，并且通过批量生产可以实现成本的降低。

公开(公告)号：US07433126B2

公开(公告)日：2008-10-07

申请号：US10489152

申请日：2003-07-02

申请人： Shigeki Hashimoto ,  Hiroki Kikuchi ,  Michio Oka

发明人： Shigeki Hashimoto ,  Hiroki Kikuchi ,  Michio Oka

IPC分类号： G02B27/00 ,  G02B27/10 ,  G02B26/00

CPC分类号： G02B27/143 ,  G02B19/0028 ,  G02B19/0057 ,  G02B27/1033 ,  G02B27/123 ,  G02B27/144 ,  G02B27/48 ,  G02B2207/117 ,  H04N9/3129

摘要： Speckle noise is reduced to increase image quality in an image display apparatus such as a projection display or the like.An illuminating optical device in an image display apparatus (1) applies a laser beam L to a GLV (spatial modulator) (6) and modulates the laser beam based on an image signal input to the GLV to display an image. A plurality of laser beams (1, 1, . . . ) each having an optical path difference greater than the coherence length of the laser beam are applied to the GLV.

摘要翻译： 斑点噪声减少以增加图像显示装置如投影显示器等中的图像质量。 图像显示装置（1）中的照明光学装置将激光束L施加到GLV（空间调制器）（6），并且基于输入到GLV的图像信号来调制激光束以显示图像。 每个具有大于激光束的相干长度的光程差的激光束（1,1）被施加到GLV。

公开(公告)号：US20050002626A1

公开(公告)日：2005-01-06

申请号：US10834981

申请日：2004-04-30

申请人： Makoto Watanabe ,  Atsushi Fukumoto ,  Michio Oka

发明人： Makoto Watanabe ,  Atsushi Fukumoto ,  Michio Oka

IPC分类号： G02B26/08 ,  G02B6/00 ,  G02B6/02 ,  G02B6/38 ,  G02B27/18 ,  G02B6/20

CPC分类号： G02B6/02347 ,  G02B6/02338 ,  G02B6/3855

摘要： A photonic crystal fiber has a configuration in which a multiplicity of voids are arranged along the longitudinal direction of the fiber and with a regular sectional structure, a terminal end portion of the fiber is fusion bond sealed with a fusing material composed of a glass lower than a light propagation medium of the fiber in softening temperature, and the terminal end portion is connected to a ferrule with the fusing material. With this configuration, it is possible to obviate the lowerings in optical characteristics such as a large refractive index difference between the light propagation medium and the voids, a high light transmission efficiency, a high numerical aperture, etc., and to obviate such problems as the penetration of foreign matter into the inside of the voids, a burning failure arising from a positional staggering of the ferrule, etc.

摘要翻译： 光子晶体光纤具有沿着纤维的长度方向配置多个空隙的构造，并且具有规则的截面结构，纤维的末端部分用由低于 软化温度下的纤维的光传播介质，并且末端部利用熔融材料与套圈连接。 通过这种结构，能够消除光传播介质和空隙之间的大的折射率差，高透光效率，高数值孔径等的光学特性的下降，并且消除诸如 异物渗透到空隙的内部，由于套圈的位置交错引起的燃烧故障等

公开(公告)号：US5801870A

公开(公告)日：1998-09-01

申请号：US824310

申请日：1997-03-26

申请人： Michio Oka ,  Hiroshi Suganuma

发明人： Michio Oka ,  Hiroshi Suganuma

IPC分类号： G02B17/06 ,  G02B26/12 ,  G03F7/20 ,  G02B26/08

CPC分类号： G03F7/70233 ,  G02B17/0615 ,  G02B17/0626 ,  G02B26/126

摘要： A light exposure illuminating apparatus is provided which, employing harmonics of a continuously outputted laser beam, is small-sized, inexpensive and free from speckles and which achieves a high light source utilization efficiency. Specifically, a harmonics generating 1 generates fourth harmonics which are reflected and swept via a scanning lens 2 by a polygonal mirror 3. A cylindrical reflecting mirror radiates the fourth harmonics reflected by the polygonal mirror 3 on an arcuate aperture formed in a light exposure mask by a sweeping movement. The light of fourth harmonics transmitted through the arcuate aperture reaches a reticle 7 set on a semiconductor pattern. The illuminating light passed through the reticle 7 is projected on a wafer 9 via a concave mirror 5 and a convex mirror 76. The area of light exposure may be increased since the reticle 7 and the wafer 9 are moved in synchronism with the scanning of the scanning optical system.

摘要翻译： 提供了一种使用连续输出的激光束的谐波的小型，便宜并且没有斑点并且实现高光源利用效率的曝光照明装置。 具体地说，谐波产生1产生通过多面镜3经由扫描透镜2被反射和扫掠的第四谐波。圆柱形反射镜将由多面镜3反射的第四谐波辐射在形成在曝光掩模中的弧形孔上 一个彻底的运动。 通过弧形孔传播的第四谐波的光到达设置在半导体图案上的标线片7。 通过标线片7的照明光通过凹面镜5和凸面镜76投影在晶片9上。因为标线片7和晶片9与扫描方向 扫描光学系统。

公开(公告)号：US5696581A

公开(公告)日：1997-12-09

申请号：US824311

申请日：1997-03-26

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G01M11/00 ,  G01M11/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

CPC分类号： G03F7/706 ,  G01M11/0292

摘要： A lens evaluating device for measuring the optical transfer function of the lens under evaluation for evaluating the lens. The lens evaluating device includes an exposure light source, a converging lens for converging a light beam radiated from the exposure light source at a point, a characteristics evaluating pattern onto which the light beam outputted from the converging lens is converged by the lens under evaluation to form an image on it, a detection unit for receiving a return light beam having scanned the characteristics evaluating pattern via the lens under evaluation for detecting changes in reflection intensity of the return light beam, and an analysis unit for executing frequency analysis of the detected results from the detection unit for measuring the optical transfer function. The results of detection by the detection unit are subjected to a frequency analysis using a spectrum analyzer for measuring the optical transfer function of the lens under evaluation for evaluating the lens. An exposure light source includes a first resonator and a second resonator. The first resonator has a laser medium illuminated by an excited light radiated by an exciting light source and a first non-linear optical crystal device for wavelength-converting the light beam radiated from the laser medium. The second resonator has a second non-linear optical crystal device for wavelength-converting a light beam radiated from the first resonator.

公开(公告)号：US5673134A

公开(公告)日：1997-09-30

申请号：US502460

申请日：1995-07-14

申请人： Michio Oka ,  Hiroshi Suganuma

发明人： Michio Oka ,  Hiroshi Suganuma

IPC分类号： G02B17/06 ,  G02B26/12 ,  G03F7/20 ,  G02B26/08

CPC分类号： G03F7/70233 ,  G02B17/0615 ,  G02B17/0626 ,  G02B26/126

摘要： A light exposure illuminating apparatus is provided which, employing harmonics of a continuously outputted laser beam, is small-sized, inexpensive and free from speckles and which achieves a high light source utilization efficiency. Specifically, a harmonics generating 1 generates light with fourth harmonics which are scanned by a scanning lens 2 and reflected and swept by a polygonal mirror 3. A cylindrical reflecting mirror radiates the sweeping fourth harmonics reflected by the polygonal mirror 3 onto an arcuate aperture formed in a light exposure mask. The light of fourth harmonics transmitted through the arcuate aperture reaches a reticle 7 set on a semiconductor pattern. The illuminating light passed through the reticle 7 is projected onto a wafer 9 via a concave mirror 5 and a convex mirror 76. The area of light exposure may be increased since the reticle 7 and the wafer 9 are moved in synchronism with the scanning of the scanning optical system.

摘要翻译： 提供了一种使用连续输出的激光束的谐波的小型，便宜并且没有斑点并且实现高光源利用效率的曝光照明装置。 具体地，谐波产生1产生具有由扫描透镜2扫描并被多面镜3反射和扫掠的第四谐波的光。圆柱形反射镜将由多面镜3反射的扫掠的第四谐波辐射到形成为 曝光掩模。 通过弧形孔传播的第四谐波的光到达设置在半导体图案上的标线片7。 通过标线片7的照明光通过凹面镜5和凸面镜76投影到晶片9上。因为标线片7和晶片9与扫描方向 扫描光学系统。

公开(公告)号：US5594745A

公开(公告)日：1997-01-14

申请号：US413741

申请日：1995-03-30

申请人： Michio Oka

发明人： Michio Oka

IPC分类号： G02F1/35 ,  G02F1/37 ,  H01S3/10 ,  H01S3/109 ,  H01S3/139 ,  H01S3/23

CPC分类号： H01S3/10092 ,  H01S3/109 ,  H01S3/139

摘要： A laser light generating apparatus has a first light source generating a light beam of a fundamental wavelength, a resonator made up of a plurality of reflection devices having high reflectance with respect to the fundamental wavelength of the light beam and a non-linear optical crystal element located within the resonator and generating a light beam of harmonic when the light beam of the fundamental wavelength is input thereto. Further, the laser light generating apparatus an amplifier element located within the resonator and amplifying the light beam of the fundamental wavelength therein and an energy source for exciting the amplifier element.

摘要翻译： 激光发生装置具有产生基波长的光束的第一光源，由相对于光束的基波长具有高反射率的多个反射装置构成的谐振器和非线性光学晶体元件 位于谐振器内并且当输入基波长的光束时产生谐波光束。 此外，激光发生装置是位于谐振器内的放大器元件，放大其中的基波长的光束，以及激励放大器元件的能量源。

公开(公告)号：US5394381A

公开(公告)日：1995-02-28

申请号：US259934

申请日：1994-06-13

申请人： Atsushi Fukumoto ,  Michio Oka

发明人： Atsushi Fukumoto ,  Michio Oka

IPC分类号： G11B11/10 ,  G11B7/005 ,  G11B7/135 ,  G11B11/105 ,  G11B13/04

CPC分类号： G11B7/1365 ,  G11B11/10515 ,  G11B11/10543 ,  G11B11/10576 ,  G11B7/005 ,  G11B7/1356 ,  G11B7/1395

摘要： An optical pickup apparatus of the present invention for reading out information signals recorded on an optical recording medium such as magneto-optical disc is adapted to split by means of a light splitting element a light beam emitted from a light source into two light beam travelling in different directions, which are linearly polarized in normally intersecting directions and to convert the phases of the vibrational components along normally intersecting two axes on a plane normally intersecting the traveling directions of the two light beams and to irradiate the recording medium with two light beams which are differently polarized so that two beam spots are partially superimposed with each other on the recording medium. The superimposed beam spot area which is a read out area is made smaller than one of the beam spots in size so that a high resolution read-out is performed.

摘要翻译： 用于读出记录在诸如磁光盘的光学记录介质上的信息信号的本发明的光学拾取装置适于通过分光元件将从光源发射的光束分成两束光束 不同的方向，它们在正交相交方向上线性偏振，并且通过正交相交的两个轴将振动分量的相位转换成通常与两个光束的行进方向相交的平面，并用两个光束照射记录介质 不同的极化，使得两个光束点在记录介质上彼此部分地叠加。 作为读出区域的叠加光束斑区域的尺寸小于一个光束点，从而执行高分辨率读出。

公开(公告)号：US5367531A

公开(公告)日：1994-11-22

申请号：US24627

申请日：1993-03-01

申请人： Naoya Eguchi ,  Michio Oka

发明人： Naoya Eguchi ,  Michio Oka

IPC分类号： H01S3/08 ,  G02F1/35 ,  G02F1/37 ,  H01S3/082 ,  H01S3/108 ,  H01S3/109 ,  H01S3/139 ,  H01S3/086

CPC分类号： G02F1/37 ,  G02F2001/3542 ,  H01S3/109 ,  H01S3/1398

摘要： A laser light beam generating apparatus includes at least one light beam source, first and second reflectors, a non-linear optical crystal element and an actuator. The light beam source emits a light beam. The non-linear optical crystal element is provided between the first reflector and the second reflector. A light beam emitted from the light beam source is incident on the non-linear optical crystal element through the first reflector. The actuator actuates at least one of the first and second reflectors along an optical axis of the light beam emitted from the light beam source.

摘要翻译： 激光束产生装置包括至少一个光束源，第一和第二反射器，非线性光学晶体元件和致动器。 光束源发射光束。 非线性光学晶体元件设置在第一反射器和第二反射器之间。 从光束源发射的光束通过第一反射器入射在非线性光学晶体元件上。 致动器沿着从光束源发射的光束的光轴致动第一和第二反射器中的至少一个。

公开(公告)号：US5212710A

公开(公告)日：1993-05-18

申请号：US728583

申请日：1991-07-11

申请人： Yushi Kaneda ,  Michio Oka

发明人： Yushi Kaneda ,  Michio Oka

IPC分类号： G02B6/28 ,  G02B6/42 ,  H01S3/00 ,  H01S3/0941 ,  H01S5/00 ,  H01S5/40

CPC分类号： H01S3/09415 ,  G02B6/2817 ,  G02B6/4249 ,  H01S3/005 ,  H01S5/4025 ,  H01S3/094053 ,  H01S5/005

摘要： A laser light source in which a couple of light beams whose shapes are re-formed and whose polarizing planes are made perpendicular to each other are synthesized by a beam splitter and then the synthesized light is incident on an optical guide through a predetermined optical system, thereby generating the synthesized light having a short spot diameter and an improved power density.