Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate
    34.
    发明授权
    Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate 失效
    电子束写入方法,精细图案写入系统以及不均匀图案承载衬底的制造方法

    公开(公告)号:US07868308B2

    公开(公告)日:2011-01-11

    申请号:US12359418

    申请日:2009-01-26

    IPC分类号: G21K5/10 H01J37/08

    摘要: A fine pattern which includes servo patterns, each constituted by servo elements, and groove patterns, each for separating adjacent data tracks, is formed on a substrate applied with a resist and placed on a rotation stage by scanning an electron beam on the substrate. While rotating the substrate in one direction, the electron beam is scanned so as to completely fill servo elements corresponding to a plurality of tracks one by one during one rotation of the substrate by X-Y deflecting the electron beam and vibrating back and forth in the radius direction. Each groove pattern is set as a line-up of a plurality of groove elements divided at a predetermined angle, and groove elements corresponding to the plurality of tracks following the writing of the servo elements are sequentially written by deflection scanning the electron beam largely in a circumferential direction during the same rotation.

    摘要翻译: 在施加有抗蚀剂的基板上形成包括由伺服元件构成的伺服图案的精细图案,以及用于分离相邻数据轨道的凹槽图案,并通过扫描基板上的电子束而放置在旋转台上。 在沿一个方向旋转衬底的同时,扫描电子束,以便通过XY偏转电子束并在半径方向上来回振动来在衬底的一次旋转期间逐个地完全填充对应于多个轨道的伺服单元 。 每个凹槽图案被设置为以预定角度划分的多个凹槽元件的阵列,并且与伺服元件写入之后的多个轨道对应的凹槽元件通过大量在 在相同旋转期间的圆周方向。

    MOLD STRUCTURE
    35.
    发明申请
    MOLD STRUCTURE 失效
    模具结构

    公开(公告)号:US20080142680A1

    公开(公告)日:2008-06-19

    申请号:US11946198

    申请日:2007-11-28

    IPC分类号: G03F7/00

    摘要: There is provided a mold structure containing a substrate, and a plurality of convex portions formed in the shape of concentric circles at predetermined intervals on one surface of the substrate, wherein a cross-sectional shape of the convex portions with respect to a radial direction of the concentric circles is such that a middle width M of each of the convex portions with respect to a heightwise direction is greater than a width T of a top portion of each of the convex portions with respect to the radial direction of the concentric circles.

    摘要翻译: 提供了一种包含基板的模具结构和在基板的一个表面上以预定间隔形成为同心圆形的多个凸部,其中凸部相对于基板的径向的横截面形状 同心圆使得每个凸部相对于高度方向的中间宽度M相对于同心圆的径向方向大于每个凸部的顶部的宽度T。

    Method and apparatus of magnetically transferring information signal from master medium to slave medium

    公开(公告)号:US07139140B2

    公开(公告)日:2006-11-21

    申请号:US10078535

    申请日:2002-02-21

    IPC分类号: G11B5/86

    摘要: When executing a magnetic transfer by bringing a master medium and a slave medium into close contact with each other and applying a transferring magnetic field, a permitted limit of the application direction of the transferring magnetic field is defined so that magnetic patterns can be accurately transferred. A slave medium 2 is previously initial DC magnetized in a track direction by applying a magnetic field to the slave medium in the track direction of a slave surface, and when executing a magnetic transfer by bringing the master medium 3 and the slave medium 2 into close contact with each other and applying the transferring magnetic field in the track direction of the slave surface, the application angle α of the transferring magnetic field is defined within a range of ±30° in a vertical direction with respect to the slave surface. Furthermore, the application angle of the transferring magnetic field is defined within a range of ±30° with respect to the track direction on a plane parallel to the slave surface.

    Disk-shaped magnetic recording medium
    37.
    发明申请
    Disk-shaped magnetic recording medium 审中-公开
    盘状磁记录介质

    公开(公告)号:US20060181796A1

    公开(公告)日:2006-08-17

    申请号:US11348266

    申请日:2006-02-07

    IPC分类号: G11B5/09 G11B5/86 G11B21/02

    摘要: The present invention provides a disk-shaped magnetic recording medium in which a servo signal for tracking is recorded as a preformat by a magnetic transfer method. This disk-shaped magnetic recording medium facilitates the manufacture of a master disk which carries information to be transferred. The disk-shaped magnetic recording medium permits the asymmetry of a regenerative signal of a servo signal for tracking which is recorded, facilitates the manufacture of a master disk which carries information to be transferred, and enables a servo signal for tracking to be recorded in a short time by use of a magnetic transfer method.

    摘要翻译: 本发明提供一种盘状磁记录介质,其中用于跟踪的伺服信号通过磁转移方式记录为预格式化。 这种盘形磁记录介质便于制造传送要传送信息的主盘。 盘状磁记录介质允许用于记录的用于跟踪的伺服信号的再生信号的不对称性,有利于制造承载待传送信息的主盘,并且使跟踪的伺服信号能够被记录在 通过使用磁转移方法很短时间。

    Magnetic-transfer method, magnetic recording medium, and magnetic recording device
    38.
    发明申请
    Magnetic-transfer method, magnetic recording medium, and magnetic recording device 失效
    磁转移方式,磁记录介质和磁记录装置

    公开(公告)号:US20060077582A1

    公开(公告)日:2006-04-13

    申请号:US11248292

    申请日:2005-10-13

    IPC分类号: G11B5/86

    CPC分类号: G11B5/865

    摘要: A magnetic-transfer method comprising the steps of: initially DC-magnetizing a transfer-recipient disc in a circumferential direction, by applying a magnetic field to the transfer-recipient disc in the circumferential direction thereof; bringing initially DC-magnetized transfer-recipient disc and a master disc into close contact with each other, on the top side of the master disc a magnetic layer including a great number of protrusions that configure a magnetic pattern being formed, ratio t/b of thickness t of the magnetic layer to circumferential length b of the protrusion being from 0.5 to 4.0; and executing magnetic transfer in such a way that a magnetic-field generation device is provided, and that, when a magnetic field is applied in a circumferential direction to the transfer-recipient disc and the master disc so as to transfer the magnetic pattern of the master disc onto the transfer-recipient disc, ratio Hv/Hh of the strength Hv of a magnetic field, of the circumferential magnetic field, that is vertical to the top side of the transfer-recipient disc, to the strength Hh of a magnetic field, of the circumferential magnetic field, that is in parallel with the top side of the transfer-recipient disc, is made equal to or smaller than 0.629−0.0571×t/b.

    摘要翻译: 一种磁转移方法,包括以下步骤:通过沿着其圆周方向向所述转移 - 接收盘施加磁场,从而在周向上直接磁化转移受体盘; 使初始的DC磁化转移受体盘和母盘彼此紧密接触,在母盘的顶侧上包括构成磁性图形的大量突起的磁性层,比例t / b 磁性层的厚度t与突起的圆周长度b为0.5〜4.0; 并且以提供磁场产生装置的方式执行磁转移,并且当沿着圆周方向向转印盘和母盘施加磁场时,将磁性图案转印 母盘到转印盘上的磁场强度Hv的比例Hv / Hh与圆盘磁场的垂直于转印盘的顶侧的磁场强度Hv / Hh相对于磁场的强度Hh ,与转印盘的顶侧平行的圆周磁场的厚度等于或小于0.629-0.0571xt / b。

    Electron beam lithography method
    39.
    发明申请
    Electron beam lithography method 失效
    电子束光刻法

    公开(公告)号:US20060001993A1

    公开(公告)日:2006-01-05

    申请号:US11169575

    申请日:2005-06-30

    IPC分类号: G11B5/86

    摘要: Deflecting means, for deflecting an electron beam in a radial direction and the circumferential direction, and blanking means, for shielding irradiation of the electron beam at portions other than drawing portions, are provided. While the disk is rotated unidirectionally, the electron beam is repeatedly deflected in a figure 8 pattern, in which the electron beam is deflected toward the next deflection initiation point in the radial direction at track edge portions, such that the deflected directions toward the inner periphery of the disk and toward the outer periphery of the disk intersect each other. Parallel scanning is performed alternately toward the outer periphery and the inner periphery of the disk. Elements of a transfer pattern, having lengths which are integer multiples of a reference value, are drawn by performing scanning a number of times equal to the integer that the reference value is multiplied by.

    摘要翻译: 提供用于使电子束沿径向和圆周方向偏转的偏转装置,以及用于屏蔽除了拉伸部分之外的部分处的电子束照射的消隐装置。 当盘被单向旋转时,电子束以图8图案重复偏转,其中电子束在轨道边缘部分沿径向方向偏转到下一个偏转起始点,使得朝向内周的偏转方向 并且朝向盘的外周彼此相交。 交替地向盘的外周和内周进行并行扫描。 通过执行等于参考值乘以的整数的次数来绘制具有作为参考值的整数倍的长度的传送图案的元素。

    Method of magnetic transfer using a side-supported slave medium directly opposed to the magnetic field generator
    40.
    发明授权
    Method of magnetic transfer using a side-supported slave medium directly opposed to the magnetic field generator 失效
    使用与磁场发生器直接相对的侧支持从属介质的磁转移方法

    公开(公告)号:US06972915B2

    公开(公告)日:2005-12-06

    申请号:US10370477

    申请日:2003-02-24

    IPC分类号: G11B5/596 G11B5/84 G11B5/86

    CPC分类号: G11B5/865 G11B5/59633

    摘要: Information represented by a pattern of a magnetic layer formed on a master information carrier is magnetically transferred to a slave. An initial DC magnetic field is applied to the slave medium with the slave medium supported from one side thereof so that the other side of the slave medium is directly opposed to the magnetic field generator, and a transfer magnetic field is applied to the slave medium and the master information carrier held in close contact with each other by a holder, which covers both the sides of the slave medium/master information carrier assembly, with the magnetic field generator positioned to oppose both the sides of the slave medium/master information carrier assembly so that the magnetic field generated by the magnetic field generator is applied to the slave medium and the master information carrier through the holder.

    摘要翻译: 由形成在主信息载体上的磁性层的图案表示的信息被磁性地传送到从设备。 初始DC磁场被施加到从属介质,其中从介质从其一侧支撑,使得从属介质的另一侧与磁场发生器直接相对,并且传递磁场被施加到从属介质, 主信息载体通过覆盖从属介质/主信息载体组件的两侧的保持器彼此紧密接触,磁场发生器被定位成与从属介质/主信息载体组件的两侧相对 使得由磁场发生器产生的磁场通过保持器施加到从属介质和主信息载体。