公开(公告)号：US4996123A

公开(公告)日：1991-02-26

申请号：US326414

申请日：1989-02-24

申请人： Noboru Nomura ,  Atsushi Ueno ,  Kazuhiko Hashimoto ,  Satoshi Kinoshita

发明人： Noboru Nomura ,  Atsushi Ueno ,  Kazuhiko Hashimoto ,  Satoshi Kinoshita

IPC分类号： G03F7/004 ,  G03F7/008 ,  G03F7/09 ,  G03F7/20

CPC分类号： G03F7/091 ,  G03F7/004 ,  G03F7/0085 ,  G03F7/2057

摘要： An optically oriented photoresist material comprised of an organic polymer and an organic crystal material each having a different refractive index to form an optically oriented layer on a substrate wherein the optical waveguide is formed by an effect of the refractive index difference, and in said waveguide layer thus formed, the spread and scattering of lights are suppressed and very fine mask patterns of said photoresist can be produced.

摘要翻译： 一种由有机聚合物和有机晶体材料组成的光学取向的光致抗蚀剂材料，它们各自具有不同的折射率，以在基板上形成光学取向层，其中光波导通过折射率差的作用形成，并且在所述波导层 由此形成，抑制了光的扩散和散射，并且可以产生所述光致抗蚀剂的非常精细的掩模图案。

公开(公告)号：US4976818A

公开(公告)日：1990-12-11

申请号：US520654

申请日：1990-04-24

申请人： Kazuhiko Hashimoto ,  Taichi Koizumi ,  Kenji Kawakita ,  Noboru Nomura

发明人： Kazuhiko Hashimoto ,  Taichi Koizumi ,  Kenji Kawakita ,  Noboru Nomura

IPC分类号： G03F7/004 ,  G03F7/09

CPC分类号： G03F7/094 ,  G03F7/004 ,  Y10S438/949

摘要： A fine pattern forming method capable of forming an accurate fine pattern without charge-up at the time of electron beam or focus ion beam exposure, by treating the bottom layer or intermediate layer or silicon containing resist of a multi-layer resist with ion shower irradiation or reducing solvent.

摘要翻译： 通过用离子喷淋照射处理多层抗蚀剂的底层或中间层或含硅抗蚀剂，能够在电子束或聚焦离子束曝光时形成精细图案而不进行充电的精细图案形成方法 或还原溶剂。

公开(公告)号：US4870289A

公开(公告)日：1989-09-26

申请号：US248051

申请日：1988-09-23

申请人： Takeo Sato ,  Shinichiro Aoki ,  Katsumasa Yamaguchi ,  Tadashi Kaneko ,  Noboru Nomura ,  Keisuke Koga ,  Kazuhiro Yamashita

发明人： Takeo Sato ,  Shinichiro Aoki ,  Katsumasa Yamaguchi ,  Tadashi Kaneko ,  Noboru Nomura ,  Keisuke Koga ,  Kazuhiro Yamashita

IPC分类号： G03F9/00 ,  H01L21/68

CPC分类号： G03F9/7065 ,  G03F9/7049 ,  H01L21/682

摘要： A system for controlling the relation in position between a photomask and a wafer for use in manufacturing apparatus of a highly integrated circuit such as large scale integration (LSI). The position control system includes a coherent light source for generating two light beams which are different in frequency and polarizing direction from each other. The light beams from the coherent light source is introduced into a first diffraction grating and the diffracted light from the first diffraction grating selectively pass through a telecentric lens system and are led to second and third diffraction gratings respectively disposed on the photomask and the wafer. Light beat signals are obtained in correspondance with the diffracted light from the second and third difraction gratings and the position relation between the photomask and wafer is controlled on the basis of the phase difference between the obtained light beat signals which corresponds to the position difference between the photomask and the wafer.

公开(公告)号：US4771180A

公开(公告)日：1988-09-13

申请号：US916738

申请日：1986-10-08

申请人： Noboru Nomura ,  Kazuhiro Yamashita

发明人： Noboru Nomura ,  Kazuhiro Yamashita

IPC分类号： G03F9/00 ,  G01N21/86

CPC分类号： G03F9/7049

摘要： A reduction projection type alignment and exposure apparatus having a light source, for alignment, a reticle having at least a first grating, first lens system, a spatial filter disposed around a Fourier spectral plane of the first lens system, second lens system, a wafer having at least a second grating, and a photo-detector for detecting light intensity of superimposed beams appearing on the spatial filter. An optical system for light exposure is provided separately from the optical system for alignment which includes the light source for alignment, first and second lens system, spatial filter, etc. The light beam generated from the light source for alignment is applied to the reticle at which it is divided into a plurality of difracted light beams by the first grating, and the diffracted light beams are applied through the first lens system, spatial filter and second lens system onto the wafer so that the diffracted light beams are re-diffracted by the second grating, and the re-diffracted light beams are superimposed with the diffracted light beams and the light intensity of the superimposed beams detected by the photo-detector.

摘要翻译： 一种缩小投影型对准和曝光装置，具有用于对准的光源，具有至少第一光栅的掩模版，第一透镜系统，设置在第一透镜系统的傅立叶光谱平面附近的空间滤光器，第二透镜系统，晶片 具有至少第二光栅，以及用于检测出现在空间滤光片上的叠加光束的光强度的光检测器。 与用于对准的光学系统分开设置用于曝光的光学系统，其包括用于对准的光源，第一和第二透镜系统，空间滤光器等。从用于对准的光源产生的光束被施加到掩模版 将其通过第一光栅分割为多个衍射光束，并且将衍射光束通过第一透镜系统，空间滤光器和第二透镜系统施加到晶片上，使得衍射光束被衍射的光束 并且再衍射光束与衍射光束叠加，并且由光检测器检测到的叠加光束的光强度。

公开(公告)号：US4422117A

公开(公告)日：1983-12-20

申请号：US254662

申请日：1981-04-16

申请人： Noboru Nomura ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi

发明人： Noboru Nomura ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/12 ,  G11B5/20 ,  G11B5/22

CPC分类号： G11B5/3903 ,  G11B5/3106 ,  G11B5/3163

摘要： A thin film magnetic head has a substrate with thin film layers deposited thereon and a protector layer bonded by a bonding layer to the substrate, with the thin film layers interposed therebetween. The thin film layers includes components of an electromagnetic transducing means. The bonding layer is a glass having a working temperature at which a magnetic layer included in the thin film layers does not have the magnetic characteristics deteriorated to any substantial degree.The fusing of the glass for making the bonding layer is performed at a temperature below 450.degree. C.

摘要翻译： 薄膜磁头具有沉积有薄膜层的基板和通过粘结层粘合到基板上的保护层，其间插入有薄膜层。 薄膜层包括电磁换能装置的部件。 接合层是具有工作温度的玻璃，其中包括在薄膜层中的磁性层的磁特性不会在任何程度上劣化。 用于制造粘合层的玻璃的熔合在450℃以下进行。

公开(公告)号：US4409632A

公开(公告)日：1983-10-11

申请号：US208480

申请日：1980-11-19

申请人： Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi ,  Noboru Nomura

发明人： Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi ,  Noboru Nomura

IPC分类号： G11B5/31 ,  G11B5/20 ,  G11B5/22

CPC分类号： G11B5/313

摘要： A magnetic head arrangement includes a spiral coil made of a thin layer and having a central opening. The spiral coil is deposited on a first layer of magnetic material in an electrically insulated manner. The arrangement further includes a second layer of magnetic material having a width wider than that of the central opening of the spiral coil and deposited on the spiral coil in an electrically insulated manner. A portion of the second layer located in the central opening of the spiral coil is magnetically connected with the first layer and another portion of the second layer located outside the spiral coil is held above the first layer to form a predetermined gap.

摘要翻译： 磁头装置包括由薄层制成并具有中心开口的螺旋线圈。 螺旋线圈以电绝缘方式沉积在第一层磁性材料上。 该装置还包括第二层磁性材料，其宽度大于螺旋线圈中心开口的宽度，并以电绝缘方式沉积在螺旋线圈上。 位于螺旋线圈的中心开口中的第二层的一部分与第一层磁性连接，位于螺旋线圈外部的第二层的另一部分被保持在第一层上方以形成预定间隙。

公开(公告)号：US4246620A

公开(公告)日：1981-01-20

申请号：US8335

申请日：1979-01-31

申请人： Nobuyuki Kaminaka ,  Kenji Kanai ,  Norimoto Nouchi ,  Noboru Nomura

发明人： Nobuyuki Kaminaka ,  Kenji Kanai ,  Norimoto Nouchi ,  Noboru Nomura

IPC分类号： G11B5/255 ,  G11B5/29 ,  G11B5/31 ,  G11B5/14 ,  G11B5/28 ,  G11B5/42

CPC分类号： G11B5/3103 ,  G11B5/3133 ,  Y10T29/49044 ,  Y10T29/49062

摘要： A thin film magnetic head having a contact surface which, when such magnetic head is in use, slidingly contacts a magnetic information carrier, such as a magnetic tape, drum or disc, for the information recording or reproduction. The magnetic head comprises a support substrate on which a thin magnetic layer and a non-magnetic layer are deposited in side-by-side relation to each other. The non-magnetic insulating layer has a wear resistance equal to or higher than that of the thin magnetic layer. A method for the manufacture of the thin film magnetic head is also disclosed.

摘要翻译： 一种具有接触表面的薄膜磁头，当这种磁头在使用中时，它可滑动地接触诸如磁带，鼓或盘之类的磁信息载体，用于信息记录或再现。 磁头包括支撑基板，薄壁磁性层和非磁性层彼此并排地沉积在支撑基板上。 非磁性绝缘层的耐磨性等于或高于薄磁性层的耐磨性。 还公开了制造薄膜磁头的方法。

公开(公告)号：US4127884A

公开(公告)日：1978-11-28

申请号：US782247

申请日：1977-03-28

申请人： Norimoto Nouchi ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Noboru Nomura

发明人： Norimoto Nouchi ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Noboru Nomura

IPC分类号： G11B5/127 ,  G11B5/17 ,  G11B5/31 ,  G11B5/39 ,  G11B5/30

CPC分类号： G11B5/3903 ,  G11B5/31 ,  Y10S428/90

摘要： A thin film type magnetic head, in which a conductor is accommodated within a groove formed in part of a ferromagnetic substrate constituting part of a magnetic core, and a ferromagnetic film is disposed on the conductor to constitute part of the magnetic core. With this structure, it is possible to reduce the number of steps of layers constituting the magnetic head for reducing damage or breakage of the stepped portions of the layers and also increase the core gap in a central part of the core so as to reduce leakage flux even in the thin film magnetic head as well as bettering dissipation of Joule heat produced in the conductor.

摘要翻译： 导体容纳在形成在构成磁芯的一部分的铁磁性基板的一部分的槽内的铁磁型磁头和铁磁性膜，构成磁芯的一部分。 利用这种结构，可以减少构成磁头的层数，以减少层的阶梯部分的损伤或断裂，并且还增加芯的中心部分的芯间隙，以便减少漏磁通 即使在薄膜磁头中，以及导体中产生的焦耳热的消散也更好。

公开(公告)号：US4071868A

公开(公告)日：1978-01-31

申请号：US641185

申请日：1975-12-16

申请人： Nobuyuki Kaminaka ,  Kenji Kanai ,  Norimoto Nouchi ,  Noboru Nomura

发明人： Nobuyuki Kaminaka ,  Kenji Kanai ,  Norimoto Nouchi ,  Noboru Nomura

IPC分类号： G11B5/11 ,  G11B5/39 ,  G11B5/12 ,  G11B5/30

CPC分类号： G11B5/3903 ,  G11B5/11

摘要： A magnetic head consists of a magnetic flux converging core having a magnetic gap and a magnetoresistive effect element which forms a magnetic circuit and which is arranged in the same plane as the magnetic gap. The direction of thickness of the magnetic circuit is aligned with the direction of width of a track of a record medium, and shielding plates of ferromagnetic material are arranged on both sides of the plane.

摘要翻译： 磁头由具有磁隙的磁通收敛芯和磁阻效应元件组成，磁阻效应元件形成磁路并且被布置在与磁隙相同的平面中。 磁路的厚度方向与记录介质的轨道的宽度方向一致，铁磁材料的屏蔽板布置在平面的两侧。

公开(公告)号：US4065797A

公开(公告)日：1977-12-27

申请号：US641224

申请日：1975-12-16

申请人： Noboru Nomura ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi

发明人： Noboru Nomura ,  Kenji Kanai ,  Nobuyuki Kaminaka ,  Norimoto Nouchi

IPC分类号： G11B5/33 ,  G11B5/39 ,  G11B23/00 ,  G11B5/12

CPC分类号： G11B5/3925 ,  G11B23/0007 ,  G11B5/332 ,  G11B5/3903

摘要： A multi-element made magnetic head having a plurality of magnetoresistive elements of a ferromagnetic material such as permalloy formed on a base of a ferromagnetic material such as ferrite is disclosed. The ferromagnetic material base is formed with a groove, which is common for all elements made extends parallel to the recording medium. It is filled with a non-magentic material such as glass, and the individual magnetoresistive elements are disposed so as to bridge the groove and are not adapted to be in direct frictional contact with the recording medium for reducing their wear. The magnetoresistive elements are also made to extend perpendicular to the recording medium so as to increase the head density or reduce the head pitch.

摘要翻译： 公开了一种多元素制造的磁头，其具有形成在诸如铁氧体的铁磁材料的基底上的诸如坡莫合金的铁磁材料的多个磁阻元件。 铁磁材料基底形成有凹槽，所述凹槽对于与记录介质平行延伸的所有元件是常见的。 它填充有诸如玻璃之类的非磁性材料，并且各个磁阻元件设置成桥接沟槽，并且不适于与记录介质直接摩擦接触以减少其磨损。 磁阻元件也被制成垂直于记录介质延伸，以增加磁头密度或降低磁头间距。