摘要:
A system for controlling the relation in position between a photomask and a wafer for use in manufacturing apparatus of a highly integrated circuit such as large scale integration (LSI). The position control system includes a coherent light source for generating two light beams which are different in frequency and polarizing direction from each other. The light beams from the coherent light source is introduced into a first diffraction grating and the diffracted light from the first diffraction grating selectively pass through a telecentric lens system and are led to second and third diffraction gratings respectively disposed on the photomask and the wafer. Light beat signals are obtained in correspondance with the diffracted light from the second and third difraction gratings and the position relation between the photomask and wafer is controlled on the basis of the phase difference between the obtained light beat signals which corresponds to the position difference between the photomask and the wafer.
摘要:
A light source emits light having two components which ave slightly-different frequencies and which have different planes of polarization. The emitted light is separated into first, second, and third parts travelling along different paths respectively. First, second, and third reference gratings diffract the first, second, and third light parts respectively. First, second, and third illumination optical systems selectively transmit the diffracted first, second, and third light parts respectively. First, second, and third mark gratings having predetermined orientations are formed on a mask and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. Similarly, first, second, and third mark gratings are formed on a wafer and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. A first device detects first optical beat signals of the diffracted lights coming from the first mark grating on the mask and the first mark grating on the wafer. Similar detection is made for the diffracted lights coming from the other mark gratings on the mask and the wafer.
摘要:
A portable device includes a camera section, a display capable of displaying an image captured by the camera section, a first case having a first surface having the display therein and a second surface opposite to the first surface, a second case that can be positioned over the second surface of the first case, a rotation axis section supporting the second case to the first case rotatably about a rotation axis perpendicular to the first surface of the first case, and an operation section operates at least one of the camera section and the display. The camera section has an optical axis and is capable of capturing an image of an object in an image-capturing direction parallel to the optical axis. The rotation axis section accommodates the camera section so that the optical axis is parallel to the rotation axis, and the image-capturing direction is directed from the first surface of the first case to the second surface of the first case. The operation section is provided at a portion of the first surface of the first case opposite to the image-capturing direction of the rotation axis of the rotation axis section. This portable device can accommodate therein the camera section even if the camera is long in the optical axis direction.
摘要:
A biaxial hinge having a rotating mechanism that realizes durability, a good tactile feedback, smaller size and more lightweight is provided for use in a notebook computer or a portable telephone that needs to be smaller and more lightweight. The biaxial hinge is constituted such that a rotating shaft member 9 is fixed to a rotation support member 10, a rotation-side member 7 is inserted and attached to the outer periphery of the rotating shaft member 9, and an opening/closing torque unit mechanism 12 for opening and closing operations is disposed at the rotation-side member 7, wherein sliding friction torque and click torque are generated by the load produced by a coil spring 6 between pressing members 4 and the rotating shaft support member 10 or a sliding member 3 attached to the rotating shaft member 9. The rotating mechanism of the biaxial hinge of the present invention affords good durability, a good tactile feedback, and a reduction in size and weight. And, this rotating mechanism is applied to a portable telephone.
摘要:
A folding device contains a stationary part, a movable part disposed to be rotatable in flip-up (unfolding) and flip-down (folding) directions, a force-applying section disposed between the two parts, which urges the movable part in either direction according to a state of the movable part, a reversing section for allowing the force-applying section to change a direction of urging of the movable part into the flip-up (unfolding) direction when the movable part is in a folded state, and an actuator for operating the reversing section. Pressing the actuator being in the folded state allows the reversing section to switch the direction of urging of the movable part into flip-up (unfolding) direction. In the electronic equipment of the present invention, the stationary and the movable housings are connected to the stationary and the movable parts of the folding device, respectively. The structures can provide a folding device equipped with a simple one-hand flipping-up (unfolding), and electronic equipment using the device.
摘要:
Inclined plane is provided at the tip of rotor cam. On the other hand, inclined planes are also provided in specific positions of stator cam. Because of this structure, in the specific positions, the inclined planes are in resilient contact with each other. Thus, the load is increased only in the specific positions without an increase in the load of spring. This structure can provide an opening and closing device capable of securely holding only desired positions without affecting the feel of opening and closing operation of the entire device, and electronic equipment using the device.
摘要:
There is provided a foldable electronic apparatus in which first and second casings are pivotally mounted by a bearing portion so as to be freely rotatable and these casings are automatically opened until a predetermined opening angle and then further manually opened. In the electronic apparatus of the present invention, the first and second casings (1), (2) are freely rotatably connected to each other (pivotally mounted) through a bearing portion (3). An opening/closing device (4) for automatically opening the first and second casings (1), (2) until a predetermined opening angle by operating a push button (49) is secured to the bearing portion. The opening/closing device (4) includes a mechanism for opening the casings until a larger opening angle exceeding the predetermined opening angle, and the first and second casings (1), (2) can be manually opened till a larger opening angle.
摘要:
A portable device includes a camera section, a camera image display, a first case having a first surface having the display therein and a second surface opposite the first surface, a second case that can be positioned over the second surface of the first case, a rotation axis section supporting the second case to the first case rotatably about an axis perpendicular to the first surface of the first case, and a camera/display operation section. The camera section has an optical axis, and the rotation axis section accommodates the camera section so that the optical axis is parallel to the rotation axis. The operation section is on the first surface of the first case opposite an image-capturing direction of the rotation axis of the rotation axis section.
摘要:
There is provided a foldable electronic apparatus in which first and second casings are pivotally mounted by a bearing portion so as to be freely rotatable and these casings are automatically opened until a predetermined opening angle and then further manually opened. In the electronic apparatus of the present invention, the first and second casings (1), (2) are freely rotatably connected to each other (pivotally mounted) through a bearing portion (3). An opening/closing device (4) for automatically opening the first and second casings (1), (2) until a predetermined opening angle by operating a push button (49) is secured to the bearing portion. The opening/closing device (4) includes a mechanism for opening the casings until a larger opening angle exceeding the predetermined opening angle, and the first and second casings (1), (2) can be manually opened till a larger opening angle.
摘要:
A portable terminal apparatus where a talking can be speedily switched to that using a bone conduction speaker even in the talking. In this device, an upper housing (101) has a cutout section (106) for clearing a step section (103). Installation sections (107) are arranged so as to set the cutout section (106) between them and are combined with a hinge provided in the step section (103). The upper housing (101) can be pivoted and folded relative to a lower housing (102). The lower housing (102) has a keypad (110) and also has the step section (103) formed higher by one step than a panel surface (112) of the lower housing (102). The step section (103) receives a bone conduction speaker (104) and has at its top section a vibration surface (105).