Optical interference display panel and manufacturing method thereof
    35.
    发明授权
    Optical interference display panel and manufacturing method thereof 有权
    光干涉显示面板及其制造方法

    公开(公告)号:US07532385B2

    公开(公告)日:2009-05-12

    申请号:US10807128

    申请日:2004-03-24

    IPC分类号: G02B26/00 H01L21/00

    摘要: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

    摘要翻译: 第一电极和牺牲层依次形成在基板上,然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。 支撑件形成在第一开口中,然后在牺牲层和支撑件上形成第二电极,从而形成微机电系统结构。 之后,使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构,并且至少一个第二开口保留在腔室的侧壁上。 随后采用释放蚀刻工艺以通过第二开口去除牺牲层,以便在光学干涉反射结构中形成空腔。 最后,关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

    OPTICAL INTERFERENCE DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
    36.
    发明申请
    OPTICAL INTERFERENCE DISPLAY PANEL AND MANUFACTURING METHOD THEREOF 有权
    光学干涉显示面板及其制造方法

    公开(公告)号:US20090219605A1

    公开(公告)日:2009-09-03

    申请号:US12463312

    申请日:2009-05-08

    IPC分类号: G02B26/00

    摘要: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

    摘要翻译: 第一电极和牺牲层依次形成在基板上,然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。 支撑件形成在第一开口中,然后在牺牲层和支撑件上形成第二电极,从而形成微机电系统结构。 之后,使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构,并且至少一个第二开口保留在腔室的侧壁上。 随后采用释放蚀刻工艺以通过第二开口去除牺牲层,以便在光学干涉反射结构中形成空腔。 最后,关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

    Optical interference display panel and manufacturing method thereof
    37.
    发明授权
    Optical interference display panel and manufacturing method thereof 有权
    光干涉显示面板及其制造方法

    公开(公告)号:US08004736B2

    公开(公告)日:2011-08-23

    申请号:US12463312

    申请日:2009-05-08

    IPC分类号: G02B26/00

    摘要: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

    摘要翻译: 第一电极和牺牲层依次形成在基板上,然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。 支撑件形成在第一开口中,然后在牺牲层和支撑件上形成第二电极,从而形成微机电系统结构。 之后,使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构,并且至少一个第二开口保留在腔室的侧壁上。 随后采用释放蚀刻工艺以通过第二开口去除牺牲层,以便在光学干涉反射结构中形成空腔。 最后,关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

    System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
    38.
    发明授权
    System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 有权
    使用结构加强背板保护微机电系统阵列的系统和方法

    公开(公告)号:US07405924B2

    公开(公告)日:2008-07-29

    申请号:US11090774

    申请日:2005-03-25

    IPC分类号: H05K5/00 H01L23/10

    摘要: Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on the substrate, and a back-plate. The back-plate is placed over the display array with a gap between the back-plate and the display array. The device further includes reinforcing structures which are integrated with the back-plate. The reinforcing structures add stiffness to the back-plate. The back-plate may have a thickness varying along an edge thereof.

    摘要翻译: 公开了一种利用干涉式调制的电子设备和该设备的封装。 封装器件包括衬底,形成在衬底上的干涉式调制显示阵列和背板。 背板被放置在显示器阵列上,在背板和显示器阵列之间具有间隙。 该装置还包括与后板一体化的加强结构。 加强结构增加了背板的刚度。 背板可以具有沿其边缘变化的厚度。

    System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
    39.
    发明授权
    System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 失效
    使用具有非平坦部分的背板来保护微机电系统阵列的系统和方法

    公开(公告)号:US07368803B2

    公开(公告)日:2008-05-06

    申请号:US11090481

    申请日:2005-03-25

    IPC分类号: H01L29/06

    摘要: Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on the substrate, and a back-plate. The back-plate is placed over the display array with a gap between the back-plate and the display array. The depth of the gap may vary across the back-plate. The back-plate can be curved or have a recess on its interior surface facing the display array. Thickness of the back-plate may vary. The device may include reinforcing structures which are integrated with the back-plate.

    摘要翻译: 公开了一种利用干涉式调制的电子设备和该设备的封装。 封装器件包括衬底,形成在衬底上的干涉式调制显示阵列和背板。 背板被放置在显示器阵列上,在背板和显示器阵列之间具有间隙。 间隙的深度可能在背板之间变化。 背板可以是弯曲的或在其面向显示器阵列的内表面上具有凹部。 背板的厚度可能会有所不同。 该装置可以包括与后板一体化的加强结构。

    Apparatus and method for reducing perceived color shift

    公开(公告)号:US20060077122A1

    公开(公告)日:2006-04-13

    申请号:US11077974

    申请日:2005-03-11

    IPC分类号: G09G3/00

    CPC分类号: G02B26/001 G02B5/20

    摘要: An apparatus and method for reducing perceived color shift as a function of viewing angle is disclosed. One embodiment is a display device that includes a color light modulator and a color filter. The filter is configured to filter wavelengths of light that would be perceived as color shifted light when reflected by the modulator at an off-axis viewing angle. Another embodiment includes a color light modulator and a color light source configured to provide light having a spectral content that lacks the wavelengths that would be perceived as color shifted light by a view of the display at an off-axis viewing angle. Another embodiment are methods of making such display devices.