Resonator, filter and fabrication of resonator
    31.
    发明授权
    Resonator, filter and fabrication of resonator 有权
    谐振器的谐振器,滤波器和制造

    公开(公告)号:US07498717B2

    公开(公告)日:2009-03-03

    申请号:US11092979

    申请日:2005-03-30

    IPC分类号: H01L41/09

    摘要: A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.

    摘要翻译: 谐振器包括设置在基板的主表面上的压电薄膜,设置在压电薄膜的第一表面上的第一电极膜,设置在压电薄膜的第二表面上的第二电极膜, 频率调节膜,其设置在所述第一和第二电极膜中的一个上,所述频率调节膜包括膜层叠体,所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜,以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节,第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此,可以精确地控制多个谐振器连接的滤波器的中心频率。

    Filter and duplexer
    33.
    发明授权
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US07786649B2

    公开(公告)日:2010-08-31

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H01L41/04

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

    Filter and duplexer
    35.
    发明申请
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US20070252662A1

    公开(公告)日:2007-11-01

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H03H9/70 H03H9/58

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

    Acoustic wave filter, duplexer using the acoustic wave filter, and communication apparatus using the duplexer
    37.
    发明授权
    Acoustic wave filter, duplexer using the acoustic wave filter, and communication apparatus using the duplexer 有权
    声波滤波器,使用声波滤波器的双工器,以及使用双工器的通信设备

    公开(公告)号:US08125298B2

    公开(公告)日:2012-02-28

    申请号:US12684481

    申请日:2010-01-08

    摘要: An acoustic wave filter having excellent steepness is provided without adding any exterior components or any new manufacturing steps. A plurality of filters (10-1) each having a first resonator (2a-1) placed in a serial arm and having a resonance frequency frs and an anti-resonance frequency fas, and a second resonator (4a-1) placed in a parallel arm and having a resonance frequency frp and an anti-resonance frequency fap are provided on a same substrate, where the resonance frequency frs of the first resonator is higher than the resonance frequency frp of the second resonator; the anti-resonance frequency fas of the first resonator is higher than the anti-resonance frequency fap of the second resonator; and the filters (10-1) are connected in multiple stages. At least one of the filters (10-1) connected in multiple stages has a third resonator (6-1) having a resonance frequency frp and an anti-resonance frequency fap. The third resonator (6-1) is formed on the substrate and connected to the serial arm in parallel with respect to the first resonator (2a-1).

    摘要翻译: 提供了具有优异陡度的声波滤波器,而不增加任何外部部件或任何新的制造步骤。 多个滤波器(10-1),每个滤波器(10-1)具有放置在串联臂中的第一谐振器(2a-1),并具有谐振频率frs和反共振频率fas,以及放置在 平行臂并具有共振频率frp和反共振频率fap设​​置在同一基板上,其中第一谐振器的谐振频率frs高于第二谐振器的谐振频率frp; 第一谐振器的反共振频率fas高于第二谐振器的反共振频率fap; 并且过滤器(10-1)分成多个阶段连接。 多级连接的滤波器(10-1)中的至少一个具有谐振频率frp和反共振频率fap的第三谐振器(6-1)。 第三谐振器(6-1)形成在基板上并相对于第一谐振器(2a-1)并联连接到串联臂。

    ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
    39.
    发明申请
    ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
    弹性波装置及其制造方法

    公开(公告)号:US20110241800A1

    公开(公告)日:2011-10-06

    申请号:US13127215

    申请日:2008-11-28

    IPC分类号: H03H9/205 H03H3/04

    摘要: A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

    摘要翻译: 一种制造弹性波装置的方法具有层压步骤,在基板(1)上形成多个弹性波装置,每个弹性波装置包括下电极(2),压电薄膜(3)和 上电极(4); 用于测量衬底(1)上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤,其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同,与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此,弹性波器件的频率特性可以通过少量的步骤容易地调节。