Filter and duplexer
    1.
    发明授权
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US07786649B2

    公开(公告)日:2010-08-31

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H01L41/04

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

    Filter and duplexer
    2.
    发明申请
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US20070252662A1

    公开(公告)日:2007-11-01

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H03H9/70 H03H9/58

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS
    10.
    发明申请
    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS 有权
    电影大容量声学谐振器,滤波器,通信模块和通信设备

    公开(公告)号:US20110006860A1

    公开(公告)日:2011-01-13

    申请号:US12921150

    申请日:2008-03-04

    IPC分类号: H03H9/17 H01L41/053

    摘要: A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

    摘要翻译: 本发明的压电薄膜谐振器具有基板1,设置在基板1上并由绝缘体形成的中间层7,设置在中间层7上的下部电极3,设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5,其间插入压电膜4,其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中,或在下部电极3和中间层7之间,并且空间6的区域包含在谐振区域8中。通过这种结构,振动能量从基板 可以抑制共振部分,从而提高质量因素。