公开(公告)号：US20050030046A1

公开(公告)日：2005-02-10

申请号：US10488680

申请日：2002-09-06

Applicant: Masami Yakabe ,  Naoki Ikeuchi ,  Toshiyuki Matsumoto ,  Koichi Nakano

Inventor： Masami Yakabe ,  Naoki Ikeuchi ,  Toshiyuki Matsumoto ,  Koichi Nakano

IPC: G01D5/24 ,  G01N27/22 ,  G01R27/26 ,  G01R27/00

CPC classification number: G01D5/24 ,  G01N27/22 ,  G01R27/2605

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and the specific potential.

Abstract translation: 静电电容检测电路10包括交流电压发生器11，其同相输入端连接到特定电位的运算放大器14（在该示例中为地），阻抗转换器16，电阻（R1）12 交流电压发生器11和运算放大器14的反相输入端子，连接在运算放大器14的反相输入端子和阻抗转换器16的输出端子之间的电阻（R2）13和阻抗元件（电容器 ）15连接在运算放大器14的输出端和阻抗转换器16的输入端之间。待检测电容器17连接在阻抗转换器16的输入端和特定电位之间。

公开(公告)号：US20050017737A1

公开(公告)日：2005-01-27

申请号：US10488763

申请日：2002-09-06

Applicant: Masami Yakabe ,  Naoki Ikeuchi

Inventor： Masami Yakabe ,  Naoki Ikeuchi

IPC: G01N27/06 ,  G01N27/22 ,  G01R27/26 ,  H04R29/00

CPC classification number: H04R29/004 ,  G01R27/26

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16, and a capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. The electrostatic capacitance detection circuit 10 and the capacitor 17 are located adjacently.

Abstract translation: 静电电容检测电路10包括交流电压发生器11，其同相输入端连接到特定电位的运算放大器14（在该示例中为地），阻抗转换器16，电阻（R1）12 交流电压发生器11和运算放大器14的反相输入端子，连接在运算放大器14的反相输入端子和阻抗转换器16的输出端子之间的电阻（R2）13和阻抗元件（电容器 ）15连接在运算放大器14的输出端子和阻抗转换器16的输入端子之间，并且待检测电容器17连接在阻抗转换器16的输入端子和特定电位之间。 静电电容检测电路10和电容器17相邻配置。

公开(公告)号：US07726190B2

公开(公告)日：2010-06-01

申请号：US11885432

申请日：2006-03-02

Applicant: Toshiyuki Matsumoto ,  Naoki Ikeuchi ,  Masami Yakabe ,  Keiichi Enjoji ,  Masato Hayashi

Inventor： Toshiyuki Matsumoto ,  Naoki Ikeuchi ,  Masami Yakabe ,  Keiichi Enjoji ,  Masato Hayashi

IPC: G01N29/00 ,  H01L41/00

CPC classification number: G01P15/18 ,  B81B2201/0257 ,  B81C99/005 ,  G01C19/56 ,  G01C25/005 ,  G01N29/043 ,  G01N2291/02881 ,  G01N2291/0421 ,  G01N2291/044 ,  G01N2291/102 ,  G01N2291/2698 ,  G01P15/123 ,  G01P21/00 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.

Abstract translation: 扬声器单元具有多个声源，每个声源都输出声波。 来自扬声器单元的压缩声波输出到达或振动空气，其移动三轴加速度传感器的可移动部分或待测试芯片的微结构TP。 随着可移动部分的移动，电阻值相应地变化，并且基于经由探针提供的输出电压来测量这种变化。 控制单元根据所测量的属性值或测量数据确定三轴加速度传感器的特性。 此外，多个声源可以以基于其与三轴加速度传感器的可移动部分的距离和测试波的波长的差设置的预定值的间距间隔开以应用复合测试波 到可动部分，使得复合声波的复合声场最大化。

公开(公告)号：US07557590B2

公开(公告)日：2009-07-07

申请号：US10567092

申请日：2004-08-05

Applicant: Masami Yakabe

Inventor： Masami Yakabe

IPC: G01R27/26

CPC classification number: H04R3/00

Abstract: A capacitance detection circuit containing an input protection circuit and having high sensitivity is provided. A capacitance detection circuit for detecting the capacitance of a capacitive sensor, comprising a buffer amplifier connected to the capacitive sensor via a signal wire and having a voltage gain of 1; diodes connected in series between the signal wire and a positive power supply; diodes connected in series between the signal wire and a negative power supply, wherein an output terminal of the buffer amplifier is connected to a junction point of the diodes and to a junction point of the diodes.

Abstract translation: 提供了包含输入保护电路并具有高灵敏度的电容检测电路。 一种电容检测电路，用于检测电容传感器的电容，包括经由信号线连接到电容传感器并具有电压增益1的缓冲放大器; 串联在信号线和正电源之间的二极管; 串联在信号线和负电源之间的二极管，其中缓冲放大器的输出端连接到二极管的连接点和二极管的接合点。

公开(公告)号：US20090045039A1

公开(公告)日：2009-02-19

申请号：US11886856

申请日：2006-03-20

Applicant: Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

Inventor： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

IPC: H01H9/00

CPC classification number: H01H1/0036 ,  B81B3/0054 ,  B81B2201/014 ,  B81B2203/053 ,  H01H1/24 ,  H01H37/46 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2037/008

Abstract: A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13 three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17 and the second wiring layer 13, and therefore close the switch 10.

Abstract translation: 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置三维交叉第一布线层16的第二布线层13。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对设置，其间具有间隔。 热塑片19被布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和 第二布线层13，因此闭合开关10。

公开(公告)号：US20080150553A1

公开(公告)日：2008-06-26

申请号：US10567092

申请日：2004-08-05

Applicant: Masami Yakabe

Inventor： Masami Yakabe

IPC: G01R27/26

CPC classification number: H04R3/00

Abstract: A capacitance detection circuit containing an input protection circuit and having high sensitivity is provided. A capacitance detection circuit (20) for detecting the capacitance of a capacitive sensor (Cs), comprising a buffer amplifier (12) connected to the capacitive sensor (Cs) via a signal wire (13) and having a voltage gain of 1; diodes (Dp1, Dp2) connected in series between the signal wire (13) and a positive power supply (+Vdd); diodes (Dm1, Dm2) connected in series between the signal wire (13) and a negative power supply (−Vdd), wherein an output terminal of the buffer amplifier (12) is connected to a junction point (21a) of the diodes (Dp1 and Dp2) and to a junction point (21b) of the diodes (Dm1 and Dm2).

Abstract translation: 提供了包含输入保护电路并具有高灵敏度的电容检测电路。 一种用于检测电容传感器（Cs）的电容的电容检测电路（20），包括经由信号线（13）连接到电容传感器（Cs）并具有电压增益1的缓冲放大器（12） 串联在信号线（13）和正电源（+ Vdd）之间的二极管（Dp 1，Dp 2）; 串联连接在信号线（13）和负电源（-Vdd）之间的二极管（Dm 1，Dm 2），其中缓冲放大器（12）的输出端连接到 二极管（Dp 1和Dp 2）以及二极管（Dm 1和Dm 2）的接合点（21b）。

公开(公告)号：US07348788B2

公开(公告)日：2008-03-25

申请号：US11393953

申请日：2006-03-31

Applicant: Masami Yakabe ,  Naoki Ikeuchi

Inventor： Masami Yakabe ,  Naoki Ikeuchi

IPC: G01R31/02

CPC classification number: B81C99/005

Abstract: A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.

Abstract translation: 提供了通过简单的方法精确检查具有微小移动部分的微结构的探测卡和检查装置。 探针卡（6）具有扬声器（2）和固定探针（4）的电路基板（100），扬声器（2）设置在电路基板（100）上。 电路基板（100）设置有开口区域。 当扬声器（2）设置在该区域上时，测试声波被输出到微结构的移动部分。 探针（4）根据测试声波检测由移动部分的运动引起的电特性的变化，从而检查微结构的特性。

公开(公告)号：US20070069746A1

公开(公告)日：2007-03-29

申请号：US11393953

申请日：2006-03-31

Applicant: Masami Yakabe ,  Naoki Ikeuchi

Inventor： Masami Yakabe ,  Naoki Ikeuchi

IPC: G01R31/02

CPC classification number: B81C99/005

Abstract: A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.

Abstract translation: 提供了通过简单的方法精确检查具有微小移动部分的微结构的探测卡和检查装置。 探针卡（6）具有扬声器（2）和固定探针（4）的电路基板（100），扬声器（2）设置在电路基板（100）上。 电路基板（100）设置有开口区域。 当扬声器（2）设置在该区域上时，测试声波被输出到微结构的移动部分。 探针（4）根据测试声波检测由移动部分的运动引起的电特性的变化，从而检查微结构的特性。

公开(公告)号：US07088112B2

公开(公告)日：2006-08-08

申请号：US10488598

申请日：2002-09-06

Applicant: Masami Yakabe

Inventor： Masami Yakabe

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01D5/24 ,  G01N27/228 ,  H04R3/007

Abstract: A capacitor C and an impedance converter Hiz are included in a feedback circuit of the first operational amplifier OP1 in series; an electrode P1 of a capacitive sensor is connected to a connection point of the said capacitor and the converter via a signal line L. The signal line L is connected to a predetermined standard electric potential through resistance R3 whose resistance value is high. When the capacitor is included in the feedback circuit, the signal line becomes in a state of floating and a circuit operation becomes unstable, however, the signal line L is fixed at predetermined electric potential, and therefore, the operation becomes stable. It is acceptable to configure the impedance converter with a voltage follower and connect the resistance R3 to the output.

Abstract translation: 电容器C和阻抗转换器Hiz包括在串联的第一运算放大器OP1的反馈电路中; 电容式传感器的电极P 1> 1通过信号线L连接到所述电容器和转换器的连接点。信号线L通过电阻R'连接到预定的标准电位， SUB> 3 ，其电阻值高。 当电容器包括在反馈电路中时，信号线变为浮置状态，电路操作变得不稳定，然而，信号线L被固定在预定电位，因此操作变得稳定。 使用电压跟随器配置阻抗转换器是可以接受的，并将电阻R 3 3 连接到输出端。

公开(公告)号：US07046016B2

公开(公告)日：2006-05-16

申请号：US10509624

申请日：2002-10-22

Applicant: Masami Yakabe ,  Koichi Nakano

Inventor： Masami Yakabe ,  Koichi Nakano

IPC: G01R27/26

CPC classification number: G01R27/26

Abstract: An electric potential fixing apparatus is provided that can prevent the combined total amount of electricity of a connection line between the first capacitance and the second capacitance from changing even when the electric potential of the connection line between the first capacitance and the second capacitance is fixed in the case where the first capacitance and the second capacitance are directly connected.This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).

Abstract translation: 提供一种电位定影装置，即使当第一电容和第二电容之间的连接线的电位固定时，也可以防止第一电容和第二电容之间的连接线的总电量的总和变化 第一电容和第二电容直接连接的情况。 该电位定影装置具有第一高电阻（3）和第二高电阻（4），并且包括电压供给电路（1），其保持测量电容（14）的电荷的总和量和固定电容 （15）并且保持连接测量电容（14）和固定电容（15）的信号线（17）的电位恒定。 并且电压供给电路（1）的输出端子（5）连接到信号线（17）。