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45 条记录 (耗时 0.021 秒)

    Switch array
    1.
    发明授权
    Switch array 失效
    开关阵列

    公开(公告)号：US07994443B2

    公开(公告)日：2011-08-09

    申请号：US11886856

    申请日：2006-03-20

    申请人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    发明人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    IPC分类号： H01H1/00 ,  H01H9/00

    CPC分类号： H01H1/0036 ,  B81B3/0054 ,  B81B2201/014 ,  B81B2203/053 ,  H01H1/24 ,  H01H37/46 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2037/008

    摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17and the second wiring layer 13, and therefore close the switch 10.

    摘要翻译： 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置与第一布线层16三维交叉的第二布线层13。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对置，而其间具有间隔。 热塑片19布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和第二个之间的连接 布线层13，因此闭合开关10。

    Switch Array
    2.
    发明申请
    Switch Array 失效
    开关阵列

    公开(公告)号：US20090045039A1

    公开(公告)日：2009-02-19

    申请号：US11886856

    申请日：2006-03-20

    申请人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    发明人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    IPC分类号： H01H9/00

    CPC分类号： H01H1/0036 ,  B81B3/0054 ,  B81B2201/014 ,  B81B2203/053 ,  H01H1/24 ,  H01H37/46 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2037/008

    摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13 three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17 and the second wiring layer 13, and therefore close the switch 10.

    摘要翻译： 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置三维交叉第一布线层16的第二布线层13。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对设置，其间具有间隔。 热塑片19被布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和 第二布线层13，因此闭合开关10。

    Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program
    6.
    发明申请
    Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program 审中-公开
    微结构探针卡，微结构检测装置，方法和计算机程序

    公开(公告)号：US20090128171A1

    公开(公告)日：2009-05-21

    申请号：US11887476

    申请日：2006-03-30

    申请人： Katsuya Okumura ,  Masami Yakabe ,  Naoki Ikeuchi

    发明人： Katsuya Okumura ,  Masami Yakabe ,  Naoki Ikeuchi

    IPC分类号： G01R31/02

    CPC分类号： G01C19/56 ,  B81C99/005 ,  G01P15/123 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084 ,  G01P2015/0842

    摘要： An inspecting method which is for a microstructure with a movable portion and executes a highly precise inspection without damaging a probe or an inspection electrode by supressing the effect of a needle pressure in contacting the probe to the inspection electrode is provided.When inspection on a microstructure is performed, first a pair of probes (2) are caused to contact respective electrode pads (PD), and the pair of probes (2) and a fritting power source (50) are connected together through relays (30). Next a voltage is applied from the fritting power source (50) to one probe (2) in the pair of probes (2). As the voltage is gradually increased, an oxide film between the pair of probes (2) is destroyed and a current flows between the pair of probes (2) by fritting phenomenon, and the probes (2) and the electrode pad (PD) are electrically conducted each other. Subsequently, the pair of probes (2) are switched to a measuring unit (40) side from the fritting power source (50) through the relays (30), and electrically connected to the measuring unit (40).

    摘要翻译： 提供了一种用于具有可移动部分的微结构的检查方法，并且通过抑制将探针接触检查电极​​的针头压力的影响来执行高精度检查而不损坏探针或检查电极。 当对微结构进行检查时，首先使一对探针（2）与相应的电极焊盘（PD）接触，并且一对探针（2）和熔接电源（50）通过继电器（30）连接在一起 ）。 接下来，从熔接电源（50）向一对探针（2）中的一个探针（2）施加电压。 随着电压逐渐增加，一对探针（2）之间的氧化膜被破坏，并且通过烧结现象在一对探针（2）之间流动电流，并且探针（2）和电极焊盘（PD）是 相互导电。 随后，一对探针（2）通过继电器（30）从熔接电源（50）切换到测量单元（40）侧，并且电连接到测量单元（40）。

    Pressure wave generator and temperature controlling method thereof
    7.
    发明授权
    Pressure wave generator and temperature controlling method thereof 失效
    压力波发生器及其温度控制方法

    公开(公告)号：US08130593B2

    公开(公告)日：2012-03-06

    申请号：US12521120

    申请日：2007-12-17

    申请人： Masato Hayashi ,  Masami Yakabe ,  Nobuyoshi Koshida

    发明人： Masato Hayashi ,  Masami Yakabe ,  Nobuyoshi Koshida

    IPC分类号： B06B1/06 ,  G10K15/04

    CPC分类号： G10K15/04

    摘要： A pressure wave generator (1) includes a thermally conductive substrate (2), a heat insulating layer (3) formed on one main surface of the substrate (2), an insulator layer (5) formed on the heat insulating layer (3), and a heat generator (4) formed on the insulator layer (5) to generate heat when a current containing an alternating component is applied thereto. The heat insulating layer (3) is formed containing at least one of silicon nitride (Si3N4), silicon dioxide (SiO2), aluminum oxide (Al2O3), magnesium oxide (MgO), diamond crystalline carbon (C), aluminum nitride (AlN), and silicon carbide (SiC). The heat generator (4) is formed containing, for example, gold (Au) or tungsten (W).

    摘要翻译： 压力波发生器（1）包括导热基板（2），形成在基板（2）的一个主表面上的绝热层（3），形成在绝热层（3）上的绝缘体层（5） 以及形成在所述绝缘体层（5）上的热发生器（4），以在施加包含交替分量的电流时产生热量。 该绝热层（3）形成为含有氮化硅（Si 3 N 4），二氧化硅（SiO 2），氧化铝（Al 2 O 3），氧化镁（MgO），金刚石结晶碳（C），氮化铝（AlN） ，和碳化硅（SiC）。 形成有例如金（Au）或钨（W）的发热体（4）。

    Device, Method and Program for Inspecting Microstructure
    8.
    发明申请
    Device, Method and Program for Inspecting Microstructure 失效
    检测微结构的装置，方法和程序

    公开(公告)号：US20080190206A1

    公开(公告)日：2008-08-14

    申请号：US11885432

    申请日：2006-03-02

    申请人： Toshiyuki Matsumoto ,  Naoki Ikeuchi ,  Masami Yakabe ,  Keiichi Enjoji ,  Masato Hayashi

    发明人： Toshiyuki Matsumoto ,  Naoki Ikeuchi ,  Masami Yakabe ,  Keiichi Enjoji ,  Masato Hayashi

    IPC分类号： G01N29/00

    CPC分类号： G01P15/18 ,  B81B2201/0257 ,  B81C99/005 ,  G01C19/56 ,  G01C25/005 ,  G01N29/043 ,  G01N2291/02881 ,  G01N2291/0421 ,  G01N2291/044 ,  G01N2291/102 ,  G01N2291/2698 ,  G01P15/123 ,  G01P21/00 ,  G01P2015/084 ,  G01P2015/0842

    摘要： A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.

    摘要翻译： 扬声器单元具有多个声源，每个声源都输出声波。 来自扬声器单元的压缩声波输出到达或振动空气，其移动三轴加速度传感器的可移动部分或待测试芯片的微结构TP。 随着可移动部分的移动，电阻值相应地变化，并且基于经由探针提供的输出电压来测量这种变化。 控制单元根据所测量的属性值或测量数据确定三轴加速度传感器的特性。 此外，多个声源可以以基于其与三轴加速度传感器的可移动部分的距离和测试波的波长的差设置的预定值的间距间隔开，以应用复合测试波 到可动部分，使得复合声波的复合声场最大化。

    PRESSURE WAVE GENERATOR AND TEMPERATURE CONTROLLING METHOD THEREOF
    9.
    发明申请
    PRESSURE WAVE GENERATOR AND TEMPERATURE CONTROLLING METHOD THEREOF 失效
    压力波发生器及其温度控制方法

    公开(公告)号：US20100025145A1

    公开(公告)日：2010-02-04

    申请号：US12521120

    申请日：2007-12-17

    申请人： Masato Hayashi ,  Masami Yakabe ,  Nobuyoshi Koshida

    发明人： Masato Hayashi ,  Masami Yakabe ,  Nobuyoshi Koshida

    IPC分类号： G10K15/04 ,  H05B1/02

    CPC分类号： G10K15/04

    摘要： A pressure wave generator (1) includes a thermally conductive substrate (2), a heat insulating layer (3) formed on one main surface of the substrate (2), an insulator layer (5) formed on the heat insulating layer (3), and a heat generator (4) formed on the insulator layer (5) to generate heat when a current containing an alternating component is applied thereto. The heat insulating layer (3) is formed containing at least one of silicon nitride (Si3N4), silicon dioxide (SiO2), aluminum oxide (Al2O3), magnesium oxide (MgO), diamond crystalline carbon (C), aluminum nitride (AlN), and silicon carbide (SiC). The heat generator (4) is formed containing, for example, gold (Au) or tungsten (W).

    摘要翻译： 压力波发生器（1）包括导热基板（2），形成在基板（2）的一个主表面上的绝热层（3），形成在绝热层（3）上的绝缘体层（5） 以及形成在所述绝缘体层（5）上的热发生器（4），以在施加包含交替分量的电流时产生热量。 该绝热层（3）形成为含有氮化硅（Si 3 N 4），二氧化硅（SiO 2），氧化铝（Al 2 O 3），氧化镁（MgO），金刚石结晶碳（C），氮化铝（AlN） ，和碳化硅（SiC）。 形成有例如金（Au）或钨（W）的发热体（4）。

    Displacement Measurement apparatus for microstructure and displcement measurement method thereof
    10.
    发明申请
    Displacement Measurement apparatus for microstructure and displcement measurement method thereof 有权
    位移测量装置的微结构和位移测量方法

    公开(公告)号：US20090145230A1

    公开(公告)日：2009-06-11

    申请号：US12315742

    申请日：2008-12-05

    申请人： Naoki Ikeuchi ,  Hisashi Fujiwara ,  Masami Yakabe ,  Masato Hayashi

    发明人： Naoki Ikeuchi ,  Hisashi Fujiwara ,  Masami Yakabe ,  Masato Hayashi

    IPC分类号： G01P15/125 ,  G06F15/00

    CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01P2015/0814

    摘要： A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located oppositely to the fixed portion electrode. A bias generating circuit applies a bias signal to between the first electrode and the movable portion electrode so that influence of a noise signal on a detection signal picked up from between the second electrode and the movable portion electrode may be reduced. A C/V converting circuit converts a capacitance change that is picked up from between the second electrode and the movable portion electrode into a voltage. A detecting circuit detects a displacement of the movable portion electrode based on the voltage.

    摘要翻译： 根据本发明的用于微结构的位移测量装置测量具有包括第一电极和第二电极的固定部分电极和位于与固定部分电极相对的可动部电极的微结构的位移。 偏置产生电路将偏置信号施加到第一电极和可动部分电极之间，从而可以减少噪声信号对从第二电极和可动部分电极之间拾取的检测信号的影响。 C / V转换电路将从第二电极和可动部分电极之间拾取的电容变化转换为电压。 检测电路基于电压检测可动部分电极的位移。