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    Method for producing a .lambda./4 shift type diffraction grating
    34.
    发明授权
    Method for producing a .lambda./4 shift type diffraction grating 失效
    用于制造λ/ 4偏移型衍射光栅的方法

    公开(公告)号：US5024726A

    公开(公告)日：1991-06-18

    申请号：US447850

    申请日：1989-12-08

    申请人： Masatoshi Fujiwara

    发明人： Masatoshi Fujiwara

    IPC分类号： H01S5/00 ,  G02B5/18

    CPC分类号： G02B5/1857 ,  Y10S359/90

    摘要： A method for producing a .lambda./4 shift type diffraction grating by producing a diffraction grating pattern on a substrate with a material capable of being selectively etched relative to the substrate, depositing a resist to bury the diffraction grating pattern, removing a portion of the resist to expose at least a portion of the surface of the diffraction grating pattern, removing the diffraction grating pattern on a first portion of the substrate, etching the first portion of the substrate using the remaining resist pattern as a mask, and etching a second portion of the substrate adjacent to the first portion using the remaining diffraction grating pattern on the second portion of the substrate, thereby producing a .lambda./4 shift type diffraction grating having a .lambda./4 phase shift region at the junction of the first and second portions of the substrate.

    摘要翻译： 一种用于制造λ/ 4偏移型衍射光栅的方法，该方法是通过在衬底上产生衍射光栅图案，其中所述衍射光栅图案具有相对于衬底选择性蚀刻的材料，沉积抗蚀剂以掩埋衍射光栅图案，去除抗蚀剂的一部分 暴露衍射光栅图案的表面的至少一部分，去除基板的第一部分上的衍射光栅图案，使用剩余的抗蚀剂图案作为掩模蚀刻基板的第一部分，并蚀刻第二部分 使用在基板的第二部分上的剩余衍射光栅图案与第一部分相邻的基板，由此产生在第一和第二部分的接合处具有λ/ 4相移区域的λ/ 4移动型衍射光栅 基质。

    Electro-pneumatic pressure converter
    35.
    发明授权
    Electro-pneumatic pressure converter 失效
    电动气压变压器

    公开(公告)号：US4675567A

    公开(公告)日：1987-06-23

    申请号：US913930

    申请日：1986-10-01

    申请人： Masatoshi Fujiwara ,  Masato Kuroda

    发明人： Masatoshi Fujiwara ,  Masato Kuroda

    IPC分类号： F15B5/00 ,  G05D16/20 ,  H01L41/08

    CPC分类号： G05D16/2013

    摘要： An electro-pneumatic pressure converter including a switching valve having at least one plate-like piezoelectric element, which is supported at one end in a cantilever manner inside a sealed chamber and a distal end portion of which moves upon application of a voltage, at least two pressure nozzles which are opened and closed upon displacement of the piezoelectric element, and an output channel extending from the sealed chamber to an external portion; a pilot relay for converting a pneumatic pressure signal from the output channel into a pneumatic pressure signal; a pressure sensor for converting the output pressure signal of the pilot relay into an electrical signal; pulse width modulating means for supplying a pulse-width modulation signal corresponding to a difference between the electrical signal from the pressure sensor and an external input signal to the plate-like piezoelectric element of the switching valve; a power supplycircuit for obtaining a predetermined voltage from the external input voltage to supply a voltage to respective portions of the converter; and means for monitoring the external input voltage and inhibiting an output of the switching valve when the external voltage is decreased below a predetermined value smaller than a normal operating range.

    摘要翻译： 一种电动气压变压器，包括具有至少一个板状压电元件的切换阀，所述至少一个板状压电元件在一端以悬臂方式支撑在密封室内，并且其远端部分在施加电压时移动至少 压电元件位移时打开和关闭的两个压力喷嘴，以及从密封室延伸到外部的输出通道; 用于将来自输出通道的气压信号转换成气动压力信号的先导继电器; 用于将先导继电器的输出压力信号转换为电信号的压力传感器; 脉冲宽度调制装置，用于将与来自压力传感器的电信号和外部输入信号之间的差相对应的脉冲宽度调制信号提供给切换阀的板状压电元件; 用于从外部输入电压获得预定电压以向转换器的各个部分提供电压的电源电路; 以及用于当外部电压降低到小于正常工作范围的预定值以下时，监视外部输入电压并禁止切换阀的输出的装置。

    Three force balanced mechanism
    37.
    发明授权
    Three force balanced mechanism 失效
    三力平衡机制

    公开(公告)号：US4502333A

    公开(公告)日：1985-03-05

    申请号：US536285

    申请日：1983-09-27

    申请人： Tatsuhide Shiga ,  Mikio Tanaka ,  Yoshikuni Doki ,  Yoshihiro Tsuruoka ,  Masatoshi Fujiwara

    发明人： Tatsuhide Shiga ,  Mikio Tanaka ,  Yoshikuni Doki ,  Yoshihiro Tsuruoka ,  Masatoshi Fujiwara

    IPC分类号： G01D5/42 ,  G01D3/024 ,  G01D5/04 ,  G01L1/08 ,  G01L7/00 ,  G01L11/00 ,  G01L7/08

    CPC分类号： G01L11/004 ,  G01D5/04 ,  G01L1/08

    摘要： In a three force balanced mechanism of the type comprising a floating pivot, an input force transmitting member, a feedback force transmitting member, one end of these members being connected to the floating pivot and a flexible span setting member with one end secured to the floating pivot, the span setting member being inclined with respect to the input force transmitting member, the floating pivot has a cylindrical surface intersecting the two force transmitting members and one end of the span setting member is wound about or unwound from the cylindrical surface. In one embodiment the cylindrical floating pivot is formed a notch having side surfaces orthogonal to each other and the two force transmitting members are secured to respective side surfaces.

    摘要翻译： 在包括浮动枢轴，输入力传递构件，反馈力传递构件的这种类型的三力平衡机构中，这些构件的一端连接到浮动枢轴，以及柔性跨距设定构件，其一端固定到浮动 枢轴，所述跨距设定构件相对于所述输入力传递构件倾斜，所述浮动枢轴具有与所述两个力传递构件相交的圆柱形表面，并且所述跨距设定构件的一端被卷绕在所述圆柱形表面上或从所述圆柱形表面展开。 在一个实施例中，圆柱形浮动枢轴形成有具有彼此正交的侧表面的凹口，并且两个力传递构件固定到相应的侧表面。