公开(公告)号：US06501533B1

公开(公告)日：2002-12-31

申请号：US09676811

申请日：2000-10-02

申请人： Minoru Murata

发明人： Minoru Murata

IPC分类号： G03B2742

CPC分类号： G03F7/70358 ,  G03F7/70066 ,  G03F7/70558 ,  G03F7/70725 ,  G03F9/7026

摘要： Effects of synchronization control errors on subsequent processes are reduced when such synchronization control errors occur in a scanning type (e.g., step-and-scan) exposure apparatus. A reticle stage controller that controls the driving of a reticle stage, a focus controller that controls a focusing position on a wafer, a blind controller that controls a shape of an aperture formed by a movable blind, and an exposure controller that controls the intensity of light incident on the wafer are controlled with as much precision as is possible, but typically have synchronization control errors. Synchronization control errors for each controller are determined, e.g., by each controller, and are supplied to a main control system that can be, e.g., a higher rank controller. The main control system displays, e.g., through a warning apparatus, shot areas in which the synchronization control errors exceed an allowable range. Such shot areas are referred to as poor shots. The poor shots are eliminated from being exposure targets in subsequent exposure processes (e.g., for layers applied above the layer causing the poor shot) and also are eliminated from being used as sample shots in subsequent alignment processes.

摘要翻译： 当在扫描类型（例如，逐步扫描）曝光装置中发生这种同步控制错误时，同步控制误差对后续处理的影响减小。 控制标线片台的驱动的标线片级控制器，控制晶片上的聚焦位置的聚焦控制器，控制由可移动遮光板形成的孔的形状的盲控制器和控制由可动遮光板形成的光圈的曝光控制器 以尽可能多的精度控制入射在晶片上的光，但通常具有同步控制误差。 每个控制器的同步控制误差例如由每个控制器确定，并被提供给可以是例如较高等级控制器的主控制系统。 主控制系统例如通过警告装置显示同步控制误差超过允许范围的拍摄区域。 这种射击区域被称为不良射击。 在随后的曝光过程中（例如，对于在层上施加的层导致不良射击）的曝光目标，不良拍摄被消除，并且也被排除在随后的对准过程中被用作样本拍摄。

公开(公告)号：US20100196797A1

公开(公告)日：2010-08-05

申请号：US12439822

申请日：2007-09-04

申请人： Hidekazu Kimura ,  Suguru Watanabe ,  Toru Takahashi ,  Nobuo Katsuura ,  Minoru Murata ,  Kiyoshi Isobe

发明人： Hidekazu Kimura ,  Suguru Watanabe ,  Toru Takahashi ,  Nobuo Katsuura ,  Minoru Murata ,  Kiyoshi Isobe

IPC分类号： H01M8/02 ,  B65D37/00

CPC分类号： H01M8/04208 ,  H01M8/04186 ,  H01M8/1011 ,  Y02E60/523

摘要： What is provided is a liquid supply container capable of minimizing, after the supply of liquid in a liquid reservoir to a liquid acceptor has been completed, the amount of the liquid remaining in the liquid reservoir. A liquid supply container 1 includes: a liquid reservoir 10 that changes its shape in accordance with the amount of liquid contained therein; and a liquid supply section 30 provided in the liquid reservoir 10 to supply the liquid to a liquid acceptor 50. The liquid supply section 30 includes: a liquid supply path 16 that supplies the liquid to the liquid acceptor 50; and an exposed surface 20 that defines a liquid reservoir 10-side end in the liquid supply path 16 and is exposed to the inner space of the liquid reservoir 10. The exposed surface 20 is provided with a recess capable of forming a flow path in which the liquid flows from the outer circumference of the exposed surface 20 to the liquid supply path 16. Also, a liquid supply container 2 has a recess or protrusion on the inner surface of the liquid reservoir 10, the recess or protrusion being capable of forming a flow path in which the liquid flows to the liquid supply path 16.

摘要翻译： 提供了一种液体供应容器，其能够在液体储存器中的液体供应液体受体已经完成之后最小化剩余在液体储存器中的液体的量。 液体供应容器1包括：液体储存器10，其根据其中容纳的液体的量改变其形状; 以及液体供应部分30，其设置在液体储存器10中以将液体供应到液体受体50.液体供应部分30包括：液体供应路径16，其将液体供应到液体受体50; 以及暴露的表面20，其在液体供应路径16中限定液体储存器10侧端部并且暴露于液体储存器10的内部空间。暴露表面20设置有能够形成流路的凹部， 液体从暴露表面20的外周流向液体供给路径16.此外，液体供应容器2在液体储存器10的内表面上具有凹部或突起，凹部或突起能够形成 液体流向液体供应路径16的流动路径。

公开(公告)号：US20100190091A1

公开(公告)日：2010-07-29

申请号：US12440124

申请日：2007-09-05

申请人： Hidekazu Kimura ,  Suguru Watanabe ,  Toru Takahashi ,  Nobuo Katsuura ,  Minoru Murata ,  Kiyoshi Isobe

发明人： Hidekazu Kimura ,  Suguru Watanabe ,  Toru Takahashi ,  Nobuo Katsuura ,  Minoru Murata ,  Kiyoshi Isobe

IPC分类号： H01M8/04 ,  B65D1/40

CPC分类号： B60K15/03 ,  B60K2015/03046 ,  H01M8/04201 ,  H01M8/1011 ,  H01M2250/30 ,  Y02B90/18 ,  Y02E60/523

摘要： A liquid supply container (11) is provided with: a liquid storage part (110) for accommodating a liquid inside; and a liquid supply part (130) provided on the liquid storage part (110) for supplying the liquid accommodated in the liquid storage part (110) to a liquid receptor (150). Shock-absorbing material is arranged between the liquid storage part (110) and the liquid supply part (130).

摘要翻译： 液体供应容器（11）设有：用于在其中容纳液体的液体储存部分（110）; 以及液体供给部（130），其设置在所述液体容纳部（110）上，用于将容纳在所述液体容纳部（110）中的液体供给到液体受体（150）。 缓冲材料布置在液体储存部分（110）和液体供应部分（130）之间。

公开(公告)号：US20080100309A1

公开(公告)日：2008-05-01

申请号：US11907005

申请日：2007-10-09

申请人： Takahiko Yoshida ,  Minoru Murata

发明人： Takahiko Yoshida ,  Minoru Murata

IPC分类号： G01R27/26

CPC分类号： F02M37/0064 ,  F02D19/06 ,  F02D19/084 ,  F02D19/087 ,  Y02T10/36

摘要： A liquid property sensor for detecting property of liquid includes a semiconductor board, a first electrode and a second electrode, and a protection film. The first and second electrodes are disposed on the semiconductor board to be spaced from each other at a predetermined distance. The protection film has resistance relative to the liquid, and is exposed to the liquid. The first and second electrodes detect a capacitance therebetween as the property of the liquid in accordance with a relative permittivity of the liquid. A capacitance-voltage conversion circuit of the semiconductor board converts the capacitance into a voltage value.

摘要翻译： 用于检测液体性质的液体性质传感器包括半导体板，第一电极和第二电极以及保护膜。 第一和第二电极设置在半导体板上以预定距离彼此间隔开。 保护膜相对于液体具有电阻，并暴露于液体。 第一和第二电极根据液体的相对介电常数来检测其间的电容，作为液体的性质。 半导体板的电容电压转换电路将电容转换为电压值。

公开(公告)号：US20070120205A1

公开(公告)日：2007-05-31

申请号：US11649254

申请日：2007-01-04

申请人： Minoru Murata ,  Kenichi Yokoyama ,  Makoto Asai

发明人： Minoru Murata ,  Kenichi Yokoyama ,  Makoto Asai

IPC分类号： G01P15/08

CPC分类号： G01C19/5719 ,  G01P15/125

摘要： A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.

摘要翻译： 半导体物理量传感器包括：基板; 支撑在基板上的半导体层; 设置在所述半导体层中的沟槽; 以及可移动部分，其设置在所述半导体层中并且通过所述沟槽与所述衬底分离。 可动部包括在厚度方向上贯穿半导体层的多个贯通孔。 可移动部分能够基于施加到可移动部分的物理量来移位，使得通过可移动部分的位移来检测物理量。 可动部分具有设置在通孔中的接合部。 交界处有三叉形。

公开(公告)号：US5963324A

公开(公告)日：1999-10-05

申请号：US729190

申请日：1996-10-11

申请人： Minoru Murata

发明人： Minoru Murata

IPC分类号： H01L21/027 ,  G01B9/02 ,  G03F7/20

CPC分类号： G01B9/0207 ,  G01B9/02067 ,  G03F7/70691

摘要： An exposure apparatus is provided with temperature sensors (25 and 26) to measure temperatures of air around laser beams from a reticle-side laser interferometer (22a) and a wafer-side laser interferometer (23a), together with an environmental sensor (31) for measuring an atmospheric pressure, humidity, and so forth. A main control system (13) as a host CPU instructs a reticle stage control system (27) and a wafer stage control system (28) to move a reticle and a wafer, respectively (step 201). During the reticle and wafer moving period, measured values by the temperature sensors (25 and 26) and the environmental sensor (31) are read, and a variation of the laser wavelength due to a change in the environmental data is corrected (step 202), and during subsequent scanning exposure, position control of the reticle and wafer stages is effected by using the corrected laser wavelength. Thus, the laser wavelength of the laser interferometers is corrected without an increase in the cost or a reduction of the throughput.

摘要翻译： 曝光装置设置有温度传感器（25和26），用于测量来自标线片侧激光干涉仪（22a）和晶片侧激光干涉仪（23a）的激光束周围的空气与环境传感器（31）的温度， 用于测量大气压力，湿度等。 作为主机CPU的主控制系统（13）指示分划板台控制系统（27）和晶片台控制系统（28）分别移动光罩和晶片（步骤201）。 在标线片和晶片移动期间，读取温度传感器（25,26）和环境传感器（31）的测量值，校正由于环境数据变化引起的激光波长的变化（步骤202） 并且在随后的扫描曝光期间，通过使用校正的激光波长来实现掩模版和晶片台的位置控制。 因此，校正激光干涉仪的激光波长，而不增加成本或降低生产量。

公开(公告)号：US5002468A

公开(公告)日：1991-03-26

申请号：US306454

申请日：1989-01-25

申请人： Minoru Murata ,  Kazumasa Yamada

发明人： Minoru Murata ,  Kazumasa Yamada

IPC分类号： F01L21/04 ,  F01L23/00 ,  F01L31/02 ,  F04B9/08 ,  F04B9/125 ,  F04B43/073 ,  F15B11/15 ,  F16K31/56

CPC分类号： F01L31/02 ,  F01L21/04 ,  F01L23/00 ,  F04B43/0736 ,  F04B9/125 ,  F04B9/1253 ,  F16K31/566

摘要： The objective of the present invention is to provide a reciprocation switching device for a pump which will solve problems of conventional devices such as that, because coil springs are used for activating by their snap action valve operators or switching operators serving to control the pressure of pump working fluid in relation to reciprocating action of the pump, such devices require the numerous number of parts including spring fitting shafts, the structure to attach such fitting shafts, parts for spring holders, etc.; and that the assembling of those parts is troublesome. A device according to the present invention uses one or two wire springs made into a C-like shape as the springs for the aforementioned purpose and calls for fitting said springs directly between the spring fitting sections(s) and the valve operator or the switching operator.

公开(公告)号：US4923168A

公开(公告)日：1990-05-08

申请号：US309667

申请日：1989-01-31

申请人： Minoru Murata ,  Kazumasa Yamada

发明人： Minoru Murata ,  Kazumasa Yamada

IPC分类号： F16K11/07 ,  F16K31/56 ,  G05G1/00 ,  G05G5/06

CPC分类号： F16K31/566 ,  F16K11/0704 ,  Y10T137/8663

摘要： A spool type switching valve to be used for the switching operation of a diaphragm pump or a similar device, which simultaneously insures both preventing abrasion of the detent mechanism and obtaining thorough operation of switching the spool. A spool is movably fitted inside a sleeve and is prevented from standing still at a neutral point by a detent mechanism provided at one of its ends. The detent mechanism comprises a spool operator fitted around a shaft section at one end of the spool as one body, a spring holder at the end of the sleeve retains a pair of C-shaped wire springs of a circular cross-section fitted between the spool operator and the spring holder. As the spool passes the neutral point, spring forces snap the spool to the extremity of its range, thereby preventing stopping of the spool in the neutral position. An axial clearance permits the spool operator to begin moving before the spool moves.

公开(公告)号：US4144354A

公开(公告)日：1979-03-13

申请号：US766863

申请日：1977-02-09

申请人： Naoyuki Unno ,  Mutsuyuki Yoshino ,  Minoru Murata

发明人： Naoyuki Unno ,  Mutsuyuki Yoshino ,  Minoru Murata

IPC分类号： A23K1/165 ,  A23K1/18 ,  A61K36/07 ,  A61K38/46 ,  A61P3/00 ,  A61K37/48

CPC分类号： A23K20/189

摘要： Enzyme composition having the activities of cellulase laminarinase, xylanase, dextranase, amilase, pectinase and protease which is obtained by culturing Basidiomycetes belonging to the genus Irpex is used for promoting secretion of milk of livestock and improving the quality of the milk.

摘要翻译： 通过培养属于Irpex属的担子菌所获得的具有纤维素酶多核苷酸酶，木聚糖酶，葡聚糖酶，淀粉酶，果胶酶和蛋白酶的活性的酶组合物用于促进家畜乳分泌和提高牛奶质量。

公开(公告)号：US08469680B2

公开(公告)日：2013-06-25

申请号：US12704625

申请日：2010-02-12

申请人： Minoru Murata ,  Shigeru Murata

发明人： Minoru Murata ,  Shigeru Murata

IPC分类号： F04B17/00 ,  F04B35/00

CPC分类号： F04B9/12 ,  F04B39/10 ,  F04B43/073 ,  F04B53/10

摘要： A valve body for pumps has a compressed air-filled chamber in the center thereof and a compressed air supply port through which compressed air is supplied into the compressed air-filled chamber. The outer surface of the valve body is provided with an annular groove-shaped air supply chamber that communicates between the compressed air-filled chamber and a pump-side air chamber. Compressed air supplied into the compressed air-filled chamber through the compressed air supply port is supplied into the pump-side air chamber through the air supply chamber.

摘要翻译： 用于泵的阀体在其中心具有压缩空气填充室，以及压缩空气供应口，通过压缩空气供应口将压缩空气供应到压缩空气填充室中。 阀体的外表面设置有环形槽形空气供应室，其在压缩空气填充室和泵侧空气室之间连通。 通过压缩空气供给口供给到压缩空气填充室的压缩空气通过供气室供给到泵侧空气室。