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公开(公告)号:US20220130684A1
公开(公告)日:2022-04-28
申请号:US17567680
申请日:2022-01-03
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L21/48 , H01L23/498 , H01L23/34 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L27/098 , H01L23/522 , H01L23/367 , H01L27/092 , H01L25/00 , H01L23/60 , H01L25/065
Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, and where the device includes a plurality of capacitors.
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公开(公告)号:US10892169B2
公开(公告)日:2021-01-12
申请号:US16114211
申请日:2018-08-28
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L27/098 , H01L23/498 , H01L21/48 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L25/065 , H01L27/092 , H01L23/60 , H01L23/522 , H01L23/367 , H01L25/00 , H01L27/088 , H01L23/34 , H01L23/373 , H01L27/108
Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming, at least in part a plurality of logic gates; a plurality of second transistors overlaying, at least in part the first single crystal layer; a plurality of third transistors overlaying, at least in part the second transistors; a plurality of fourth transistors overlaying, at least in part the third transistors; a second metal layer overlaying, at least in part the fourth transistors; where the fourth transistors are aligned with less than 100 nm misalignment to the first transistors, where at least one of the plurality of vias has a radius of less than 200 nm, where a memory cell includes at least one of the third transistors.
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公开(公告)号:US10600657B2
公开(公告)日:2020-03-24
申请号:US16113860
申请日:2018-08-27
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L21/48 , H01L23/498 , H01L21/8234 , H01L23/34 , H01L27/098 , H01L27/092 , H01L27/02 , H01L27/06 , H01L25/065 , H01L23/60 , H01L23/522 , H01L25/00 , H01L23/373 , H01L23/367
Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming, at least in part a plurality of logic gates; a plurality of second transistors overlaying, at least in part the first single crystal layer; a plurality of third transistors overlaying, at least in part the second transistors; a second metal layer overlaying, at least in part the third transistors; Input/Output pads to provide connection to external devices, a local power grid to distribute power to the plurality of logic gates, where the third transistors are aligned to the first transistors with less than 40 nm misalignment, where the first single crystal layer includes an Serializer/Deserializer (“SerDes”) structure connected to at least one of the Input/Output pads, where a memory cell includes at least one of the third transistors.
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公开(公告)号:US20190019693A1
公开(公告)日:2019-01-17
申请号:US16115519
申请日:2018-08-28
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L21/48 , H01L23/34 , H01L23/498 , H01L27/098 , H01L27/092 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L25/065 , H01L23/60 , H01L23/522
Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming, at least in part a plurality of logic gates; a plurality of second transistors overlaying, at least in part the first single crystal layer; a plurality of third transistors overlaying, at least in part the second transistors; a second metal layer overlaying, at least in part the third transistors; Input/Output pads to provide connection to external devices, a local power grid to distribute power to the logic gates, where the third transistors are aligned to the first transistors with less than 40 nm misalignment, where the first single crystal layer includes a Phase Lock Loop (“PLL”) structure connected to at least one of the Input/Output pads, where a memory cell includes at least one of the third transistors.
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公开(公告)号:US20190006192A1
公开(公告)日:2019-01-03
申请号:US16114211
申请日:2018-08-28
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L21/48 , H01L23/34 , H01L23/498 , H01L27/098 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L25/065 , H01L27/092 , H01L23/60 , H01L23/522
Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming, at least in part a plurality of logic gates; a plurality of second transistors overlaying, at least in part the first single crystal layer; a plurality of third transistors overlaying, at least in part the second transistors; a plurality of fourth transistors overlaying, at least in part the third transistors; a second metal layer overlaying, at least in part the fourth transistors; where the fourth transistors are aligned with less than 100 nm misalignment to the first transistors, where at least one of the plurality of vias has a radius of less than 200 nm, where a memory cell includes at least one of the third transistors.
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公开(公告)号:US20180197812A1
公开(公告)日:2018-07-12
申请号:US15913917
申请日:2018-03-06
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L23/498 , H01L23/34 , H01L27/098 , H01L27/092 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L25/065 , H01L23/60 , H01L23/522
CPC classification number: H01L23/49827 , H01L21/823487 , H01L23/34 , H01L23/367 , H01L23/3677 , H01L23/373 , H01L23/3732 , H01L23/49838 , H01L23/5226 , H01L23/60 , H01L25/0657 , H01L25/50 , H01L27/0207 , H01L27/0248 , H01L27/0688 , H01L27/092 , H01L27/098 , H01L2225/06527 , H01L2225/06541 , H01L2225/06589 , H01L2924/00 , H01L2924/0002
Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming a plurality of logic gates; a plurality of second transistors overlaying the first single crystal layer; a plurality of third transistors overlaying the second transistors; a second metal layer overlaying the third transistors; and Input/Output pads to provide connection to external devices, where the third transistors are aligned to the first transistors with less than 40 nm misalignment, where the first single crystal layer includes an Electrostatic Discharge (“ESD”) structure connected to at least one of the Input/Output pads, where at least one of the third transistors is a junction-less transistor, and where a memory cell includes at least one of the third transistors.
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公开(公告)号:US09911627B1
公开(公告)日:2018-03-06
申请号:US13864244
申请日:2013-04-17
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
CPC classification number: H01L21/4871 , H01L21/823487 , H01L23/34 , H01L23/367 , H01L23/3677 , H01L23/373 , H01L23/3732 , H01L23/49827 , H01L23/49838 , H01L23/5226 , H01L23/60 , H01L25/0657 , H01L25/50 , H01L27/0207 , H01L27/0248 , H01L27/0688 , H01L27/092 , H01L27/098 , H01L2225/06527 , H01L2225/06541 , H01L2225/06589 , H01L2924/0002 , H01L2924/00
Abstract: A method for processing a 3D semiconductor device, the method including: processing a first layer comprising first transistors, forming a first power distribution grid to provide power to the first transistors, processing a second layer overlying the first transistors and including second transistors, where the second layer includes a through layer via with diameter of less than 150 nm, forming a second power distribution grid overlaying the second transistors, where the first power distribution grid includes first power conductors and the second power distribution grid includes second power conductors, and where the second power conductors are substantially wider or thicker than the first power conductors, and where the device includes a plurality of vias to connect the second power distribution grid to the first power distribution grid.
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公开(公告)号:US20170200715A1
公开(公告)日:2017-07-13
申请号:US15470866
申请日:2017-03-27
Applicant: Monolithic 3D Inc.
Inventor: Deepak Sekar , Zvi Or-Bach , Brian Cronquist
IPC: H01L27/06 , H01L27/108 , H01L21/762
CPC classification number: H01L27/0688 , H01L21/76254 , H01L21/823475 , H01L23/3677 , H01L23/481 , H01L23/5225 , H01L23/585 , H01L25/0657 , H01L27/088 , H01L27/0886 , H01L27/092 , H01L27/0922 , H01L27/10802 , H01L27/10897 , H01L28/00 , H01L2225/06527 , H01L2225/06541 , H01L2225/06589 , H01L2924/0002 , H01L2924/00
Abstract: An Integrated Circuit device, including: first transistors and second transistors, where the first transistors and the second transistors each include a single crystal channel, where at least one of the second transistors overlays at least one of the first transistors with less than 1 micron distance apart, and where at least one of the second transistors is a dopant segregated schottky barrier transistor.
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公开(公告)号:US09299641B2
公开(公告)日:2016-03-29
申请号:US14747599
申请日:2015-06-23
Applicant: Monolithic 3D Inc.
Inventor: Deepak Sekar , Zvi Or-Bach , Brian Cronquist
IPC: H01L23/48 , H01L27/088 , H01L23/367 , H01L23/522 , H01L27/06
CPC classification number: H01L25/0657 , H01L21/823475 , H01L23/3677 , H01L23/481 , H01L23/5225 , H01L27/0688 , H01L27/088 , H01L27/0886 , H01L27/092 , H01L27/0922 , H01L2225/06527 , H01L2225/06541 , H01L2225/06589 , H01L2924/0002 , H01L2924/00
Abstract: A 3D device including: a first layer including first transistors, the first layer overlaid by at least one interconnection layer; a second layer including second transistors, the second layer overlaying the interconnection layer; a plurality of electrical connections connecting the second transistors with the interconnection layer; and at least one thermally conductive and electrically non-conductive contact, where the at least one thermally conductive and electrically non-conductive contact thermally connects the second layer to a top or bottom surface of the 3D device.
Abstract translation: 一种3D设备,包括:包括第一晶体管的第一层,由至少一个互连层覆盖的第一层; 第二层,包括第二晶体管,第二层覆盖互连层; 将所述第二晶体管与所述互连层连接的多个电连接; 以及至少一个导热和非导电接触,其中所述至少一个导热和非导电接触将所述第二层热连接到所述3D器件的顶表面或底表面。
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公开(公告)号:US08836073B1
公开(公告)日:2014-09-16
申请号:US13959994
申请日:2013-08-06
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak Sekar , Brian Cronquist
IPC: H01L21/44 , H01L21/48 , H01L21/50 , H01L23/48 , H01L27/06 , H01L23/544 , H01L27/088 , H01L29/66
CPC classification number: H01L23/481 , H01L21/743 , H01L23/34 , H01L23/50 , H01L23/544 , H01L27/0207 , H01L27/0623 , H01L27/0688 , H01L27/088 , H01L27/0886 , H01L27/10802 , H01L27/10894 , H01L27/10897 , H01L27/11526 , H01L27/11551 , H01L27/11573 , H01L27/11578 , H01L27/11807 , H01L27/2436 , H01L27/249 , H01L29/1066 , H01L29/66272 , H01L29/66704 , H01L29/66825 , H01L29/66901 , H01L29/732 , H01L29/7841 , H01L29/808 , H01L2224/16225 , H01L2224/73253 , H01L2924/12032 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/1461 , H01L2924/16152 , H01L2924/00
Abstract: An Integrated Circuit device including: a first layer of first transistors; a first metal layer overlaying the first transistors and providing at least one connection to the first transistors; a second metal layer overlaying the first metal layer; and a second layer of second transistors overlaying the second metal layer, where the second metal layer is connected to provide power to at least one of the second transistors.
Abstract translation: 一种集成电路装置,包括:第一层第一晶体管; 覆盖所述第一晶体管并且提供至少一个到所述第一晶体管的连接的第一金属层; 覆盖所述第一金属层的第二金属层; 以及覆盖所述第二金属层的第二层第二晶体管,其中所述第二金属层被连接以向所述第二晶体管中的至少一个提供功率。
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