公开(公告)号：US08263943B2

公开(公告)日：2012-09-11

申请号：US13144620

申请日：2010-01-08

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

IPC分类号： H01J49/10 ,  H01J37/28

CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J37/15 ,  H01J2237/0216 ,  H01J2237/0807 ,  H01J2237/28

摘要： Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

摘要翻译： 提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。 发射极基座和真空容器彼此磁性相互作用。

公开(公告)号：US20110147609A1

公开(公告)日：2011-06-23

申请号：US12995700

申请日：2009-03-30

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

IPC分类号： H01J3/04

CPC分类号： H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

摘要翻译： 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离​​子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US4959964A

公开(公告)日：1990-10-02

申请号：US406235

申请日：1989-09-12

申请人： Norihide Saho ,  Takeo Nemoto ,  Hisanao Ogata ,  Mitsuru Saeki

发明人： Norihide Saho ,  Takeo Nemoto ,  Hisanao Ogata ,  Mitsuru Saeki

IPC分类号： F17C3/08 ,  G01R33/3815 ,  G01R33/385

CPC分类号： G01R33/3815 ,  F17C3/085 ,  G01R33/3854 ,  F17C2203/0687 ,  F17C2221/017 ,  F17C2270/0536

摘要： In a cryostat with a refrigerator containing a superconductive magnet, in which a material to be cooled and a low temperature end of the refrigerator for cooling the to-be-cooled material are disposed within a heat-insulating tank, the refrigerator is connected in unison with a part of a structural member other than the heat-insulating tank by a rigid coupling member. Accordingly, a heat portion of the refrigerator is tightly coupled to a magnetic shield member having a large mass and is connected to a vacuum container through bellows. The end portion of the refrigerator is formed in unison with heat shield sleeves and/or the heat shield tank through heat-conductive material having elasticity. Also, in order to prevent the leakage of the sound or noise from the heat portion, a sound-insulating cover is provided also for passages connecting to the head portion and is fixed to the magnetic shield member.

公开(公告)号：US08779380B2

公开(公告)日：2014-07-15

申请号：US12995700

申请日：2009-03-30

申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

IPC分类号： H01J27/00

CPC分类号： H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

摘要翻译： 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离​​子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US08455841B2

公开(公告)日：2013-06-04

申请号：US13381623

申请日：2010-06-04

申请人： Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

发明人： Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

IPC分类号： H01J37/26

CPC分类号： H01J37/08 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/0807

摘要： Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.

摘要翻译： 提供大电流和高度稳定的气田电离离子源，以及具有大焦深的高分辨率离子显微镜。 本发明涉及一种具有气田电离离子源的离子显微镜，其中设置有用于冷却与离子显微镜主体无关的气田电离离子源的制冷机，以及用于循环的制冷剂循环回路冷却机构 气体离子源和冰箱之间的制冷剂。 因此，可以减小传播到气田电离离子源的冰箱的机械振动，并且实现离子源的亮度的提高和离子束聚焦性能的提高。

公开(公告)号：US5083445A

公开(公告)日：1992-01-28

申请号：US466633

申请日：1990-01-17

申请人： Norihide Saho ,  Taisei Uede ,  Yoichi Ono ,  Hisanao Ogata ,  Takeo Nemoto

发明人： Norihide Saho ,  Taisei Uede ,  Yoichi Ono ,  Hisanao Ogata ,  Takeo Nemoto

IPC分类号： B01D8/00 ,  F04B37/08

CPC分类号： F04B37/08 ,  B01D8/00 ,  Y10S417/901

摘要： A cryopump for effecting a cooling operation by a freezing medium such as liquid helium. A plurality of radiation-heat shield plates for protecting cryopanels against an external heat radiation are provided in opposed relation to a gas inlet of the cryopump. Particularly, a plurality of groups of such radiation-heat shield plates are provided in such a manner that the radiation-heat shield plates of each group are arranged in a multi-stage manner in registry with one another in the direction of the depth of the cryopump and are disposed in parallel relation to one another. Each of the cryopanels is disposed adjacent to a rear surface of respective radiation-heat shield plates facing away from the gas inlet. With this construction, the gas molecules reflected by those radiation-heat shield plates and by a rear wall of the cryopump, are less liable to reach the gas inlet, and tend to be condensed at an increased rate on those cryopanels.

公开(公告)号：US4432216A

公开(公告)日：1984-02-21

申请号：US438464

申请日：1982-11-02

申请人： Toshiharu Matsuda ,  Kenjiro Kasai ,  Seiichi Kikkawa ,  Norihide Saho ,  Kouzo Matumoto

发明人： Toshiharu Matsuda ,  Kenjiro Kasai ,  Seiichi Kikkawa ,  Norihide Saho ,  Kouzo Matumoto

IPC分类号： F25D11/00 ,  F17C13/00 ,  F25B9/00 ,  F25B9/10 ,  F25D3/10 ,  F25J1/02 ,  H01F6/04 ,  H01L39/04 ,  F25B19/00

CPC分类号： F25B9/10 ,  F25B2400/17

摘要： A split type cryogenic cooling apparatus comprising a refrigerator which permits a working gas of a high pressure and an operating temperature to generate cold heat, a cryostat accommodating a vessel containing liquefied fraction of the working gas together with an object to be cooled and a plurality of shield plates surrounding the vessel and maintained at respective temperature levels, and a communicating pipe system providing a communication between the refrigerator and the cryostat and having a vacuum heat insulation. Two or more stages of heat exchangers are disposed in the cryostat with their colder ends held in thermal contact with the shield plates and the vessel of temperature levels corresponding thereto, to thereby suppress an introduction of external heat into the cryostat.

摘要翻译： 一种分体式低温冷却装置，其特征在于，包括：冰箱，其允许高压和工作温度的工作气体产生冷热;低温恒温器，容纳包含所述工作气体的液化部分的容器以及待冷却物体;以及多个 屏蔽板围绕容器并维持在相应的温度水平，以及连通管系统，其提供冰箱和低温恒温器之间的连通并具有真空隔热。 两个或多个热交换器级设置在低温恒温器中，其较冷端保持与屏蔽板和对应于其的温度水平的容器热接触，从而抑制外部热量引入低温恒温器。

公开(公告)号：US07358736B2

公开(公告)日：2008-04-15

申请号：US11493819

申请日：2006-07-27

申请人： Yuzo Fukuda ,  Hiromitsu Seino ,  Kazuo Saitoh ,  Hiroyuki Tanaka ,  Tsuyoshi Wakuda ,  Norihide Saho ,  Michiya Okada

发明人： Yuzo Fukuda ,  Hiromitsu Seino ,  Kazuo Saitoh ,  Hiroyuki Tanaka ,  Tsuyoshi Wakuda ,  Norihide Saho ,  Michiya Okada

IPC分类号： G01V3/00

CPC分类号： G01R33/30

摘要： The invention provides a low temperature probe having a high sensitivity by reducing a heat intrusion into a receive coil. A heat making an intrusion into a coil is suppressed by inserting a heat radiation shield in which a temperature is controlled at about 100 K to a portion between an outer container of a probe and a coil portion. A heat radiation shield bore sleeve is provided in a heat radiation bore, is connected to the heat radiation shield, and is cooled by a second heat exchanger. Further, the coil portion is cooled by a first heat exchanger. In preparation for a contraction at a time of being cooled, the outer container, the heat radiation shield and the coil portion are connected by using a fixing portion, and a heat relieving mechanism or a contraction relieving mechanism is provided in a root side (an opposite side to the fixing portion) of the heat radiation shield and the coil portion. The fixing portion is formed in a shape and made of a material having a small heat intrusion amount and having a small heat contraction.

摘要翻译： 本发明通过减少对接收线圈的热侵入来提供具有高灵敏度的低温探针。 通过将温度控制在约100K的热辐射屏蔽物插入到探针的外部容器与线圈部分之间的部分来抑制进入线圈的热量。 热辐射屏蔽孔套筒设置在散热孔中，连接到散热屏蔽，并由第二热交换器冷却。 此外，线圈部分由第一热交换器冷却。 为了准备冷却时的收缩，通过使用固定部连接外容器，散热屏蔽体和线圈部，并且在根侧设置有放热机构或收缩解除机构 热辐射屏蔽体和线圈部分相对于固定部分的相对侧）。 固定部形成为由热侵入量小且热收缩小的材料构成。

公开(公告)号：US5381666A

公开(公告)日：1995-01-17

申请号：US710123

申请日：1991-06-04

申请人： Norihide Saho ,  Takeo Nemoto ,  Mitsuru Saeki

发明人： Norihide Saho ,  Takeo Nemoto ,  Mitsuru Saeki

IPC分类号： F25D3/10 ,  A61B5/055 ,  F17C3/08 ,  F25B9/00 ,  F25B9/10 ,  F25D13/00 ,  F25D19/00 ,  F25J1/00 ,  G01R33/3815 ,  H01F6/04 ,  H01F7/20 ,  F17C5/02 ,  F25B19/00

CPC分类号： F25B9/10 ,  F17C2203/0687 ,  F17C2221/012 ,  F17C2221/017 ,  F17C2270/0536 ,  F25D19/006 ,  G01R33/3815 ,  Y02E60/321

摘要： In a cryostat with a liquefaction refrigerator, an object to be cooled, as well as a low-temperature end of the liquefaction refrigerator for cooling the object to be cooled, is contained in a thermally-insulated vessel. The liquefaction refrigerator comprises a cooler and a refrigerator, and the cooler comprises, as main components, a heat exchanger and an expansion valve. The refrigerator includes a mechanically-operated cold-generating device. Within a vacuum vessel in the cryostat, the cooler and the refrigerator are thermally connected together by a releasable thermally-conductive member. Since the refrigerator and the cooler are separate from each other, they can be overhauled independently of each other, and the cooler can be of a compact and lightweight design. Therefore, there can be provided the cryostat which is low in running cost, and has an excellent cooling performance.

摘要翻译： 在具有液化制冷机的低温恒温器中，将要冷却的物体以及用于冷却待冷却物体的液化制冷机的低温端包含在绝热容器中。 液化冰箱包括冷却器和冰箱，并且冷却器作为主要部件包括热交换器和膨胀阀。 冰箱包括机械操作的冷产生装置。 在低温恒温器内的真空容器中，冷却器和冰箱通过可释放的导热构件热连接在一起。 由于冰箱和冷却器彼此分开，所以它们可以彼此独立地进行大修，并且冷却器可以是紧凑且轻便的设计。 因此，可以提供低运行成本的低温恒温器，并且具有优异的冷却性能。

公开(公告)号：US5158585A

公开(公告)日：1992-10-27

申请号：US657269

申请日：1991-02-19

申请人： Norihide Saho ,  Takeo Nemoto ,  Shintaro Sado ,  Sachihiro Yoshimatsu ,  Tadashi Takada ,  Susumu Harada

发明人： Norihide Saho ,  Takeo Nemoto ,  Shintaro Sado ,  Sachihiro Yoshimatsu ,  Tadashi Takada ,  Susumu Harada

IPC分类号： B01D46/00 ,  B01D46/24 ,  F04B39/16 ,  F04C29/02 ,  F25B43/02

CPC分类号： B01D46/2407 ,  B01D46/0009 ,  B01D46/0024 ,  B01D46/0031 ,  B01D46/0036 ,  F04B39/16 ,  F04C29/026 ,  F25B43/02 ,  F25B2341/0016

摘要： A compressor unit in which the oil separated by a plurality of oil separators to a gas suction side pipe of the previous stage oil separator which contains gas whose oil concentration is higher than that of the gas from which oil has been separated, with the separated oil being returned to a compressor. The plurality of separators enables a simplification of the arrangement of the oil returning pipe, a prevention in a reduction in the discharge flow rate of the compressor, and reduction in space required for the separators.

摘要翻译： 一种压缩机单元，其中油被多个油分离器分离到前一级油分离器的气体吸入侧管，其含有油浓度高于油分离的气体的气体，分离的油 被送回压缩机。 多个分离器能够简化回油管的布置，防止压缩机的排出流量的降低以及分离器所需的空间的减少。