Nonstick layer for a micromechanical component
    31.
    发明授权
    Nonstick layer for a micromechanical component 有权
    用于微机械部件的不粘层

    公开(公告)号:US06656368B2

    公开(公告)日:2003-12-02

    申请号:US09445374

    申请日:2000-03-02

    IPC分类号: H01L2100

    摘要: A method for manufacturing micromechanical components, and a micromechanical component, in which a movable element is produced on a sacrificial layer. In a subsequent step the sacrificial layer beneath the movable element is removed so that the movable element becomes movable. After removal of the sacrificial layer, a protective layer is deposited on a surface of the movable element. Silicon oxide and/or silicon nitride is used for the protective layer.

    摘要翻译: 一种用于制造微机械部件的方法,以及微机械部件,其中在牺牲层上制造可移动元件。 在随后的步骤中,去除可移动元件下面的牺牲层,使得可移动元件变得可移动。 在去除牺牲层之后,在可移动元件的表面上沉积保护层。 氧化硅和/或氮化硅用于保护层。

    Closing system for a passage for instruments
    33.
    发明授权
    Closing system for a passage for instruments 失效
    仪器通道关闭系统

    公开(公告)号:US5423761A

    公开(公告)日:1995-06-13

    申请号:US78264

    申请日:1993-06-28

    摘要: A closing system for an instrument passage, particularly for use in laparoscopic puncture devices. The object of the invention is to provide a closing system of safe operation which permits a non-complicated cleaning and has a simple and comparatively small construction. The object is realized according to the invention in that a closing member is a floatingly seated disc which centrally fits into a conical seat and which is held in any position only by a non-symmetrically acting magnetic force of at least one magnet, preferably a permanent magnet.

    摘要翻译: PCT No.PCT / EP92 / 02439。 371日期:1993年6月28日 102(e)日期1993年6月28日PCT提交1992年10月24日PCT公布。 出版物WO93 / 08728 日期:1993年5月13日。一种用于仪器通道的闭合系统,特别用于腹腔镜穿刺装置。 本发明的目的是提供一种安全操作的关闭系统,其允许非复杂的清洁并且具有简单且相对较小的结构。 根据本发明实现的目的在于,闭合构件是浮动座盘,其中心配合到锥形座中,并且仅通过至少一个磁体的非对称作用磁力保持在任何位置,优选地为永久 磁铁。