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公开(公告)号：US08674460B2
公开(公告)日：2014-03-18
申请号：US12790646
申请日：2010-05-28
CPC分类号： B81B7/0054 , B81B7/0048 , B81B2201/047 , B81B2207/07
摘要： In accordance with the disclosure, a MEMS substrate is provided that includes: a central planar portion configured to support a MEMS device; and a first electrical pad coplanar with the central planar portion, the first pad being connected to the central planar portion through a first flexure, wherein the first flexure is configured to substantially mechanically isolate the first electrical pad from the central planar portion.
摘要翻译： 根据本公开，提供了一种MEMS基板，其包括：构造成支撑MEMS装置的中心平面部分; 以及与所述中心平面部分共面的第一电垫，所述第一焊盘通过第一挠曲件连接到所述中心平面部分，其中所述第一挠曲被配置为基本上机械地将所述第一电焊盘与所述中心平面部分隔离。
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公开(公告)号：US08616791B2
公开(公告)日：2013-12-31
申请号：US13247869
申请日：2011-09-28
IPC分类号： G03B17/00
CPC分类号： H02N1/006 , B81B3/0037 , B81B2201/033 , B81B2203/053 , G03B2205/0084
摘要： A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.
摘要翻译： 用于制造致动器装置的方法包括形成基本上平面的结构，包括具有闩锁脚的外框架，耦合到外框架的固定框架，耦合到固定框架的闩锁块，通过 锁定块挠曲件，联接到外框架的可移动框架，以及包括交替地附接到固定和移动框架的多个叉指齿轮的致动器。 为了操作，闩锁块向下旋转直到闩锁块的上表面设置在下方并通过闩锁块弯曲保持与闩锁脚的下表面闩锁接触。
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公开(公告)号：US08346074B2
公开(公告)日：2013-01-01
申请号：US13225257
申请日：2011-09-02
CPC分类号： G02B7/09 , G02B7/08 , G02B13/001 , G03B3/10 , G03B13/36 , G03B17/02 , H04N5/2252 , H04N5/2253 , H04N5/2254 , Y10T29/4902
摘要： In an example embodiment, a method for focusing a miniature camera includes applying a signal to an actuator in the camera, moving a MEMS stage movably supported by one or more flexures in response to the application of the signal, moving a lens in response to the moving of the MEMS stage, and limiting movement of the MEMS stage to substantially one degree of freedom corresponding to an optical axis of the lens.
摘要翻译： 在示例实施例中，用于聚焦小型照相机的方法包括将信号施加到相机中的致动器，响应于信号的施加而移动由一个或多个挠曲件可移动地支撑的MEMS台，响应于 移动MEMS级，并且将MEMS级的运动限制为与透镜的光轴相对的基本上一个自由度。
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公开(公告)号：US20120133916A1
公开(公告)日：2012-05-31
申请号：US12957112
申请日：2010-11-30
CPC分类号： G02B7/022 , G02B13/0085 , Y10T428/24942
摘要： In one aspect, the present invention provides a wafer level optical assembly comprising a first wafer level optical element, the first wafer level optical element comprising a first alignment structure and a second wafer level optical element, the second wafer level optical element comprising a second alignment structure, wherein the first alignment structure contacts the second alignment structure.
摘要翻译： 一方面，本发明提供一种晶片级光学组件，其包括第一晶片级光学元件，所述第一晶片级光学元件包括第一对准结构和第二晶片级光学元件，所述第二晶片级光学元件包括第二对准 结构，其中第一对准结构接触第二对准结构。
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公开(公告)号：US20120119613A1
公开(公告)日：2012-05-17
申请号：US12946614
申请日：2010-11-15
CPC分类号： H02N1/002 , G02B7/102 , G02B13/0085
摘要： A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.
摘要翻译： 制造致动器装置的方法包括提供包括导电材料层的晶片并在导电材料中形成多个旋转对称的模具，每个模具包括多个径向突出部和互补尺寸的径向凹槽，其以交替方式布置 并且围绕模具的圆周以相等的角度增量。 为了最大化使用可用的晶片空间，芯片以晶片的形式布置在晶片上，其中每个裸片相对于相邻的裸片旋转360度的角度，除以模具上的突片或凹槽的数量的两倍 对于位于晶片的外周的模具，每个模具设置成与相邻模具靠近邻接的边缘到边缘，并且每个模具的每个突片嵌套在相邻模具的互补凹槽内。
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公开(公告)号：US20100284081A1
公开(公告)日：2010-11-11
申请号：US12463234
申请日：2009-05-08
CPC分类号： G03B3/10 , G02B7/102 , G02B13/009 , G03B2205/0007 , G03B2205/0084
摘要： An integrated lens barrel for a miniature camera is disclosed. The lens barrel can include components such as a shutter, an autofocus mechanism, a zoom mechanism, and/or an image stabilization mechanism. These and/or components can define a portion of the lens barrel that increases the length of the lens barrel. An electrostatic MEMS actuator can be used to effect movement of the autofocus mechanism, zoom mechanism, and/or image stabilization mechanism. Integrating the shutter, autofocus mechanism, zoom mechanism, and/or image stabilization mechanism into the lens barrel facilitates the construction of a substantially smaller camera that is suitable for use in personal electronic devices, such as cellular telephones.
摘要翻译： 公开了一种用于微型照相机的集成透镜镜筒。 透镜镜筒可以包括诸如快门，自动对焦机构，变焦机构和/或图像稳定机构的部件。 这些和/或部件可以限定增加透镜镜筒长度的透镜镜筒的一部分。 可以使用静电MEMS致动器来实现自动聚焦机构，变焦机构和/或图像稳定机构的移动。 将快门，自动对焦机构，变焦机构和/或图像稳定机构集成到镜头镜筒中有助于构建适用于个人电子设备（例如蜂窝电话）的基本上较小的相机。
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公开(公告)号：US06934087B1
公开(公告)日：2005-08-23
申请号：US10669676
申请日：2003-09-23
申请人： Roman C. Gutierrez , Thomas R. Vanzandt , Christopher I. Walker , Edouard G. H. Schmidtlin , Robert J. Calvet
发明人： Roman C. Gutierrez , Thomas R. Vanzandt , Christopher I. Walker , Edouard G. H. Schmidtlin , Robert J. Calvet
CPC分类号： G02B6/327 , G02B6/241 , G02B6/264 , G02B6/3833
摘要： A fiber optic collimator comprises an optical fiber with an angled end face, a ferrule and a plano-convex lens. An end portion of the optical fiber is inserted in the ferrule. The plano-convex lens collimates a beam of light from the optical fiber.
摘要翻译： 光纤准直器包括具有成角度端面的光纤，套圈和平凸透镜。 光纤的端部插入到套圈中。 平凸透镜准直来自光纤的光束。
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38.发明授权Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same 失效硅体微加工，对称，退化振动陀螺仪，加速度计和传感器及其使用方法
公开(公告)号：US5894090A
公开(公告)日：1999-04-13
申请号：US657685
申请日：1996-05-31
申请人： Tony K. Tang , William J. Kaiser , Randall K. Bartman , Jaroslava Z. Wilcox , Roman C. Gutierrez , Robert J. Calvet
发明人： Tony K. Tang , William J. Kaiser , Randall K. Bartman , Jaroslava Z. Wilcox , Roman C. Gutierrez , Robert J. Calvet
IPC分类号： G01C19/5719 , G01P15/125 , G01P15/14 , G01P15/18 , G01C19/00 , G01P9/00
CPC分类号： G01C19/5719 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/084 , G01P2015/0842
摘要： When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.
摘要翻译： 当体现在微型显微镜中时，本发明由具有附接到中心的柱的硅四叶三叶草结构组成。 整个结构由四个硅悬臂或弹簧悬挂。 该装置被静电驱动并电容地检测科里奥利诱导叶三叶草结构叶片的运动。 在柱子与三叶草叶的平面不对称的情况下，装置可以用作加速度计。 如果柱子设置为哑铃或不对称柱的形状，则将重心移出三叶草叶结构的平面，并提供混合装置。 当没有中心质量的情况下使用三叶草叶结构时，它可以作为高Q谐振器执行，作为可以耦合到谐振性能的任何物理现象的传感器。
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公开(公告)号：US20140362441A9
公开(公告)日：2014-12-11
申请号：US13216225
申请日：2011-08-23
CPC分类号： G03B3/10 , G02B7/102 , G02B13/009 , G03B2205/0007 , G03B2205/0084
摘要： An integrated lens barrel for a miniature camera is disclosed. The lens barrel can include components such as a shutter, an autofocus mechanism, a zoom mechanism, and/or an image stabilization mechanism. These and/or components can define a portion of the lens barrel that increases the length of the lens barrel. An electrostatic MEMS actuator can be used to effect movement of the autofocus mechanism, zoom mechanism, and/or image stabilization mechanism. Integrating the shutter, autofocus mechanism, zoom mechanism, and/or image stabilization mechanism into the lens barrel facilitates the construction of a substantially smaller camera that is suitable for use in personal electronic devices, such as cellular telephones.
摘要翻译： 公开了一种用于微型照相机的集成透镜镜筒。 透镜镜筒可以包括诸如快门，自动对焦机构，变焦机构和/或图像稳定机构的部件。 这些和/或部件可以限定增加透镜镜筒长度的透镜镜筒的一部分。 可以使用静电MEMS致动器来实现自动聚焦机构，变焦机构和/或图像稳定机构的移动。 将快门，自动对焦机构，变焦机构和/或图像稳定机构集成到镜头镜筒中有助于构建适用于个人电子设备（例如蜂窝电话）的基本上较小的相机。
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公开(公告)号：US08637961B2
公开(公告)日：2014-01-28
申请号：US12946614
申请日：2010-11-15
IPC分类号： H01L23/544
CPC分类号： H02N1/002 , G02B7/102 , G02B13/0085
摘要： A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.
摘要翻译： 制造致动器装置的方法包括提供包括导电材料层的晶片并在导电材料中形成多个旋转对称的模具，每个模具包括多个径向突出部和互补尺寸的径向凹槽，其以交替方式布置 并且围绕模具的圆周以相等的角度增量。 为了最大化使用可用的晶片空间，芯片以晶片的形式布置在晶片上，其中每个裸片相对于相邻的裸片旋转360度的角度，除以模具上的突片或凹槽的数量的两倍 对于位于晶片的外周的模具，每个模具设置成与相邻模具靠近邻接的边缘到边缘，并且每个模具的每个突片嵌套在相邻模具的互补凹槽内。
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