公开(公告)号：US5718795A

公开(公告)日：1998-02-17

申请号：US517281

申请日：1995-08-21

Applicant: Richard W. Plavidal ,  Shaoher X. Pan

Inventor： Richard W. Plavidal ,  Shaoher X. Pan

IPC: H01J37/32 ,  H01L21/302 ,  C23F1/04

CPC classification number: H01J37/32623 ,  H01J37/3266 ,  H01J2237/3341 ,  H01J2237/3344

Abstract: The present invention is embodied in a plasma reactor for processing a workpiece such as a semiconductor wafer having an axis of symmetry, the reactor including a reactor chamber with a ceiling having an upwardly extending annular pocket bounded by a pair of circumferential side walls, a pedestal for supporting the workpiece within the chamber under the ceiling, a processing gas supply inlet into the chamber, an RF plasma power source coupled to the pedestal, and a magnetic field source near the ceiling providing a radially symmetrical magnetic field having a magnetic pole of one type facing said inner circumferential wall and a magnetic pole of the opposite type facing said outer circumferential wall so as to apply a magnetic field generally straight across said annular pocket. The straight magnetic field lines of the radially symmetrical magnetic field are generally confined to the annular pocket, penetrating into the chamber to a very shallow depth, if at all, and the height of the ceiling above the workpiece exceeds the magnetic field penetration depth.

Abstract translation: 本发明体现在用于处理诸如具有对称轴的半导体晶片的工件的等离子体反应器中，该反应器包括具有天花板的反应室，该天花板具有由一对周向侧壁限定的向上延伸的环形袋，基座 用于将工件支撑在天花板下的腔室内，处理气体供应入口进入腔室，耦合到基座的RF等离子体电源和靠近天花板的磁场源，提供具有一个磁极的径向对称磁场 面向所述内圆周壁的面向所述外周壁的相反类型的磁极，以便施加大致直线穿过所述环形凹槽的磁场。 径向对称磁场的直线磁场线通常被限制在环形凹穴中，如果有的话，穿透室内的深度非常浅，并且工件上方的天花板的高度超过磁场穿透深度。

公开(公告)号：US08722441B2

公开(公告)日：2014-05-13

申请号：US13489955

申请日：2012-06-06

Applicant: Shaoher X. Pan ,  Jay Chen

Inventor： Shaoher X. Pan ,  Jay Chen

IPC: H01L21/00

CPC classification number: H01L33/24 ,  H01L33/007 ,  H01L33/0079 ,  H01L33/32 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for fabricating a light emitting device includes forming a trench in a first surface on first side of a substrate. The trench comprises a first sloped surface not parallel to the first surface, wherein the substrate has a second surface opposite to the first surface of the substrate. The method also includes forming alight emission layer over the first trench surface, but not over the remainder of the first substrate surface, and removing at least a portion of the substrate from the second side of the substrate to expose the light emission layer and allow it to emit light out of the protrusion or protrusions on the second side of the substrate. These protrusions may be elongated pyramids.

Abstract translation: 一种制造发光器件的方法包括在衬底的第一侧上的第一表面中形成沟槽。 沟槽包括不平行于第一表面的第一倾斜表面，其中基底具有与基底的第一表面相对的第二表面。 该方法还包括在第一沟槽表面上形成发光层，但不在第一衬底表面的其余部分上形成发光层，以及从衬底的第二侧去除衬底的至少一部分以暴露发光层并允许 以从基板的第二侧上的突起或突起发出光。 这些突起可以是细长的金字塔。

公开(公告)号：US08674383B2

公开(公告)日：2014-03-18

申请号：US12691269

申请日：2010-01-21

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L33/20

CPC classification number: H01L33/24 ,  H01L33/0079 ,  H01L33/38 ,  H01L33/54 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A light emitting device includes a conductive substrate having a first substrate surface and comprising a conductive material, a protrusion formed on the conductive substrate, wherein the protrusion is defined in part by a first protrusion surface that is not parallel to the first substrate surface, and light emission layers disposed over the first protrusion surface. The light emission layers can emit light when an electric field is applied across the light emission layers.

Abstract translation: 发光器件包括具有第一衬底表面并且包括导电材料的导电衬底，形成在导电衬底上的突起，其中突起部分地由不与第一衬底表面平行的第一突出表面限定，以及 发光层设置在第一突起表面上。 当跨越发光层施加电场时，发光层可以发光。

公开(公告)号：US08507297B2

公开(公告)日：2013-08-13

申请号：US12856981

申请日：2010-08-16

Applicant: Shaoher X. Pan ,  Vlad Novotny

Inventor： Shaoher X. Pan ,  Vlad Novotny

IPC: H01L21/66

CPC classification number: G02B26/101 ,  G02B26/0833

Abstract: A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.

Abstract translation: 包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。 晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。 这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。 通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。

公开(公告)号：US08283676B2

公开(公告)日：2012-10-09

申请号：US12782080

申请日：2010-05-18

Applicant: Shaoher X. Pan ,  Jay Chen

Inventor： Shaoher X. Pan ,  Jay Chen

IPC: H01L27/15

CPC classification number: H01L33/24 ,  H01L33/0079 ,  H01L33/32 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for fabricating a light emitting device includes forming a trench in a first surface on a first side of a substrate. The trench comprises a first sloped surface not parallel to the first surface, wherein the substrate has a second side opposite to the first side of the substrate. The method also includes forming light emission layers over the first trench surface and the first surface, wherein the light emission layer is configured to emit light and removing at least a portion of the substrate from the second side of the substrate to form a protrusion on the second side of the substrate to allow the light emission layer to emit light out of the protrusion on the second side of the substrate.

Abstract translation: 一种制造发光器件的方法包括在衬底的第一侧上的第一表面中形成沟槽。 所述沟槽包括不平行于所述第一表面的第一倾斜表面，其中所述基底具有与所述基底的第一侧相对的第二侧。 该方法还包括在第一沟槽表面和第一表面上形成发光层，其中发光层被配置为发射光，并从衬底的第二侧去除衬底的至少一部分以在衬底的第二侧上形成突起 基板的第二面，以允许发光层从基板的第二面上的突出部发出光。

公开(公告)号：US20120205617A1

公开(公告)日：2012-08-16

申请号：US13155857

申请日：2011-06-08

Applicant: Shaoher X. Pan ,  Jay Chen ,  Justin Payne ,  Michael Heuken

Inventor： Shaoher X. Pan ,  Jay Chen ,  Justin Payne ,  Michael Heuken

IPC: H01L33/04

CPC classification number: H01L33/32 ,  H01L33/02 ,  H01L33/16

Abstract: A light emitting device includes a silicon substrate having a (100) upper surface. The (100) upper surface has a recess, the recess being defined in part by (111) surfaces of the silicon substrate. The light emitting device includes a GaN crystal structure over one of the (111) surfaces which has a non-polar plane and a first surface along the non-polar plane. Light emission layers over the first surface have at least one quantum well comprising GaN.

Abstract translation: 发光器件包括具有（100）上表面的硅衬底。 （100）上表面具有凹部，凹部由硅衬底的（111）表面部分地限定。 发光器件包括在（111）表面之一上具有非极性平面和沿非极性平面的第一表面的GaN晶体结构。 第一表面上的发光层具有至少一个包含GaN的量子阱。

公开(公告)号：US20120043525A1

公开(公告)日：2012-02-23

申请号：US13286108

申请日：2011-10-31

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L33/04

CPC classification number: H01L33/24 ,  H01L33/10 ,  H01L33/20 ,  H01L33/32

Abstract: A light emitting device includes a substrate having a first surface and a second surface not parallel to the first surface, and a light emission layer disposed over the second surface to emit light. The light emission layer has a light emission surface which is not parallel to the first surface.

Abstract translation: 发光器件包括具有第一表面和不平行于第一表面的第二表面的衬底，以及设置在第二表面上以发光的发光层。 发光层具有不与第一面平行的发光面。

公开(公告)号：US20110114917A1

公开(公告)日：2011-05-19

申请号：US13054396

申请日：2008-07-21

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L33/04 ,  H01L33/46

CPC classification number: H01L33/20 ,  H01L27/156 ,  H01L33/24

Abstract: A light emitting device includes a substrate having a first surface and a second surface not parallel to the first surface, and a light emission layer disposed over the second surface to emit light. The light emission layer has a light emission surface which is not parallel to the first surface.

Abstract translation: 发光器件包括具有第一表面和不平行于第一表面的第二表面的衬底，以及设置在第二表面上以发光的发光层。 发光层具有不与第一面平行的发光面。

公开(公告)号：US20090252186A1

公开(公告)日：2009-10-08

申请号：US12061254

申请日：2008-04-02

Applicant: Shaoher X. Pan ,  Vlad Novotny

Inventor： Shaoher X. Pan ,  Vlad Novotny

IPC: H01S3/10

CPC classification number: H04N9/3161 ,  H01S3/2391 ,  H04N9/3129

Abstract: A display system includes a coherent light source that can emit a coherent light beam, an optical component that can direct the coherent light beam to a spatial light modulator, a transport mechanism that can move the optical component to produce a movement in the coherent light beam, and a spatial light modulator having a two-dimensional array of mirrors each configured to selectively reflect the coherent light beam either toward a screen surface or away from the screen surface to form a display pixel on the screen surface. A display image is formed on the display screen by display pixels produced by the mirrors that reflect the coherent light beam toward the screen surface.

Abstract translation: 显示系统包括可发射相干光束的相干光源，可将相干光束引导到空间光调制器的光学部件，可移动光学部件以产生相干光束中的运动的传输机构 以及具有二维阵列阵列的空间光调制器，其各自被配置为选择性地将相干光束朝向屏幕表面或远离屏幕表面反射以在屏幕表面上形成显示像素。 显示图像通过由反射相干光束朝向屏幕表面的反射镜产生的显示像素在显示屏上形成。

公开(公告)号：US20090251760A1

公开(公告)日：2009-10-08

申请号：US12061182

申请日：2008-04-02

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/004 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109

Abstract: A micro mirror device includes a hinge supported upon a substrate. The hinge has a length and a width substantially parallel to an upper surface of the substrate, and has a thickness substantially perpendicular to the upper surface of the substrate. The thickness is larger than the width. A mirror plate is tiltable around the hinge. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.

Abstract translation: 微镜装置包括支撑在基板上的铰链。 铰链具有基本上平行于衬底的上表面的长度和宽度，并且具有基本上垂直于衬底的上表面的厚度。 厚度大于宽度。 镜板可围绕铰链倾斜。 当镜板倾斜离开倾斜位置时，铰链可以在镜板上产生弹性恢复力。