公开(公告)号：US06226079B1

公开(公告)日：2001-05-01

申请号：US09161393

申请日：1998-09-29

Applicant: Kazuo Takeda ,  Makoto Ohkura ,  Seiichi Isomae ,  Kyoko Minowa ,  Muneo Maeshima ,  Shigeru Matsui ,  Yasushi Matsuda ,  Hirofumi Shimizu

Inventor： Kazuo Takeda ,  Makoto Ohkura ,  Seiichi Isomae ,  Kyoko Minowa ,  Muneo Maeshima ,  Shigeru Matsui ,  Yasushi Matsuda ,  Hirofumi Shimizu

IPC: G01N2100

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: A defect assessing apparatus and method and a semiconductor manufacturing method for revealing the relationship between the size and depth of defects is disclosed. A detecting optical system is provided for detecting the intensity of scattered light from a defect generated by the shorter wavelength one of the light rays of at least two different wavelengths emitted from irradiating optical systems and that of scattered light from the defect generated by the longer wavelength one of same. A calculating means is provided for determining, from the scattered light intensity derived from the shorter wavelength ray and that derived form the longer wavelength ray, both detected by the detecting optical system, a value corresponding to the defect size and another value corresponding to the defect depth. A display means is provided for displaying a distribution revealing the relationship between defect size and defect depth on the basis of the value corresponding to the defect size and the value corresponding to the defect depth, both determined by the calculating means.

Abstract translation: 公开了一种用于揭示缺陷的尺寸和深度之间的关系的缺陷评估装置和方法以及半导体制造方法。 提供了一种检测光学系统，用于检测由照射光学系统发射的至少两种不同波长的较短波长的一个光线产生的缺陷的散射光的强度，以及来自由较长波长产生的缺陷的散射光 一个是相同的 提供了一种计算装置，用于根据由检测光学系统检测的来自较短波长的衍射的散射光强度和由较长波长的光导出的值，确定对应于缺陷尺寸的值和对应于缺陷的另一个值 深度。 提供显示装置，用于根据由计算装置确定的缺陷尺寸和对应于缺陷深度的值，显示出显示缺陷尺寸和缺陷深度之间的关系的分布。

公开(公告)号：US5179733A

公开(公告)日：1993-01-12

申请号：US836171

申请日：1992-02-12

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: H01Q1/27

CPC classification number: H01Q1/273

Abstract: A wristband with an internal antenna for a wristwatch-receiver has first and second band portions each adapted for coupling at first ends thereof to a receiver housing and an adjustable clasp for coupling opposed, second ends thereof to one another to encircle a wearer's wrist. The band portions include conductive metal strips within an insulative covering and mechanically and electrically coupled at one end to the receiver housing. The clasp is adjustably positioned on one band portion and includes a clampable/releasable conductive protrusion for electrically contacting segments of the metal strip exposed through openings in a portion of the insulative covering to form a continuous conductive loop within the wristband. The inner side of the band has a grid pattern of transverse and longitudinal ridges.

Abstract translation: 具有用于手表 - 接收器的内部天线的腕带具有第一和第二带部分，每个带部分适于在其第一端处耦合到接收器壳体和可调节的钩扣，用于将相对的第二端彼此连接以包围佩戴者的腕部。 带部分包括在绝缘覆盖物内的导电金属条，并在一端机械地和电耦合到接收器壳体。 该扣环可调节地定位在一个带部分上并且包括可夹紧/可释放的导电突起，用于电接触绝缘覆盖物的一部分中的开口露出的金属带的段，以在腕带内形成连续的导电环。 带的内侧具有横向和纵向脊的网格图案。

公开(公告)号：US4939463A

公开(公告)日：1990-07-03

申请号：US218694

申请日：1988-07-07

Applicant: Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno

Inventor： Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno

IPC: A61B10/00 ,  A61B5/055 ,  G01R33/44 ,  G01R33/48 ,  G01R33/56 ,  G01R33/561

CPC classification number: G01R33/56554 ,  G01R33/56

Abstract: A method wherein the requirement for the amplitude of the oscillating gradient magnetic field is relaxed by reconstructing an image while using simultaneously echoes S.sub.p (k.sub.x, y) produced in the case where the positive oscillating gradient magnetic field is applied to the object to be tested and echoes S.sub.N (k.sub.x, y) produced in the case where the negative is applied thereto, i.e. by using data points on segments of a trajectory of data points ascending from left to right in the spatial frequency domain and those on segments of a trajectory of data points ascending from right to left. That is, the image M(x, y) is obtained by Fourier-transforming at first the echoes S.sub.p (k.sub.x, k.sub.y) and S.sub.N (k.sub.x, k.sub.y) with respect to k.sub.y, multiplying complex numbers a.sub.1 and a.sub.2 to g.sub.p (k.sub.x, y) and g.sub.N (k.sub.x, y) obtained by this transformation; adding the results thus obtained, i.e. forming g(k.sub.x, y)=a.sub.1 g.sub.p (k.sub.x, y)+a.sub.2 g.sub.N (k.sub.x, y); and finally Fourier-transforming this g(k.sub.x, y) with respect to k.sub.x.

公开(公告)号：US4797616A

公开(公告)日：1989-01-10

申请号：US151901

申请日：1988-02-03

Applicant: Shigeru Matsui ,  Takashi Onodera ,  Kensuke Sekihara ,  Hidemi Shiono ,  Hideki Kohno

Inventor： Shigeru Matsui ,  Takashi Onodera ,  Kensuke Sekihara ,  Hidemi Shiono ,  Hideki Kohno

IPC: G01R33/32 ,  A61B5/055 ,  A61B10/00 ,  G01R33/44 ,  G01R33/48 ,  G01R33/485 ,  G01R33/20

CPC classification number: G01R33/485

Abstract: An NMR spectroscopic imaging method of obtaining separate spin distribution images for respective spectral components of the spectrum of an NMR signal caused by the chemical shift of nuclides of interest in an object includes providing for a transversal magnetization signal of the object placed in a static magnetic field. A position of the signal in a phase domain is translated in a K-space from the origin thereof. Further, the signal is sampled while rotating a position of the signal in the K-space plural times on a certain circle in the K-space by applying a rotating field gradient, thereby to obtain a group of signal data. Signal data trains each of which is composed of signal data present at the same position on the K-space in the signal data group obtained by the sampling during the plural signal rotations, is subjected to Fourier transformations, respectively, thereby effecting a spectral analysis of the NMR signal.

Abstract translation: 由对象物质的化学位移引起的核磁共振信号频谱的各频谱分量的分离自旋分布图像的NMR分光成像方法包括提供放置在静磁场中的物体的横向磁化信号 。 信号在相位域中的位置从其原点在K空间中平移。 此外，在通过施加旋转场梯度在K空间中的某个圆上多次旋转K空间中的信号的位置的同时对信号进行采样，从而获得一组信号数据。 由多个信号旋转中的采样获得的信号数据组中的与K空间上的相同位置处的信号数据组成的信号数据串分别进行傅里叶变换，从而进行频谱分析 NMR信号。

公开(公告)号：US4052581A

公开(公告)日：1977-10-04

申请号：US626557

申请日：1975-10-28

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: H01H1/26 ,  H01H1/28 ,  H01H50/56

CPC classification number: H01H50/56

Abstract: A switch is comprised of at least one leaf-like springy fixed contact, a movable contact, a supporting member for supporting the fixed contact and a positioning member for positioning the free end of the fixed contact. The leaf-like fixed contact is fixed by the supporting member at a position close to one end of the fixed contact, and is biased by the positioning member at a position close to the other end. Thus, the free end of the leaf-like springy fixed contact is placed at a position by its function of urging the positioning member.

公开(公告)号：US09390934B2

公开(公告)日：2016-07-12

申请号：US14350314

申请日：2012-09-13

Applicant: Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

Inventor： Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

IPC: G03F1/26 ,  H01L21/3065 ,  G03F1/30 ,  H01L21/308 ,  G03F1/00

CPC classification number: H01L21/3065 ,  G03F1/0046 ,  G03F1/26 ,  G03F1/28 ,  G03F1/30 ,  H01L21/3085

Abstract: A technique of forming an asymmetric pattern by using a phase shift mask, and further, techniques of manufacturing a diffraction grating and a semiconductor device, capable of improving accuracy of a product and capable of shortening manufacturing time. In a method of manufacturing a diffraction grating by using a phase shift mask (in which a light shield part and a light transmission part are periodically arranged), light emitted from an illumination light source is transmitted through the phase shift mask, and a photoresist on a surface of a Si wafer is exposed by providing interference between zero diffraction order light and positive first diffraction order light which are generated by the transmission through this phase shift mask onto the surface of the Si wafer, and a diffraction grating which has a blazed cross-sectional shape is formed on the Si wafer.

Abstract translation: 通过使用相移掩模形成非对称图案的技术，以及制造衍射光栅和半导体器件的技术，能够提高产品的精度并能缩短制造时间。 在通过使用相移掩模（其中周期性地布置有遮光部分和透光部分）制造衍射光栅的方法中，从照明光源发射的光透射穿过相移掩模，并且光致抗蚀剂在 通过提供由通过该相移掩模的透射产生的零衍射级光和正的第一衍射级光之间的干涉而暴露于Si晶片的表面到Si晶片的表面上的衍射光栅和具有闪耀十字 在Si晶片上形成截面形状。

公开(公告)号：US08934092B2

公开(公告)日：2015-01-13

申请号：US13838460

申请日：2013-03-15

Applicant: Yoshimasa Oshima ,  Toshiyuki Nakao ,  Shigeru Matsui

Inventor： Yoshimasa Oshima ,  Toshiyuki Nakao ,  Shigeru Matsui

IPC: G01N21/00 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N2021/4716

Abstract: A surface defect inspection apparatus and method for irradiating a beam multiple times to a same region on a surface of an inspection sample, detecting each scattered light from the same region by detection optical systems individually to produce plural signals, and wherein irradiating the beam includes performing a line illumination of the beam on a line illumination region of the sample surface. The line illumination region is moved in a longitudinal direction at a pitch shorter than a length of the line illumination region in the longitudinal direction.

Abstract translation: 一种表面缺陷检查装置和方法，用于将多个光束照射到检查样品的表面上的相同区域，分别通过检测光学系统检测来自相同区域的每个散射光以产生多个信号，并且其中照射光束包括执行 在样品表面的线照射区域上的光束的线照明。 线照明区域沿纵向方向以比线照明区域的长度方向的长度短的间距移动。

公开(公告)号：US08160352B2

公开(公告)日：2012-04-17

申请号：US12964833

申请日：2010-12-10

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G06K9/00

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/9505

Abstract: A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio.

Abstract translation: 能够获取各散射方位角的散射光强度分布信息，高灵敏度地检测异物和缺陷的表面检查装置。 用于冷凝的凹面镜和用于成像的另一凹面镜用于处理宽的立方角。 由于使用用于冷凝和图像形成的反射镜，所以不需要用于夹持透镜周边的支撑件，并且有效开口面积不会降低。 设置多个方位检测光学系统，并且可以通过掩埋整个周边来检测所有方位角处的反射光，而不需要特定的透镜抛光。 光信号统一单元将来自与用于提高S / N比的系统中预先指定的散射方位相对应的特定系统的数字数据相加。

公开(公告)号：US07973922B2

公开(公告)日：2011-07-05

申请号：US12556144

申请日：2009-09-09

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N2021/8861

Abstract: An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in the outer peripheral part of the object to be inspected than in the inner peripheral part thereof while uniformly maintains a temperature rise caused by the irradiation of the light beam, over the outer surface of the object to be inspected, in order to prevent the effective entire signal value of a scattered light signal from lowering, without lowering the linear speed of a movable stage for the object to be inspected in the outer peripheral part of the object to be inspected, thereby it is possible to prevent lowering of the detectability for a foreign matter or a defect, for preventing lowering of inspection throughput.

Abstract translation: 光学检查装置将光束照射到被检查物体的外周部的照明强度比要检查对象的外周部的照明强度高于内周部的照明光斑的形状 同时在被检查物体的外表面上均匀地保持由光束照射引起的温度升高，以防止散射光信号的有效整体信号值降低，而不会降低线性速度 在待检查物体的外周部分中可检测物体的可移动台，从而可以防止异物或缺陷的可检测性的降低，以防止检查吞吐量的降低。

公开(公告)号：US07952701B2

公开(公告)日：2011-05-31

申请号：US12367673

申请日：2009-02-09

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/8806

Abstract: If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other or to improve both of them. Also, there is a problem that the detection sensitivity is lowered on an outer circumference portion than on an inner circumference portion of the article to be inspected.A plurality of measurement units comprising an illumination optics, a measurement spot, a collection optics, and a light detection optics are provided, inspection results obtained from the plurality of measurement spots are integrated, and light-amount distribution to each measurement spot is controlled according to a scan radial position.

Abstract translation: 如果测量点的照度受到限制，以防止被检查物品的热损伤，由于检测灵敏度和检测速度处于权衡关系，难以改进其中之一而不牺牲其他 或改善两者。 此外，存在检测灵敏度在外周部比被检查物品的内周部低的问题。 提供包括照明光学元件，测量点，收集光学元件和光检测光学元件的多个测量单元，从多个测量点获得的检查结果被整合，并且根据以下测量点控制对每个测量点的光量分布 到扫描径向位置。