Electrically rewritable non-volatile memory element and method of manufacturing the same
    32.
    发明授权
    Electrically rewritable non-volatile memory element and method of manufacturing the same 有权
    电可重写非易失性存储元件及其制造方法

    公开(公告)号:US07589364B2

    公开(公告)日:2009-09-15

    申请号:US11264129

    申请日:2005-11-02

    IPC分类号: H01L31/112

    摘要: A non-volatile memory element includes a first interlayer insulation layer 11 having a first through-hole 11a, a second interlayer insulation layer 12 having a second through-hole 12a formed on the first interlayer insulation layer 11, a bottom electrode 13 provided in the first through-hole 11, recording layer 15 containing phase change material provided in the second through-hole 12, a top electrode 16 provided on the second interlayer insulation layer 12, and a thin-film insulation layer 14 formed between the bottom electrode 13 and the recording layer 15. In accordance with this invention, the diameter D1 of a bottom electrode 13 buried in a first through-hole 11a is smaller than the diameter D2 of a second through-hole 12a, thereby decreasing the thermal capacity of the bottom electrode 13. Therefore, when a pore 14a is formed by dielectric breakdown in a thin-film insulation layer 14 and the vicinity is used as a heating region, the amount of heat escaping to the bottom electrode 13 is decreased, resulting in higher heating efficiency.

    摘要翻译: 非易失性存储元件包括具有第一通孔11a的第一层间绝缘层11,形成在第一层间绝缘层11上的第二通孔12a的第二层间绝缘层12, 第一通孔11,设置在第二通孔12中的包含相变材料的记录层15,设置在第二层间绝缘层12上的顶部电极16和形成在底部电极13和 记录层15.根据本发明,埋在第一通孔11a中的底部电极13的直径D1小于第二通孔12a的直径D2,从而降低底部电极的热容量 因此,当通过薄膜绝缘层14中的电介质击穿形成孔14a并且将其附近用作加热区域时,向底部电极逸出的热量 13降低,导致更高的加热效率。

    Reduction of drift in phase-change memory via thermally-managed programming
    33.
    发明授权
    Reduction of drift in phase-change memory via thermally-managed programming 有权
    通过热管理编程减少相变存储器中的漂移

    公开(公告)号:US07978508B2

    公开(公告)日:2011-07-12

    申请号:US12356236

    申请日:2009-01-20

    IPC分类号: G11C11/00

    摘要: A method of programming a phase-change material. The method includes providing a transformation pulse to the phase-change material, where the transformation pulse includes a programming waveform and a conditioning waveform. The programming waveform provides sufficient energy to alter the structural state of the phase-change material. In one embodiment, the programming waveform alters the volume fractions of crystalline and amorphous phase regions within the phase-change material. The conditioning waveform provides sufficient energy to heat the phase-change material to a temperature above the ambient temperature but below the crystallization temperature of the phase-change material. The method programs the phase-change material to a state that exhibits a reduced time variation of resistance.

    摘要翻译: 编程相变材料的方法。 该方法包括向相变材料提供变换脉冲,其中变换脉冲包括编程波形和调节波形。 编程波形提供足够的能量来改变相变材料的结构状态。 在一个实施例中,编程波形改变相变材料内的晶体和非晶相区域的体积分数。 调节波形提供足够的能量以将相变材料加热到高于环境温度但低于相变材料的结晶温度的温度。 该方法将相变材料编程为呈现减小的电阻时间变化的状态。

    Memory device and method of making same
    34.
    发明授权
    Memory device and method of making same 有权
    存储器件及其制作方法

    公开(公告)号:US07902536B2

    公开(公告)日:2011-03-08

    申请号:US11495927

    申请日:2006-07-28

    IPC分类号: H01L29/02 H01L47/00

    摘要: A radial memory device includes a phase-change material, a first electrode in electrical communication with the phase-change material, the first electrode having a substantially planar first area of electrical communication with the phase-change material. The radial memory device also includes a second electrode in electrical communication with the phase-change material, the second electrode having a second area of electrical communication with the phase-change material, the second area being laterally spacedly disposed from the first area and substantially circumscribing the first area.Further, a method of making a memory device is disclosed. The steps include depositing a first electrode, depositing a first insulator, configuring the first insulator to define a first opening. The first opening provides for a generally planar first contact of the first electrode. The method further including the steps of depositing a phase-change material, depositing a second insulator, configuring the second insulator, depositing a second electrode having a second contact laterally displaced from said first contact, and configuring said second electrode.

    摘要翻译: 径向存储器件包括相变材料,与相变材料电连通的第一电极,第一电极具有与相变材料电连通的基本平坦的第一区域。 所述径向存储装置还包括与所述相变材料电连通的第二电极,所述第二电极具有与所述相变材料电连通的第二区域,所述第二区域与所述第一区域横向间隔设置并且基本上限定 第一个区域。 此外,公开了一种制造存储器件的方法。 这些步骤包括沉积第一电极,沉积第一绝缘体,构成第一绝缘体以限定第一开口。 第一开口提供第一电极的大致平面的第一接触。 该方法还包括以下步骤:沉积相变材料,沉积第二绝缘体,构成第二绝缘体,沉积具有从所述第一触点横向移位的第二触点的第二电极,以及配置所述第二电极。

    Electrically rewritable non-volatile memory element and method of manufacturing the same
    35.
    发明授权
    Electrically rewritable non-volatile memory element and method of manufacturing the same 有权
    电可重写非易失性存储元件及其制造方法

    公开(公告)号:US07692272B2

    公开(公告)日:2010-04-06

    申请号:US11334504

    申请日:2006-01-19

    IPC分类号: H01L31/0264

    摘要: A non-volatile memory element comprises a bottom electrode 12; a top electrode 15; and a recording layer 13 containing phase change material and a block layer 14 that can block phase change of the recording layer 13, provided between the bottom electrode 12 and the top electrode 15. The block layer 14 is constituted of material having an electrical resistance that is higher than that of material constituting the recording layer 13. The block layer 14 suppresses the radiation of heat towards the top electrode 15 and greatly limits the phase change region when a write current is applied. The result is a high heating efficiency. The top electrode 15 itself can be used to constitute a bit line, or a separate bit line can be provided.

    摘要翻译: 非易失性存储元件包括底部电极12; 顶部电极15; 以及包含相变材料的记录层13和可以阻挡设置在底部电极12和顶部电极15之间的记录层13的相变的阻挡层14.阻挡层14由具有电阻的材料构成, 比构成记录层13的材料高。阻挡层14抑制向顶部电极15的热辐射,并且在施加写入电流时极大地限制相变区域。 结果是高的加热效率。 顶部电极15本身可以用于构成位线,或者可以提供单独的位线。

    Memory Device
    36.
    发明申请
    Memory Device 有权
    存储设备

    公开(公告)号:US20090225588A1

    公开(公告)日:2009-09-10

    申请号:US12044407

    申请日:2008-03-07

    IPC分类号: G11C11/00 H01L21/06

    摘要: A phase-change memory device includes a first insulator having a hole therethrough, a first electrode that conforms at least partially to the hole, a phase-change material in electrical communication with the first electrode, and a second electrode in electrical communication with the phase-change material. When current is passed from the first electrode to the second electrode through the phase-change material, at least one of the first and second electrodes remains unreactive with the phase change material.

    摘要翻译: 相变存储器件包括具有穿过其中的孔的第一绝缘体,至少部分地匹配于该孔的第一电极,与第一电极电连通的相变材料以及与该相位电连通的第二电极 交换材料 当电流通过相变材料从第一电极通过第二电极时,第一和第二电极中的至少一个保持与相变材料不反应。

    Phase change device with offset contact
    37.
    发明申请
    Phase change device with offset contact 有权
    相移装置,带偏置接点

    公开(公告)号:US20080224120A1

    公开(公告)日:2008-09-18

    申请号:US12152330

    申请日:2008-05-14

    IPC分类号: H01L45/00

    摘要: A programmable resistance memory combines multiple cells into a block that includes one or more shared electrodes. The shared electrode configuration provides additional thermal isolation for the active region of each memory cell, thereby reducing the current required to program each memory cell.

    摘要翻译: 可编程电阻存储器将多个单元组合成包括一个或多个共享电极的块。 共享电极配置为每个存储单元的有源区域提供额外的热隔离,从而减少编程每个存储单元所需的电流。

    Multi-layered chalcogenide and related devices having enhanced operational characteristics
    38.
    发明申请
    Multi-layered chalcogenide and related devices having enhanced operational characteristics 审中-公开
    具有增强的操作特性的多层硫族化物和相关装置

    公开(公告)号:US20080042119A1

    公开(公告)日:2008-02-21

    申请号:US11821246

    申请日:2007-06-22

    IPC分类号: H01L47/00

    摘要: A multi-layer chalcogenide, memory or switching device. The device includes an active region disposed between a first terminal and a second terminal. The active region includes a first layer and a second layer, where one of the layers is a heterogeneous layer that includes an operational component and a promoter component. The other layer may be a homogeneous or heterogeneous layer. In exemplary embodiments, the operational component is a chalcogenide or phase change material and the promoter component is an insulating or dielectric material. Inclusion of the promoter component provides beneficial performance characteristics such as a reduction in reset current or minimization of formation requirements.

    摘要翻译: 多层硫族化物,记忆体或开关装置。 该装置包括设置在第一端子和第二端子之间的有源区域。 有源区包括第一层和第二层,其中一层是包含可操作组分和促进剂组分的异质层。 另一层可以是均质或非均质层。 在示例性实施方案中,操作组分是硫族化物或相变材料,并且促进剂组分是绝缘或介电材料。 包含启动子组分提供了有益的性能特征,例如复位电流的降低或形成要求的最小化。

    MEMORY DEVICE AND METHOD OF MAKING SAME
    39.
    发明申请
    MEMORY DEVICE AND METHOD OF MAKING SAME 审中-公开
    存储器件及其制造方法

    公开(公告)号:US20080023685A1

    公开(公告)日:2008-01-31

    申请号:US11743459

    申请日:2007-05-02

    IPC分类号: H01L47/00

    摘要: A memory device includes a phase-change material and a first electrode in electrical communication with the phase-change material. Also included is a second electrode in electrical communication with the phase-change material and a dielectric layer. The dielectric layer is disposed between the first electrode and the second electrode. The dielectric layer has an opening therethrough. The phase-change material is disposed on both sides of the dielectric layer and within the opening. Electrical communication within the device is by means of virtual contacts.

    摘要翻译: 存储器件包括相变材料和与相变材料电连通的第一电极。 还包括与相变材料和介电层电连通的第二电极。 介电层设置在第一电极和第二电极之间。 电介质层具有通过其的开口。 相变材料设置在电介质层的两侧和开口内。 设备内的电气通信是通过虚拟接触。

    Electrically rewritable non-volatile memory element and method of manufacturing the same
    40.
    发明申请
    Electrically rewritable non-volatile memory element and method of manufacturing the same 有权
    电可重写非易失性存储元件及其制造方法

    公开(公告)号:US20070096074A1

    公开(公告)日:2007-05-03

    申请号:US11264129

    申请日:2005-11-02

    IPC分类号: H01L47/00

    摘要: A non-volatile memory element includes a first interlayer insulation layer 11 having a first through-hole 11a, a second interlayer insulation layer 12 having a second through-hole 12a formed on the first interlayer insulation layer 11, a bottom electrode 13 provided in the first through-hole 11, recording layer 15 containing phase change material provided in the second through-hole 12, a top electrode 16 provided on the second interlayer insulation layer 12, and a thin-film insulation layer 14 formed between the bottom electrode 13 and the recording layer 15. In accordance with this invention, the diameter D1 of a bottom electrode 13 buried in a first through-hole 11a is smaller than the diameter D2 of a second through-hole 12a, thereby decreasing the thermal capacity of the bottom electrode 13. Therefore, when a pore 14a is formed by dielectric breakdown in a thin-film insulation layer 14 and the vicinity is used as a heating region, the amount of heat escaping to the bottom electrode 13 is decreased, resulting in higher heating efficiency.

    摘要翻译: 非易失性存储元件包括具有第一通孔11a的第一层间绝缘层11,具有形成在第一层间绝缘层11上的第二通孔12a的第二层间绝缘层12, 在第一通孔11中,设置在第二通孔12中的包含相变材料的记录层15,设置在第二层间绝缘层12上的顶部电极16和形成在第二通孔12的底部电极之间的薄膜绝缘层14 13和记录层15。 根据本发明,埋在第一通孔11a中的底部电极13的直径D 1小于第二通孔12a的直径D 2,从而降低底部电极13的热容量 。 因此,当通过薄膜绝缘层14中的电介质击穿形成孔14a并且将其附近用作加热区域时,逸出到底部电极13的热量减少,导致更高的加热效率。