公开(公告)号：US08714188B2

公开(公告)日：2014-05-06

申请号：US13239715

申请日：2011-09-22

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： G05D7/06

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20130084059A1

公开(公告)日：2013-04-04

申请号：US13563983

申请日：2012-08-01

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

IPC分类号： C23C14/00 ,  F22B1/28

CPC分类号： C23C16/4483 ,  F22B1/284

摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.

摘要翻译： 能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括 网状，蜂窝状，网状或管状隔壁。

公开(公告)号：US08047225B2

公开(公告)日：2011-11-01

申请号：US12422136

申请日：2009-04-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： F16K31/42

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20100139775A1

公开(公告)日：2010-06-10

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F15D1/00

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1−P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.

摘要翻译： 一种压力式流量控制装置，通过精确地控制在大流量范围内的流体的流动，能够减小尺寸和安装成本。 具体地说，在孔（8）中流动的流体的流量被计算为Qc = KP1（K是比例因子）或Qc = KP2m（P1-P2）n（K是比例因子，m和n是常数） 通过使用孔口上游侧的压力P1和孔口下游侧的压力P2。 在流量控制装置的控制阀的下游侧和流体供给管之间的流体通道由彼此平行定位的至少两个或更多个流体通道形成。 具有不同流体流动特性的孔口插入彼此平行定位的流体通道中。 为了控制小流量区域中的流体，允许小流量区域中的流体流到一个孔口。 为了控制大流量区域中的流动，通过切换流体通道允许大流量区域中的流体流向另一个孔口。

公开(公告)号：US08418714B2

公开(公告)日：2013-04-16

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K31/12 ,  F16K31/36

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

摘要翻译： 提供一种压力式流量控制装置，其中通过孔口的流体流量计算为Qc = KP1（其中K是比例常数）或Qc = KP2m（P1-P2）n（其中K是比例常数 ，m和n常数）通过使用孔口上游侧压力P1和/或孔口下游侧压力P2。 控制阀的下游侧和压力式流量控制装置的流体供给管之间的流体通道平行地包括至少2个流体通道，并且为每个这些流体通道设置具有不同流量特性的孔，其中 小流量区域中的流体流向一个孔，用于在小流量区域中的流体的流量控制，而大流量区域中的流体流向另一个孔口，用于大流量区域中的流体的流量控制。

公开(公告)号：US20080257415A1

公开(公告)日：2008-10-23

申请号：US10597343

申请日：2005-01-13

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： F17D1/16 ,  F16K17/00 ,  B01F15/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US08724974B2

公开(公告)日：2014-05-13

申请号：US13563983

申请日：2012-08-01

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

IPC分类号： B01D7/00

CPC分类号： C23C16/4483 ,  F22B1/284

摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.

摘要翻译： 能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括 网状，蜂窝状，网状或管状隔壁。

公开(公告)号：US07849869B2

公开(公告)日：2010-12-14

申请号：US10597343

申请日：2005-01-13

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： F17D5/06

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20090171507A1

公开(公告)日：2009-07-02

申请号：US11913271

申请日：2006-05-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： G05D7/06 ,  F16L55/027 ,  F16K31/12

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

摘要翻译： 节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体 流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。

公开(公告)号：US20070193628A1

公开(公告)日：2007-08-23

申请号：US10566495

申请日：2004-07-28

申请人： Hiroshi Kannan ,  Tomio Uno ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Atsushi Matsumoto ,  Nobukazu Ikeda

发明人： Hiroshi Kannan ,  Tomio Uno ,  Ryousuke Dohi ,  Kouji Nishino ,  Osamu Nakamura ,  Atsushi Matsumoto ,  Nobukazu Ikeda

IPC分类号： G05D7/06

CPC分类号： G05D7/0652 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

摘要： The present invention makes it possible to prevent substantial reduction of flow rate control accuracy in a small flow quantity range, to achieve an accurate flow rate control over the entire range of a flow rate control, and also to allow control of a wide pressure range of a chamber with an accurate flow rate control. Namely, with a gas supply facility having a plurality of pressure type flow controllers connected in parallel and a controller to control operation of pressure type flow controllers to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one pressure type flow controller is made to be a controller to control a gas flow rate range up to 10% of the maximum flow rate to be supplied to a chamber, while the remaining pressure type flow controllers are made to be ones to control the rest of the gas flow rate range.

摘要翻译： 本发明使得可以防止在小流量范围内的流量控制精度的显着降低，从而在流量控制的整个范围内实现精确的流量控制，并且还可以控制宽的压力范围 具有精确流量控制的室。 也就是说，具有并联连接的多个压力式流量控制器的气体供给装置和控制器，用于控制压力式流量控制器的操作，以在控制其流量的同时将由真空泵排出的所需气体供应到腔室，一个压力 型流量控制器被制成控制器，以控制最高流量的10％的气体流量范围供给到室，而剩余的压力式流量控制器被制成控制其余的 气体流量范围。