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公开(公告)号:US20230395431A1
公开(公告)日:2023-12-07
申请号:US17830904
申请日:2022-06-02
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Cheng-Chieh Li , Chih-Wei Wu , Ying-Ching Shih
IPC: H01L21/822 , H01L21/48 , H01L21/56 , H01L23/31 , H01L23/498
CPC classification number: H01L21/822 , H01L21/486 , H01L21/4857 , H01L24/16 , H01L23/3121 , H01L23/49822 , H01L23/49838 , H01L21/565
Abstract: A method of forming a semiconductor structure includes: forming a first redistribution structure on a first side of a wafer, the first redistribution structure including dielectric layers and conductive features in the dielectric layers; forming grooves in the first redistribution structure, the grooves exposing sidewalls of the dielectric layers and the wafer, the grooves defining a plurality of die attaching regions; bonding a plurality of dies to the first redistribution structure in the plurality of die attaching regions; forming a first molding material on the first side of the wafer around the plurality of dies, the first molding material filling the grooves; forming a passivation layer on a second side of the wafer opposing the first side; and dicing along the grooves from the second side of the wafer to form a plurality of individual semiconductor packages, each of the plurality of individual semiconductor packages including a respective die.
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公开(公告)号:US20220359329A1
公开(公告)日:2022-11-10
申请号:US17872488
申请日:2022-07-25
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chen-Hua Yu , Chih-Wei Wu , Ying-Ching Shih , Szu-Wei Lu
IPC: H01L23/31 , H01L25/065 , H01L21/56 , H01L25/00 , H01L23/18
Abstract: An integrated circuit package and a method of forming the same are provided. A method includes stacking a plurality of integrated circuit dies on a wafer to form a die stack. A bonding process is performed on the die stack. The bonding process mechanically and electrically connects adjacent integrated circuit dies of the die stack to each other. A dam structure is formed over the wafer. The dam structure surrounds the die stack. A first encapsulant is formed over the wafer and between the die stack and the dam structure. The first encapsulant fills gaps between the adjacent integrated circuit dies of the die stack. A second encapsulant is formed over the wafer. The second encapsulant surrounds the die stack, the first encapsulant and the dam structure.
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公开(公告)号:US11410897B2
公开(公告)日:2022-08-09
申请号:US16454099
申请日:2019-06-27
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chih-Wei Wu , Szu-Wei Lu , Ying-Ching Shih
IPC: H01L23/31 , H01L23/49 , H01L23/28 , H01L23/00 , H01L23/538 , H01L23/498
Abstract: A semiconductor structure includes a circuit carrier, a dielectric layer, a conductive terminal, a semiconductor die, and an insulating encapsulation. The circuit carrier includes a first surface and a second surface opposite to each other, a sidewall connected to the first and second surfaces, and an edge between the second surface and the sidewall. The dielectric layer is disposed on the second surface of the circuit carrier and extends to at least cover the edge of the circuit carrier. The conductive terminal is disposed on and partially embedded in the dielectric layer to be connected to the circuit carrier. The semiconductor die encapsulated by the insulating encapsulation is disposed on the first surface of the circuit carrier and electrically coupled to the conductive terminal through the circuit carrier.
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公开(公告)号:US20210366814A1
公开(公告)日:2021-11-25
申请号:US16881211
申请日:2020-05-22
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Shang-Yun Hou , Hsien-Pin Hu , Sao-Ling Chiu , Wen-Hsin Wei , Ping-Kang Huang , Chih-Ta Shen , Szu-Wei Lu , Ying-Ching Shih , Wen-Chih Chiou , Chi-Hsi Wu , Chen-Hua Yu
IPC: H01L23/498 , H01L23/00 , H01L23/31 , H01L21/56 , H01L21/48
Abstract: A semiconductor structure includes a first interposer; a second interposer laterally adjacent to the first interposer, where the second interposer is spaced apart from the first interposer; and a first die attached to a first side of the first interposer and attached to a first side of the second interposer, where the first side of the first interposer and the first side of the second interposer face the first die.
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公开(公告)号:US20210327778A1
公开(公告)日:2021-10-21
申请号:US17362185
申请日:2021-06-29
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chen-Hua Yu , Wen-Hsin Wei , Chi-Hsi Wu , Shang-Yun Hou , Jing-Cheng Lin , Hsien-Pin Hu , Ying-Ching Shih , Szu-Wei Lu
IPC: H01L23/31 , H01L23/16 , H01L21/56 , H01L23/00 , H01L23/14 , H01L21/48 , H01L25/03 , H01L25/065 , H01L23/48 , H01L23/498
Abstract: An embodiment is a method including: attaching a first die to a first side of a first component using first electrical connectors, attaching a first side of a second die to first side of the first component using second electrical connectors, attaching a dummy die to the first side of the first component in a scribe line region of the first component, adhering a cover structure to a second side of the second die, and singulating the first component and the dummy die to form a package structure.
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公开(公告)号:US11139260B2
公开(公告)日:2021-10-05
申请号:US16572611
申请日:2019-09-17
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jung-Hua Chang , Szu-Wei Lu , Ying-Ching Shih
IPC: H01L23/34 , H01L23/48 , H01L23/28 , H01L21/00 , H01L21/44 , H01L23/00 , H01L23/31 , H01L21/56 , H01L25/065
Abstract: A semiconductor structure including an integrated circuit die and conductive bumps is provided. The integrated circuit die includes bump pads. The conductive bumps are disposed on the bump pads. Each of the conductive bumps includes a first pillar portion disposed on one of the bump pads and a second pillar portion disposed on the first pillar portion. The second pillar portion is electrically connected to one of the bump pads through the first pillar portion, wherein a first width of the first pillar portion is greater than a second width of the second pillar portion. A package structure including the above-mentioned semiconductor structure is also provided.
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公开(公告)号:US20210265306A1
公开(公告)日:2021-08-26
申请号:US16801171
申请日:2020-02-26
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chih-Wei Wu , Szu-Wei Lu , Ying-Ching Shih
IPC: H01L25/065 , H01L23/48 , H01L23/31 , H01L23/00 , H01L23/538 , H01L21/56 , H01L25/00 , H01L21/48
Abstract: A package includes at least one memory component and an insulating encapsulation. The at least one memory component includes a stacked memory structure and a plurality of conductive posts. The stacked memory structure is laterally encapsulated in a molding compound. The conductive posts are disposed on an upper surface of the stacked memory structure. The upper surface of the stacked memory structure is exposed from the molding compound. The insulating encapsulation encapsulates the at least one memory component. The top surfaces of the conductive posts are exposed form the insulating encapsulation. A material of the molding compound is different a material of the insulating encapsulation.
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公开(公告)号:US20210210400A1
公开(公告)日:2021-07-08
申请号:US17208694
申请日:2021-03-22
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yu-Wei Chen , Li-Chung Kuo , Ying-Ching Shih , Szu-Wei Lu , Jing-Cheng Lin , Long Hua Lee , Kuan-Yu Huang
IPC: H01L23/31 , H01L23/498 , H01L21/56 , H01L23/00 , H01L25/065
Abstract: A method for forming an underfill structure and semiconductor packages including the underfill structure are disclosed. In an embodiment, the semiconductor package may include a package including an integrated circuit die; an interposer bonded to the integrated circuit die by a plurality of die connectors; and an encapsulant surrounding the integrated circuit die. The semiconductor package may further include a package substrate bonded to the interposer by a plurality of conductive connectors; a first underfill between the package and the package substrate, the first underfill having a first coefficient of thermal expansion (CTE); and a second underfill surrounding the first underfill, the second underfill having a second CTE less than the first CTE.
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公开(公告)号:US20200350283A1
公开(公告)日:2020-11-05
申请号:US16934041
申请日:2020-07-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ying-Ching Shih , Chih-Wei Wu , Szu-Wei Lu
IPC: H01L25/065 , H01L23/31 , H01L23/538 , H01L23/00 , H01L23/498 , H01L25/00 , H01L21/56
Abstract: A manufacturing method of a semiconductor package includes the following steps. A chip is provided. The chip has an active surface and a rear surface opposite to the active surface. The chip includes conductive pads disposed at the active surface. A first solder-containing alloy layer is formed on the rear surface of the chip. A second solder-containing alloy layer is formed on a surface and at a location where the chip is to be attached. The chip is mounted to the surface and the first solder-containing alloy layer is aligned with the second solder-containing alloy layer. A reflow step is performed on the first and second solder-containing alloy layers to form a joint alloy layer between the chip and the surface.
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公开(公告)号:US20240222242A1
公开(公告)日:2024-07-04
申请号:US18609836
申请日:2024-03-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Shang-Yun Hou , Hsien-Pin Hu , Sao-Ling Chiu , Wen-Hsin Wei , Ping-Kang Huang , Chih-Ta Shen , Szu-Wei Lu , Ying-Ching Shih , Wen-Chih Chiou , Chi-Hsi Wu , Chen-Hua Yu
IPC: H01L23/498 , H01L21/48 , H01L21/56 , H01L23/00 , H01L23/31 , H01L23/538
CPC classification number: H01L23/49816 , H01L21/4853 , H01L21/56 , H01L23/3121 , H01L23/49861 , H01L24/13 , H01L23/5385 , H01L2224/023 , H01L2225/107
Abstract: A semiconductor structure includes a first interposer; a second interposer laterally adjacent to the first interposer, where the second interposer is spaced apart from the first interposer; and a first die attached to a first side of the first interposer and attached to a first side of the second interposer, where the first side of the first interposer and the first side of the second interposer face the first die.
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