摘要:
A novel MOS field effect transistor which operates at high speed and with low power consumption has impurity doped source and drain regions deposited at 850.degree. C. or less by molecular layer epitaxial growth method. The molecular layer epitaxial growth is concurrently carried out with the control of impurity doping concentration so that the layers epitaxially deposited has a lightly doped region and a heavily doped region. Since the thickness of the growth layer can be controlled with a degree of accuracy on the order of an atom layer and thermal diffusions can remarkably be reduced by the low deposition temperature, an overlap of a gate over each of the source and drain regions can be reduced to 500 .ANG. or less.
摘要:
A method for growing a single crystal thin film of an element semiconductor which comprises repeating the successive operations of feeding a single kind of gas containing the element semiconductor as a component element onto a substrate heated in a growth chamber and then exhausting the gas in the growth chamber under controlled conditions and thereby growing the single crystal thin film of said element semiconductor in a desired thickness with a precision of monomolecular layer. In an alternate method for growing a single crystal thin film of an element semiconductor, the sole gas containing the element semiconductor is continuously fed onto the substrate for a given period of time, thereby forming a single crystal thin film of element semiconductor having a desired thickness. According to the present invention, there can be obtained single crystal thin films with high quality in a high reproducibility, by simplified operating parameters and growing apparatus.
摘要:
An image forming apparatus employing a face-down delivery system in which the plane of the recording medium at any position relative to any other position assumed by the recording medium beginning with a stacking tray and ending with a delivery tray does not exceed 90.degree.. The apparatus includes a detachable cartridge which includes a photosensitive member, a charging device and a cleaning device. In one preferred embodiment, register rollers and fixing rollers are positioned relative to each other such that a substantially zero angular deviation exists in the path traveled by the recording medium between these two pairs of rollers.
摘要:
To provide an information spread scale prediction device capable of accurately predicting the number of future contributions for a specific topic in SNS and the like. The information spread scale prediction device includes: a learning text data input unit which acquires learning text data from a specific website; a node influence learning unit which calculates the influence for the number of statements by each group to which a node specifying a single specific user belongs for the topic from the number of statements by each classified topic, and stores it as learning data; a prediction text data input unit which acquires prediction text data from the specific website after storing the learning data; and a future contribution number prediction unit which predicts and outputs the number of contributions at a specific future time of the topic based on the number of statements of each topic and the learning data.
摘要:
In a method for polishing a semiconductor wafer by rotating a work carrier and a table while pressing the semiconductor wafer retained by the work carrier against a polishing cloth mounted on the table, at a time when the table and the work carrier both having been at rest are rotated, each at a predetermined number of revolutions, in a condition that the polishing cloth and the semiconductor wafer are pressed against each other, to thereby start polishing, a table acceleration is maintained smaller than a work carrier acceleration. By such maintaining the table acceleration smaller than the work carrier acceleration, vibrations to be generated when the polishing is started can be prevented. In the method for polishing a semiconductor wafer according to the present invention, the diameter of the semiconductor wafer is preferably defined to be 30% or more of the diameter of the table.
摘要:
Soluble nickel and tin contained in a coating layer are eluted into an aqueous solution by bringing a cathode coated with a nickel-tin alloy into contact with an aqueous solution of an alkali metal hydrogen carbonate such as sodium hydrogen carbonate, thereby reducing the amounts of these metals eluted during electrolysis.
摘要:
An information processing device can obtain an accurate result of regression analysis even if a mean and a variance of a response variable depends on an explanatory variable taking continuous variable.An information processing device calculates a mean of and a variance of a response variable for each range which is determined based on a partition candidate being information on partitioning a domain of an explanatory variable into a plurality of ranges based on observed data including information representing the explanatory variable and information representing the response variable being an observed value in terms of the explanatory variable and the mean and the variance are dependent on the explanatory variable. The information processing device selects a specific partition candidate among a plurality of the partition candidates by using an information criterion which is calculated based on the observed data and the calculated mean and variance of the response variable. The information processing device calculates a smooth function representing the variance of the response variable in the domain of the explanatory variable and a smooth function representing the mean of the response variable in the domain of the explanatory variable based on the mean and the variance calculated for each range determined based on the specific partition candidate.
摘要:
A device for detecting an accumulation amount of particulates is provided. The device has a filter for trapping particulates from a gas containing the particulates, a container for containing the filter, an upstream pipe provided on the upstream side of the container to lead the gas into the container, a downstream pipe provided on the downstream side of the container to lead the gas after passed through the filter, a transmitting antenna provided within the downstream pipe to transmit an electromagnetic wave having a frequency of 30 GHz or more but not exceeding 10 THz, and a receiving antenna provided within the upstream pipe to receive the electromagnetic wave. An amount of the particulates trapped in the filter is detected based on an intensity of the electromagnetic wave received by the receiving antenna.
摘要:
An optical modulator 24 has a supporting substrate 5, a modulating substrate 11 made of an electro-optical material, an optical waveguide 12 provided on the side of a first main surface 30 of the modulating substrate 11, and an adhesion layer 6 adhering a second main surface 31 of the modulating substrate 11 onto the supporting substrate 5. The modulating substrate 11 has a high-frequency interaction portion 11c applying a voltage on the optical waveguide 12 to modulate propagating light, an incident portion 11a inputting light to the optical waveguide, and an outgoing portion 11b outputting light from the optical waveguide. The high-frequency interaction portion 11c is recessed on the first main surface 30 of the modulating substrate 11 with respect to the incident and outgoing portions 11a and 11b. The high-frequency interaction portion 11c has a thickness smaller than the those of the incident and outgoing portions 11a and 11b.
摘要:
An optical modulator includes an optical modulation substrate, an electrical length adjusting substrate, a package containing the substrates, and a plurality of input ports for inputting high frequency electrical signals. The optical modulation substrate includes a substrate body made of an electro-optic material, a ground electrode and a plurality of signal electrodes provided on the substrate body, optical waveguides propagating lights interacting with the signal electrodes, respectively, and electrode input ports inputting the high frequency electrical signals into the signal electrodes, respectively. The signal electrode includes an interacting part, an input end part provided between the electrode input port and interacting part, and a terminal part. The electrical length adjusting substrate includes conductive lines connected to the input ports for inputting the high frequency electrical signals, respectively. The conductive lines have electrical lengths different from each other for adjusting the phase differences among the ports.