公开(公告)号：US20120258415A1

公开(公告)日：2012-10-11

申请号：US13438234

申请日：2012-04-03

申请人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

发明人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

IPC分类号： F27D21/00 ,  F27D3/00

CPC分类号： H01L21/67109 ,  H01L21/67248

摘要： A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T1×(1−α)+T2×α, α>1, where T1 and T2 represent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.

摘要翻译： 一种热处理设备，包括：处理容器，用于处理保存在船上的晶片; 用于加热处理容器的加热器; 以及用于控制加热器的控制部。 加热器温度传感器设置在加热器和处理容器之间，容器内温度传感器设置在处理容器中，并且可移动的温度传感器设置在船上。 温度传感器连接到温度估计部。 温度估计部分选择三种类型的温度传感器中的两种，例如， 可移动温度传感器和容器内温度传感器，并根据以下公式确定晶片的温度：T = T1×（1-α）+ T2×α，α> 1，其中T1和T2表示检测温度 的选定温度传感器，α表示混合比。

公开(公告)号：US20100224614A1

公开(公告)日：2010-09-09

申请号：US12223162

申请日：2007-02-07

申请人： Makoto Kobayashi ,  Kenichi Yamaga ,  Takanori Saito

发明人： Makoto Kobayashi ,  Kenichi Yamaga ,  Takanori Saito

IPC分类号： F27D11/00 ,  H05B3/02

CPC分类号： H01L21/67109 ,  H01L21/425 ,  Y10T29/49083

摘要： The present invention provides a heat treatment apparatus having a high degree of freedom of an outlet design and capable of adjusting the rate of a reduction in the temperature of each part of a heater without using an adjustment valve. The heat treatment apparatus having a simple flow path structure can be constructed with simplified sealing and a reduced cost.The heat treatment apparatus 1 includes a process chamber 2, a tubular heater 3, a heat exhaust system 25 and a cooling section 26. The process chamber 2 accommodates objects W to be placed in multiple stages and to be treated. A predetermined heat treatment is performed in the process chamber. The heater 3 surrounds an outer circumference of the process chamber 2 and heats the objects W to be treated. The heat exhaust system 25 is adapted to exhaust an atmosphere present in a space 24 existing between the heater 3 and the process chamber 2. The cooling section 26 is adapted to blow a cooling fluid into the space 24 to cool the atmosphere. The heater 3 includes a tubular heat insulator 17, a heat generating resistor 18 and an outer shell 20. The heat generating resistor 18 is provided on an inner circumference of the heat insulator 17. The outer shell 20 is provided on an outer circumference of the heat insulator 17. The cooling section 26 includes at least one annular flow path 28 and an outlet 29. The annular flow path 28 is arranged between the heat insulator 17 and the outer shell 20. The outlet 29 is provided in the heat insulator 17. The outlet 29 is arranged to ensure that the cooling fluid is blown out of the outlet 29 toward a vertical central axis of the heat insulator 17 or in a direction oblique to the direction toward vertical central axis of the heat insulator 17.

摘要翻译： 本发明提供一种热处理装置，其具有出口设计的高自由度，并且能够调节加热器的每个部件的温度降低的速率而不使用调节阀。 具有简单的流路结构的热处理装置可以以简单的密封和降低的成本构成。 热处理设备1包括处理室2，管状加热器3，散热系统25和冷却部分26.处理室2容纳待放置的多个物体W并进行处理。 在处理室中进行预定的热处理。 加热器3围绕处理室2的外周并加热被处理物体W. 散热系统25适于排出存在于加热器3和处理室2之间的空间24中的气氛。冷却部分26适于将冷却流体吹入空间24以冷却大气。 加热器3包括管状隔热件17，发热电阻18和外壳20.发热电阻18设置在隔热材料17的内周上。外壳20设置在绝热体17的外周。 绝热体17.冷却部分26包括至少一个环形流动路径28和出口29.环形流路28设置在绝热体17和外壳20之间。出口29设置在绝热体17中。 出口29布置成确保冷却流体从出口29朝向隔热件17的垂直中心轴线或者沿着与隔热件17的垂直中心轴方向倾斜的方向吹出。

公开(公告)号：US06885814B2

公开(公告)日：2005-04-26

申请号：US10395395

申请日：2003-03-25

申请人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

发明人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

公开(公告)号：US06516143B2

公开(公告)日：2003-02-04

申请号：US09819702

申请日：2001-03-29

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Takanori Saito ,  Kazutoshi Miura ,  Harunari Hasegawa ,  Joji Hoshi ,  Katsutoshi Ishii

IPC分类号： H05B302

CPC分类号： H05B3/44 ,  H05B3/42 ,  H05B3/46 ,  H05B2203/022

摘要： The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.

公开(公告)号：US06515264B2

公开(公告)日：2003-02-04

申请号：US10170539

申请日：2002-06-14

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06204488B1

公开(公告)日：2001-03-20

申请号：US09450755

申请日：1999-11-30

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B300

CPC分类号： F27D99/0073 ,  F27D2099/0008 ,  H01L21/67098

摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

摘要翻译： 密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。 石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。 导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。 一个插头设置在管的下端以封闭它。 防止火花发生，而结构简单，易于组装的低电阻密封端子。

公开(公告)号：US5252395A

公开(公告)日：1993-10-12

申请号：US792013

申请日：1991-11-13

申请人： Shigenobu Maruoka ,  Toshio Sugizaki ,  Kouji Irie ,  Ichiro Tsuchida ,  Takanori Saito

发明人： Shigenobu Maruoka ,  Toshio Sugizaki ,  Kouji Irie ,  Ichiro Tsuchida ,  Takanori Saito

IPC分类号： C09J7/02 ,  C09J133/00 ,  C09J133/08 ,  C09J143/04 ,  C09J155/00

CPC分类号： C09J133/08 ,  C09J143/04 ,  C09J155/005 ,  C09J7/0217 ,  C09J2201/606 ,  Y10T428/2891

摘要： A pressure sensitive adhesive sheet comprising a substrate and an adhesive composition which is coated on the surface of the substrate. The main components of the adhesive composition are (a) a copolymer comprising monomeric units of an acrylic ester, (b) monomeric units of a polar acrylic compound, (c) monomeric units of a high glass transition temperature (Tg) macromonomer having a Tg of 20.degree. C. or above, (d) monomeric units of a low Tg macromonomer having a Tg of below 20.degree. C. and (e) monomeric units of an oligomer having telechelic thiol functional groups. The pressure sensitive adhesive sheet has excellent adhesive strength, resistance against formation of blisters and removability upon heating.

公开(公告)号：US5187007A

公开(公告)日：1993-02-16

申请号：US549496

申请日：1990-06-29

申请人： Kazuyoshi Ebe ,  Hiroaki Narita ,  Katsuhisa Taguchi ,  Yoshitaka Akeda ,  Takanori Saito

发明人： Kazuyoshi Ebe ,  Hiroaki Narita ,  Katsuhisa Taguchi ,  Yoshitaka Akeda ,  Takanori Saito

IPC分类号： C09J4/06 ,  C09J7/02 ,  C09J175/16 ,  H01L21/00 ,  H01L21/302 ,  H01L21/68

CPC分类号： H01L21/6835 ,  C09J175/16 ,  C09J4/06 ,  C09J7/0207 ,  C09J7/0239 ,  C09J7/0246 ,  H01L21/302 ,  H01L21/67132 ,  H01L21/6836 ,  C09J2203/326 ,  H01L2221/68322 ,  H01L2221/68327 ,  Y10T428/28 ,  Y10T428/2809 ,  Y10T428/2891 ,  Y10T428/2896

摘要： An adhesive sheet according to the present invention comprises a substrate having coated on the surface thereof an adhesive layer consisting of an adhesive and a radiation polymerizable compound, which compound is a urethane acrylate oligomer having a molecular weight of 3,000-10,000, preferably 4,000-8,000. The adhesive sheet is preferably used in subjecting semiconductor wafers to dicing operation and no adhesive sticks to and remains on the back side surface of the wafer chips as picked up.

摘要翻译： 根据本发明的粘合片包括在其表面上涂覆有由粘合剂和可辐射聚合化合物组成的粘合剂层的基材，该化合物是分子量为3,000-10,000，优选4,000-8,000的氨基甲酸酯丙烯酸酯低聚物 。 粘合片优选用于使半导体晶片进行切割操作，并且没有粘合剂粘附并保留在拾取的晶片芯片的背侧表面上。

公开(公告)号：US4244642A

公开(公告)日：1981-01-13

申请号：US49967

申请日：1979-06-19

申请人： Shiro Toriumi ,  Hiroshi Endo ,  Takao Saijo ,  Takanori Saito ,  Kuniaki Kamimura

发明人： Shiro Toriumi ,  Hiroshi Endo ,  Takao Saijo ,  Takanori Saito ,  Kuniaki Kamimura

IPC分类号： G03B27/58 ,  G03B21/11 ,  G03B21/64 ,  G06K17/00 ,  G03B23/14 ,  B65H5/26

CPC分类号： G03B21/116 ,  G06K17/0016

摘要： An aperture card reader is equipped with a unit detachably mountable on the main body for automatically feeding aperture cards. The aperture card can automatically be placed between presser plates while the unit is mounted on the main body or, alternatively, can be manually fed when the unit is detached from the main body. The aperture card is automatically fed between the presser plates with the card in a position in which the minor sides of the aperture card are oriented in the direction of feed, while the card can be manually placed between the presser plates by feeding the card in a position in which the major sides of the card are oriented in the direction of feed. The image of the microfilm mounted on the aperture card can be projected on a screen in a horizontal position when the card is fed automatically, or in a vertical position when the card is fed manually.

摘要翻译： 光圈读卡器配备有可拆卸地安装在主体上用于自动馈送光圈卡的单元。 当单元安装在主体上时，光圈卡可以自动放置在压板之间，或者当本机与主体分离时可以手动进给。 光圈卡被自动地进给到压板与卡之间的位置中，孔卡的小侧在进给方向上定向，而卡可以通过将卡馈送到卡片中来手动地放置在压板之间 卡的主要侧面朝向进给方向的位置。 安装在孔卡上的缩微胶片的图像可以在卡被自动进给时处于水平位置的屏幕上，或者当手动进给卡时处于垂直位置。

公开(公告)号：US20120064469A1

公开(公告)日：2012-03-15

申请号：US13221209

申请日：2011-08-30

申请人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

发明人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

IPC分类号： F27D19/00 ,  F27D7/00 ,  F27D11/02 ,  F27B1/24

CPC分类号： F27B17/0025 ,  H01L21/67109 ,  H01L21/67248

摘要： A heat treatment apparatus and control method enabling the apparatus to settle down the internal temperature of a treating vessel to a target temperature accurately and quickly. The apparatus includes a furnace body with a heater on an inner circumferential surface thereof, a treating vessel disposed inside the furnace body, a cooling medium supply blower and cooling medium release blower connected to the furnace body, and a temperature sensor provided inside the treating vessel. A signal from the temperature sensor is sent to a heater output computing unit of a controller. The computing unit determines a heater output level to be obtained during temperature regulation with the heater only, the heater output level being based on a preset temperature that has been determined by a temperature determining unit and temperature detected by the temperature sensor. A blower output computing unit activates blower output based on the heater output level.

摘要翻译： 一种热处理装置和控制方法，使得该装置能够准确而快速地将处理容器的内部温度降至目标温度。 该装置包括在炉体内部具有加热器的炉体，设置在炉体内的处理容器，与炉体连接的冷却介质供给鼓风机和冷却介质排出鼓风机，以及设置在处理容器内的温度传感器 。 来自温度传感器的信号被发送到控制器的加热器输出计算单元。 计算单元确定仅在加热器的温度调节期间获得的加热器输出水平，加热器输出水平基于由温度确定单元确定的预设温度和由温度传感器检测的温度。 鼓风机输出计算单元基于加热器输出电平激活鼓风机输出。