公开(公告)号：US20060274514A1

公开(公告)日：2006-12-07

申请号：US11444276

申请日：2006-05-31

申请人： Kunihiko Yoshioka ,  Takao Ohnishi

发明人： Kunihiko Yoshioka ,  Takao Ohnishi

IPC分类号： H01R12/16

CPC分类号： G01N35/1016 ,  B41J2/125 ,  G01H11/08 ,  G01H13/00 ,  G01N29/022 ,  G01N29/046 ,  G01N29/12 ,  G01N2035/1041 ,  G01N2291/014 ,  G01N2291/022 ,  G01N2291/0427 ,  G01N2291/106

摘要： Disclosed herein is a flight state detection apparatus and a flight state detection method that is capable of accurately detecting the flight state of a micro object ejected from a micro object ejection part. The flight state detection apparatus is constructed in a simplified structure and is manufactured at low costs. The flight state detection apparatus includes a sensor substrate, a piezoelectric/electrostrictive element, and an aperture plate. The sensor substrate includes a thick support part and a vibrating plate supported by the thick support part in a cantilever shape. The piezoelectric/electrostrictive element is mounted to a fixed end side of the vibrating plate. In the aperture plate, an aperture is formed, which is opposite to a target part disposed at a free end side of the vibrating plate. When the micro object passes through the aperture, and then collides with the target part, the vibrating plate is vibrated, and an electromotive force corresponding to the vibration state is generated in the piezoelectric/electrostrictive element.

公开(公告)号：US07089813B2

公开(公告)日：2006-08-15

申请号：US11060988

申请日：2005-02-18

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G9/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

公开(公告)号：US06724127B2

公开(公告)日：2004-04-20

申请号：US10231737

申请日：2002-08-30

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

摘要翻译： 一种压电/电致伸缩器件，包括基片和连接板，所述连接板具有连接到所述基片的第一端和沿第一方向延伸的相对的第二端，以及沿垂直于所述第一方向的第二方向的第一和第二相对侧。 固定板连接到连接板的第二端。 第一隔膜的第一侧接合到连接板的第一侧，并且第一隔膜的相对的第二侧接合到基板。 第二隔膜的第一侧接合到基板，并且第二隔膜的相对的第二侧接合到连接板的第二侧。 压电/电致伸缩元件设置在至少一个隔膜的至少一个平面表面的至少一部分上。

公开(公告)号：US06612190B2

公开(公告)日：2003-09-02

申请号：US10071019

申请日：2002-02-08

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01P1510

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31).

摘要翻译： 其中连接板（33）和隔膜（31）在其各自侧面接合在一起的质量传感器（30） 感测板（32）在与隔膜（31）接合到连接板（33）的方向垂直的方向上的相应侧面处连接到连接板（33）; 在感测板（32）的板表面的至少任一个上安装由压电膜和电极组成的压电元件（35）; 并且由传感器基板（34）接合由隔膜（31），检测板（32），连接板（33）和压电元件（35）组成的谐振部。 通过测量伴随隔膜（31）的质量变化的谐振部分的谐振频率的变化来测量隔膜（31）的质量的变化。

公开(公告)号：US06554405B1

公开(公告)日：2003-04-29

申请号：US09669933

申请日：2000-09-26

申请人： Takao Ohnishi ,  Toshikazu Hirota ,  Yukihisa Takeuchi

发明人： Takao Ohnishi ,  Toshikazu Hirota ,  Yukihisa Takeuchi

IPC分类号： B41J2045

CPC分类号： B01J4/008 ,  B01J2219/00162 ,  B01J2219/002 ,  B01J2219/00213 ,  B01J2219/00231 ,  B01J2219/0027 ,  B41J2/175

摘要： A liquid-drop discharge device includes an array of liquid-drop discharge units for discharging liquid from a float cell in communication with a liquid storage tank. A reaction cell, into which fluid is discharged, is provided in communication with the float cell. A differential adjusting tube is provided between the float cell and the reaction cell and includes a release valve for maintaining a specified pressure relationship between an internal pressure P2 of the float cell and an internal pressure P3 of the reaction cell. A driving circuit is provided to drive a pressurizing source of the liquid-drop discharge device and is connected to a control unit. The control unit is connected to a pressure sensor, which detects the internal pressure of the reaction cell and the release valve. The internal pressure P1 of the liquid storage tank is controlled to be larger than the internal pressure P3 of the reaction cell.

公开(公告)号：US06224298B1

公开(公告)日：2001-05-01

申请号：US09142329

申请日：1998-11-27

申请人： Hiroyuki Tsuji ,  Takao Ohnishi

发明人： Hiroyuki Tsuji ,  Takao Ohnishi

IPC分类号： B65G5316

CPC分类号： H05K13/027 ,  Y10S414/101

摘要： Grooves for constructing transport passages 12 for transporting semiconductor chips 28 are provided (the grooves are provided in parallel to one another in a number corresponding to quality levels of the semiconductor chips 28). An air blow pipe 27 is provided at a starting end Pa of the transport passage 12 in a transport direction (direction indicated by the arrow in FIG. 7) to give the thrust for moving the semiconductor chips 28 in the transport direction. A large number of air-jetting holes 26 for floating the semiconductor chips 28 are provided through a transport surface. Especially, the air-jetting holes 26 are provided at a terminal end in the transport direction in a number larger than those for the other portions. Thus, the floating amount of the semiconductor chip 28 is maximized at the terminal end. A plurality of slits 29 are provided vertically through a terminal end wall 20a in the transport direction. Accordingly, a transport system is realized, in which the object is transported in one direction while floating the object by means of air. Especially, it is possible to realize the automatic operation for picking up individual objects one by one.

摘要翻译： 设置用于构造用于输送半导体芯片28的输送通道12的凹槽（凹槽以对应于半导体芯片28的质量水平的数量彼此平行地设置）。 输送路径12的输送方向（图7中的箭头方向）的起始端Pa设置有吹送管27，以提供沿着输送方向移动半导体芯片28的推力。 通过输送面设置有用于使半导体芯片28浮起的大量喷射孔26。 特别地，空气喷射孔26设置在输送方向的末端，其数量大于其它部分的数量。 因此，半导体芯片28的浮动量在终端被最大化。 在输送方向上通过终端壁20a垂直设置多个狭缝29。 因此，实现了一种传送系统，其中物体沿着一个方向传送，同时通过空气浮动物体。 特别地，可以实现逐个拾取各个物体的自动操作。

公开(公告)号：US06118277A

公开(公告)日：2000-09-12

申请号：US181350

申请日：1998-10-28

申请人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

发明人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

IPC分类号： G01R31/12 ,  G01N27/92 ,  G01R31/00 ,  G01R31/302 ,  G01R31/309 ,  H01G13/00 ,  G01R31/28

CPC分类号： G01R31/309

摘要： Disclosed is an appearance inspection apparatus for inspecting whether an appearance state of a main actuator element is adequate or defective by applying an appearance-inspecting voltage to the main actuator element including an upper electrode formed on an upper surface of a shape-retaining layer and a lower electrode formed on a lower surface of the shape-retaining layer. The appearance inspection apparatus comprises an optical detecting unit for electrically detecting the appearance state of the main actuator element on the basis of light emission caused by the main actuator element, and a judging unit for judging whether the appearance state of the main actuator element is adequate or defective on the basis of a level of a detection signal supplied from the optical detecting unit. Accordingly, it is possible to realize high inspection accuracy, reduce inspection time, and simplify the inspection apparatus. Further, the present invention is also applicable to integrated electronic parts.

摘要翻译： 公开了一种外观检查装置，用于通过对主致动器元件施加外观检查电压来检查主致动器元件的外观状态是否充分或有缺陷，该主致动器元件包括形成在形状保持层的上表面上的上电极和 形成在形状保持层的下表面上的下电极。 外观检查装置包括：光检测单元，用于基于主致动器元件发出的发光来电检测主致动器元件的外观状态;判断单元，用于判断主致动器元件的外观状态是否足够 或者根据从光学检测单元提供的检测信号的电平而有缺陷。 因此，可以实现高检查精度，缩短检查时间，简化检查装置。 此外，本发明也可应用于集成电子部件。

公开(公告)号：US5463462A

公开(公告)日：1995-10-31

申请号：US219381

申请日：1994-03-29

申请人： Takao Ohnishi ,  Yukihisa Osugi ,  Miyuki Muto

发明人： Takao Ohnishi ,  Yukihisa Osugi ,  Miyuki Muto

IPC分类号： G01N21/956 ,  G01B9/02

CPC分类号： G01N21/95692 ,  G01N21/95623

摘要： A parallel light beam is introduced from a collimator lens into through holes defined in a honeycomb-shaped object, and any light emitted from the honeycomb-shaped object is read by a CCD camera through a Fourier-transform lens to produce a Fourier-transform image of the honeycomb-shaped object. The honeycomb-shaped object is tilted such that the axis of the through holes is inclined at a certain angle to the optical axis of the parallel laser beam. If the partitions contain interstices spaced at intervals and light introduced into the through holes passes through such interstices, the Fourier-transform image includes a stripe pattern induced by diffracted light from the interstices. Since the stripe pattern can easily be distinguished from a dot-matrix pattern representing light emitted from the through holes, the interstices contained in the partitions can reliably be detected.

摘要翻译： 将平行光束从准直透镜引入定义在蜂窝状物体中的通孔中，并且通过CCD照相机通过傅立叶变换透镜从蜂窝状物体发射的任何光被读取，以产生傅里叶变换图像 的蜂窝状物体。 蜂窝状物体倾斜使得通孔的轴线相对于平行激光束的光轴倾斜一定角度。 如果分隔件间隔间隔，并且引入通孔的光通过这些空隙，则傅立叶变换图像包括由来自间隙的衍射光引起的条纹图案。 由于条纹图案可以容易地与表示从通孔发出的光的点阵图案区分开，所以可以可靠地检测包含在分区中的间隙。

公开(公告)号：US08528408B2

公开(公告)日：2013-09-10

申请号：US13299584

申请日：2011-11-18

申请人： Takao Ohnishi ,  Kunihiko Yoshioka ,  Shuhei Fujita

发明人： Takao Ohnishi ,  Kunihiko Yoshioka ,  Shuhei Fujita

IPC分类号： G01N29/27 ,  G01H13/00 ,  G01H5/00

CPC分类号： G01N9/24 ,  G01N35/1016 ,  G01N2035/1041

摘要： A passage detection apparatus is configured to detect the change in the properties (propagation state of sound wave, dielectric constant, etc.) of a specific space, which changes according to the passage of an object in the specific space and the size of the object. The passage detection apparatus includes a pair of detection units and configured to transmit and receive signals to and from an external device. The specific space is formed by the space between the detection unit and the detection unit. The detection unit is supported by a first substrate. The detection unit is supported by a second substrate that is parallel to the first substrate, and arranged at the position corresponding to the detection unit supported by the first substrate.

摘要翻译： 通过检测装置被配置为检测根据特定空间中的物体的通过和物体的尺寸而变化的特定空间的特性（声波的传播状态，介电常数等）的变化 。 通过检测装置包括一对检测单元，并且被配置为向外部设备发送信号和从外部设备接收信号。 特定空间由检测单元和检测单元之间的空间形成。 检测单元由第一基板支撑。 检测单元由与第一基板平行的第二基板支撑，并且布置在与由第一基板支撑的检测单元对应的位置。

公开(公告)号：US08476805B2

公开(公告)日：2013-07-02

申请号：US12693710

申请日：2010-01-26

申请人： Takao Ohnishi ,  Yuhji Umeda ,  Naoki Goto

发明人： Takao Ohnishi ,  Yuhji Umeda ,  Naoki Goto

IPC分类号： H01L41/04 ,  H01L41/047

CPC分类号： H01L41/29 ,  H01L41/047 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/314 ,  Y10T29/42

摘要： There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.

摘要翻译： 公开了即使压电/电致伸缩层裂纹也可以用作传感器的压电/电致伸缩元件。 本发明提供一种压电/电致伸缩元件，其包括基板，固定在基板上的下电极层和固定在下电极层上的压电/电致伸缩层，下电极层相对于基板的覆盖率为98％或 减。