Appearance inspection apparatus for electronic parts and appearance
inspection method for electronic parts
    1.
    发明授权
    Appearance inspection apparatus for electronic parts and appearance inspection method for electronic parts 有权
    电子部件外观检查装置及电子部件外观检查方法

    公开(公告)号:US06118277A

    公开(公告)日:2000-09-12

    申请号:US181350

    申请日:1998-10-28

    CPC分类号: G01R31/309

    摘要: Disclosed is an appearance inspection apparatus for inspecting whether an appearance state of a main actuator element is adequate or defective by applying an appearance-inspecting voltage to the main actuator element including an upper electrode formed on an upper surface of a shape-retaining layer and a lower electrode formed on a lower surface of the shape-retaining layer. The appearance inspection apparatus comprises an optical detecting unit for electrically detecting the appearance state of the main actuator element on the basis of light emission caused by the main actuator element, and a judging unit for judging whether the appearance state of the main actuator element is adequate or defective on the basis of a level of a detection signal supplied from the optical detecting unit. Accordingly, it is possible to realize high inspection accuracy, reduce inspection time, and simplify the inspection apparatus. Further, the present invention is also applicable to integrated electronic parts.

    摘要翻译: 公开了一种外观检查装置,用于通过对主致动器元件施加外观检查电压来检查主致动器元件的外观状态是否充分或有缺陷,该主致动器元件包括形成在形状保持层的上表面上的上电极和 形成在形状保持层的下表面上的下电极。 外观检查装置包括:光检测单元,用于基于主致动器元件发出的发光来电检测主致动器元件的外观状态;判断单元,用于判断主致动器元件的外观状态是否足够 或者根据从光学检测单元提供的检测信号的电平而有缺陷。 因此,可以实现高检查精度,缩短检查时间,简化检查装置。 此外,本发明也可应用于集成电子部件。

    Article feeding apparatus
    2.
    发明授权
    Article feeding apparatus 有权
    物品送料装置

    公开(公告)号:US06354789B2

    公开(公告)日:2002-03-12

    申请号:US09732672

    申请日:2000-12-08

    IPC分类号: B66C2300

    CPC分类号: H01L21/67784 B65G51/03

    摘要: An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

    摘要翻译: 用于半导体芯片的馈电装置具有一个具有分别作为半导体芯片的并行馈电路径的槽的结构体,该馈电路径对应于半导体芯片的各个质量水平,该结构体由部分稳定的氧化锆制成。 用于暂时停止沿进给路径供给的半导体芯片的止动机构包括设置在馈送路径的端壁前面的馈送路径中的压电体。 用于计数沿馈送路径馈送的半导体芯片的计数机构具有设置在靠近端壁的馈送路径中的电极。 该装置用作用于具有喷射空气的浮动物品的进料系统,并且供给漂浮物品,并使其自身变得自动化。

    Article feeding apparatus
    3.
    发明授权

    公开(公告)号:US06203250B1

    公开(公告)日:2001-03-20

    申请号:US09212342

    申请日:1998-12-15

    IPC分类号: B65G5316

    CPC分类号: H01L21/67784 B65G51/03

    摘要: An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

    Cell driving type actuator and method for manufacturing the same
    4.
    发明授权
    Cell driving type actuator and method for manufacturing the same 失效
    电池驱动型致动器及其制造方法

    公开(公告)号:US06933663B2

    公开(公告)日:2005-08-23

    申请号:US10117353

    申请日:2002-04-05

    摘要: A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive elements arranged in comb teeth-like alignment on a base plate. The actuator is driven by means of dislocation of the piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of the cells is formed independently from adjacent cells by positioning cover plates between two adjacent piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive actuator wherein a heating process at a high temperature can be applied and mass production at low cost is possible. The actuator includes cells with slit portions having a width of 60 μm or less and a high aspect ratio and can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.

    摘要翻译: 压电/电致伸缩致动器包括在基板上以梳齿状对准布置的多个压电/电致伸缩元件。 致动器通过压电/电致伸缩元件的位错来驱动。 电池驱动型致动器的特征在于,通过将盖板定位在两个相邻的压电/电致伸缩元件之间,每个电池单元独立于相邻电池单元形成。 因此,提供了一种压电/电致伸缩致动器,其中可以应用高温下的加热过程,并且可以以低成本进行批量生产。 致动器包括具有宽度为60μm或更小并且具有高纵横比的狭缝部分的电池,并且可以以高电场强度被激活,并且可以以小的电场强度获得大的位移。

    Micropump
    6.
    发明授权
    Micropump 失效
    微型泵

    公开(公告)号:US06752601B2

    公开(公告)日:2004-06-22

    申请号:US09935087

    申请日:2001-08-22

    IPC分类号: F04B3500

    摘要: A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response.

    摘要翻译: 具有用于通过压力作用输送流体的至少一个泵构件的微型泵包括由至少一个用于产生压力波动的致动器构件和流体流动的流体通道形成的泵单元。 致动器构件设置有通过将由压电/电致伸缩元件或反铁电元件制成的两个侧壁设置在连接板上而形成的单元,并且用盖板覆盖面对侧壁之间的连接板的表面。 致动器构件选择性地形成流体通道并且由于侧壁的膨胀/收缩引起的电池的位移而在流体通道构件中产生压力波动。 微型泵的尺寸小而薄,同时获得了增加的流体喷射量,并且响应速度很快。

    Nozzle for liquid injection device and method of producing the same
    7.
    发明授权
    Nozzle for liquid injection device and method of producing the same 失效
    注射装置用喷嘴及其制造方法

    公开(公告)号:US06256884B1

    公开(公告)日:2001-07-10

    申请号:US09516106

    申请日:2000-03-01

    IPC分类号: B23P1516

    摘要: A method for producing a nozzle having a projecting tip part, including the steps of disposing a ceramic green sheet between a first die and a stripper containing a first punch, moving the first punch through a first surface of the ceramic green sheet to form a hole therethrough, inverting the ceramic green sheet, disposing the inverted ceramic green sheet between a second die and a stripper containing a second punch, the second die having a cavity in the shape of a negative configuration of the projecting tip part, moving the second punch through the hole formed in the ceramic green sheet to force a portion of the ceramic green sheet into the cavity of the second die and form the projecting tip part, and baking the ceramic green sheet to form the nozzle.

    摘要翻译: 一种具有突出尖端部分的喷嘴的制造方法,包括以下步骤:在第一模具和包含第一冲头的剥离器之间设置陶瓷生坯片,使第一冲头穿过陶瓷生片的第一表面,形成孔 在第二模具和包含第二冲头的剥离器之间设置反转的陶瓷生片,所述第二模具具有呈突出尖端部分的负构型的空腔,使第二冲头穿过 形成在陶瓷生片中的孔,以将陶瓷生片的一部分压入第二模的空腔,形成突出的顶端部,并烘烤陶瓷生片以形成喷嘴。

    Cell driving type micropump member and method for manufacturing the same
    9.
    发明授权
    Cell driving type micropump member and method for manufacturing the same 失效
    电池驱动型微型泵构件及其制造方法

    公开(公告)号:US06699018B2

    公开(公告)日:2004-03-02

    申请号:US09900742

    申请日:2001-07-06

    IPC分类号: F04B3500

    摘要: A micro pump member is provided, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The volume of the pressurizing chambers is changed by the displacement of the piezoelectric/electrostrictive elements to produce a pressure in the pressurizing chambers. The pressurizing chambers are formed independent of adjacent pressurizing chambers. Activation can be carried out by applying a driving electric field having a high field strength to the pressurizing chambers, so that a greater displacement and a higher response can be obtained with a smaller field strength.

    摘要翻译: 提供了一种微型泵构件,其中形成在基部中的多个单元被用作加压室,并且形成加压室的侧壁由压电/电致伸缩元件构成。 通过压电/电致伸缩元件的位移改变加压室的体积,以在加压室中产生压力。 加压室独立于相邻的加压室形成。 可以通过向加压室施加具有高场强的驱动电场来进行激活,从而可以以更小的场强获得更大的位移和更高的响应。

    Nozzle for liquid injection device and method of producing the same
    10.
    发明授权
    Nozzle for liquid injection device and method of producing the same 失效
    注射装置用喷嘴及其制造方法

    公开(公告)号:US06585175B2

    公开(公告)日:2003-07-01

    申请号:US09863107

    申请日:2001-05-22

    IPC分类号: B05B100

    摘要: A liquid injection nozzle including a substantially planar substrate having first and second opposed surfaces. A communicating portion, which has an inner circumferential surface, extends through the substrate from the first surface to the second surface of the substrate. The inner circumferential surface is tapered from the first surface toward the second surface such that a lateral dimension of the inner circumferential surface is narrowest at a tip portion. A projected part extends from the second surface of the substrate and defines the tip portion which terminates the communicating portion.

    摘要翻译: 一种液体喷射喷嘴,包括具有第一和第二相对表面的基本平坦的基板。 具有内圆周表面的连通部分从衬底的第一表面延伸穿过衬底的第二表面。 内圆周表面从第一表面朝向第二表面逐渐变细,使得内圆周表面的横向尺寸在尖端部分处最窄。 突出部分从基板的第二表面延伸并且限定终止连通部分的末端部分。