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    Appearance inspection apparatus for electronic parts and appearance inspection method for electronic parts
    1.
    发明授权
    Appearance inspection apparatus for electronic parts and appearance inspection method for electronic parts 有权
    电子部件外观检查装置及电子部件外观检查方法

    公开(公告)号：US06118277A

    公开(公告)日：2000-09-12

    申请号：US181350

    申请日：1998-10-28

    申请人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    发明人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    IPC分类号： G01R31/12 ,  G01N27/92 ,  G01R31/00 ,  G01R31/302 ,  G01R31/309 ,  H01G13/00 ,  G01R31/28

    CPC分类号： G01R31/309

    摘要： Disclosed is an appearance inspection apparatus for inspecting whether an appearance state of a main actuator element is adequate or defective by applying an appearance-inspecting voltage to the main actuator element including an upper electrode formed on an upper surface of a shape-retaining layer and a lower electrode formed on a lower surface of the shape-retaining layer. The appearance inspection apparatus comprises an optical detecting unit for electrically detecting the appearance state of the main actuator element on the basis of light emission caused by the main actuator element, and a judging unit for judging whether the appearance state of the main actuator element is adequate or defective on the basis of a level of a detection signal supplied from the optical detecting unit. Accordingly, it is possible to realize high inspection accuracy, reduce inspection time, and simplify the inspection apparatus. Further, the present invention is also applicable to integrated electronic parts.

    摘要翻译： 公开了一种外观检查装置，用于通过对主致动器元件施加外观检查电压来检查主致动器元件的外观状态是否充分或有缺陷，该主致动器元件包括形成在形状保持层的上表面上的上电极和 形成在形状保持层的下表面上的下电极。 外观检查装置包括：光检测单元，用于基于主致动器元件发出的发光来电检测主致动器元件的外观状态;判断单元，用于判断主致动器元件的外观状态是否足够 或者根据从光学检测单元提供的检测信号的电平而有缺陷。 因此，可以实现高检查精度，缩短检查时间，简化检查装置。 此外，本发明也可应用于集成电子部件。

    Article feeding apparatus
    2.
    发明授权
    Article feeding apparatus 有权
    物品送料装置

    公开(公告)号：US06354789B2

    公开(公告)日：2002-03-12

    申请号：US09732672

    申请日：2000-12-08

    申请人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    发明人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    IPC分类号： B66C2300

    CPC分类号： H01L21/67784 ,  B65G51/03

    摘要： An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

    摘要翻译： 用于半导体芯片的馈电装置具有一个具有分别作为半导体芯片的并行馈电路径的槽的结构体，该馈电路径对应于半导体芯片的各个质量水平，该结构体由部分稳定的氧化锆制成。 用于暂时停止沿进给路径供给的半导体芯片的止动机构包括设置在馈送路径的端壁前面的馈送路径中的压电体。 用于计数沿馈送路径馈送的半导体芯片的计数机构具有设置在靠近端壁的馈送路径中的电极。 该装置用作用于具有喷射空气的浮动物品的进料系统，并且供给漂浮物品，并使其自身变得自动化。

    Article feeding apparatus
    3.
    发明授权
    Article feeding apparatus 有权

    公开(公告)号：US06203250B1

    公开(公告)日：2001-03-20

    申请号：US09212342

    申请日：1998-12-15

    申请人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    发明人： Yukihisa Takeuchi ,  Hiroyuki Tsuji ,  Takao Ohnishi

    IPC分类号： B65G5316

    CPC分类号： H01L21/67784 ,  B65G51/03

    摘要： An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

    Mass sensor and mass sensing method
    7.
    发明授权
    Mass sensor and mass sensing method 失效
    质量传感器和质量感测方法

    公开(公告)号：US06457361B1

    公开(公告)日：2002-10-01

    申请号：US09387012

    申请日：1999-08-31

    申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    IPC分类号： G01H1300

    CPC分类号： G01G3/13

    摘要： A mass sensor including: a connecting plate having one or more slit(s) and/or opening portion(s) formed therein and/or having a thin-walled portion and a thick-walled portion formed therein; a diaphragm joined with the connecting plate at respective side surfaces; a piezoelectric element; a sensing plate with the piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of the connecting plate in the direction perpendicular to the joining direction of the diaphragm and the connecting plate; and a sensor substrate with which at least a part of side surfaces of the connecting plate as well as the sensing plate are joined, and the diaphragm, the connecting plate, the sensing plate, and the piezoelectric element form a resonating portion. The mass sensor can conveniently be used for determining the mass of a substance to be sensed by measuring changes in resonant frequencies caused by changes in the mass of the diaphragm on which a catching substance for catching a substance to be sensed by reacting only with the object of sensing is applied.

    摘要翻译： 一种质量传感器，包括：连接板，其中形成有一个或多个狭缝和/或开口部分，和/或具有形成在其中的薄壁部分和厚壁部分; 在相应的侧表面处连接有连接板的隔膜; 压电元件; 具有压电元件的检测板至少在传感板的至少一个表面上的一个部分上设置，其侧表面在垂直于隔膜的接合方向的方向上与连接板的侧表面接合， 连接板; 以及传感器基板，连接板的至少一部分的侧面以及感测板与其连接，隔膜，连接板，感测板和压电元件形成谐振部。 质量传感器可以方便地用于通过测量由通过仅与物体反应而捕获待检测物质的捕获物质的膜片的质量变化引起的谐振频率的变化来确定待感测物质的质量 的感应。

    Double-headed mass sensor and mass detection method
    8.
    发明授权
    Double-headed mass sensor and mass detection method 失效
    双头质量传感器和质量检测方法

    公开(公告)号：US06389877B1

    公开(公告)日：2002-05-21

    申请号：US09367294

    申请日：1999-08-10

    申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    IPC分类号： G01N1100

    CPC分类号： G01G3/16

    摘要： There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

    摘要翻译： 提供了一种双头质量传感器（25），其中在与第二隔膜（21B）接合的第一连接板（22A）和与第二隔膜（21B）接合的第二连接板（22B）之间 相互的侧面，在至少一个平面上设置有主要元件（44）的第一传感板（41A）被桥接，并且包括隔膜（21A），（21B），连接板 22A），（22B），第一感测板（41A）和主要元件（44）接合到传感器基板（27）。 （21A），（21B）的质量的变化通过测量伴随着膜片（21A），（21B）的质量变化的共振部分的共振频率的变化来测量每个膜片（21A），（21B）的质量的变化。 本发明的质量传感器能够容易且高度精确地测量包括细菌和病毒等微生物，化学物质以及气相沉积膜的厚度的纳刻级的微小质量。

    Mass sensor and mass sensing method
    9.
    发明授权
    Mass sensor and mass sensing method 失效
    质量传感器和质量感测方法

    公开(公告)号：US06326563B1

    公开(公告)日：2001-12-04

    申请号：US09401625

    申请日：1999-09-22

    申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

    IPC分类号： G01G314

    CPC分类号： G01G3/13

    摘要： A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

    摘要翻译： 质量传感器包括隔膜，具有布置在连接相应侧面的至少一个表面的至少一部分上的压电元件的感测板，由隔膜和感测板夹持的连接板，其中隔膜，感测板， 压电元件和连接板形成谐振部分。 连接板跨接在形成在传感器基板中的凹部的侧面，并且感测板至少与凹部的底部接合。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。 质量传感器能够容易且准确地测量包括诸如细菌和病毒等微生物或化学物质的纳刻级的微小质量或气相沉积膜的厚度。

    Diaphragm structure
    10.
    发明授权
    Diaphragm structure 失效
    隔膜结构

    公开(公告)号：US5965970A

    公开(公告)日：1999-10-12

    申请号：US639609

    申请日：1996-04-29

    申请人： Yukihisa Takeuchi ,  Keizo Miyata ,  Takao Ohnishi ,  Nobuo Takahashi

    发明人： Yukihisa Takeuchi ,  Keizo Miyata ,  Takao Ohnishi ,  Nobuo Takahashi

    IPC分类号： G01L7/08 ,  G01L9/00 ,  G01L9/04 ,  H01L41/09 ,  H01L41/08

    CPC分类号： H01L41/0973

    摘要： A diaphragm structure includes a ceramic substrate having at least one window portion and a thin diaphragm laminated onto the ceramic substrate so as to cover the window portion, wherein only a part of an interface between the ceramic substrate and the thin diaphragm is joined to form a joint of the diaphragm. A diaphragm structure is free from instability caused by a breakage or deformation of a partition wall between window portions upon punching or laminating even if a diaphragm structure employs a design in which dimensions of a diaphragm portion is maintained and simultaneously a distance between diaphragm portions is made narrow to restrain a surface area excluding a diaphragm portion of a diaphragm structure or a design in which a plurality of diaphragm portion having various configurations and dimensions are disposed.

    摘要翻译： 膜片结构包括陶瓷基板，其具有至少一个窗口部分和层叠在陶瓷基板上以便覆盖窗口部分的薄隔膜，其中仅陶瓷基板和薄隔膜之间的界面的一部分接合形成 隔膜的关节。 即使膜片结构采用保持隔膜部分的尺寸同时设置隔膜部分之间的距离的设计，隔膜结构也不会因冲孔或层压时窗口部分之间的隔壁的断裂或变形而引起的不稳定性 狭窄以限制除隔膜结构的隔膜部分之外的表面积或其中设置有具有各种构造和尺寸的多个隔膜部分的设计。