摘要:
In the method for manufacturing a SIMOX wafer, oxygen ions are implanted into a silicon wafer, then the silicon wafer is subjected to a prescribed heat treatment so as to form a buried oxide layer in the silicon wafer. The prescribed heat treatment includes: a step of ramping up a temperature of the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%; either or both of a step of oxidizing the silicon wafer in a high oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of 5% or more and a step of annealing the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%; and a step of ramping down the temperature of the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%. A hydrogen chloride gas is mixed with the low oxygen partial pressure gas having an oxygen partial pressure ratio of less than 5% in at least one step from among the ramp-up step, the anneal step and the ramp-down step.
摘要:
A display executes a first reset operation during a blanking period, and second and third reset operations and a write operation during each selection period. The first reset operation includes connecting a current source to a precharge circuit and writing a first reset signal into the precharge circuit. The second reset operation includes connecting the current source to a drive circuit of a pixel and writing a second reset signal into the drive circuit to set a potential of a video signal line at a first potential. The third reset operation includes disconnecting the video signal line from the current source and making the precharge circuit output a reset current to the video signal line for a given length of time to shift the potential of the video signal line from the first potential to a second potential.
摘要:
A display sequentially executes first and second operations during a write period. The first operation includes making a first constant-current flow through a video signal line while connecting a first terminal of a drive control element to a power supply terminal connecting a second terminal and control terminal of the drive control element to the video signal line. The second operation includes making a second constant-current flow through the video signal line in a flow direction of the first constant-current while breaking a connection between the first terminal and the power supply terminal and/or a connection between the second terminal and the control terminal and connecting the control terminal to the video signal line. The display causes a difference between grayscale levels by changing a time period during which the second constant-current flows through the video signal line.
摘要:
A display includes pixels arrange in a matrix. Each pixel includes a display element, a first drive current control circuit which is supplied with a first video signal and outputs a first drive current to the display element at magnitude corresponding to magnitude of the first video signal, and a second drive current control circuit which is supplied with a second video signal and outputs a second drive current to the display element at magnitude corresponding to magnitude of the second video signal. The display can set a ratio T1/T2 larger than 1, wherein T1 represents a time period over which the first drive current control circuit can output the first drive current to the display element, and T2 represents a time period over which the second drive current control circuit can output the second drive current to the display element.
摘要:
An active matrix display device comprises a plurality of pixels which are arranged in the form of a matrix on a substrate and each of which includes a display element and a pixel circuit which supplies the display element with a drive current, video signal lines arranged along the pixels, and a video signal driver which, after the supply of base currents to the video signal lines, supplies the pixels with gradation currents through the video signal lines. The pixel circuit includes a pixel switch which controls whether or not to select the pixel, stores the difference current between the gradation and base currents when the pixel is selected and outputs the stored difference current to the display element as the drive current when the pixel is nonselected.
摘要:
An organic EL display device comprises an organic EL element PX in which a self light-emitting layer is held between an anode and a cathode, and a pixel switch SW′ for pixels formed of the organic EL element PX. Particularly, the pixel switch SW′ includes a source electrode and a drain electrode which is formed together with the anode on an interlayer insulating film so as to reflect the light laterally emitted from the self light-emitting layer.
摘要:
In oxygen ion implantation equipment, a chamber has a bottom wall on one end face thereof and is open in the other end face thereof. A wafer holder rotatably holding a plurality of wafers on the same circumference of a circle is housed in the chamber. Inside a cap closing an opening of the chamber while making the chamber airtight with a sealing member, a coolant passage is formed near the sealing member. A plurality of lamp heaters are disposed so as to extend in the direction of the tangent to the circumference of the cap and align parallel to the direction of the radius of the cap, in such a way as to face one wafer held by the wafer holder. When the plurality of lamp heaters are divided into inner lamps located on the inner side of the cap in the direction of the radius thereof and outer lamps located on the outer side of the cap in the direction of the radius thereof, the amount of heat applied to the wafer per unit time by the outer lamps is made larger than the amount of heat applied to the wafer per unit time by the inner lamps.
摘要:
According to one embodiment, a print head includes first and second substrates, an OLED array and a drive circuit. The first substrate extending in a first direction and has a main surface including first to third regions. The first region extends in the first direction. The second and third regions are arranged in a second direction crossing the first direction with the first region interposed between the second and third regions. The OLED array includes first electrodes arranged above the first region, an organic emitting layer positioned above the first electrodes, and a second electrode positioned above the organic emitting layer. The drive circuit is configured to supply drive currents to the first electrodes and includes a first circuit positioned above the third region and a second circuit positioned above the third region.
摘要:
This ion implantation apparatus is provided with a holding devise which holds the wafer, and which turns it along its circumference. In addition to holding the wafer at a prescribed position, the ion implantation apparatus subjects the wafer to ion implantation in regions where there is partial overlap of its circumference. The holding devise turns and inclines the wafer, and also holds the wafer by three or more holding pins. The side face of the holding pin has an inversely tapered shape, and the multiple holding pins include a first holding pin whose protrusion amount is relatively small, and a second holding pin whose protrusion amount is relatively large. The holding pin which is on the upper side from the center of the wafer in the planar direction of the inclined wafer is the second holding pin, and the angle of inclination of the side face of the second holding pin at a position where ions are implanted into the wafer has an angular degree which is equal to or less than an angle of incidence of the ion beam relative to the wafer.
摘要:
A MLD-SIMOX wafer is obtained by forming a first ion-implanted layer in a silicon wafer; forming a second ion-implanted layer that is in an amorphous state; and subjecting the wafer to a high-temperature heat treatment to maintain the wafer in an atmosphere containing oxygen at a temperature that is not lower than 1300° C. but lower than a silicon melting point to change the first and the second ion-implanted layers into a BOX layer, wherein the dose amount for the first ion-implanted layer is 1.25 to 1.5×1017 atoms/cm2, the dose amount for the second ion-implanted layer is 1.0×1014 to 1×1016 atoms/cm2, the wafer is preheated to a temperature of 50° C. to 200° C. before forming the second ion-implanted layer, and the second ion-implanted layer is formed in a state where it is continuously heated to a preheating temperature.
摘要翻译:通过在硅晶片中形成第一离子注入层来获得MLD-SIMOX晶片; 形成处于非晶状态的第二离子注入层; 并对该晶片进行高温热处理,将晶片保持在不低于1300℃但低于硅熔点的温度的氧气氛中,以改变第一和第二离子注入层 其中第一离子注入层的剂量为1.25〜1.5×10 17原子/ cm 2,第二离子注入层的剂量为1.0×10 14〜1×10 16原子/ cm 2,晶片 在形成第二离子注入层之前预热到50℃至200℃的温度,并且第二离子注入层在其被连续加热到预热温度的状态下形成。