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    SEGMENTED OVJP PRINT BAR
    31.
    发明申请
    SEGMENTED OVJP PRINT BAR 有权

    公开(公告)号：US20210234139A1

    公开(公告)日：2021-07-29

    申请号：US17228745

    申请日：2021-04-13

    Applicant: Universal Display Corporation

    Inventor： William E. QUINN ,  Gregory MCGRAW

    IPC: H01L51/56 ,  H01L51/50 ,  H01L51/00 ,  C23C14/22 ,  B41J2/04 ,  B41J2/155 ,  C23C14/04 ,  C23C14/12 ,  B41J25/316 ,  B41J25/308

    Abstract: Implementations of the disclosed subject matter provide a print bar for organic vapor jet (OVJP) deposition is provided that includes a plurality of n print head segments, where each of the plurality of print head segments may have an OVJP print head. The print bar may include a plurality of distance sensors, where each of the plurality of distance sensors may be configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments. The print bar may include a plurality of not more than n+1 actuators configured to adjust at least one of a position and an orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of distance sensors.

    ORGANIC VAPOR JET MICRO-PRINT HEAD WITH MULTIPLE GAS DISTRIBUTION ORIFICE PLATES
    33.
    发明申请
    ORGANIC VAPOR JET MICRO-PRINT HEAD WITH MULTIPLE GAS DISTRIBUTION ORIFICE PLATES 审中-公开

    公开(公告)号：US20200235296A1

    公开(公告)日：2020-07-23

    申请号：US16711476

    申请日：2019-12-12

    Applicant: Universal Display Corporation

    Inventor： Gregory MCGRAW ,  William E. QUINN ,  Roman KOROTKOV

    IPC: H01L51/00 ,  H01L51/56 ,  B05C5/02

    Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 p.m or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.

    Modular Confined Organic Print Head and System
    35.
    发明申请
    Modular Confined Organic Print Head and System 审中-公开

    公开(公告)号：US20190256968A1

    公开(公告)日：2019-08-22

    申请号：US16255040

    申请日：2019-01-23

    Applicant: Universal Display Corporation

    Inventor： William E. QUINN ,  Gregory MCGRAW ,  Matthew KING ,  Gregg KOTTAS

    IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24

    Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

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