Charged particle beam drawing apparatus and method
    32.
    发明授权
    Charged particle beam drawing apparatus and method 有权
    带电粒子束绘图装置及方法

    公开(公告)号:US08481964B2

    公开(公告)日:2013-07-09

    申请号:US12846215

    申请日:2010-07-29

    申请人: Yasuo Kato

    发明人: Yasuo Kato

    摘要: A charged particle beam drawing apparatus has a drawing chamber including a movable stage which supports a mask, the mask being formed by applying a resist to an upper surface of a mask substrate, an optical column for applying a charged particle beam to draw patterns in the resist, a charged particle beam dose correction portion for correcting a dose of the charged particle beam applied from the optical column to the resist on the basis of proximity effect and fogging effect, and a conversion coefficient changing portion for changing a conversion coefficient on the basis of pattern density in the resist and a position in the resist, wherein the conversion coefficient is a ratio of an accumulation energy of the charged particle beam accumulated in the resist, to an accumulation dose of the charged particle beam accumulated in the resist.

    摘要翻译: 带电粒子束描绘装置具有包括可移动台的拉伸室,其支撑掩模,所述掩模通过向掩模基板的上表面施加抗蚀剂而形成,用于施加带电粒子束以在 基于邻近效应和起雾效果,将从光学柱施加的带电粒子束的剂量校正到抗蚀剂的带电粒子束剂量校正部分,以及用于根据邻近效应和雾化效应改变转换系数的转换系数改变部分 抗蚀剂中的图案密度和抗蚀剂中的位置,其中转换系数是积聚在抗蚀剂中的带电粒子束的累积能量与积聚在抗蚀剂中的带电粒子束的累积剂量的比。

    Communication system
    33.
    发明授权
    Communication system 失效
    通讯系统

    公开(公告)号:US08340575B2

    公开(公告)日:2012-12-25

    申请号:US11883363

    申请日:2006-01-25

    申请人: Yasuo Kato

    发明人: Yasuo Kato

    IPC分类号: H04B5/00

    摘要: Stable receiving action is achieved with a receiver of simpler configuration.When a human hand is held over the panel unit 201, the electric field in the vicinity of the human body is coupled to the sensor electrode 2122 of the coil sensor 212 from the receiving electrode 211 of the panel unit 201, and alternate current is generated at the sensor electrode 2122. This alternate current then induces a magnetic flux inside the central opening of the coil 2121 in proportion to the strength of the electric field in the vicinity of the human body. Depending on the changes in this magnetic flux, electric current passes through the coil 2121. The electric current passing through the coil 2121 is converted by the electric current detecting circuit 2124 of the coil sensor 212 to voltage signals and transmitted as received signals to the demodulator 22. As a result, the received signals corresponding to the electric field in the vicinity of the human body, namely the transmission signals applied by the transmitter 1 to the human body, are obtained.

    摘要翻译: 采用简单配置的接收机实现稳定的接收动作。 当人的手被夹持在面板单元201上时,人体附近的电场从面板单元201的接收电极211耦合到线圈传感器212的传感器电极2122,并且产生交流电流 传感器电极2122.然后,该交流电流在线圈2121的中心开口内与人体附近的电场强度成比例地引起磁通。 取决于该磁通量的变化,电流通过线圈2121.通过线圈2121的电流被线圈传感器212的电流检测电路2124转换成电压信号并作为接收信号发送到解调器 结果,获得对应于人体附近的电场的接收信号,即由发射机1施加到人体的传输信号。

    SUBSTRATE HOLDING APPARATUS, CARRIER, SUBSTRATE PROCESSING APPARATUS, AND IMAGE DISPLAY DEVICE MANUFACTURING METHOD
    35.
    发明申请
    SUBSTRATE HOLDING APPARATUS, CARRIER, SUBSTRATE PROCESSING APPARATUS, AND IMAGE DISPLAY DEVICE MANUFACTURING METHOD 审中-公开
    基板保持装置,载体,基板处理装置和图像显示装置的制造方法

    公开(公告)号:US20100081355A1

    公开(公告)日:2010-04-01

    申请号:US12568396

    申请日:2009-09-28

    IPC分类号: H01J9/00

    CPC分类号: H01J9/241

    摘要: An apparatus comprises a carrier configured to hold a mask containing a magnetic material and a substrate by magnetically attracting the mask via the substrate, and a controller configured to control the carrier, the carrier including a permanent electromagnet and a first contact, the permanent electromagnet including a variable-polarity magnet, a coil electrically connected to the first contact and generates a magnetic field for changing the polarity of the variable-polarity magnet by an electric current supplied via the first contact, and a fixed-polarity magnet. The controller includes a second contact which is in contact with the first contact and supplies an electric current to the coil via the first contact, a sensor unit which senses a contact state between the first contact and the second contact, and a current supply unit which supplies an electric current to the coil via the first contact and the second contact.

    摘要翻译: 一种装置,包括:载体,被配置为通过经由衬底磁吸引掩模来保持包含磁性材料和基底的掩模;以及控制器,被配置为控制载体,所述载体包括永久电磁体和第一接触,所述永磁电动机包括 一个可变极性磁体,一个电连接到该第一触点的线圈,并产生用于通过经由该第一触点提供的电流来改变该可变极性磁体的极性的磁场和一个固定极性的磁体。 所述控制器包括与所述第一接触件接触并且经由所述第一接触件向所述线圈提供电流的第二接触件,感测所述第一接触件和所述第二接触件之间的接触状态的传感器单元和电流供应单元, 经由第一触点和第二触点向线圈供给电流。

    Method of manufacturing an actuator
    36.
    发明授权
    Method of manufacturing an actuator 有权
    制造执行机构的方法

    公开(公告)号:US07549207B2

    公开(公告)日:2009-06-23

    申请号:US11290821

    申请日:2005-12-01

    IPC分类号: H02K15/00

    摘要: A manufacturing method for an actuator including a casing and a housing. The method includes setting a metallic ring in a molding die; injection molding a first flange portion of the casing using one annular hooking piece of the metallic ring as a part of a surface of the molding die so as to outsert-mold the metallic ring on a molded surface of the first flange portion, the molded surface being opposite to a first connecting end surface of the first flange portion; engaging the first flange portion with a second flange portion of the housing so as to be opposed to each other; and applying force to bend the metallic ring to form an other annular hooking piece, thereby crimping and fixing the first connecting end surface of the casing with a second connecting end surface of the housing.

    摘要翻译: 一种用于包括壳体和壳体的致动器的制造方法。 该方法包括在成型模具中设置金属环; 使用所述金属环的一个环形钩件作为所述成形模的表面的一部分注射成型所述壳体的第一凸缘部,以将所述金属环外露于所述第一凸缘部的模制表面上,所述模制表面 与所述第一凸缘部的第一连接端面相对; 将所述第一凸缘部分与所述壳体的第二凸缘部分接合以彼此相对; 并且施加力弯曲金属环以形成另一个环形钩形件,由此用壳体的第二连接端表面压接和固定壳体的第一连接端表面。

    Leak detector for evaporated fuel
    37.
    发明授权
    Leak detector for evaporated fuel 有权
    泄漏检测器用于蒸发燃料

    公开(公告)号:US07231813B2

    公开(公告)日:2007-06-19

    申请号:US11324582

    申请日:2006-01-04

    IPC分类号: G01M3/28 G01M3/32

    CPC分类号: F02M25/089 F02M25/0836

    摘要: An evaporated fuel leak detector detects leakage of an evaporated fuel generated in a fuel tank. The detector includes: a differential pressure valve, a pump for sucking a detection port side to reduce pressure on a fuel tank side, and pressure detection means for detecting pressure on a detection port side. The valve includes a detection port connecting to a fuel tank side, an atmosphere port opened to atmosphere, a pressure chamber and a valve member displaceable in accordance with differential pressure between the detection port and the pressure chamber for connecting and disconnecting a connection between the detection port and the atmosphere port. The valve member disconnects between the detection port and the atmosphere port in a case where pressure of the pressure chamber becomes larger than pressure of the detection port by a predetermined pressure.

    摘要翻译: 蒸发的燃料泄漏检测器检测在燃料箱中产生的蒸发燃料的泄漏。 检测器包括:差压阀,用于吸入检测口侧以减少燃料箱侧的压力的泵以及用于检测检测口侧的压力的压力检测单元。 阀包括连接到燃料箱侧的检测口,向大气开放的气氛口,压力室和阀构件,其可根据检测口和压力室之间的压差而移动,用于连接和断开检测之间的连接 港口和大气港口。 在压力室的压力变得大于检测口的压力预定压力的情况下,阀构件在检测口与大气口之间断开。

    Subjective optometric apparatus
    38.
    发明授权
    Subjective optometric apparatus 失效
    主观验光仪

    公开(公告)号:US07159984B2

    公开(公告)日:2007-01-09

    申请号:US10639441

    申请日:2003-08-13

    IPC分类号: A61B3/04 A61B3/02

    CPC分类号: A61B3/04 A61B3/0285 G06F19/00

    摘要: Disclosed is a subjective optometric apparatus in which the earpiece members and the nose pad member for attaching the main body of the device to the subject can be easily adjusted without involving any effort. The subjective optometric apparatus has a horizontal frame and an inner tube inserted into the horizontal frame, with a support bar for supporting a nose pad member being passed through the horizontal frame and the inner tube. In a state in which the inner tube is being biased by a spring, a rubber member provided in a through-hole of the inner tube abuts the peripheral surface of the support bar to lock the support bar, thereby bringing the nose pad member into a locked state. Further, when a push-button is pushed in against the biasing force of the spring, the inner tube is displaced and the rubber member is detached from the peripheral surface of the support bar, with the result that the nose pad member is released from the locked state and becomes capable of being displaced.

    摘要翻译: 公开了一种主观验光装置,其中可以容易地调节用于将装置的主体附接到被摄体的听筒构件和鼻垫构件,而不需要任何努力。 主观验光装置具有插入水平框架中的水平框架和内管,其中支撑杆用于支撑鼻垫构件穿过水平框架和内管。 在内管被弹簧偏压的状态下,设置在内管的通孔中的橡胶构件与支撑杆的周面抵接,以锁定支撑杆,从而使鼻垫构件成为 锁定状态。 此外,当按压按压弹簧的偏压力时,内管被移动,并且橡胶构件从支撑杆的外周表面脱离,结果鼻垫构件从 锁定状态并变得有能力流离失所。

    Electromagnetic combination valve
    39.
    发明申请
    Electromagnetic combination valve 审中-公开
    电磁组合阀

    公开(公告)号:US20060185735A1

    公开(公告)日:2006-08-24

    申请号:US11356182

    申请日:2006-02-17

    IPC分类号: F16K31/14

    CPC分类号: F02M25/0836 Y10T137/7782

    摘要: An electromagnetic combination valve has an electromagnetic driving portion, a housing, a spring, and a first and a second valves. A coil in the electromagnetic driving portion generates a magnetomotive force when it is energized to attract the first valve to open the first valve. The second valve opens by being urged to the one side in an axial direction by the spring when a pressure of a fluid to urge the second valve in a valve-closing direction of the second valve decreases to a predetermined value when the first valve opens. The second valve has a sealing rubber on an end face thereof, to form an airtight seal at a gap between a valve seat of the housing and the second valve. The sealing rubber generates a repulsive force smaller than the urging force of the spring in the axial direction.

    摘要翻译: 电磁组合阀具有电磁驱动部分,壳体,弹簧以及第一和第二阀。 当电磁驱动部分中的线圈通电时产生磁动势以吸引第一阀以打开第一阀。 当第一阀打开时,当在第二阀的关闭方向推动第二阀的流体的压力降低到预定值时,第二阀通过弹簧沿轴向被推向一侧。 第二阀在其端面上具有密封橡胶,以在壳体的阀座与第二阀之间的间隙处形成气密密封。 密封橡胶产生比弹簧在轴向上的作用力小的推斥力。

    Fluid control valve
    40.
    发明申请
    Fluid control valve 有权
    流体控制阀

    公开(公告)号:US20060185652A1

    公开(公告)日:2006-08-24

    申请号:US11356186

    申请日:2006-02-17

    IPC分类号: F16K31/02 F02M25/08

    摘要: A fluid control valve has: a housing in which a fluid passage is formed; a valve seat in which a fluid flow hole is formed to be communicated with the fluid passage; and a valve that is formed from rubber elastic body. At least a part of the housing is formed from resin. The valve has a valve seal portion and is installed in the housing to be able to close the fluid flow hole. In a valve-closing time, the valve seal portion is seated on the valve seat. The valve seal portion is coated by a thin diamond-like carbon coating having hardness between Hv 50 and Hv 500 in Vickers hardness.

    摘要翻译: 流体控制阀具有:形成流体通道的壳体; 阀座,其中流体流动孔形成为与流体通道连通; 以及由橡胶弹性体形成的阀。 壳体的至少一部分由树脂形成。 阀具有阀密封部分并且安装在壳体中以能够关闭流体流动孔。 在关阀时间中,阀密封部分位于阀座上。 阀密封部分由硬度为Hv 50和Hv 500之间的维氏硬度的薄金刚石状碳涂层涂覆。