Film formation method and apparatus for semiconductor process
    31.
    发明授权
    Film formation method and apparatus for semiconductor process 有权
    用于半导体工艺的成膜方法和装置

    公开(公告)号:US08168270B2

    公开(公告)日:2012-05-01

    申请号:US11896752

    申请日:2007-09-05

    IPC分类号: C23C16/513

    摘要: An oxide film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas including a source gas containing a film source element and no amino group, a second process gas including an oxidizing gas, and a third process gas including a preliminary treatment gas. A first step includes an excitation period of supplying the third process gas excited by an exciting mechanism, thereby performing a preliminary treatment on the target substrate by preliminary treatment gas radicals. A second step performs supply of the first process gas, thereby adsorbing the film source element on the target substrate. A third step includes an excitation period of supplying the second process gas excited by an exciting mechanism, thereby oxidizing the film source element adsorbed on the target substrate by oxidizing gas radicals.

    摘要翻译: 在目标基板上通过CVD形成氧化膜,在选择性地供给包括含有膜源元素而不含氨基的源气体的第一工艺气体的工艺领域中,包含氧化气体的第二工艺气体和 包括初步处理气体的第三工艺气体。 第一步骤包括供给由激励机构激励的第三处理气体的激发期,由此通过预处理气体基团对目标基板进行预处理。 第二步进行第一处理气体的供给,从而将膜源元件吸附在目标基板上。 第三步骤包括供给由激励机构激励的第二处理气体的激励周期,从而通过氧化气体基团氧化吸附在目标基板上的膜源元件。

    Method and apparatus for processing line drawings in images
    32.
    发明授权
    Method and apparatus for processing line drawings in images 有权
    图像处理线条图的方法和装置

    公开(公告)号:US07889938B2

    公开(公告)日:2011-02-15

    申请号:US11689326

    申请日:2007-03-21

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: G06K9/36

    CPC分类号: G06K9/481

    摘要: In an image processing method, contour information is extracted on the basis of terminal points and intersections included in a thinned line drawing, the contour information being extracted for each of closed curves and line elements connecting the terminal points and the intersections included in the line drawing, and skeletonized vector data is generated on the basis of the contour information. Start and end terminal points in the skeletonized vector data are determined. Artificial vectors to be inserted between the determined start and end terminal points are generated, and artificial-vector-inserted vector data including the generated artificial vectors is generated. A smoothing process is performed for the artificial-vector-inserted vector data, and then smoothed, non-circumference vector data is generated on the basis of the start and end terminal points. The thinned line drawing is raster-scanned in units of a pixel matrix.

    摘要翻译: 在图像处理方法中,基于包括在细线图中的终点和交点,提取轮廓信息,为每个闭合曲线提取轮廓信息,并且连接终点和与线条图中包含的交点的线元素 并且基于轮廓信息生成骨架化矢量数据。 确定骨架化矢量数据中的起点和终点。 生成在确定的开始和结束终点之间插入的人造矢量,并且生成包括所生成的人造矢量的人造矢量插入矢量数据。 对人造矢量插入矢量数据执行平滑处理,然后基于开始和结束终点产生平滑的非圆周矢量数据。 细化线条以像素矩阵为单位进行光栅扫描。

    IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND PROGRAM
    33.
    发明申请
    IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND PROGRAM 有权
    图像处理设备,图像处理方法和程序

    公开(公告)号:US20100266209A1

    公开(公告)日:2010-10-21

    申请号:US12756289

    申请日:2010-04-08

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: G06K9/46

    CPC分类号: H04N1/40062 H04N1/41

    摘要: The present invention provides an image processing apparatus which able to shorten processing time and includes an image inputting unit that inputs an image, a region division unit that generates region information by dividing an input image input by the image inputting unit into regions having a plurality of different types of attributes, including a frame region attribute, a non-frame region processing unit that obtains data of respective regions other than frame regions by applying attribute-specific processing for respective regions, excluding frame regions, included in the input image on the basis of the input image and the region information, and executes processing of filling of the processed regions, and a frame region processing unit that executes reduction processing and vectorization processing for the frame region according to the region size of the frame region.

    摘要翻译: 本发明提供一种能够缩短处理时间并包括输入图像的图像输入单元的图像处理装置,通过将由图像输入单元输入的输入图像分割为具有多个图像的区域来生成区域信息的区域分割单元 不同类型的属性,包括帧区域属性,非帧区域处理单元,其通过对包括在输入图像中的各个区域(包括帧区域)的各个区域进行属性特定处理,基于该帧区域属性来获取除了帧区域之外的各个区域的数据 并且执行处理区域的填充处理,以及帧区域处理单元,其根据帧区域的区域大小对帧区域执行缩小处理和矢量化处理。

    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING MEHTOD
    34.
    发明申请
    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING MEHTOD 有权
    图像处理设备和图像处理器

    公开(公告)号:US20100158365A1

    公开(公告)日:2010-06-24

    申请号:US12640191

    申请日:2009-12-17

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: G06K9/36

    摘要: Noise does not occur even if an image of an object region extracted from an input image and a background image are stored separately, and then displayed or printed, at a boundary portion of the object region. A boundary region is set at the inner side of the object region of the input image, and a pixel value of an adjacent pixel at the outer side of the boundary of the object region is written to a corresponding pixel in the boundary region. Even if a difference occurs between the background image and the object image, when a document file is displayed or printed, since the pixel value of the pixel at the outer side of the object region is assigned to the pixel in the boundary region, noise due to average color does not occur.

    摘要翻译: 即使从输入图像和背景图像提取的对象区域的图像分开存储,然后显示或打印在对象区域的边界部分,也不会发生噪点。 将边界区域设置在输入图像的对象区域的内侧,并且将对象区域的边界外侧的相邻像素的像素值写入边界区域中的相应像素。 即使背景图像和对象图像之间出现差异,当显示或打印文档文件时,由于将对象区域外侧的像素的像素值分配给边界区域中的像素,所以会产生噪声 平均颜色不会发生。

    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD
    35.
    发明申请
    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD 有权
    图像处理装置和图像处理方法

    公开(公告)号:US20090273689A1

    公开(公告)日:2009-11-05

    申请号:US12505960

    申请日:2009-07-20

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: H04N5/228 H04N5/225

    CPC分类号: H04N5/232 H04N5/23222

    摘要: It is determined whether or not there is inconsistency between image sensing mode data, which is set by an operator with respect to a scene including an object of shooting, and attribute data, e.g., focal length data or the like, that accompanies an obtained image. When it is determined that there is inconsistency between the image sensing mode data and attribute data, a caution is given to the operator that it is necessary to maintain consistency.

    摘要翻译: 确定操作者相对于包括拍摄对象的场景设置的图像感测模式数据与伴随所获得的图像的属性数据(例如焦距数据等)是否不一致 。 当确定图像感测模式数据和属性数据之间存在不一致时,操作者应谨慎地保持一致性。

    IMAGE PROCESSING APPARATUS AND METHOD AND PROGRAM STORAGE MEDIUM
    36.
    发明申请
    IMAGE PROCESSING APPARATUS AND METHOD AND PROGRAM STORAGE MEDIUM 有权
    图像处理设备和方法和程序存储介质

    公开(公告)号:US20090123037A1

    公开(公告)日:2009-05-14

    申请号:US12349139

    申请日:2009-01-06

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: G06K9/00 G06K9/32

    摘要: According to the present invention, the face of a subject person can be rapidly detected. An image input unit inputs an image to be processed. A photographing-position input unit inputs photographing-position information attached to the processed image. An angle-range information determination unit determines an angle range, where face detection should be performed to the processed image, on the basis of the information obtained by the photographing-position information input unit. On the basis of information indicating the determined angle range, under the control of a process control unit, a face detection unit performs face detection to the processed image input by the image input unit in predetermined angle increments. A face integration unit integrates all of face data detected by a basic-angle-range face detection unit into face information and then outputs the information.

    摘要翻译: 根据本发明,可以快速地检测被摄体的脸部。 图像输入单元输入要处理的图像。 拍摄位置输入单元输入附加到处理图像的拍摄位置信息。 角度范围信息确定单元基于由拍摄位置信息输入单元获得的信息来确定对处理后的图像进行面部检测的角度范围。 基于指示确定的角度范围的信息,在处理控制单元的控制下,面部检测单元以预定的角度增量对由图像输入单元输入的处理图像执行面部检测。 面部积分单元将由基准角度范围面部检测单元检测出的全部面部数据整合到面部信息中,然后输出该信息。

    IMAGE PROCESSING METHOD AND IMAGE PROCESSING APPARATUS
    37.
    发明申请
    IMAGE PROCESSING METHOD AND IMAGE PROCESSING APPARATUS 有权
    图像处理方法和图像处理装置

    公开(公告)号:US20070230809A1

    公开(公告)日:2007-10-04

    申请号:US11689326

    申请日:2007-03-21

    申请人: Yoshihiro Ishida

    发明人: Yoshihiro Ishida

    IPC分类号: G06K9/48

    CPC分类号: G06K9/481

    摘要: In an image processing method, contour information is extracted on the basis of terminal points and intersections included in a thinned line drawing, the contour information being extracted for each of closed curves and line elements connecting the terminal points and the intersections included in the line drawing, and skeletonized vector data is generated on the basis of the contour information. Start and end terminal points in the skeletonized vector data are determined. Artificial vectors to be inserted between the determined start and end terminal points are generated, and artificial-vector-inserted vector data including the generated artificial vectors is generated. A smoothing process is performed for the artificial-vector-inserted vector data, and then smoothed, non-circumference vector data is generated on the basis of the start and end terminal points. The thinned line drawing is raster-scanned in units of a pixel matrix.

    摘要翻译: 在图像处理方法中,基于包括在细线图中的终点和交点,提取轮廓信息,为每个闭合曲线提取轮廓信息,并且连接终点和与线条图中包含的交点的线元素 并且基于轮廓信息生成骨架化矢量数据。 确定骨架化矢量数据中的起点和终点。 生成在确定的开始和结束终点之间插入的人造矢量,并且生成包括所生成的人造矢量的人造矢量插入矢量数据。 对人造矢量插入矢量数据执行平滑处理,然后基于开始和结束终点产生平滑的非圆周矢量数据。 细化线条以像素矩阵为单位进行光栅扫描。

    Polishing apparatus and method for producing semiconductors using the apparatus
    39.
    发明授权
    Polishing apparatus and method for producing semiconductors using the apparatus 有权
    抛光装置及其制造方法

    公开(公告)号:US07166013B2

    公开(公告)日:2007-01-23

    申请号:US11004991

    申请日:2004-12-07

    摘要: The present invention relates to a polishing apparatus, and a semiconductor manufacturing method using the apparatus. Dressing of a grindstone surface is ground by sizing processing whereby dressing of a tool surface can be done while preventing occurrence of cracks on the grindstone surface which is the cause for occurrence of scratches. Further, flatness of the surface of a dressing tool can be guaranteed because of sizing cutting-in; even if a thick grindstone of a few centimeters is used, the flatness can be maintained to the end; and processing with less in-face unevenness can be always carried out. Therefore, the life of the dressing tool can be greatly extended.Further, the present sizing-dressing is carried out jointly with processing of a wafer to thereby enable improvement of throughput of the apparatus as well as maintenance of a processing rate.The present apparatus and method are effective for planarization of various substrate surfaces having irregularities.

    摘要翻译: 本发明涉及一种抛光装置以及使用该装置的半导体制造方法。 磨石表面的磨合通过施胶处理进行研磨,由此可以进行工具表面的修整,同时防止在磨石表面产生裂纹,这是产生划痕的原因。 此外,可以保证修整工具的表面的平整度,因为切割的尺寸大小; 即使使用了几厘米厚的砂轮,也可以保持平坦度, 并且可以总是执行具有较少的面内不均匀性的处理。 因此,修整工具的寿命可以大大延长。 此外,与晶片的处理联合进行本施胶修整,从而能够提高装置的生产量以及维持处理速度。 本装置和方法对于具有不规则性的各种衬底表面的平坦化是有效的。