Electronic device and method of making same
    31.
    发明申请
    Electronic device and method of making same 有权
    电子设备及其制作方法

    公开(公告)号:US20090271962A1

    公开(公告)日:2009-11-05

    申请号:US12458274

    申请日:2009-07-07

    摘要: The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A. It significantly suppresses a situation of dissolution of the piezoelectric film 52A and realizes improvement in characteristics of the piezoelectric device 74 made.

    摘要翻译: 本发明提供了具有改进特性的电子设备和制造该电子设备的方法。 在制造根据本发明的电子设备(压电器件)74的方法中,形成在层压体60的电极膜46A上的压电膜52A的外边缘R1位于电极膜46A的外边缘R2的内侧 。 因此,从蚀刻液在聚酰亚胺72和层叠体60之间渗透的多层基板61去除单晶Si基板14时,蚀刻液在其到达压电膜52A之前就绕过电极膜46A。 也就是说,通过电极膜46A显着地延长到压电膜52A的蚀刻溶液的路线A. 因此,在制造电子设备74的方法中,蚀刻溶液不太可能到达压电膜52A。 这显着地抑制了压电膜52A的溶解情况,并且实现了所制作的压电装置74的特性的改善。

    Thin-film device
    32.
    发明申请
    Thin-film device 有权
    薄膜装置

    公开(公告)号:US20070194404A1

    公开(公告)日:2007-08-23

    申请号:US11701458

    申请日:2007-02-02

    IPC分类号: H01L29/00

    CPC分类号: H01L27/016 H01L27/12

    摘要: A thin-film device incorporates: a substrate; an insulating layer, a lower conductor layer, a dielectric film, an insulating layer, an upper conductor layer and a protection film that are stacked in this order on the substrate; and four terminal electrodes. The four terminal electrodes touch part of end faces of the upper conductor layer, and part of the top surface of the upper conductor layer contiguous to the end faces. The protection film has four concave portions, each of which has a shape that is recessed inward from the edge of the protection film except portions thereof corresponding to these concave portions. The four concave portions expose respective portions of the top surface of the upper conductor layer that touch the four terminal electrodes. The four concave portions accommodate respective portions of the four terminal electrodes.

    摘要翻译: 薄膜器件包括:衬底; 绝缘层,下导体层,电介质膜,绝缘层,上导体层和保护膜,其依次层叠在基板上; 和四个端子电极。 四个端子电极接触上导体层的端面的一部分,并且上导体层的顶表面的与端面相邻的部分。 保护膜具有四个凹部,每个凹部具有从除了与这些凹部对应的部分之外的保护膜的边缘向内凹陷的形状。 四个凹部露出接触四个端子电极的上部导体层的上表面的各个部分。 四个凹部容纳四个端子电极的各部分。

    Thin-film piezoelectric element and method of making same
    33.
    发明授权
    Thin-film piezoelectric element and method of making same 有权
    薄膜压电元件及其制造方法

    公开(公告)号:US07247975B2

    公开(公告)日:2007-07-24

    申请号:US11078565

    申请日:2005-03-14

    IPC分类号: H01L41/08

    摘要: Provided is a thin-film piezoelectric element which reduces the influence of an oxide film left on the electrode film on the degradation of element characteristics, and a method of making the thin-film piezoelectric element. The thin-film piezoelectric element has ZrO2 as the main component of the outermost layer of the oxide film which covers the laminate. Young's modulus of the ZrO2 is 190 GPa, giving a significantly low value compared with Young's modulus of MgO, 245 GPa. Consequently, the influence of the oxide film on the reduction in the displacement magnitude of the piezoelectric film is smaller than the influence of the MgO thin film left in the conventional thin-film piezoelectric element. As a result, the thin-film piezoelectric element decreases the influence of the oxide film on the degradation of element characteristics compared with the conventional thin-film piezoelectric element.

    摘要翻译: 本发明提供一种能够减少留在电极膜上的氧化膜对元件特性劣化的影响的薄膜压电元件,以及制造该薄膜压电元件的方法。 薄膜压电元件以覆盖层叠体的氧化膜的最外层的主要成分为ZrO 2。 ZrO 2的杨氏模量为190GPa,与MgO的杨氏模量245GPa相比,显着低得多。 因此,氧化膜对压电膜的位移幅度的减小的影响小于常规薄膜压电元件中残留的MgO薄膜的影响。 结果,与传统的薄膜压电元件相比,薄膜压电元件降低了氧化膜对元件特性的降低的影响。

    Thin-film device and method of manufacturing same
    35.
    发明申请
    Thin-film device and method of manufacturing same 有权
    薄膜器件及其制造方法

    公开(公告)号:US20070120130A1

    公开(公告)日:2007-05-31

    申请号:US11588321

    申请日:2006-10-27

    IPC分类号: H01L33/00

    CPC分类号: H01L28/40

    摘要: A thin-film device comprises: a substrate; a flattening film made of an insulating material and disposed on the substrate; and a capacitor provided on the flattening film. The capacitor incorporates: a lower conductor layer disposed on the flattening film; a dielectric film disposed on the lower conductor layer; and an upper conductor layer disposed on the dielectric film. The thickness of the dielectric film falls within a range of 0.02 to 1 μm inclusive and is smaller than the thickness of the lower conductor layer. The surface roughness in maximum height of the top surface of the flattening film is smaller than that of the top surface of the substrate and equal to or smaller than the thickness of the dielectric film. The surface roughness in maximum height of the top surface of the lower conductor layer is equal to or smaller than the thickness of the dielectric film.

    摘要翻译: 薄膜器件包括:衬底; 由绝缘材料制成并设置在基板上的扁平薄膜; 以及设置在平坦化膜上的电容器。 电容器包括:设置在平坦化膜上的下导体层; 设置在下导体层上的电介质膜; 以及设置在电介质膜上的上导体层。 电介质膜的厚度在0.02〜1μm的范围内,小于下导体层的厚度。 平坦化膜的上表面的最大高度的表面粗糙度小于衬底顶表面的表面粗糙度,等于或小于电介质膜的厚度。 下导体层的上表面的最大高度的表面粗糙度等于或小于电介质膜的厚度。

    Suspension assembly, hard disk drive, and method of manufacturing suspension assembly
    37.
    发明申请
    Suspension assembly, hard disk drive, and method of manufacturing suspension assembly 有权
    悬挂组件,硬盘驱动器和制造悬架组件的方法

    公开(公告)号:US20050195531A1

    公开(公告)日:2005-09-08

    申请号:US11054280

    申请日:2005-02-10

    CPC分类号: G11B5/56 G11B5/483 G11B5/5552

    摘要: A head slider having a thin film magnetic head is mounted on a suspension assembly. The suspension assembly is comprised of a metal plate-like member, and a piezoelectric actuator for displacing the head slider relative to the suspension assembly. The piezoelectric actuator has a piezoelectric film, and a pair of electrode films placed so as to sandwich the piezoelectric film in between. The piezoelectric film and the pair of electrode films are formed in an order of one electrode film, the piezoelectric film, and the other electrode film on the plate-like member.

    摘要翻译: 具有薄膜磁头的磁头滑块安装在悬架组件上。 悬架组件由金属板状构件和用于相对于悬架组件移位头滑块的压电致动器构成。 压电致动器具有压电膜和一对电极膜,以将压电膜夹在其间。 压电膜和一对电极膜按板状构件上的一个电极膜,压电膜和另一个电极膜的顺序形成。

    Non-contact signal transmission device having a magnetoresistive element for communicating between mutually insulated electrical circuits
    38.
    发明授权
    Non-contact signal transmission device having a magnetoresistive element for communicating between mutually insulated electrical circuits 有权
    具有用于在相互绝缘的电路之间连通的磁阻元件的非接触式信号传输装置

    公开(公告)号:US08326222B2

    公开(公告)日:2012-12-04

    申请号:US12659795

    申请日:2010-03-22

    IPC分类号: H04B5/00 G02B27/00

    CPC分类号: H04B5/0031 H04B5/0081

    摘要: A signal transmission device includes: an input signal conductor in which an input signal current flows and thereby generating an input signal magnetic field; a magnetically-biasing conductor in which a biasing current flows and thereby generating a biasing magnetic field; and one or more magnetoresistive elements in each of which a sensing current flows and thereby generating a self-biasing magnetic field, and each including a magnetization free layer having a magnetization direction which varies in response to the input signal magnetic field, the biasing magnetic field, and the self-biasing magnetic field. Each of the biasing magnetic field and the self-biasing magnetic field is applied to the magnetization free layer in a same direction to each other.

    摘要翻译: 信号传输装置包括:输入信号导体,其中输入信号电流流动,从而产生输入信号磁场; 磁偏置导体,其中偏置电流流动,从而产生偏置磁场; 以及一个或多个磁阻元件,其中每一个感测电流流动,从而产生自偏置磁场,并且每个磁阻元件包括响应于输入信号磁场而变化的磁化方向的磁化自由层,偏置磁场 ,和自偏磁场。 偏置磁场和自偏磁场中的每一个以彼此相同的方向施加到磁化自由层。

    Electronic component
    39.
    发明授权
    Electronic component 有权
    电子元器件

    公开(公告)号:US08013257B2

    公开(公告)日:2011-09-06

    申请号:US12344011

    申请日:2008-12-24

    IPC分类号: H05K1/16

    摘要: The present invention provides an electronic component which is capable of effectively suppressing the characteristic deterioration of the passive element portion. An electronic component comprises a ceramic substrate, a passive element portion on the substrate, an insulator layer which is provided over the passive element portion and comprises a through-hole, a lead terminal which is fitted in the through-hole of the insulator layer and electrically connected to the passive element portion, and an external connection terminal which is electrically connected to the lead terminal. The insulator layer comprises a first face on the side of the passive element portion, a second face on the side opposite the passive element portion, and a third face which connects the first face and the second face and constitutes the peripheral face of the insulator layer, the external connection terminal is in contact with the lead terminal and the second face and the third face of the insulator layer. In a cross-section of the through-hole in a thickness direction of the substrate, a boundary line between the internal surface of the through-hole and the lead terminal is inclined in a direction moving away from a region of the third face with which the external connection terminal is in contact with an end of the boundary line on the side of the first face being taken as a fixed point.

    摘要翻译: 本发明提供能够有效地抑制无源元件部的特性劣化的电子部件。 电子部件包括陶瓷基板,基板上的无源元件部分,设置在无源元件部分上方并包括通孔的绝缘体层,安装在绝缘体层的通孔中的引线端子和 电连接到无源元件部分,以及电连接到引线端子的外部连接端子。 绝缘体层包括无源元件部分侧的第一面,与无源元件部分相对的一侧上的第二面以及连接第一面和第二面的第三面,并构成绝缘体层的外周面 外部连接端子与引线端子和绝缘体层的第二面和第三面接触。 在贯通孔的基板的厚度方向的截面中,贯通孔的内表面与引线端子之间的边界线沿着从第三面的区域移开的方向倾斜, 外部连接端子与第一面侧的边界线的端部接触,作为固定点。

    Electronic component comprising a coil conductor and a capacity element
    40.
    发明授权
    Electronic component comprising a coil conductor and a capacity element 有权
    电子元件包括线圈导体和电容元件

    公开(公告)号:US07859080B2

    公开(公告)日:2010-12-28

    申请号:US11606931

    申请日:2006-12-01

    IPC分类号: H01L27/08

    摘要: The invention provides an electronic component which has an improved breakdown limit value of withstand voltage and improved insulation properties and which can be made compact and provided with a multiplicity of layers and a great capacity. The electronic component includes a first conductor having a bottom conductor formed on a substrate and a raised conductor formed to protrude from the bottom conductor, a dielectric film formed on the raised conductor, and a second conductor formed on the dielectric film to constitute a capacitor element in combination with the raised conductor and the dielectric film.

    摘要翻译: 本发明提供一种具有改进的耐电压击穿极限值和改善的绝缘性能的电子部件,其可以制成紧凑的并具有多层和大容量。 电子部件包括:第一导体,其具有形成在基板上的底部导体和形成为从底部导体突出的凸起导体,形成在凸起导体上的电介质膜和形成在电介质膜上的第二导体,以构成电容器元件 与凸起的导体和电介质膜组合。