公开(公告)号：US20250092502A1

公开(公告)日：2025-03-20

申请号：US18730310

申请日：2023-03-07

Applicant: MITSUBISHI HEAVY INDUSTRIES AERO ENGINES, LTD. ,  FUJIMI INCORPORATED ,  TOCALO CO., LTD.

Inventor： Arata KINOUCHI ,  Takaya MASUDA ,  Yoichiro HABU ,  Kaito TAKAGI ,  Kazuo NODA

IPC: C23C4/18 ,  C23C4/02 ,  C23C4/11 ,  C23C4/134

Abstract: A method for applying a thermal barrier coating according to an embodiment, includes: a step of forming a top coat layer on a bond coat layer formed on a heat-resistant alloy base material of an object. The step of forming the top coat layer includes forming the top coat layer by thermal-spraying a suspension, which contains ceramic powder, with atmospheric pressure plasma spraying, while cooling a portion of a plasma flame by supplying water as a cooling fluid to a periphery of the plasma flame at a supply rate of not less than 25 ml/min and not greater than 100 ml/min.

公开(公告)号：US20250051900A1

公开(公告)日：2025-02-13

申请号：US18706873

申请日：2023-03-30

Applicant: TOCALO CO., LTD.

Inventor： Akihiro MISHIMA ,  Tomoki FUNATSU ,  Keisuke NICHO

IPC: C23C4/18 ,  C23C4/11 ,  C23C4/134

Abstract: To provide a surface treatment method for smoothing the surface of a ceramic thermal spray coating, and a ceramic thermal spray coating subjected to the surface smoothing treatment.
A surface treatment method for a ceramic thermal spray coating, which comprises jetting a slurry containing a liquid having a viscosity at a temperature of 20° C. of 10 mPa/s or lower and a powder medium having a polyhedral structure and having a median diameter (D50) of from 1 to 50 μm with a content of the powder medium of from 1 to 50 vol %, against a surface of a ceramic thermal spray coating, using a compressed gas under a pressure of from 0.01 to 1.0 MPa, to smooth the surface of the ceramic thermal spray coating.

公开(公告)号：US20240043982A1

公开(公告)日：2024-02-08

申请号：US18266481

申请日：2021-11-18

Applicant: TOCALO Co., Ltd. ,  FUJIMI INCORPORATED

Inventor： Yasuhiro Shiojiri ,  Tatsuo Suidzu ,  Kensuke Taguchi ,  Hiroaki Mizuno ,  Takaya Masuda

IPC: C23C4/04 ,  H01J37/32

CPC classification number: C23C4/04 ,  H01J37/32477 ,  C23C4/134

Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.

公开(公告)号：US11631574B2

公开(公告)日：2023-04-18

申请号：US16764042

申请日：2018-10-29

Applicant: TOCALO CO., LTD.

Inventor： Shikou Abukawa ,  Kensuke Taguchi ,  Yu Asakimori ,  Ryutaro Kawamura

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).

公开(公告)号：US11131014B2

公开(公告)日：2021-09-28

申请号：US15568445

申请日：2016-03-23

Applicant: TOCALO CO., LTD.

Inventor： Hiroki Yokota ,  Daisuke Kawai ,  Tatsuo Suidzu

IPC: B23K26/00 ,  C23C4/02 ,  B23K26/352 ,  C23C28/04 ,  C23C8/10 ,  C23C8/02 ,  C23C8/80 ,  C23C4/134

Abstract: A ceramic substrate is irradiated in an atmospheric air with a laser having a power density of 1.0×107-1.0×109 W/cm2 for an action time on an irradiation area of 1.0×10−7-1.0×10−5 s to roughen a surface of the ceramic substrate, as well as to form an oxide layer on a roughened surface. A thermal sprayed coating formed on the ceramic substrate sufficiently adheres to the ceramic substrate via the oxide layer.

公开(公告)号：US10914342B2

公开(公告)日：2021-02-09

申请号：US16229244

申请日：2018-12-21

Applicant: DENSO CORPORATION ,  TOHOKU UNIVERSITY ,  TOCALO Co., Ltd.

Inventor： Kentaro Kishi ,  Yasunori Niiyama ,  Koshi Adachi ,  Shinya Miki

IPC: F16C33/12 ,  F16C33/10 ,  F16C33/04 ,  C10N50/00

Abstract: A sliding member includes: a base material; a solid lubricant layer arranged on a surface of the base material; a defect layer having a material defect, disposed in the solid lubricant layer, and being changeable into an ultra low friction layer by mechanical stress more easily than changing from the solid lubricant layer to the ultra low friction layer; and a ultra low friction layer covering a surface of the defect layer.

公开(公告)号：US20160348971A1

公开(公告)日：2016-12-01

申请号：US15116778

申请日：2015-10-02

Applicant: NIPPON STEEL & SUMITOMO METAL CORPORATION ,  TOCALO CO., LTD.

Inventor： Yasushi KURISU ,  Tatsuo SUIDZU

IPC: F27D3/02 ,  C23C4/10 ,  C23C4/18 ,  C23C4/06 ,  C23C22/24 ,  C23C28/00 ,  F27B9/30 ,  C22C29/06

CPC classification number: F27D3/026 ,  B65H27/00 ,  B65H2401/12 ,  B65H2401/13 ,  B65H2404/187 ,  B65H2404/5322 ,  B65H2701/173 ,  C21D9/56 ,  C21D9/563 ,  C22C29/005 ,  C22C29/02 ,  C22C29/06 ,  C22C29/12 ,  C23C4/06 ,  C23C4/10 ,  C23C4/18 ,  C23C22/24 ,  C23C28/00 ,  C23C28/30 ,  C23C28/321 ,  C23C28/345 ,  C23C28/36 ,  F27B9/28 ,  F27B9/30

Abstract: A hearth roll includes a base roll, a thermally sprayed coating formed on the base roll, and a modified coating formed on the thermally sprayed coating. The modified coating is formed by modifying a part or the whole of a surface of the thermally sprayed coating by melting and solidification of the thermally sprayed coating, by irradiating a part or the whole of the surface of the thermally sprayed coating with an energy beam. The thickness of the modified coating is from 2 to 20 μm, and the Vickers hardness HV of the modified coating is from 1.2 to 1.4 times larger than the Vickers hardness HV of the thermally sprayed coating.

Abstract translation: 炉底辊包括基辊，形成在基辊上的热喷涂层，以及形成在喷涂涂层上的改性涂层。 通过用能量束照射喷涂涂层的一部分或全部表面，通过熔融和固化热喷涂涂层来修饰喷涂涂层的表面的一部分或全部而形成改性涂层。 改性涂层的厚度为2〜20μm，改性涂层的维氏硬度HV为喷涂涂层的维氏硬度HV的1.2〜1.4倍。

公开(公告)号：US20140370249A1

公开(公告)日：2014-12-18

申请号：US14373505

申请日：2013-01-16

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Takema Teratani ,  Shinya Miki ,  Kenichiro Togoe

IPC: C23C14/48

CPC classification number: C23C14/48 ,  C23C4/04 ,  C23C4/18 ,  Y10T428/24802

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。

公开(公告)号：US20140302247A1

公开(公告)日：2014-10-09

申请号：US14355053

申请日：2012-04-12

Applicant: Mitsuharu Inaba ,  Hiroki Yokota

Inventor： Mitsuharu Inaba ,  Hiroki Yokota

IPC: B05D3/06

CPC classification number: B05D3/06 ,  B23K26/0608 ,  B23K26/0853 ,  B23K26/34 ,  C23C4/10 ,  C23C4/18

Abstract: Forming a densified layer in a spray coating which forms a densified layer providing a sufficient effect while preventing generation of excessively large cracks and does not cause the increase of costs; also provided in a spray coating covering member. When a high-energy beam for remelting and resolidifying a coating composition of a surface layer of an Al2O3 spray coating is scanned over a surface of the Al2O3 spray coating, it is constituted with a precedent laser beam precedently scanned in a scanning direction and a follow-up laser beam subserviently scanned on the same trajectory as that of the precedent laser beam, and the precedent laser beam is irradiated on to the surface of the Al2O3 spray coating while scanning, and the follow-up laser beam is superimposedly irradiated to an irradiation region scanned with the precedent laser beam while scanning to thereby densify the surface layer of the irradiation region.

Abstract translation: 在喷涂中形成致密化层，其形成致密层，提供足够的效果，同时防止产生过大的裂纹，并且不会导致成本的增加; 也设置在喷涂覆盖件中。 当在Al 2 O 3喷涂层的表面上扫描用于重熔和重新固化Al 2 O 3喷涂层的表面层的涂料组合物的高能束时，其由扫描方向先后扫描的先验激光束 - 激光束在与先前激光束相同的轨迹上被维护地扫描，并且将先前的激光束在扫描时照射到Al 2 O 3喷涂的表面上，并将随动激光束重叠地照射到照射 在扫描时用先有的激光束扫描的区域，从而使照射区域的表面层致密化。

公开(公告)号：US20120258565A1

公开(公告)日：2012-10-11

申请号：US13431438

申请日：2012-03-27

Applicant: Eisuke NISHITANI ,  Yasuo KUNII ,  Kazuyuki TOYODA ,  Kosaku HIYAMA ,  Tomohiro NAKASUJI ,  Tatsuya HAMAGUCHI ,  Kiyoshi MIYAJIMA

Inventor： Eisuke NISHITANI ,  Yasuo KUNII ,  Kazuyuki TOYODA ,  Kosaku HIYAMA ,  Tomohiro NAKASUJI ,  Tatsuya HAMAGUCHI ,  Kiyoshi MIYAJIMA

IPC: H01L31/0236 ,  C23C16/44

CPC classification number: H01L21/67109 ,  H01L21/67754 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

Abstract: There is provided a substrate processing apparatus, comprising: a processing chamber in which a plurality of substrates are housed, the substrate having thereon a lamination film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a reaction tube formed so as to constitute the processing chamber; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas to the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; and a heating section provided so as to surround the reaction tube, wherein a porous coating film having a void rate of 5% to 15% mainly composed of a mixture of chromium oxide (CrxOy:x, y are arbitrary integer of 1 or more) silica is formed on a surface exposed to at least the elemental selenium-containing gas or the elemental sulfur-containing gas, out of the surface of the reaction tube on the processing chamber side.

Abstract translation: 提供了一种基板处理装置，包括：容纳多个基板的处理室，其上具有由铜铟，铜镓或铜铟镓中的任一种构成的层压膜的基板; 形成为构成处理室的反应管; 配置为将元素含硒气体或元素含硫气体引入所述处理室的气体供给管; 排气管，其构造成排出处理室中的气氛; 以及包围反应管的加热部，其特征在于，主要由氧化铬（Cr x O y：x，y为1以上的任意整数）的混合物构成的空隙率为5％〜15％的多孔质涂膜， 二氧化硅在暴露于至少含元素硒的气体或元素含硫气体的表面上形成在处理室侧的反应管表面之外。