公开(公告)号：US06676813B1

公开(公告)日：2004-01-13

申请号：US10097893

申请日：2002-03-13

Applicant: Denis V. Pelekhov ,  P. Chris Hammel ,  Geoffrey Nunes, Jr. ,  Melissa M. Midzor ,  Michael Roukes

Inventor： Denis V. Pelekhov ,  P. Chris Hammel ,  Geoffrey Nunes, Jr. ,  Melissa M. Midzor ,  Michael Roukes

IPC: C23C1400

CPC classification number: G01Q60/56 ,  Y10S977/865

Abstract: A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.

Abstract translation: 用于涂覆用于磁力显微镜和磁共振力显微镜的机械谐振器的尖端的方法，其中尖端涂覆有铁磁材料，并且悬臂不是，并且由该方法产生的产物。 悬臂和引入的尖端涂覆有光致抗蚀剂，除了表面张力将光致抗蚀剂从尖端保持下来。 然后用磁性材料涂覆悬臂和尖端。 接下来，丙酮用于从悬臂上提取磁性材料，但不从尖端剥离。

公开(公告)号：US06639400B2

公开(公告)日：2003-10-28

申请号：US10228189

申请日：2002-08-27

Applicant: Masayuki Abe

Inventor： Masayuki Abe

IPC: G01R3312

CPC classification number: G01R33/0385 ,  G01Q60/54 ,  G11B5/3166 ,  G11B5/455 ,  Y10S977/865

Abstract: In a magnetic head measuring apparatus for measuring a magnetic head, an amplitude-modulated electric current whose amplitude is modulated by a specified carrier wave frequency and modulation frequency is applied to a magnetic head. A calibrating magnetic field generating source causes the magnetic head to generate a magnetic field having a specified strength and frequency, thereby calibrating measurement variations of the magnetic head. A magnetic head measuring device measures a high-frequency magnetic field generated from the magnetic head. If necessary, an interchangeable magnetic material probe is used to replace a probe of the magnetic head measuring device.

Abstract translation: 在用于测量磁头的磁头测量装置中，将振幅由指定的载波频率和调制频率调制的幅度调制电流施加到磁头。 校准磁场产生源使得磁头产生具有指定强度和频率的磁场，从而校准磁头的测量变化。 磁头测量装置测量从磁头产生的高频磁场。 如果需要，可以使用可互换的磁性材料探针来代替磁头测量装置的探头。

公开(公告)号：US06532806B1

公开(公告)日：2003-03-18

申请号：US09695508

申请日：2000-10-23

Applicant: Xiao-Dong Xiang ,  Chen Gao ,  Peter G. Schultz ,  Tao Wei

Inventor： Xiao-Dong Xiang ,  Chen Gao ,  Peter G. Schultz ,  Tao Wei

IPC: G01B734

CPC classification number: G01Q60/22 ,  Y10S977/86 ,  Y10S977/864 ,  Y10S977/865 ,  Y10S977/869

Abstract: A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

Abstract translation: 描述了一种新颖的扫描显微镜，其使用近场渐逝电磁波来探测样品特性。 该新型显微镜能够对样品的电性能进行高分辨率成像和定量测量。 本发明的扫描瞬逝波电磁显微镜（SEMM）可以绘制材料的介电常数，切线损耗，电导率，复电阻抗等电参数。 定量图对应于成像细节。 新型显微镜可用于测量电介质和导电材料的电学性能。

公开(公告)号：US20030042896A1

公开(公告)日：2003-03-06

申请号：US10228189

申请日：2002-08-27

Inventor： Masayuki Abe

IPC: G01R033/12

CPC classification number: G01R33/0385 ,  G01Q60/54 ,  G11B5/3166 ,  G11B5/455 ,  Y10S977/865

Abstract: In a magnetic head measuring apparatus for measuring a magnetic head, an amplitude-modulated electric current whose amplitude is modulated by a specified carrier wave frequency and modulation frequency is applied to a magnetic head. A calibrating magnetic field generating source causes the magnetic head to generate a magnetic field having a specified strength and frequency, thereby calibrating measurement variations of the magnetic head. A magnetic head measuring device measures a high-frequency magnetic field generated from the magnetic head. If necessary, an interchangeable magnetic material probe is used to replace a probe of the magnetic head measuring device.

公开(公告)号：US06504365B2

公开(公告)日：2003-01-07

申请号：US09966342

申请日：2001-09-27

Applicant: Shinichi Kitamura

Inventor： Shinichi Kitamura

IPC: G01R3302

CPC classification number: G01R33/0385 ,  G01Q30/16 ,  G01Q60/08 ,  Y10S977/865

Abstract: A magnetic force microscope capable of producing a topographic image containing no magnetic information. In the topographic imaging mode, an error amplifier controls the distance between a cantilever and the sample to cause the oscillation frequency of the cantilever to shift from f0 to f1, for causing a probe to tap each observation position (xi, yj) on the sample. According to the results of the control, topographic information in the observation position (xi, yj) is obtained. In the magnetic force imaging mode, the probe is placed on the observation position (xi, yj), and the distance between the cantilever and the sample is held to the distance used in the topographic imaging mode according to information stored in the memory. At this time, the amplitude of the cantilever is so adjusted that the probe does not tap the sample. Magnetic information about the observation position (xi, yj) on the sample is obtained based on the oscillation frequency of the cantilever at this time.

公开(公告)号：US06448766B1

公开(公告)日：2002-09-10

申请号：US09531900

申请日：2000-03-20

Applicant: Ruediger Berger ,  Andreas H. Dietzel ,  Jean Fompeyrine ,  Frank Krause ,  Jean-Pierre Locquet ,  Erich Maechler

Inventor： Ruediger Berger ,  Andreas H. Dietzel ,  Jean Fompeyrine ,  Frank Krause ,  Jean-Pierre Locquet ,  Erich Maechler

IPC: G01R3302

CPC classification number: G01Q60/56 ,  G01R33/10 ,  G11B5/3166 ,  G11B5/455 ,  Y10S977/865

Abstract: Magnetic characterization of the magnetic field emanating from an RWH device is presented using a magnetostrictive layer as a probe between the device and the scanned SFM tip. The findings suggest a very promising technique to resolve magnetic fields laterally at least in the 100 nm realm. Other magnetosensitive properties such as the magnetoelastic and the piezomagnetic effect can be used in a similar way to infer magnetic characteristics of microstructures or of magnetic multilayers.

Abstract translation: 使用磁致伸缩层作为器件与扫描的SFM尖端之间的探针来呈现从RWH器件发出的磁场的磁特性。 研究结果表明，一种非常有前途的技术可以至少在100纳米的领域中横向解决磁场。 可以以类似的方式使用诸如磁弹性和压电效应的其它磁敏性质来推断微结构或磁性多层的磁特性。

公开(公告)号：US06373246B1

公开(公告)日：2002-04-16

申请号：US09559376

申请日：2000-04-27

Applicant: Eisuke Tomita ,  Naoto Moriya

Inventor： Eisuke Tomita ,  Naoto Moriya

IPC: G01R3302

CPC classification number: G01Q60/56 ,  G01R33/0385 ,  G11B11/10502 ,  G11B11/10582 ,  G11B19/02 ,  G11B2005/0002 ,  Y10S977/865

Abstract: A magnetic force sensor detects a magnetic force of a magnetic sample having a given magnetization direction. The magnetic force sensor comprises a magnetic probe having a tip portion. The tip portion has an electrolytically plated film of hard-magnetic material effective to maintain the magnetization direction of the probe constant and parallel to the given magnetization direction of the sample.

Abstract translation: 磁力传感器检测具有给定磁化方向的磁性样品的磁力。 磁力传感器包括具有尖端部分的磁性探头。 尖端部分具有有效保持探头的磁化方向恒定并平行于样品的给定磁化方向的硬磁材料的电解电镀膜。

公开(公告)号：US06292316B1

公开(公告)日：2001-09-18

申请号：US09267147

申请日：1999-03-11

Applicant: Andreas Dietzel ,  Friedrich Fleischmann ,  Frank Krause

Inventor： Andreas Dietzel ,  Friedrich Fleischmann ,  Frank Krause

IPC: G11B2736

CPC classification number: G01R33/1207 ,  G01Q30/02 ,  G01Q30/025 ,  G11B5/82 ,  G11B33/10 ,  Y10S977/725 ,  Y10S977/863 ,  Y10S977/865

Abstract: A magnetic disk tester which also incorporates a sensor such as an AFM or MFM is described. The device is able directly and quickly to detect and characterize sub-micrometric defects on the surface of magnetic disks. A process for finding and characterizing defects on a magnetic disk according to the invention comprises the steps of rotating the magnetic disk using a spindle motor; writing data on the magnetic disk at selected positions; finding a position on the magnetic disk having a defect which produces an error when reading the data from the magnetic disk; determining coordinates of the defect referenced from an index on the disk; stopping the spindle motor; positioning a sensing device such as an AFM or MFM head over the defect; and sensing characteristics of the defect which aid in determining a cause of the defect. A magnetic disk examination device embodying the invention comprises a spindle rotably connected to a spindle motor; a magnetic read/write head mounted on an actuator; a magnetic read/write tester for writing then reading magnetic data on the magnetic disk while rotating to find a position on the magnetic disk which produces read errors; a sensor mounted on an actuator which can be a second actuator or the same as the one for the read/write head; a positioning system which places the sensor at the position of the error while the magnetic disk is stationary; and a data acquisition system which gathers data using the sensor.

Abstract translation: 还描述了还包括诸如AFM或MFM的传感器的磁盘测试器。 该装置能够直接快速地检测和表征磁盘表面的亚微米缺陷。 根据本发明的用于发现和表征磁盘上的缺陷的过程包括以下步骤：使用主轴电动机旋转磁盘; 在选定位置在磁盘上写入数据; 在磁盘上找到具有从磁盘读取数据时产生错误的缺陷的位置; 确定从磁盘上的索引引用的缺陷的坐标; 停止主轴电机; 将诸如AFM或MFM头的感测装置定位在缺陷上; 以及感测缺陷的特征，这有助于确定缺陷的原因。 体现本发明的磁盘检查装置包括可旋转地连接到主轴电机的主轴; 安装在致动器上的磁读/写头; 用于写入的磁读/写测试器，同时在旋转的同时在磁盘上读取磁数据以找到产生读错误的磁盘上的位置; 安装在致动器上的传感器，其可以是第二致动器或与用于读/写头的致动器相同; 定位系统，其在磁盘静止时将传感器放置在误差位置; 以及使用传感器收集数据的数据采集系统。

公开(公告)号：US5939715A

公开(公告)日：1999-08-17

申请号：US31641

申请日：1997-02-27

Applicant: Shinichi Kitamura ,  Takashi Sueyoshi

Inventor： Shinichi Kitamura ,  Takashi Sueyoshi

IPC: G01B21/30 ,  G01B7/00 ,  G01B7/34 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/00 ,  G01Q60/08 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/50 ,  G01Q60/56 ,  G01R33/038 ,  H01J3/14

CPC classification number: G01Q60/08 ,  B82Y35/00 ,  G01B7/00 ,  G01Q60/32 ,  G01Q60/52 ,  G01R33/0385 ,  B82Y25/00 ,  Y10S977/865

Abstract: There is disclosed a scanning probe microscope capable of producing a topographic image and a magnetic image of a surface of a sample in one measurement. The microscope has a probe tip made of a magnetic material. A physical force, such as an atomic force, is exerted between the probe tip and the sample. When this physical force does not act on the probe tip, it vibrates at a first vibrational frequency. Displacements of the probe tip are detected by a photodetector. A topographic information-extracting portion including a voltage-to-current converter, a phase shifter, an FM demodulator, a low-pass filter, and an error amplifier extracts a signal representative of topographic information from the output from the photodetector. A magnetic distribution-extracting portion, including an oscillator and a lock-in amplifier, extracts information about the magnetism of the sample from the output from the photodetector.

Abstract translation: 公开了一种能够在一次测量中产生样品表面的地形图像和磁性图像的扫描探针显微镜。 显微镜具有由磁性材料制成的探针尖端。 在探针尖端和样品之间施加诸如原子力的物理力。 当该物理力不作用于探针尖端时，其以第一振动频率振动。 探针尖端的位移由光检测器检测。 包括电压 - 电流转换器，移相器，FM解调器，低通滤波器和误差放大器的地形信息提取部分从光电检测器的输出中提取表示地形信息的信号。 包括振荡器和锁定放大器的磁分布提取部分从光电检测器的输出中提取关于样品的磁性的信息。

公开(公告)号：US5925818A

公开(公告)日：1999-07-20

申请号：US886590

申请日：1997-07-01

Applicant: Jason Cleveland ,  Paul Hansma ,  William Ducker

Inventor： Jason Cleveland ,  Paul Hansma ,  William Ducker

IPC: G01B7/34 ,  G01B21/30 ,  G01Q10/06 ,  G01Q20/00

CPC classification number: G01Q10/06 ,  B82Y35/00 ,  G01Q20/00 ,  Y10S977/865 ,  Y10S977/872 ,  Y10S977/873

Abstract: A method and apparatus of magnetic force control for a scanning probe, wherein a first magnetic source having a magnetic moment is provided on the scanning probe and a second magnetic source is disposed external to the scanning probe to apply a magnetic field in a direction other than parallel, and preferably perpendicular, to the orientation of the magnetic moment, from the second magnetic source to the first magnetic source to produce a torque related to the amplitude of the applied magnetic field acting on the probe. By controlling the amplitude of the applied magnetic field, the deflection of the scanning probe is maintained constant during scanning by the scanning probe. An output signal related to the amplitude of the magnetic field applied by the second magnetic source is produced and is indicative of a surface force applied to the probe. The invention can also be used to apply large forces during scanning for applications such as nanolithography or elasticity mapping.

Abstract translation: 一种用于扫描探针的磁力控制的方法和装置，其中在扫描探针上设有具有磁矩的第一磁源，并且第二磁源设置在扫描探针外部，以沿除了 平行且优选地垂直于从第二磁源到第一磁源的磁矩的取向，以产生与作用在探针上的施加的磁场的振幅相关的转矩。 通过控制所施加的磁场的幅度，扫描探针的扫描期间扫描探针的偏转保持恒定。 产生与由第二磁源施加的磁场的振幅相关的输出信号，并且指示施加到探针的表面力。 本发明还可用于在扫描期间施加大的力以用于诸如纳米光刻或弹性映射之类的应用。