Light scanning electron microscope and use
    401.
    发明申请
    Light scanning electron microscope and use 有权
    光扫描电子显微镜和使用

    公开(公告)号:US20060012871A1

    公开(公告)日:2006-01-19

    申请号:US10967638

    申请日:2004-10-19

    Abstract: In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.

    Abstract translation: 在具有照射配置(2)的共聚焦激光扫描显微镜中,其提供用于照射探针区域(23)的照明光束,所述照射光束具有扫描配置(3,4),其在扫描时将照射光束引导到探测器上;以及 具有检测器配置(5),其通过扫描配置(3,4)通过共焦孔(26)将照射的探测区域(23)映射到至少一个检测器单元(28)上, 扫描配置(3,4)的照明配置(2)提供线形照明光束,扫描配置(3,4)在扫描时将线形照明光束引导到探头f上,并且共焦孔 被设计为作为共焦孔的检测器单元(28)的开槽孔(26)或槽形区域(28,48)。

    Spectrometer
    402.
    发明申请
    Spectrometer 有权
    光谱仪

    公开(公告)号:US20050057751A1

    公开(公告)日:2005-03-17

    申请号:US10918286

    申请日:2004-08-13

    CPC classification number: G01J3/06

    Abstract: The invention is based on the knowledge that the quasi-static deflection of a dispersive element can also be obtained in a miniaturization, in that a higher degree of insusceptibility against vibration and shock can be obtained when a suspension is used for the dispersive element, which biases the same into a resting position, as well as for the deflection a means for holding the dispersive element in a deflected position, such that an equilibrium of powers is established between the holding force and the biasing force. In that way, after shock and vibration, the dispersive element always returns to the position defined by the holding force. Therefore, an inventive spectrometer comprises a dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, as well as a suspension for supporting the dispersive element and for biasing the same into a resting position with a biasing force, when the dispersive element is in a deflected position. A control means controls a holding means to vary the deflected position, so that different spectral components become detectable for a detector of the spectrometer.

    Abstract translation: 本发明是基于以下知识:分散元件的准静态偏转也可以在小型化中获得,因为当悬浮液用于分散元件时,可以获得更高程度的对振动和冲击的不敏感性,其中 将其偏压到静止位置,以及偏转中用于将分散元件保持在偏转位置的装置,使得在保持力和偏压力之间建立功率平衡。 以这种方式,在冲击和振动之后,色散元件总是返回到由夹持力限定的位置。 因此,本发明的光谱仪包括用于将其光谱分布被确定的光束光谱分解成光谱分量的分散元件,以及用于支撑色散元件并将其偏置到静止位置的悬架,其具有偏压 当分散元件处于偏转位置时。 控制装置控制保持装置来改变偏转位置,使得对于光谱仪的检测器可以检测不同的光谱分量。

    Spectrometer comprising active matrix optics
    404.
    发明申请
    Spectrometer comprising active matrix optics 有权
    光谱仪包括有源矩阵光学元件

    公开(公告)号:US20040169858A1

    公开(公告)日:2004-09-02

    申请号:US10468839

    申请日:2004-03-19

    Inventor: Edouard Da Silva

    Abstract: The invention relates to a spectrometer (1) comprising a dispersive element of a light beam formed of a set of spectral components, the dispersive element generating spatial dispersion of the spectral components in the form of a dispersion spectrum (6) spatially spread, at least one photon detector (5, 52) comprising at least one detection element (51) being provided at one point of said dispersion. According to the invention, a matrix optical electromechanical device (3) is provided between the dispersive element and the detector in the dispersion spectrum, said electromechanical device being formed of a matrix of optical elements, each of the optical elements being able to send back a portion of the dispersion spectrum according to at least two directions in relation to a control signal, in order to enable the selection of at least one sub-assembly of the spectrum for said detection element. A method and an application of the spectrometer are claimed.

    Abstract translation: 本发明涉及一种光谱仪(1),其包括由一组光谱分量形成的光束的色散元件,所述色散元件至少产生以分散光谱(6)的形式的空间色散空间扩散 一个光子检测器(5,52)包括至少一个检测元件(51),该检测元件设置在所述分散体的一个点处。 根据本发明,在色散谱中在色散元件和检测器之间提供矩阵光学机电装置(3),所述机电装置由光学元件的矩阵形成,每个光学元件能够发送回 根据与控制信号相关的至少两个方向的色散谱的一部分,以便能够选择用于所述检测元件的光谱的至少一个子组件。 要求保护光谱仪的方法和应用。

    Spectral instrument using multiple non-interfering optical beam paths and elements for use therewith

    公开(公告)号:US06714298B2

    公开(公告)日:2004-03-30

    申请号:US09728247

    申请日:2000-11-30

    Applicant: Damond V. Ryer

    Inventor: Damond V. Ryer

    Abstract: A spectrometer, or a spectral instrument using multiple non-interfering optical beam paths and special optical elements. The special optical elements for use with the instrument are used for directing the optical beam and/or altering the form of the beam. The instrument has the potential, depending upon the totality of the optical components incorporated into the instrument, to be a monochromator, a spectroradiometer, a spectrophotometer and a spectral source. The spectral instrument may further be a part of the spectral system. The system may include the spectral instrument, a power module and means for remote control of the instrument. Such remote control may be by use of a personal computer or a control system dedicated to the control, measurement and analysis of the collected information. The multiple non-interfering beam paths are created using specially designed optical elements such as a diffraction grating, a splitter box, a zero back-lash drive system for movement of the grating element. The orientation of and a physical/spatial relationship between the field lenses, slits, return mirror, reflecting prism, turning lenses all define the multiple, preferably two paths. Particularly, there is a double pass through the grating to increase dispersion, reduce scatter while maintaining a perfect temperature independent spectral match for the second pass. Using the same grating twice reduces scatter by about a factor of 1000, increases the dispersion by a factor of two, and eliminates any temperature-related mechanical spectral drift which often is present with two separate monochromators. Because of the specially designed grating structure, the grating can cause the concurrent diffraction of a plurality of incident optical beams, each of which beams have different angles of incidence and different angles of reflection. The path of the incident and the reflected beam to and from the grating is “off-axis”. That is, the beams going to and from the grating do not use the optical axis of the grating structure.

    Temporally resolved wavelength measurement method and apparatus
    406.
    发明授权
    Temporally resolved wavelength measurement method and apparatus 失效
    时间分辨波长测量方法和装置

    公开(公告)号:US06683686B2

    公开(公告)日:2004-01-27

    申请号:US09972037

    申请日:2001-10-09

    CPC classification number: G01J3/1804 G01J3/06 G01J2003/2866

    Abstract: The invention provides a method and apparatus for determining the wavelength of a sample source of light, the apparatus having a reference light source of known wavelength, a collimator for collimating light from the sample source and from the reference source, a dispersing means for receiving and spatially dispersing collimated light from the collimator according to wavelength, focusing means for focusing dispersed light from the dispersing means, and a photodetector located in the focal plane of the focusing means and having an aperture for spatially selectively admitting light from the focusing means, and operable to provide a temporally calibratable output signal indicative of the wavelength of the selectively admitted light, wherein the apparatus is operable to scan the focused spatially dispersed beam across the aperture, and the photodetector output includes resolvable features corresponding to light from the reference source and sample source, whereby a time difference between the features is indicative of a wavelength difference between the light from the reference source and the sample source.

    Abstract translation: 本发明提供了一种用于确定样品光源的波长的方法和装置,该装置具有已知波长的参考光源,用于准直来自样品源和参考源的光的准直器,用于接收和 根据波长对来自准直器的准直光进行空间分散,用于聚焦来自分散装置的分散光的聚焦装置,以及位于聚焦装置的焦平面中的光电检测器,并具有用于空间选择性地允许来自聚焦装置的光的孔, 以提供指示所选择的入射光的波长的可临时校准的输出信号,其中该装置可操作以扫过聚焦的空间分散的光束穿过孔,并且光电检测器输出包括对应于来自参考源和样品源的光的可分辨特征 ,由此之间的时间差 这些特征表示来自参考源的光和样品源之间的波长差。

    Wavelength characteristic measurement apparatus
    407.
    发明授权
    Wavelength characteristic measurement apparatus 有权
    波长特性测量装置

    公开(公告)号:US06633380B1

    公开(公告)日:2003-10-14

    申请号:US09561450

    申请日:2000-04-28

    CPC classification number: G01J3/06

    Abstract: An optical spectrum analyzer 100 and a wavelength variable light source 101 have each a sweep synchronization start function. A correction function of the rotation speed of a motor 106 for varying the angle of a diffraction grating in a spectroscope 104 so that extracted wavelength and output signal light wavelength match over a setup sweep wavelength range is found from the output signal light wavelength characteristic relative to the rotation angle of a spectral element 119 and the extracted wavelength of the spectroscope 104, and the rotation angle of motor 106 for driving the spectroscope 104 is varied for each setup wavelength in accordance with the correction function, then sweep is performed.

    Abstract translation: 光谱分析仪 100 和波长可变光源 101 具有扫描同步启动功能。 因此,为了改变分光镜 104 中的衍射光栅的角度,可以使用电机 106 的旋转速度的校正功能 从相对于光谱元素 119 的旋转角度的输出信号光波长特性中可以发现在建立扫描波长范围内提取的波长和输出信号光波长匹配, 分辨率 104 的波长,以及用于驱动分光镜 104的电机 106 的旋转角度 根据校正功能为每个设置波长而变化,然后执行扫描。

    Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating
    408.
    发明授权
    Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating 失效
    具有波长可调散射组件的具有体积分散衍射光栅的光学器件

    公开(公告)号:US06583873B1

    公开(公告)日:2003-06-24

    申请号:US09668167

    申请日:2000-09-25

    Abstract: A spectrometer has a source of illumination radiation having a plurality of spectral wavelengths, a bandpass filter, a dispersive beamsplitter disposed in an optical path of said source of illumination radiation, an illumination radiation rejection filter, and a spectrograph disposed in a path of radiation from a sample illuminated by illumination radiation from said source of illumination radiation. The dispersive beamsplitter, the bandpass filter, the illumination radiation rejection filter and spectrograph are tunable in correspondence to a selected one of the plurality of spectral wavelengths of the source of illumination radiation. The dispersive beamsplitter directs the selected one of the plurality of spectral wavelengths of illumination radiation to a sample and directs elastically scattered and reflected radiation from the sample out of a measurement beam of light emanating from the sample. The inelastically scattered light passes through the dispersive beamsplitter essentially unaffected and is directed to the illumination radiation rejection filter and the spectrograph.

    Abstract translation: 光谱仪具有具有多个光谱波长的照射辐射源,带通滤光器,设置在所述照射辐射源的光路中的色散分束器,照明辐射阻挡滤光器和设置在辐射路径中的光谱仪 由来自所述照射辐射源的照射辐射照射的样品。 分散分束器,带通滤光器,照明辐射抑制滤光器和光谱仪可以对应于照明辐射源的多个光谱波长中的选定的一个。 色散分束器将照射辐射的多个光谱波长中的所选择的一个引导到样本,并将来自样品的弹性散射和反射辐射引导出从样品发出的测量光束。 非弹性散射的光通过色散分束器基本上不受影响,并被引导到照明辐射阻挡滤光器和光谱仪。

    Optical part driving device incorporated into a detachable block and optical interferometer including same
    409.
    发明授权
    Optical part driving device incorporated into a detachable block and optical interferometer including same 失效
    结合到可拆卸块中的光学部件驱动装置和包括其的光学干涉仪

    公开(公告)号:US06570658B1

    公开(公告)日:2003-05-27

    申请号:US09538155

    申请日:2000-03-29

    CPC classification number: G01J3/06 G01J3/00 G01J3/4532 G01J3/4535

    Abstract: An optical part driving device for moving an optical part, comprises; a driving timing pulley, a pair of driven timing pulleys, a timing belt wound by the driving timing pulley and the driven timing pulleys and connected with the optical part between the pair of driven timing pulleys, and a pair of tension pulleys for tensing the timing belt on both sides of the driving timing pulley.

    Abstract translation: 一种用于移动光学部件的光学部件驱动装置,包括: 驱动正时皮带轮,一对驱动正时皮带轮,由驱动正时皮带轮缠绕的同步皮带轮和从动定时皮带轮,并连接在一对驱动正时滑轮之间的光学部件和一对张紧皮带轮, 皮带两侧的驱动正时滑轮。

    Device for adjusting angular play
    410.
    发明授权
    Device for adjusting angular play 失效
    用于调整角度的装置

    公开(公告)号:US06507399B1

    公开(公告)日:2003-01-14

    申请号:US09582627

    申请日:2000-08-21

    CPC classification number: G02B5/1828 G01J3/06 G02B26/0808

    Abstract: The invention concerns a device for adjusting angular play on a predetermined angular range of an optical element mobile in rotation relative to a frame. Said device comprises a contact piece (3), integral with the optical element, and an elastic steady arm (4). The steady arm has a first end (41) fixed to the frame and a second end (42) co-operating with the contact piece when the mobile element is oriented in the predetermined angular range, at least when the mobile element enters said angular range in the rotational direction (S1), such that the steady arm exerts on the mobile element a counter-torque. Said second end does not co-operate with the contact piece when the mobile element is oriented outside the angular range.

    Abstract translation: 本发明涉及一种用于在相对于框架旋转的光学元件移动体的预定角度范围内调整角度游隙的装置。 所述装置包括与光学元件成一体的接触片(3)和弹性稳定臂(4)。 至少当移动元件进入所述角度范围时,稳定臂具有固定到框架的第一端(41)和与移动元件定向在预定角度范围内时与接触片配合的第二端(42) 在旋转方向(S1)上,使得稳定臂在移动元件上施加反扭矩。 当移动元件定向在角度范围外时,所述第二端不与接触件配合。

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