Method for Ablating or Roughening Wafer Surfaces

    公开(公告)号:US20210269304A1

    公开(公告)日:2021-09-02

    申请号:US17188985

    申请日:2021-03-01

    Abstract: The present invention provides a simple method for ablating a protective thin film on a bulk surface and roughening the underlying bulk. In an embodiment, silicon nitride thin films, which are useful as etch-stop masks in micro- and nano-fabrication, is removed from a silicon wafer's surface using a hand-held “flameless” Tesla-coil lighter. Vias created by a spatially localized electron beam from the lighter allow a practitioner to perform micro- and nano-fabrication without the conventional steps of needing a photoresist and photolithography. Patterning could be achieved with a hard mask or rastering of the spatially confined discharge, offering—with low barriers to rapid use—particular capabilities that might otherwise be out of reach to researchers without access to conventional, instrumentation-intensive micro- and nano-fabrication workflows.

    Plasticized flexible pyrotechnic material

    公开(公告)号:US12049433B2

    公开(公告)日:2024-07-30

    申请号:US17203325

    申请日:2021-03-16

    CPC classification number: C06B45/10 A62D3/38

    Abstract: A plasticized pyrotechnic material can be easily portioned and formed or molded into a desired shape and burns at a high temperature (>2000° C.) but does not detonate. The plasticized pyrotechnic material may preferably include a combination of about 70-99% by weight of a pyrotechnic composition and about 1-30% by weight of a plasticizer composition comprising various low to mid molecular weight polyisobutylenes. The pyrotechnic material comprises inorganic oxidizers (e.g. metal oxides, oxohalide salts, nitrates, nitrites, chlorates/perchlorates) and metal or metal oxides powders mixed intimately. The plasticizer may include a small amount of a fluoropolymer, such as polytetrafluoroethylene (PTFE) and may also include up to 1-2% by weight of a processed oil, such as a mineral oil or motor oil. Some embodiments may also include a biocide precursor molecule.

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