Elastomeric stamp, patterning method using such a stamp and method for producing such a stamp
    41.
    发明申请
    Elastomeric stamp, patterning method using such a stamp and method for producing such a stamp 审中-公开
    弹性印模,使用这种印模的图案化方法和制造这种印章的方法

    公开(公告)号:US20070145632A1

    公开(公告)日:2007-06-28

    申请号:US10575797

    申请日:2004-10-07

    IPC分类号: B29C33/40

    摘要: An elastomeric stamp (10) for printing a pattern on a substrate (500) with an ink (520) is at least partially formed from a first material such as PDMS. The stamp comprises a first surface (12) in a first plane, a second surface (14) in a second plane and a third surface (16) extending from the first surface (12) to the second surface (14). The first surface (12) typically forms to the contact surface of a protruding feature of the stamp (10), whereas the third surface (16) typically forms the edge of such a feature. The first surface (12) comprises a barrier layer (22) being substantially impermeable to the ink (520). Optionally, the second surface (14) may carry a further barrier layer (24) to suppress gas phase diffusion of the ink (520). In contrast, the third surface (16) is permeable to the ink (520). Consequently, a stamp (10) is obtained that is highly suitable for edge transfer lithography type patterning. The first material of the stamp serves as an ink reservoir, thus reducing the re-inking frequency of the stamp, and the layer (22) prevents unwanted diffusion of the ink (520) to the areas of the substrate (500) into contact with the stamp (10), thus 20 improving the feature definition on the substrate surface.

    摘要翻译: 用于用油墨(520)在基底(500)上印刷图案的弹性印模(10)至少部分地由诸如PDMS的第一材料形成。 印模包括在第一平面中的第一表面(12),在第二平面中的第二表面(14)和从第一表面(12)延伸到第二表面(14)的第三表面(16)。 第一表面(12)通常形成到印模(10)的突出特征的接触表面,而第三表面(16)通常形成这种特征的边缘。 第一表面(12)包括对油墨(520)基本不可渗透的阻挡层(22)。 可选地,第二表面(14)可携带另外的阻挡层(24)以抑制油墨(520)的气相扩散。 相比之下,第三表面(16)对墨水是可渗透的(520)。 因此,获得了非常适合于边缘转印光刻型图案化的印模(10)。 印模的第一材料用作墨水储存器,从而减小印模的再墨水频率,并且所述层(22)防止墨(520)对基板(500)的区域的不期望的扩散与基板(500)的区域接触 印模(10),从而改善了基板表面上的特征定义。

    Self-assemblable polymer and method for use in lithography
    44.
    发明授权
    Self-assemblable polymer and method for use in lithography 有权
    自组装聚合物和用于光刻的方法

    公开(公告)号:US08921032B2

    公开(公告)日:2014-12-30

    申请号:US13700703

    申请日:2011-04-20

    IPC分类号: G03F7/004 G03F7/20 G03F7/40

    摘要: A self-assemblable polymer is disclosed, having first and second molecular configurations with the first molecular configuration has a higher Flory Huggins parameter for the self-assemblable polymer than the second molecular configuration, and the self-assemblable polymer is configurable from the first molecular configuration to the second molecular configuration, from the second molecular configuration to the first molecular configuration, or both, by the application of a stimulus. The polymer is of use in a method for providing an ordered, periodically patterned layer of the polymer on a substrate, by ordering and annealing the polymer in its second molecular configuration and setting the polymer when it is in the first molecular configuration. The second molecular configuration provides better ordering kinetics and permits annealing of defects near its order/disorder transition temperature, while the first molecular configuration, with a higher order/disorder transition temperature, provides low line edge/width roughness for the pattern formed on setting.

    摘要翻译: 公开了具有第一和第二分子构型的自组装聚合物,其具有第一分子构型,其具有比第二分子构型更高的可自组装聚合物的Flory Huggins参数,并且可自组装聚合物可从第一分子构型 到第二分子构型,从第二分子构型到第一分子构型,或两者都通过施加刺激。 聚合物可用于通过在其第二分子构型中排列和退火聚合物并在聚合物处于第一分子构型时设置聚合物,从而在基底上提供聚合物的有序周期性图案化层的方法。 第二种分子结构提供更好的排序动力学,并允许在其顺序/无序转变温度附近的缺陷退火,而具有较高阶/无序转变温度的第一分子构型为设置上形成的图案提供了低的线边缘/宽度粗糙度。

    LITHOGRAPHY USING SELF-ASSEMBLED POLYMERS
    46.
    发明申请
    LITHOGRAPHY USING SELF-ASSEMBLED POLYMERS 有权
    使用自组装聚合物的光刻

    公开(公告)号:US20130140272A1

    公开(公告)日:2013-06-06

    申请号:US13816720

    申请日:2011-07-21

    IPC分类号: B44C1/22

    摘要: A method of lithography on a substrate uses a self-assembled polymer (SAP) layer deposited on the substrate, with first and second domains arranged in a pattern across the layer. A planarization layer is formed over the SAP and a development etch applied to substantially remove a portion of the planarization layer over the second domain leaving a cap of the planarization layer substantially covering the first domain. The uncapped second domain is then removed from the surface by a breakthrough etch leaving the capped first domain as a pattern feature on the surface. A transfer etch may then be used to transfer the pattern feature to the substrate using the capped first domain. The capping allows the second domain to be removed, e.g., without excessive loss of lateral feature width for the remaining first domain, even when the difference in etch resistance between the first and second domains is small.

    摘要翻译: 衬底上的光刻方法使用沉积在衬底上的自组装聚合物(SAP)层,其中第一和第二畴以整个层的图案排列。 平坦化层形成在SAP之上,并且显影蚀刻被施加以在第二域上基本上去除平坦化层的一部分,留下平坦化层的盖基本覆盖第一域。 然后通过穿透蚀刻从表面除去未封端的第二结构域,留下封盖的第一结构域作为表面上的图案特征。 然后可以使用转移蚀刻来使用封盖的第一结构域将图案特征转移到衬底。 封盖允许除去第二结构域,例如,即使当第一和第二畴之间的耐蚀刻性差异小时,也不会对剩余的第一区域的横向特征宽度过度损失。

    DICHROIC GUEST-HOST POLARIZER
    48.
    发明申请
    DICHROIC GUEST-HOST POLARIZER 有权
    双重客户主机极地

    公开(公告)号:US20100045900A1

    公开(公告)日:2010-02-25

    申请号:US11993594

    申请日:2006-06-23

    摘要: A method for the manufacture of a polarizer is provided. The method comprises providing a liquid crystal composition comprising a liquid crystal host and a viscosity enhancer; providing a thin film of said composition on a substrate; orienting said liquid crystal host to obtain an aligned film in a first liquid crystal mesophase, wherein the liquid crystal host is aligned planar to said substrate; gelating said viscosity enhancer to congeal said film; and obtaining a second liquid crystal state in said congealed film. By the use of a viscosity enhancer in the composition, homeotropic alignment of the liquid crystal host can be suppressed.

    摘要翻译: 提供一种用于制造偏振器的方法。 该方法包括提供包括液晶宿主和粘度增强剂的液晶组合物; 在基底上提供所述组合物的薄膜; 使所述液晶主体取向以在第一液晶中间相中获得取向膜,其中所述液晶主体与所述基板平面排列; 凝胶化所述粘度增强剂以凝结所述膜; 并在所述凝结膜中获得第二液晶态。 通过在组合物中使用粘度增强剂,可以抑制液晶主体的垂面取向。

    Mirror with built-in display
    49.
    发明申请
    Mirror with built-in display 失效
    镜子内置显示屏

    公开(公告)号:US20070041096A1

    公开(公告)日:2007-02-22

    申请号:US10578448

    申请日:2004-11-03

    IPC分类号: G02B5/30

    摘要: A mirror device (1) which can be simultaneously used for display purposes, based on e.g. an LCD display (5) with a polarizing min or (2) placed in front of it. the reflectivity of such a mirror display is enhanced by providing at its non-viewing side a further polarizing mirror (11) Color absorption in the display is prevented by placing the color filter (13) or a color (sequential) backlight (30) behind this reflective polarizer at the back of the display.

    摘要翻译: 可以同时用于显示目的的镜装置(1) 具有极化min或(2)的LCD显示器(5)放置在其前面。 通过在其非观看侧提供另一个偏振镜(11)来增强这种镜子显示器的反射率。通过将滤色器(13)或颜色(顺序)背光(30)放置在后面来防止显示器中的颜色吸收 该反光偏振器在显示器的背面。

    Birefringent optical element, lcd device with birefringent optical element, and manufacturing process for a birefringent optical element
    50.
    发明申请
    Birefringent optical element, lcd device with birefringent optical element, and manufacturing process for a birefringent optical element 审中-公开
    双折射光学元件,具有双折射光学元件的液晶装置和用于双折射光学元件的制造方法

    公开(公告)号:US20060177605A1

    公开(公告)日:2006-08-10

    申请号:US10549025

    申请日:2004-03-18

    摘要: A birefringent optical element comprises a polymerized and/or cross-linked mixture (301) of a liquid crystalline compound and a photo-isomerizable compound. The birefringence of the element can be determined with high precision by manipulating the order parameter and polarization anisotropy of said mixture. For this purpose, the photo-isomerizable compound is converted from a transform to a cis-form during manufacturing by means of irradiation. Preferably the photo-isomerizable compound is a cinnamate compound. The irradiated mixture is polymerized and/or cross-linked after irradiation. The irradiation preferably takes place through a greyscale mask (305) so that within the mixture (301) portions (302R, 302G, 302B) are defined that obtain different birefringence values. The process is for example suitable for manufacturing a retarder layer or compensation foil inside the liquid crystalline cell of a Liquid Crystal Display (LCD) device, and in particular for manufacturing a patterned retarder layer having portions with different retardation, associated with the primary colors of a color LCD device.

    摘要翻译: 双折射光学元件包括液晶化合物和光可异构化化合物的聚合和/或交联的混合物(301)。 元件的双折射可以通过操纵所述混合物的阶数参数和偏振各向异性来高精度地确定。 为此目的,通过照射在制造过程中将光可异构化化合物从转化转化为顺式。 优选光可异构化化合物是肉桂酸酯化合物。 被照射的混合物在照射后聚合和/或交联。 照射优选通过灰度级掩模(305)发生,使得在混合物(301)部分(302R,302G,302B)中被限定得到不同的双折射值。 该方法例如适合于在液晶显示器(LCD)器件的液晶单元内部制造延迟器层或补偿箔,特别是用于制造具有不同延迟的部分的图案化延迟器层,其与原色相关联 彩色液晶显示装置。