公开(公告)号：US5351938A

公开(公告)日：1994-10-04

申请号：US16515

申请日：1993-02-11

申请人： Frank Hegner ,  Elke Schmidt ,  Thomas Klahn ,  Peter Reimann ,  Heinz Breitenstein ,  Stephan Messmer

发明人： Frank Hegner ,  Elke Schmidt ,  Thomas Klahn ,  Peter Reimann ,  Heinz Breitenstein ,  Stephan Messmer

IPC分类号： B23K35/32 ,  B22D11/06 ,  B23K35/02 ,  B23K35/40 ,  C04B37/00 ,  C04B37/02 ,  C22C16/00 ,  C30B33/06 ,  G01L9/12 ,  G05D16/00 ,  B22D41/01

CPC分类号： G01L9/0075 ,  B22D11/0611 ,  B22D11/064 ,  B23K35/0233 ,  B23K35/32

摘要： This active brazing serves to braze ceramic parts or single crystals or metal parts or to braze ceramic parts to single crystals or ceramic parts or single crystals to metal parts. In addition to the zirconium-nickel alloy, which is composed of 70 atom % to 85 atom % zirconium and 15 atom % to 30 atom % nickel, it contains titanium. In an apparatus for fabricating a foil (6) from this ternary active-brazing alloy by melt spinning which has a uniform thickness and two surfaces that are as smooth as possible, the alloy, after being melted by high-frequency heating in a cylindrical crucible (1) made completely of a high-temperature-resistant and highly thermally conductive nonmetallic material, particularly of high-density graphite or of boron nitride, is forced through an opening (3) in the bottom of the crucible onto a metal drum (5) of high thermal conductivity rotating at a high circumferential speed, on which the liquid alloy solidifies at a cooling rate on the order of 10.sup.3 to 10.sup.6 .degree. C./s. A product made using this ternary active brazing is a pressure sensor (10) having a substrate (12) and a diaphragm (11) of ceramic, particularly alumina ceramic, preferably with a purity of 96 wt.%, which are thermally joined around the periphery in a defined spaced relationship (d) and parallel to each other by means of the active brazing, e.g., by means of a preform (20) made therefrom, thus forming a chamber (13).

摘要翻译： 这种活性钎焊用于钎焊陶瓷部件或单晶或金属部件或将陶瓷部件钎焊到单晶或陶瓷部件或单晶到金属部件。 除了由70原子％至85原子％的锆和15原子％至30原子％的镍组成的锆 - 镍合金之外，还含有钛。 在通过熔融纺丝从均匀的厚度和两个表面尽可能平滑的熔融纺丝制造箔（6）的装置中，该合金在通过高频加热在圆柱形坩埚中熔化之后 （1）完全由高温高导热非金属材料，特别是高密度石墨或氮化硼制成，被迫穿过坩埚底部的开口（3）到金属鼓（5 ）的高导热率以高圆周速度旋转，液体合金以约103至106℃/ s的冷却速率固化。 使用这种三元活性钎焊制成的产品是压力传感器（10），其具有衬底（12）和陶瓷的隔膜（11），特别是氧化铝陶瓷，优选纯度为96重量％，它们围绕 周边以限定的间隔关系（d）并且通过活性钎焊彼此平行，例如通过由其制成的预成型件（20），从而形成腔室（13）。

公开(公告)号：US5076147A

公开(公告)日：1991-12-31

申请号：US499615

申请日：1990-03-26

申请人： Frank Hegner ,  Manfred Frank

发明人： Frank Hegner ,  Manfred Frank

IPC分类号： G01L9/00 ,  G01L19/06

CPC分类号： G01L9/0075 ,  G01L19/0627

摘要： The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.

摘要翻译： 压力传感器由基板和隔膜围绕周边连接在一起形成一个室。 面对离开基板的隔膜的表面暴露于要测量其压力的介质。 为了防止隔膜受到腐蚀或磨损，暴露于介质的隔膜表面被碳化硅层覆盖，优选通过化学气相沉积。

公开(公告)号：US4603455A

公开(公告)日：1986-08-05

申请号：US724913

申请日：1985-04-19

申请人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

发明人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

IPC分类号： G01N25/64 ,  G01N27/22 ,  H01G4/06

CPC分类号： G01N27/225 ,  Y10T29/435 ,  Y10T29/49169

摘要： A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

摘要翻译： 通过薄膜技术在电绝缘衬套主体的端面处形成用于测量具有基极，湿敏介电层和顶电极的绝对湿度的薄膜湿度传感器。 连接导体被引导穿过衬套主体并且终止于接地面并且与衬套主体的端面一起抛光的接触区域中。 形成电极的金属层在施加时是优选的，通过多孔掩模来形成，它们各自覆盖相关联的连接导体的接触区域并与之电连接。 衬套主体被插入到高度合金化的镍 - 钼化合物的套筒中并且以耐压的方式与其连接。

公开(公告)号：US08104353B2

公开(公告)日：2012-01-31

申请号：US12451209

申请日：2008-06-04

申请人： Ulfert Drewes ,  Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

发明人： Ulfert Drewes ,  Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

IPC分类号： G01L9/12 ,  H01R43/00

CPC分类号： G01L9/0075 ,  G01L13/025 ,  Y10T29/49117

摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

摘要翻译： 压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料 测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。 第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

公开(公告)号：US20110041618A1

公开(公告)日：2011-02-24

申请号：US12312722

申请日：2007-11-27

申请人： Frank Hegner ,  Andreas Rossberg

发明人： Frank Hegner ,  Andreas Rossberg

IPC分类号： G01L13/02 ,  B32B18/00 ,  B32B5/00 ,  B32B7/02

CPC分类号： C04B41/5031 ,  C04B35/111 ,  C04B37/005 ,  C04B37/006 ,  C04B41/009 ,  C04B41/87 ,  C04B2111/503 ,  C04B2235/785 ,  C04B2237/10 ,  C04B2237/12 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/592 ,  C04B2237/708 ,  G01L9/0075 ,  G01L19/0627 ,  Y10T428/2495 ,  Y10T428/26 ,  Y10T428/265 ,  C04B41/4525 ,  C04B35/10 ,  C04B35/48

摘要： An elastic ceramic body and a pressure sensor. The elastic ceramic body comprises: a base body of an elastic ceramic material; and a cover layer, which covers at least one section of a surface of the base body, wherein the cover layer is of a material other than that of the base body, and the cover layer comprises microcrystalline A12O3 (corundum). The cover layer is preferably prepared in a sol gel process. The pressure sensor, comprises: a disk-shaped measuring membrane, which is embodied as an elastic ceramic body according to the above definition; and at least one membrane support body, on which the measuring membrane is connected at its edge region along an encircling joint to form a pressure-tight measuring chamber between the membrane support body and the measuring membrane.

摘要翻译： 一个弹性陶瓷体和一个压力传感器。 弹性陶瓷体包括：弹性陶瓷材料的基体; 以及覆盖层，其覆盖基体的表面的至少一个部分，其中覆盖层是不同于基体的覆盖层，并且覆盖层包含微晶A12O3（刚玉）。 覆盖层优选以溶胶凝胶法制备。 压力传感器包括：盘状测量膜，其被实施为根据上述定义的弹性陶瓷体; 以及至少一个膜支撑体，测量膜在其边缘区域沿着环绕接头连接在其上，以在膜支撑体和测量膜之间形成压力测量室。

公开(公告)号：US07861598B2

公开(公告)日：2011-01-04

申请号：US11631036

申请日：2005-06-14

申请人： Ulfert Drewes ,  Frank Hegner

发明人： Ulfert Drewes ,  Frank Hegner

IPC分类号： G01L7/00

CPC分类号： G01L19/145 ,  G01L19/147

摘要： A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial clamping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping force is transmitted through the misalignment accommodating arrangement, from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.

摘要翻译： 一种压力传感器，包括具有壳体轴线的壳体和限定在壳体中的测量室室。 测量池室可通过开口暴露于压力。 开口被环形的第一密封表面包围。 一种压力测量单元，具有面向开口的第二密封表面和背离密封表面密封环的支承表面; 并且提供与壳体接合的夹紧装置。 压力测量单元和密封环通过夹紧装置和第一密封表面之间的这种方式通过轴向夹紧力夹紧，密封环压紧地设置在第一密封表面和第二密封表面之间 。 压力传感器还包括不对准容纳装置，其包括朝向开口的第一传动体，以及远离开口的第二传递体。 轴向夹紧力通过不对准容纳装置从夹紧装置传递到压力测量单元，并且第一传动体相对于第二传动体可绕两个相互垂直的轴线倾斜。

公开(公告)号：US07448274B2

公开(公告)日：2008-11-11

申请号：US10566364

申请日：2004-07-16

申请人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

发明人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

IPC分类号： G01L7/00

CPC分类号： G01L19/003

摘要： A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

摘要翻译： 一种压力传感器，包括：压力测量单元，其具有可与介质一起装载的端面; 壳体，其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中，并且密封装置位于支承表面和端面之间，并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上，第二密封元件位于支承表面上，并且解耦环被轴向夹紧在第一和第二密封元件之间。

公开(公告)号：US20060185435A1

公开(公告)日：2006-08-24

申请号：US10528094

申请日：2003-09-09

申请人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

发明人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

IPC分类号： G01L19/04

CPC分类号： G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器的跨度误差和连接到平台的端面的测量膜，其中压力测量单元被轴向夹紧在弹性密封环之间，该弹性密封环承载在膜支承端面 的压力测量单元和支撑环，其支撑在压力测量单元的后表面上，支撑环的尺寸与密封环和压力测量单元的尺寸协调，使得膜的径向变形 由压力测量单元的轴向夹紧引起的端面的距离足够小，使得由轴向夹紧力减小至少10％所引起的压力传感器的跨度误差不大于约0.02％。 此外，布置在支撑环和夹紧环之间的是刚性去耦元件，其使跨度的温度滞后最小化。 通过有限元法迭代地确定支撑环和去耦元件的几何形状。

公开(公告)号：US20060096381A1

公开(公告)日：2006-05-11

申请号：US10518546

申请日：2003-07-01

申请人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

发明人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

IPC分类号： G01L9/12

CPC分类号： G01L19/02 ,  G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器和连接到平台端面的测量膜的压力传感器的跨度误差，其中压力测量单元被轴向夹紧在弹性密封环之间，弹性密封环承载在含膜的末端 压力测量单元的表面和支撑环，支撑环在其后侧支撑测量单元，支撑环的尺寸与密封环和压力测量单元的尺寸匹配，使得径向 由压力测量单元的轴向夹紧导致的含膜端面的变形足够小，由于轴向夹紧力减小至少10％，压力传感器的跨度误差不大于0.02％ 。 通过FEM迭代地确定支撑环的几何形状。

公开(公告)号：US06941814B2

公开(公告)日：2005-09-13

申请号：US10498515

申请日：2002-12-18

申请人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

发明人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

IPC分类号： G01L19/06 ,  G01L7/00 ,  G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0075

摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

摘要翻译： 用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。 疏水涂层优选包括硅烷。 特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。 疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。 锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。 另外，脂族或环状硅氮烷-Si-NH-Si-，例如 六甲基二硅氮烷。 同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。