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70 条记录 (耗时 0.032 秒)

    Adjustment Arrangement of an Optical Element
    42.
    发明申请
    Adjustment Arrangement of an Optical Element 有权
    光学元件的调整布置

    公开(公告)号：US20090009892A1

    公开(公告)日：2009-01-08

    申请号：US12211978

    申请日：2008-09-17

    申请人： Klaus Beck ,  Bernhard Gellrich ,  Hubert Holderer ,  Thomas Petasch ,  Cornelia Roesch ,  Alexander Kohl

    发明人： Klaus Beck ,  Bernhard Gellrich ,  Hubert Holderer ,  Thomas Petasch ,  Cornelia Roesch ,  Alexander Kohl

    IPC分类号： G02B7/04

    CPC分类号： G03F7/70258 ,  G02B7/023 ,  G03F7/70825

    摘要： A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).

    摘要翻译： 一种布置用于调整光学元件（1），特别是光学系统中的透镜的调整，特别是用于半导体光刻的投影透镜系统中。 光学元件（1）通过分布在光学元件（1）的圆周上的多个轴承脚（2）安装在安装件（3）中，并且可由致动器（5）选择性地变形。 至少一些轴承脚（2）在相应的轴承座（2）的区域中被致动器（5）接合，使得相应的轴承座（2）可以沿着光学方向 轴（7）。

    System for setting and maintaining a gas atmosphere in an optical system
    44.
    发明申请
    System for setting and maintaining a gas atmosphere in an optical system 审中-公开
    用于在光学系统中设置和维持气体气氛的系统

    公开(公告)号：US20060061886A1

    公开(公告)日：2006-03-23

    申请号：US11247925

    申请日：2005-10-11

    申请人： Bernhard Gellrich ,  Nils Dieckmann

    发明人： Bernhard Gellrich ,  Nils Dieckmann

    IPC分类号： G02B7/02

    CPC分类号： G03F7/70916 ,  G03F7/70933

    摘要： Arranged in a system for setting and maintaining a gas atmosphere in an objective having at least one optical element is a first, inner gas compartment that is separated from a second, outer gas compartment by an inner casing. Both gas compartments are provided with gas inlet and gas outlet openings. At least one of the two gas compartments is under a pressure that is higher than the ambient pressure.

    摘要翻译： 布置在用于在具有至少一个光学元件的物镜中设置和维持气体气氛的系统中，是通过内壳与第二外部气体隔室分离的第一内部气体隔室。 两个气室都设有气体入口和气体出口。 两个气体室中的至少一个处于高于环境压力的压力下。

    Mounting apparatus for an optical element
    45.
    发明授权
    Mounting apparatus for an optical element 有权
    光学元件安装装置

    公开(公告)号：US06816325B1

    公开(公告)日：2004-11-09

    申请号：US10661183

    申请日：2003-09-11

    申请人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

    发明人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

    IPC分类号： G02B702

    CPC分类号： G02B7/023

    摘要： In the case of a mounting apparatus, an optical element having an inner mount and an outer mount, in particular a lens in a projection lens system for semiconductor lithography, the inner mount is connected to the outer mount via three circumferentially distributed articulations. Manipulators, whereby said inner mount is displaceable, act on the articulations. The articulations comprise a mechanism which transforms a radial movement into an axial movement.

    摘要翻译： 在安装装置的情况下，具有内部安装件和外部安装件的光学元件，特别是用于半导体光刻的投影透镜系统中的透镜，内部安装件通过三个周向分布的关节连接到外部安装件。 由此所述内部支架可移动的操纵器作用在铰接上。 关节包括将径向运动变换成轴向运动的机构。

    Adjusting apparatus for an optical element in a lens system
    46.
    发明授权
    Adjusting apparatus for an optical element in a lens system 有权

    公开(公告)号：US06594093B2

    公开(公告)日：2003-07-15

    申请号：US10039841

    申请日：2002-01-03

    申请人： Timo Moeller ,  Bernhard Gellrich

    发明人： Timo Moeller ,  Bernhard Gellrich

    IPC分类号： G02B702

    CPC分类号： G03F7/70258 ,  G02B7/023 ,  G03F7/70825

    摘要： In the case of an adjusting apparatus for an optical element in a lens system, in particular a lens in a projection lens system for semiconductor lithography, for producing tilting movements, having at least one actuator, the optical element is connected via elastic connecting members, directly or indirectly via an inner mount, to an outer mount. The elastic connecting members or the at least one actuator are/is provided in each case with bearing bridges which have bearing locations for a connection to the optical element or to the inner mount, and bridge arms which are connected to the bearing locations. The bridge arms are provided with piezoceramic elements in plate or sheet form which undergo changes in length upon activation. The piezoceramic elements of the various bearing bridges can be activated individually or together.

    Method of straightening the supporting surfaces of supporting elements for optical elements
    47.
    发明授权
    Method of straightening the supporting surfaces of supporting elements for optical elements 失效
    矫正用于光学元件的支撑元件的支撑表面的方法

    公开(公告)号：US06366413B1

    公开(公告)日：2002-04-02

    申请号：US09692256

    申请日：2000-10-19

    申请人： Michael Trunz ,  Bernhard Gellrich

    发明人： Michael Trunz ,  Bernhard Gellrich

    IPC分类号： G02B702

    CPC分类号： G03F7/70241 ,  G02B7/026 ,  G03F7/70825

    摘要： In a method of straightening the supporting surfaces (5) of supporting elements (3) for optical elements (1), in particular in lens systems of microlithography projection exposure equipment, the supporting elements (3) and/or at least one bearing part (2, 6) connected to the supporting elements (3) for the optical elements (1) are deformed by a laser beam (A, B, C, D) produced by a laser (7) in such a way that the supporting surfaces (5) are at least approximately aligned with a common supporting plane or some other prescribed distribution.

    摘要翻译： 在用于矫正用于光学元件（1）的支撑元件（3）的支撑表面（5）的方法中，特别是在微光刻投影曝光设备的透镜系统中，支撑元件（3）和/或至少一个轴承部件 连接到用于光学元件（1）的支撑元件（3）的光束（2,6）通过由激光器（7）产生的激光束（A，B，C，D）变形，使得支撑表面 5）至少大致与公共支撑平面或某些其他规定分布对准。