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公开(公告)号:US11574867B2
公开(公告)日:2023-02-07
申请号:US17104078
申请日:2020-11-25
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Ephrem G. Gebreselasie , Vibhor Jain , Yves T. Ngu , Johnatan A. Kantarovsky , Alain F. Loiseau
IPC: H01L23/52 , H01L23/525 , H01L21/8249 , H01L21/02 , H01L27/07 , H01L23/62 , H01L27/115 , H01L27/112 , H01L27/02
Abstract: An electrical fuse (e-fuse) includes a fuse link including a silicided semiconductor layer over a dielectric layer covering a gate conductor. The silicided semiconductor layer is non-planar and extends orthogonally over the gate conductor. A first terminal is electrically coupled to a first end of the fuse link, and a second terminal is electrically coupled to a second end of the fuse link. The fuse link may be formed in the same layer as an intrinsic and/or extrinsic base of a bipolar transistor. The gate conductor may control a current source for programming the e-fuse. The e-fuse reduces the footprint and the required programming energy compared to conventional e-fuses.
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公开(公告)号:US11515397B2
公开(公告)日:2022-11-29
申请号:US16934669
申请日:2020-07-21
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Anthony K. Stamper , Siva P. Adusumilli , Vibhor Jain , Steven Bentley
IPC: H01L29/66 , H01L29/20 , H01L29/778 , H01L29/06 , H01L21/763 , H01L21/8234 , H01L29/36
Abstract: Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. A layer stack is formed on a semiconductor substrate comprised of a single-crystal semiconductor material. The layer stack includes a semiconductor layer comprised of a III-V compound semiconductor material. A polycrystalline layer is formed in the semiconductor substrate. The polycrystalline layer extends laterally beneath the layer stack.
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公开(公告)号:US11469178B2
公开(公告)日:2022-10-11
申请号:US17126921
申请日:2020-12-18
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Anthony K. Stamper , John J. Ellis-Monaghan , Steven M. Shank , John J. Pekarik , Vibhor Jain
IPC: H01L23/525 , H01L27/12 , H01L23/532
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a metal-free fuse structure and methods of manufacture. The structure includes: a first metal-free fuse structure comprising a top semiconductor material of semiconductor-on-insulator (SOI) technologies, the top semiconductor material including end portions with a first electrical resistance and a fuse portion of a second, higher electrical resistance electrically connected to the end portions; and a second metal-free fuse structure comprising the top semiconductor material of semiconductor-on-insulator (SOI) technologies, the top semiconductor material of the second metal-free fuse structure including at least a fuse portion of a lower electrical resistance than the second, higher electrical resistance.
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公开(公告)号:US11411081B2
公开(公告)日:2022-08-09
申请号:US16855236
申请日:2020-04-22
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Steven M. Shank , Anthony K. Stamper , Vibhor Jain , John J. Ellis-Monaghan
IPC: H01L27/092 , H01L29/08 , H01L29/78
Abstract: The disclosure provides a field effect transistor (FET) stack with methods to form the same. The FET stack includes a first transistor over a substrate. The first transistor includes a first active semiconductor material including a first channel region between a first set of source/drain terminals, and a first gate structure over the first channel region. The first gate structure includes a first gate insulator of a first thickness above the first channel region. A second transistor is over the substrate and horizontally separated from the first transistor. A second gate structure of the second transistor may include a second gate insulator of a second thickness above a second channel region, the second thickness being greater than the first thickness. A shared gate node may be coupled to each of the first gate structure and the second gate structure.
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公开(公告)号:US20220190145A1
公开(公告)日:2022-06-16
申请号:US17120916
申请日:2020-12-14
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sarah McTaggart , Qizhi Liu , Vibhor Jain , Mark Levy , Paula Fisher , James R. Elliott
IPC: H01L29/737 , H01L29/66
Abstract: Device structures and fabrication methods for heterojunction bipolar transistors. Trench isolation regions are positioned in a semiconductor substrate to define active regions. A base layer includes first sections that are respectively positioned over the active regions and second sections that are respectively positioned over the trench isolation regions. Emitter fingers are respectively positioned on the first sections of the base layer. The first sections of the base layer include single-crystal semiconductor material, and the second sections of the base layer include polycrystalline semiconductor material. The second sections of the base layer are spaced in a vertical direction from the trench isolation regions to define a first cavity that extends about a perimeter of the base layer and second cavities that are connected to the first cavity.
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公开(公告)号:US20220165663A1
公开(公告)日:2022-05-26
申请号:US17104078
申请日:2020-11-25
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Ephrem G. Gebreselasie , Vibhor Jain , Yves T. Ngu , Johnatan A. Kantarovsky , Alain F. Loiseau
IPC: H01L23/525 , H01L27/07 , H01L21/02 , H01L21/8249
Abstract: An electrical fuse (e-fuse) includes a fuse link including a silicided semiconductor layer over a dielectric layer covering a gate conductor. The silicided semiconductor layer is non-planar and extends orthogonally over the gate conductor. A first terminal is electrically coupled to a first end of the fuse link, and a second terminal is electrically coupled to a second end of the fuse link. The fuse link may be formed in the same layer as an intrinsic and/or extrinsic base of a bipolar transistor. The gate conductor may control a current source for programming the e-fuse. The e-fuse reduces the footprint and the required programming energy compared to conventional e-fuses.
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公开(公告)号:US11217685B2
公开(公告)日:2022-01-04
申请号:US16909376
申请日:2020-06-23
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Herbert Ho , Vibhor Jain , John J. Pekarik , Claude Ortolland , Judson R. Holt , Qizhi Liu , Viorel Ontalus
IPC: H01L29/737 , H01L29/66 , H01L29/08
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a device with a marker layer and methods of manufacture. The device includes: a collector region; an intrinsic base region above the collector region; an emitter region comprising emitter material and a marker layer vertically between the intrinsic base region and the emitter material; and an extrinsic base region in electrical contact with the intrinsic base region.
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公开(公告)号:US11152520B1
公开(公告)日:2021-10-19
申请号:US16868773
申请日:2020-05-07
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Siva P. Adusumilli , Mark D. Levy , Vibhor Jain , John J. Ellis-Monaghan
IPC: H01L31/0232 , H01L27/144 , H01L31/18 , H01L31/105 , H01L31/028
Abstract: A photodetector includes a photodetecting region in a semiconductor substrate, and a reflector extending at least partially along a sidewall of the photodetecting region in the semiconductor substrate. The reflector includes an air gap defined in the semiconductor substrate. The reflector allows use of thinner germanium for the photodetecting region. The air gap may have a variety of internal features to direct electromagnetic radiation towards the photodetecting region.
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公开(公告)号:US11145725B2
公开(公告)日:2021-10-12
申请号:US16823005
申请日:2020-03-18
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Qizhi Liu , Vibhor Jain , Judson R. Holt , Herbert Ho , Claude Ortolland , John J. Pekarik
IPC: H01L29/417 , H01L29/66 , H01L29/737 , H01L29/08
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a heterojunction bipolar transistor and methods of manufacture. The structure includes: a sub-collector region; a collector region in electrical connection to the sub-collector region; an emitter located adjacent to the collector region and comprising emitter material, recessed sidewalls on the emitter material and an extension region extending at an upper portion of the emitter material above the recessed sidewalls; and an extrinsic base separated from the emitter by the recessed sidewalls.
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公开(公告)号:US11121097B1
公开(公告)日:2021-09-14
申请号:US16881736
申请日:2020-05-22
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Vibhor Jain , Sebastian T. Ventrone , Siva P. Adusumilli , John J. Ellis-Monaghan , Ajay Raman
Abstract: The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.
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