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公开(公告)号：US08638179B2
公开(公告)日：2014-01-28
申请号：US13330965
申请日：2011-12-20
申请人： Alexei Gaidarzhy , Pritiraj Mohanty
发明人： Alexei Gaidarzhy , Pritiraj Mohanty
CPC分类号： H03H9/02259 , B81B3/0086 , B81B2201/0271 , H03H9/02275 , H03H9/02338 , H03H9/02417 , H03H9/2405 , H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02464 , H03H2009/02496
摘要： Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
摘要翻译： 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。 提供与机械谐振结构分离的偏置结构来调谐机械谐振结构的谐振频率。
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公开(公告)号：US08314665B2
公开(公告)日：2012-11-20
申请号：US12311141
申请日：2007-09-20
摘要： A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.
摘要翻译： 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层，其中所述谐振器包括亚微米可激发元件，并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率，并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。
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公开(公告)号：US08111108B2
公开(公告)日：2012-02-07
申请号：US12181531
申请日：2008-07-29
申请人： Alexei Gaidarzhy , Pritiraj Mohanty
发明人： Alexei Gaidarzhy , Pritiraj Mohanty
IPC分类号： H03B5/30
CPC分类号： H03H9/02259 , B81B3/0086 , B81B2201/0271 , H03H9/02275 , H03H9/02338 , H03H9/02417 , H03H9/2405 , H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02464 , H03H2009/02496
摘要： Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
摘要翻译： 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。
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公开(公告)号：US20100007443A1
公开(公告)日：2010-01-14
申请号：US12311141
申请日：2007-09-20
IPC分类号： H03H9/15
摘要： A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.
摘要翻译： 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层，其中所述谐振器包括亚微米可激发元件，并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率，并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。
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公开(公告)号：US20100026136A1
公开(公告)日：2010-02-04
申请号：US12181531
申请日：2008-07-29
申请人： Alexei Gaidarzhy , Pritiraj Mohanty
发明人： Alexei Gaidarzhy , Pritiraj Mohanty
IPC分类号： H02N11/00
CPC分类号： H03H9/02259 , B81B3/0086 , B81B2201/0271 , H03H9/02275 , H03H9/02338 , H03H9/02417 , H03H9/2405 , H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02464 , H03H2009/02496
摘要： Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
摘要翻译： 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。
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