公开(公告)号：US20080012511A1

公开(公告)日：2008-01-17

申请号：US11632401

申请日：2005-07-13

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： H02K41/03

CPC分类号： H02K41/031 ,  G03F7/70758 ,  H02K1/146 ,  H02K1/278 ,  H02K2201/18 ,  Y10T29/49117

摘要： A planar motor device and the like which can shift at a high acceleration, provide a high aligning accuracy and can be efficiently driven is provided. The planar motor (15) includes a fixed part (16) provided on a base member (14), and a moving part (17) provided on a stage unit (WST1). The fixed part (16) is provided with core members (22), which are arranged at prescribed intervals within an XY plane with a coil (21) wound around, and leading edge parts of head parts (22a) of the core members (22) are set to be within a substantially one plane. On the bottom plane of a first stage (25) of the stage unit (WST1), permanent magnets (26) are arranged at prescribed intervals in an X direction and a Y direction.

摘要翻译： 提供了可以以高加速度移位的平面电动机装置等，提供高对准精度并且可以被有效地驱动。 平面电机（15）包括设置在基座部件（14）上的固定部件（16）和设置在平台部件（WST1）上的移动部件。 固定部分（16）设置有芯部件（22），它们以规定的间隔布置在XY平面内，线圈（21）缠绕在其上，并且芯部件的头部（22b）的前缘部分 22）设置在基本上一个平面内。 在平台单元（WST 1）的第一平台（25）的底面上，在X方向和Y方向上以规定的间隔配置永磁体（26）。

公开(公告)号：US07149932B2

公开(公告)日：2006-12-12

申请号：US09973795

申请日：2001-10-11

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： G06F11/00

CPC分类号： H04L1/0056 ,  H04L1/0041 ,  H04L1/0045 ,  H04L2001/0094

摘要： A serial communication device bridging between a parallel bus and a serial bus, includes (a) a check bit producer which applies an error correcting code to parallel data transmitted through the parallel bus, (b) a parallel-serial converter which converts the parallel data output from the check bit producer, into serial data, (c) a serial-parallel converter which converts serial data transmitted through the serial bus, into parallel data, and (d) an error detector which checks an error correcting code applied to the serial data, and detects an error in the error correcting code.

公开(公告)号：US20060103944A1

公开(公告)日：2006-05-18

申请号：US11322125

申请日：2005-12-30

申请人： Kazuya Ono ,  Yuichi Shibazaki

发明人： Kazuya Ono ,  Yuichi Shibazaki

IPC分类号： G02B3/00

CPC分类号： G03F7/70341 ,  G03F7/70833

摘要： An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

公开(公告)号：US06906334B2

公开(公告)日：2005-06-14

申请号：US09741264

申请日：2000-12-19

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： G03F7/20 ,  H01J37/20 ,  H01L21/68 ,  G03B27/42

CPC分类号： G03F7/70758 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/3175 ,  H01L21/682

摘要： An actuator has a pair of electromagnets and a curved magnetic member that is magnetically coupled to the electromagnets. The magnetic force acting on the curved magnetic member has less of a tendency to induce torque to the table than a straight magnetic member, because the geometry of the magnetic force between the curved magnetic member and electromagnets remain relatively unchanged over the permitted range of movement of the magnetic member.

摘要翻译： 致动器具有一对电磁体和磁耦合到电磁体的弯曲的磁性构件。 作用在弯曲的磁性构件上的磁力比直线磁性构件具有较少的引起转矩的趋势，因为弯曲的磁性构件和电磁体之间的磁力的几何形状在允许的运动范围内保持相对不变 磁性构件。

公开(公告)号：US06750625B2

公开(公告)日：2004-06-15

申请号：US09929025

申请日：2001-08-15

申请人： Michael Binnard ,  Kazuya Ono ,  Andrew J. Hazelton

发明人： Michael Binnard ,  Kazuya Ono ,  Andrew J. Hazelton

IPC分类号： G05B1118

CPC分类号： G03F7/70716 ,  G03F7/70725 ,  G03F7/70825 ,  H01L21/682 ,  H02K41/03 ,  H02K2201/18

摘要： A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are controlled by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to distort the high accuracy stage during movements thereof. The high accuracy stage is supported in three vertical degrees of freedom by electromagnetic actuators disposed between the coarse stage and the high accuracy stage and aided by a supplemental vertical support disposed adjacent to the actuators. Preferably, the high accuracy stage is suspended from a bar supported by the supplemental vertical support, which is preferably air bellows.

摘要翻译： 电磁轴承采用六自由度的高精度级。 在舞台的水平面中的运动由可变磁阻致动器控制，该致动器安装在高精度级与粗级之间，以便在其运动期间不会使高精度级失真。 高精度级通过设置在粗级和高精度级之间的电磁致动器在三个垂直自由度中得到支持，并且辅助于靠近致动器设置的辅助垂直支撑。 优选地，高精度级从由辅助垂直支撑件支撑的杆悬挂，该杆优选为空气波纹管。

公开(公告)号：US5523843A

公开(公告)日：1996-06-04

申请号：US118358

申请日：1993-09-09

申请人： Yukio Yamane ,  Kazuya Ono

发明人： Yukio Yamane ,  Kazuya Ono

IPC分类号： G03F7/20 ,  G01B9/02

CPC分类号： G03F7/70716

摘要： A system for detecting yawing of an article movable in first and second orthogonal directions along a plane includes a first yawing detecting device for detecting any angular change of a first surface of the article opposed to the first yawing detecting device, during movement of the article in the first direction; and a second yawing detecting device for detecting any angular change of a second surface of the article different from the first surface and opposed to the second yawing detecting device, during movement of the article in the second direction.

摘要翻译： 一种用于检测在沿着平面的第一和第二正交方向上可移动的物品的偏航的系统包括第一偏航检测装置，用于在物品移动期间检测与第一偏航检测装置相对的物品的第一表面的任何角度变化 第一个方向 以及第二偏转检测装置，用于在物品沿第二方向移动期间检测与第一横置检测装置不同的第一表面的第二表面的任何角度变化。

公开(公告)号：US5414058A

公开(公告)日：1995-05-09

申请号：US91742

申请日：1993-07-15

申请人： Kazuya Ono ,  Tetsuo Miyake ,  Mikio Osa ,  Katuji Kitagawa ,  Masao Kubo

发明人： Kazuya Ono ,  Tetsuo Miyake ,  Mikio Osa ,  Katuji Kitagawa ,  Masao Kubo

IPC分类号： C08G59/18 ,  C09D163/00 ,  C08G59/06

CPC分类号： C08G59/18 ,  C09D163/00 ,  Y10S525/934

摘要： A powder coating composition includes one or more crystalline substances the lowest melting point of which is Mp and one or more non-crystalline substances the lowest glass transition point of which is Tg and is lower than Mp, wherein the crystalline and non-crystalline substances are selected from epoxy resins and curing agents and bonded to each other. The bonding is effected by maintaining a powdery mixture containing the crystalline and non-crystalline substances at a temperature higher than Tg but lower than Mp and the softening point of any of the the non-crystalline substances, optionally under a pressure, and cooling and pulverizing the resulting mixture.

摘要翻译： 粉末涂料组合物包括其中最低熔点为Mp的一种或多种结晶物质和最低玻璃化转变点为Tg并低于Mp的一种或多种非结晶物质，其中结晶和非结晶物质为 选自环氧树脂和固化剂并彼此粘合。 粘合是通过在高于Tg但低于Mp的温度下保持含有结晶和非结晶物质的粉末状混合物，任选地在压力下保持任何非结晶物质的软化点，以及冷却和粉碎 所得混合物。

公开(公告)号：US5319002A

公开(公告)日：1994-06-07

申请号：US960815

申请日：1992-10-14

申请人： Kunimitsu Matsuzaki ,  Seitaro Iwamoto ,  Takeshi Watanabe ,  Kazuya Ono ,  Katsuji Kitagawa

发明人： Kunimitsu Matsuzaki ,  Seitaro Iwamoto ,  Takeshi Watanabe ,  Kazuya Ono ,  Katsuji Kitagawa

IPC分类号： C09D5/46 ,  C09D163/00 ,  C09D7/12 ,  C09D133/12

CPC分类号： C09D163/00 ,  Y10S525/934

摘要： A powder coating composition is disclosed which includes a particulate material containing an epoxy resin and a curing agent, and fine powder of a charge controlling agent such as an acrylic resin, silica or a mixture thereof. The charge controlling agent is deposited on surfaces of the particles of the particulate material.

摘要翻译： 公开了一种粉末涂料组合物，其包含含有环氧树脂和固化剂的颗粒材料，以及电荷控制剂如丙烯酸树脂，二氧化硅或其混合物的细粉末。 电荷控制剂沉积在颗粒材料颗粒的表面上。

公开(公告)号：US5040431A

公开(公告)日：1991-08-20

申请号：US299340

申请日：1989-01-23

申请人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

发明人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

IPC分类号： F16C29/02 ,  G03F7/20 ,  H01L21/68

CPC分类号： F16C29/025 ,  F16C32/06 ,  G03F7/70716 ,  H01L21/68 ,  Y10S248/913 ,  Y10T74/20354

摘要： In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.

摘要翻译： 在运动导向装置中，两个平行的固定导轨固定在一个表面板上，为表面板和固定导轨提供多个静压气体或轴承部件。 在这些轴承部件的影响下，Y台架沿Y轴方向移动。 相对于表面板和Y平台设置有额外的静液压气体或空气轴承构件，以支撑X平台在与Y轴方向正交的X轴方向上移动。 通过表面板上的固定引导件在X轴方向上引导Y台的引导，而通过表面板在与X-Y平面垂直的Z轴方向上的引导。 X平台的Y轴方向的引导由Y台进行，其Z轴方向的引导部由表面板制成，与Y台相同。 利用这种结构，Y阶段的任何振动，滚动或其他方式不会传递到X级。 因此，可以实现高精度的引导。 线性电动机用作X和Y级的驱动源，使得所有可移动部分由非接触结构提供。 此外，使用合适的制动构件，这些构件在阶段事故发生时可操作。 由此，可以防止舞台的意外碰撞和/或舞台从导轨脱轨。

公开(公告)号：US5015671A

公开(公告)日：1991-05-14

申请号：US459191

申请日：1989-12-29

申请人： Kazuya Ono ,  Tetsuo Miyake ,  Katsuji Kitagawa

发明人： Kazuya Ono ,  Tetsuo Miyake ,  Katsuji Kitagawa

IPC分类号： C09D5/03 ,  C08G59/40 ,  C08G59/50 ,  C09D5/46 ,  C09D163/00

CPC分类号： C08G59/5073 ,  C08G59/4014 ,  C09D163/00

摘要： A thermosetting, powder coating composition is disclosed which comprises an epoxy resin, a nitrogen-containing curing agent and an inorganic filler consisting essentially of aluminum hydroxide and silica, the weight ratio of the aluminum hydroxide to the silica being 1:4 to 4:1 and the filler being used in an amount of 40-300 parts by weight per 100 parts by weight of the epoxy resin.

摘要翻译： 公开了一种热固性粉末涂料组合物，其包含环氧树脂，含氮固化剂和基本上由氢氧化铝和二氧化硅组成的无机填料，氢氧化铝与二氧化硅的重量比为1:4至4:1 相对于100重量份环氧树脂，填料的用量为40-300重量份。