公开(公告)号：US5040431A

公开(公告)日：1991-08-20

申请号：US299340

申请日：1989-01-23

申请人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

发明人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

IPC分类号： F16C29/02 ,  G03F7/20 ,  H01L21/68

CPC分类号： F16C29/025 ,  F16C32/06 ,  G03F7/70716 ,  H01L21/68 ,  Y10S248/913 ,  Y10T74/20354

摘要： In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.

摘要翻译： 在运动导向装置中，两个平行的固定导轨固定在一个表面板上，为表面板和固定导轨提供多个静压气体或轴承部件。 在这些轴承部件的影响下，Y台架沿Y轴方向移动。 相对于表面板和Y平台设置有额外的静液压气体或空气轴承构件，以支撑X平台在与Y轴方向正交的X轴方向上移动。 通过表面板上的固定引导件在X轴方向上引导Y台的引导，而通过表面板在与X-Y平面垂直的Z轴方向上的引导。 X平台的Y轴方向的引导由Y台进行，其Z轴方向的引导部由表面板制成，与Y台相同。 利用这种结构，Y阶段的任何振动，滚动或其他方式不会传递到X级。 因此，可以实现高精度的引导。 线性电动机用作X和Y级的驱动源，使得所有可移动部分由非接触结构提供。 此外，使用合适的制动构件，这些构件在阶段事故发生时可操作。 由此，可以防止舞台的意外碰撞和/或舞台从导轨脱轨。

公开(公告)号：US4744675A

公开(公告)日：1988-05-17

申请号：US3769

申请日：1987-01-16

申请人： Shigeo Sakino ,  Mahito Negishi ,  Koichi Matsushita ,  Michio Horikoshi ,  Makoto Higomura

发明人： Shigeo Sakino ,  Mahito Negishi ,  Koichi Matsushita ,  Michio Horikoshi ,  Makoto Higomura

IPC分类号： B23Q1/28 ,  B23Q1/38 ,  B23Q1/58 ,  F16C29/02 ,  F16C32/06

CPC分类号： F16C32/06 ,  B23Q1/28 ,  B23Q1/38 ,  B23Q1/58 ,  F16C29/025

摘要： A moving mechanism for relatively moving first and second members, the mechanism comprising a first fluid discharging portion provided on the first member, for relatively supporting the second member by use of a static pressure, and a second fluid discharging portion operable to produce a static pressure that is effective to apply, to the first member, a force contributable to prevent any deformation of the first member due to the static pressure caused by the first fluid discharging portion.

摘要翻译： 一种用于相对移动的第一和第二构件的移动机构，所述机构包括设置在第一构件上的第一流体排放部分，用于通过静压力相对地支撑第二构件;以及第二流体排出部分，其可操作以产生静压力 对于第一构件有效地施加有助于防止由于第一流体排出部引起的静压而使第一构件发生变形的力。

公开(公告)号：US09027231B2

公开(公告)日：2015-05-12

申请号：US13702119

申请日：2011-06-22

申请人： Toshihiko Mimura ,  Yuichi Someya ,  Yuji Matsuo ,  Mikio Nakasugi ,  Ken Meisho ,  Masaichi Sato ,  Mahito Negishi

发明人： Toshihiko Mimura ,  Yuichi Someya ,  Yuji Matsuo ,  Mikio Nakasugi ,  Ken Meisho ,  Masaichi Sato ,  Mahito Negishi

IPC分类号： B23P21/00 ,  B25J19/02 ,  B25J9/00 ,  B25J21/00

CPC分类号： B23P21/00 ,  B25J9/0084 ,  B25J21/00 ,  Y10T29/53087 ,  Y10T29/53091

摘要： To enable positioning a robot arm and a workpiece with high accuracy while reducing vibrations of a camera. According to the claimed invention for this purpose, a robot station 100 includes a pedestal 103 to which robot arms 101 and 102 are fixed, a camera 106 which images an area including a working area 209 of the pedestal 103, and a booth 104 to which the camera 106 is fixed. The pedestal 103 is fixed to a floor surface, and the booth 104 is fixed to the floor surface without contacting the pedestal 103. The booth 104 is formed in the shape of a rectangular parallelepiped having a short side parallel to a workpiece conveying direction T and a long side perpendicular to the workpiece conveying direction T in a plan view. In the booth 104, the length of the long side y of the booth 104 is set to not less than the sum of a maximum length by which the robot arms 101 and 102 protrude from the pedestal 103 in a direction perpendicular to the workpiece conveying direction T and the length in the direction perpendicular to the workpiece conveying direction T of the pedestal 103 in a plan view.

摘要翻译： 实现机器人手臂和工件的高精度定位，同时减少相机振动。 根据本发明，为此目的，机器人站100包括固定有机器人手臂101和102的基座103，对包括基座103的工作区域209的区域进行成像的照相机106和与其相对 照相机106是固定的。 基座103被固定在地板表面上，并且将展位104固定在地板表面上而不与基座103接触。展台104形成为具有平行于工件传送方向T的短边的长方体形状， 在平面图中垂直于工件传送方向T的长边。 在展台104中，展厅104的长边y的长度被设定为不小于机器人臂101和102在垂直于工件传送方向的方向上从基座103突出的最大长度之和 T和在平面图中与基座103的工件输送方向T垂直的方向的长度。

公开(公告)号：US20070195333A1

公开(公告)日：2007-08-23

申请号：US11675562

申请日：2007-02-15

申请人： Mahito Negishi

发明人： Mahito Negishi

IPC分类号： G01N13/16 ,  G01B5/28 ,  G01B11/30

CPC分类号： G01B21/30 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/38 ,  G01Q70/06

摘要： A surface shape of a member to be measured is measured by reflecting measuring light at a reflection surface of a probe and utilizing an atomic force exerting between the probe and utilizing an atomic force exerting between the probe and the member to be measured. In addition to a first scanner for driving the probe, a second scanner for moving a focus position of an optical system is provided. Position conversion data representing a correlation between amounts of control of the first scanner and the second scanner are obtained in advance. By synchronously driving the first scanner and the second scanner, the focus position of the optical system is caused to follow the probe to improve measurement accuracy.

摘要翻译： 通过在探针的反射面反射测量光并利用在探针之间施加的原子力并利用在探针与待测量的构件之间施加的原子力来测量要测量的构件的表面形状。 除了用于驱动探针的第一扫描仪之外，还提供了用于移动光学系统的聚焦位置的第二扫描仪。 预先获得表示第一扫描仪和第二扫描仪的控制量之间的相关性的位置转换数据。 通过同步驱动第一扫描器和第二扫描器，使得光学系统的聚焦位置跟随探头以提高测量精度。

公开(公告)号：US08744625B2

公开(公告)日：2014-06-03

申请号：US13269215

申请日：2011-10-07

申请人： Mahito Negishi

发明人： Mahito Negishi

IPC分类号： B25J9/06

CPC分类号： B25J9/161 ,  B25J9/1656 ,  G05B2219/33081 ,  G05B2219/40449

摘要： In the control of a multi-joint robot main body, it is necessary to execute intricate track calculations and synchronous operations in parallel, even if the track calculations are intricate and times required for the calculations are indefinite. For this purpose, a robot controlling device of the present invention includes a shared memory, and first and second processing units connected to the shared memory. The first processing unit performs track calculation processing which includes calculating operation command data indicating a series of command values to be output to arm motors, based on a command to operate the multi-joint robot main body to a desired position posture, and storing the calculated operation command data in the shared memory. The second processing unit performs synchronous processing which includes acquiring the operation command data stored in the shared memory, and synchronously outputting the command values to the arm motors at predetermined time intervals.

摘要翻译： 在多关节机器人主体的控制中，即使轨迹计算复杂，计算所需时间不确定，也需要并行执行复杂的轨迹计算和同步运算。 为此，本发明的机器人控制装置包括共享存储器以及连接到共享存储器的第一和第二处理单元。 第一处理单元执行轨道计算处理，其包括基于将多关节机器人主体操作到所需位置姿势的命令，计算指示要输出到手臂马达的一系列命令值的操作命令数据，并存储所计算的 共享存储器中的操作命令数据。 第二处理单元执行同步处理，其包括获取存储在共享存储器中的操作命令数据，并且以预定时间间隔同步地将命令值输出到臂马达。

公开(公告)号：US20110258847A1

公开(公告)日：2011-10-27

申请号：US13079183

申请日：2011-04-04

申请人： Ken Meisho ,  Mikio Nakasugi ,  Mahito Negishi ,  Yuji Matsuo

发明人： Ken Meisho ,  Mikio Nakasugi ,  Mahito Negishi ,  Yuji Matsuo

IPC分类号： B23P19/00

CPC分类号： B25J9/0084 ,  B23P19/00 ,  B23P21/00 ,  B25J9/0009 ,  B25J21/00 ,  Y10T29/53

摘要： A robotic cell enables a robotic station to be downsized and both high maintainability and high rigidity to be attained. To this end, the robotic cell for assembling parts by using multiple robots includes multiple booths for housing multiple trestles, on each of which a pair of robotic arms are mounted, with the trestles adjoining one another. Each trestle has an opening portion on one side surface thereof, through which a power controller box is carried in and out. To compensate for a decrease in rigidity of the trestle due to the opening portion, a connecting member is used for coupling two trestles adjacent to each other across the respective booths. Both end portions of each connecting member are fastened to the both trestles with screws, respectively.

摘要翻译： 机器人电池使得机器人站能够被小型化，并且能够实现高可维护性和高刚度。 为此，通过使用多个机器人组装零件的机器人单元包括多个支架，用于容纳多个支架，每个支架上安装有一对机器人手臂，支架彼此相邻。 每个支架在其一个侧表面上具有开口部分，功率控制器盒通过该开口部分进出。 为了补偿由于开口部分引起的支架刚度的降低，连接构件用于将两个彼此相邻的两个支架联接在相应的展位上。 每个连接构件的两个端部分别用螺钉紧固到两个支架上。

公开(公告)号：US4916340A

公开(公告)日：1990-04-10

申请号：US299342

申请日：1989-01-23

申请人： Mahito Negishi

发明人： Mahito Negishi

IPC分类号： B23Q1/62 ,  F16C29/02 ,  G03F7/20 ,  H02K5/16 ,  H02K41/02

CPC分类号： H02K41/031 ,  B23Q1/621 ,  F16C29/025 ,  F16C32/0603 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/70875 ,  H02K5/16

摘要： Movement guiding device includes two parallel stationary guides provided on a surface plate, a plurality of hydrostatic gas bearing members provided in relation to the surface plate and the stationary guides for supporting a Y stage, a plurality of hydrostatic gas bearing members provided in relation to the surface plate and the Y stage for supporting an X stage, two linear motors provided outside the stationary guides for moving the Y stage in a Y direction, and a linear motor coupled integrally to the Y stage for moving the X stage in an X direction. The Y stage moving linear motor has a stator fixed to the surface plate and a moving element fixed to the Y stage. The X stage driving linear motor has a stator fixed to the Y stage and a moving element fixed to the X stage. Each stator and each moving element are fixed to a corresponding component with a predetermined interspacing thereto defined by spacers of polycarbonate, while each interspacing is filled with a heat insulating material such as expanded polystyrene, for example. With this structure, without interfering with the transmission of the drive force of each linear motor, the transmission of heat generated by the linear motor to the surface plate is effectively prevented. In one embodiment, a cooling medium is supplied to a coil supporting member in accordance with a difference in temperature between the surface plate and the linear motor.

摘要翻译： 移动引导装置包括设置在表面板上的两个平行的固定引导件，相对于表面板设置的多个静压气体轴承部件和用于支撑Y台的固定引导件，多个静压气体轴承部件 表面板和用于支撑X台的Y台，设置在固定导轨外侧的用于沿Y方向移动Y台的两个线性马达，以及一体地连接到Y台上的线性马达，用于沿X方向移动X台。 Y级移动线性电动机具有固定在表面板上的定子和固定在Y平台上的移动元件。 X级驱动线性电动机具有固定在Y档的定子和固定在X档的移动元件。 每个定子和每个移动元件被固定到具有由聚碳酸酯的间隔物限定的预定间隔的相应部件，而每个间隔填充有隔热材料，例如发泡聚苯乙烯。 利用这种结构，在不干扰每个线性电动机的驱动力的传递的情况下，有效地防止了由线性电动机产生的热量传递到表面板。 在一个实施例中，根据表面板和线性电动机之间的温度差，将冷却介质供应到线圈支撑构件。

公开(公告)号：US09120221B2

公开(公告)日：2015-09-01

申请号：US13697584

申请日：2011-05-16

申请人： Mikio Nakasugi ,  Mahito Negishi ,  Masaichi Sato ,  Ken Meisho ,  Yuji Matsuo

发明人： Mikio Nakasugi ,  Mahito Negishi ,  Masaichi Sato ,  Ken Meisho ,  Yuji Matsuo

IPC分类号： B23P21/00 ,  B25J9/00

CPC分类号： B25J9/0084 ,  B23P21/00 ,  B23P21/004 ,  B25J9/0096 ,  Y10T29/53

摘要： Provided is a robot cell apparatus in which a cooperatively operable area for a pair of robot arms can be widened and which has an excellent workability. The present invention includes a table with a plane having a quadrangular shape in plan view, a workpiece being placed on the plane. Proximal ends of robot arms are respectively fixed to two corners at diagonal positions among four corners of the plane of the table. A cooperatively operable area in which the pair of robot arms are cooperatively operable is formed in a space above the plane of the table.

摘要翻译： 提供一种机器人单元装置，其中可以加宽用于一对机器人手臂的协作可操作区域，并且其具有优异的可加工性。 本发明包括具有平面图中具有四边形形状的平面的工作台，将工件放置在平面上。 机器人手臂的近端分别固定在桌子的平面四角之间的对角位置的两个角。 在桌子的平面上方的空间中形成有可协作操作的一对机器人手臂的协同操作区域。

公开(公告)号：US20130055560A1

公开(公告)日：2013-03-07

申请号：US13697584

申请日：2011-05-16

申请人： Mikio Nakasugi ,  Mahito Negishi ,  Masaichi Sato ,  Ken Meisho ,  Yuji Matsuo

发明人： Mikio Nakasugi ,  Mahito Negishi ,  Masaichi Sato ,  Ken Meisho ,  Yuji Matsuo

IPC分类号： B23P19/00

CPC分类号： B25J9/0084 ,  B23P21/00 ,  B23P21/004 ,  B25J9/0096 ,  Y10T29/53

摘要： Provided is a robot cell apparatus in which a cooperatively operable area for a pair of robot arms can be widened and which has an excellent workability. The present invention includes a table with a plane having a quadrangular shape in plan view, a workpiece being placed on the plane. Proximal ends of robot arms are respectively fixed to two corners at diagonal positions among four corners of the plane of the table. A cooperatively operable area in which the pair of robot arms are cooperatively operable is formed in a space above the plane of the table.

摘要翻译： 提供一种机器人单元装置，其中可以加宽用于一对机器人手臂的协作可操作区域，并且其具有优异的可加工性。 本发明包括具有平面图中具有四边形形状的平面的工作台，将工件放置在平面上。 机器人手臂的近端分别固定在桌子的平面四角之间的对角位置的两个角。 在桌子的平面上方的空间中形成有可协作操作的一对机器人手臂的协同操作区域。

公开(公告)号：US20110245006A1

公开(公告)日：2011-10-06

申请号：US13079736

申请日：2011-04-04

申请人： Mahito Negishi

发明人： Mahito Negishi

IPC分类号： F16H1/28 ,  F16H55/14

CPC分类号： B25J9/1025 ,  F16H49/001 ,  H02K7/116 ,  H02K2213/03

摘要： Provided is a strain wave gearing having a high stiffness and no limitation imposed on rotation, and a robotic arm including the strain wave gearing. A strain wave gearing includes an electric motor and a strain wave gearing reducer. The strain wave gearing reducer includes: an outer ring member including a first internal gear; a pair of second internal gears each having internal teeth formed along an inner periphery thereof, and the pair of second internal gears differing from the first internal gear in number of teeth; a flexible gear; and a cam member, which distorts the flexible gear in a radial direction to cause the flexible gear to engage with the first internal gear and the pair of second internal gears. The pair of second internal gears is fixed to a pair of fixing plates coupled to each other by a shaft penetrating the cam member.

摘要翻译： 提供具有高刚度并且不限于旋转的应变波传动装置，以及包括应变波齿轮传动装置的机器臂。 应变波传动装置包括电动机和应变波齿轮减速器。 应变波减速机包括：外圈构件，其包括第一内齿轮; 一对第二内齿轮，每个第二内齿轮具有沿其内周形成的内齿，所述一对第二内齿轮与所述第一内齿轮的齿数不同; 柔性齿轮; 以及凸轮构件，其在径向上扭曲柔性齿轮，以使柔性齿轮与第一内齿轮和一对第二内齿轮接合。 一对第二内齿轮通过穿过凸轮构件的轴彼此连接而固定在一对固定板上。