摘要:
A resist composition comprising, in a resist, an additive which has a melting point-of 160° C. or above, contains no aromatic ring, has a molecular size of no greater than 50 Å and is soluble in the developing solution for the resist, at 1-50 parts by weight with respect to 100 parts by solid weight of the resist, as well as a pattern forming process employing it. It thereby becomes possible to obtain high-resolution resist patterns.
摘要:
A novel and useful linear triene compound represented by the following formula (1) is co-polymerized with an &agr;-olefin to obtain an ethylenically unsaturated copolymer which is superior in weather-ability, heat resitance and fastness to ozone, together with superior scorch stability and vulcanizability at high velocity in which R1, R2, R3, R4, R5 and R6 stand each, independently of each other, for hydrogen atom or an alkyl having 1-3 carbon atoms, R7 represents an alkyl having 1-3 carbon atoms and n is an integer of 0-5, with the proviso that each of R4s or of R5s may be identical with or different from each other, respectively, when n is 2 or greater.
摘要:
Alkali-developable, chemically amplified resist composition which comprises an alkali-insoluble compound having a structural unit containing a protected alkali-soluble group in which unit a protective moiety of said protected alkali-soluble group contains an alicyclic hydrocarbon group having bonded to a carbon atom thereof a —CH2—R1′ group wherein R1′ is methyl, ethyl, propyl or isopropyl, and said alkali-soluble group is cleaved upon action of an acid generated from a photoacid generator used in combination with said compound, thereby releasing said protective moiety from the alkali-soluble group and converting said compound to an alkali-soluble one, and a photoacid generator capable of being decomposed upon exposure to a patterning radiation to thereby produce an acid capable of causing cleavage of said protective moiety. The resist composition can exhibit a high sensitivity (not more than 5 mJ/cm2) and therefore is particularly suitable for ArF lithography and also can exhibit stable patterning properties.
摘要翻译:碱可显影的化学增幅抗蚀剂组合物,其包含具有包含受保护的碱溶性基团的结构单元的碱不溶性化合物,其中所述被保护的碱溶性基团的保护部分含有与碳原子键合的脂环族烃基 其中R 1'是甲基,乙基,丙基或异丙基,并且所述碱溶性基团在与所述化合物组合使用的光致酸产生剂产生的酸作用下被切割,由此释放所述保护部分 从碱溶性基团中转化为碱溶性化合物,以及光致酸发生剂,其能够在暴露于图案化辐射时分解,从而产生能够导致所述保护部分裂解的酸。 抗蚀剂组合物可以表现出高灵敏度(不大于5mJ / cm 2),因此特别适用于ArF光刻,并且还可呈现稳定的图案化性能。
摘要:
A composition for forming an electrically conductive layer which is used in patterning of a resist with electric charge beam, which comprises: (a) 0.1 to 20 parts by weight of sulfonated polyanilines with a sulfonic group content ranging from 20 to 80% based on the aromatic ring, the sulfonated polyaniline having a weight average molecular weight of 500 to 100,000 and a molecular weight dispersion of not more than 5, (b) 100 parts by weight of a solvent, and (c) 0.01 to 30 parts by weight of amines and/or quaternary ammonium salts, and if desired, it further comprises 0 to 200 parts by weight of the following substance(s) (A) and/or (B) as component (d): (A) a high molecular weight compound soluble in the aforesaid solvent (b), (B) a surface active agent.
摘要:
A flat display apparatus is disclosed which includes a grid interposed between and spaced apart from control electrodes and an electron source. The grid which includes holes has a higher potential applied than the one applied to a cathode so as to enable electrons to pass through the holes. An additional grid may be interposed between and spaced apart from the grid and the control electrodes. Alternatively, a rear electrode is located between adjacent porous cover electrodes to connect them, and a second rear electrode is located near the rear electrode and has a lower potential applied than the one applied to the cover electrodes.
摘要:
A cathode for use in electron tubes which comprises a base metal made of nickel as a principal component and having a surface on which a porous electron emissive layer is formed. The porous electron emissive layer is of a composition comprising 0.1 to 20 wt % (relative to the total weight of the porous electron emissive layer) of scandium oxide having a layered crystalline structure dispersed in an oxide of alkaline earth metal including at least barium. This cathode can be made by preparing a solution in which nitrocellulose is dissolved with the use of an organic solvent, mixing both of barium carbonate and scandium oxide having a layered crystalline structure into the solution to provide an suspension, pulverizing solid components of the suspension for the adjustment of particle size, and depositing the suspension on a surface of the base metal to form the electron emissive layer.
摘要:
In the method of invention, the formability is imparted to the slurry of a metal or ceramic powder by employing a porous mold and removing the dispersion medium through the evaporation or thermal decomposition thereof, or by using a silazane oil as the dispersion medium and curing it by heating. Since the phase change usually accompanying volume change does not occur in the dispersion medium, strain and deformation rarely occur in the molded body. As result, the sintered body obtained has high dimensional accuracy.
摘要:
A cathode for an electron tube in accordance with the present invention comprises: a base (2) containing not only nickel as a major element but also a reducing agent; a layer (3) of an electron-emissive substance which is applied to the base (2) and contains not only an alkaline earth metal oxide as a principal component but also a scandium oxide; and a heater for heating the layer (3).
摘要:
An oxide-coated cathode for an electron tube comprises a layer (2) of an electron-emissive substance. This layer (2) contains: an alkaline earth metal oxide as a principal component containing at least Ba; an oxide of Sc; and at least one heat-resisting oxide selected from the group consisting of oxides of Al, Si, Ta, V, Cr, Fe, Zr, Nb, Hf, Ta, Mo and W.
摘要:
An encapsulating material for solar cell containing an ethylene/α-olefin copolymer satisfying the following a1) and a2), and a specific peroxyketal having a 1-hour half-life temperature in a range of 100 to 135 degrees centigrade; the peroxyketal being contained in an amount of 0.1 to less than 0.8 weight parts relative to 100 weight parts of the ethylene/α-olefin copolymer. a1) the shore A hardness is from 60 to 85 as measured in accordance with ASTM D2240. a2) MFR is from 2 to 50 g/10 minutes as measured under the conditions of a temperature of 190 degrees centigrade and a load of 2.16 kg in accordance with ASTM D1238.