公开(公告)号：US20060006166A1

公开(公告)日：2006-01-12

申请号：US10884933

申请日：2004-07-06

申请人： Howard Chen ,  William Ferrante ,  Louis Hsu ,  Carl Radens

发明人： Howard Chen ,  William Ferrante ,  Louis Hsu ,  Carl Radens

IPC分类号： H05B1/02 ,  H05B3/00

CPC分类号： G05D23/20 ,  G05D23/1931 ,  Y10T307/469

摘要： An on-chip temperature control system includes a temperature sensor, which monitors a temperature of a chip, and a hysteresis comparator which checks whether the temperature is in an acceptable range. A reference adjustment circuit is responsive to the hysteresis comparator to adjust an on-chip voltage to control the temperature locally by adjusting a local supply voltage, if the temperature is out of range.

摘要翻译： 片上温度控制系统包括监测芯片温度的温度传感器和检查温度是否在可接受范围内的滞后比较器。 如果温度超出范围，参考调节电路响应于迟滞比较器来调节片上电压以局部地调节局部电源电压来控制温度。

公开(公告)号：US20050260801A1

公开(公告)日：2005-11-24

申请号：US10996866

申请日：2004-11-24

申请人： Rama Divakaruni ,  Louis Hsu ,  Rajiv Joshi ,  Carl Radens

发明人： Rama Divakaruni ,  Louis Hsu ,  Rajiv Joshi ,  Carl Radens

IPC分类号： H01L21/336 ,  H01L29/45 ,  H01L29/76 ,  H01L29/786

CPC分类号： H01L29/66553 ,  H01L29/458 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66628 ,  H01L29/66772 ,  H01L29/7842 ,  H01L29/78618 ,  H01L29/78684

摘要： A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETs. The FETs include a thin channel with raised source/drain (RSD) regions at each end on an insulator layer, e.g., on an ultra-thin silicon on insulator (SOI) chip. Isolation trenches at each end of the FETs, i.e., at the end of the RSD regions, isolate and define FET islands. Insulating sidewalls at each RSD region sandwich the FET gate between the RSD regions. The gate dielectric may be a high K dielectric. Salicide on the RSD regions and, optionally, on the gates reduce device resistances.

摘要翻译： 包括FET的场效应晶体管（FET），集成电路（IC）芯片和形成FET的方法。 FET包括在绝缘体层上的每个端部（例如，在绝缘体上的超薄绝缘体（SOI））芯片上的源极/漏极（RSD）区域上升的薄沟道。 在FET的每个端部，即在RSD区域的末端处的隔离沟槽隔离并限定FET岛。 每个RSD区域的绝缘侧壁将RSD区域之间的FET栅极夹在中间。 栅极电介质可以是高K电介质。 RSD区域上和可选地在栅极上的杀菌剂降低了器件电阻。

公开(公告)号：US20050112811A1

公开(公告)日：2005-05-26

申请号：US10707200

申请日：2003-11-26

申请人： Louis Hsu ,  Carl Radens ,  Ramachandra Divakaruni

发明人： Louis Hsu ,  Carl Radens ,  Ramachandra Divakaruni

IPC分类号： H01L21/336 ,  H01L21/762 ,  H01L29/45 ,  H01L21/8234

CPC分类号： H01L29/66772 ,  H01L21/76283 ,  H01L29/458 ,  H01L29/66545

摘要： An ultra-thin, scaleable MOSFET transistor and fabrication method are described. The transistor features fully self-aligned, raised source/drain junctions on a thin SOI wafer and exhibits low contact resistance, low gate resistance and good device isolation characteristic. No extra lithographic mask steps are required beyond those required by conventional processes. The transistor is completely “bracketed” or surrounded by STI (shallow trench isolation), providing inherent isolation between it and any other devices on the SOI wafer. Gate sidewall spacers are formed outside of the gate area so that the scalability is limited solely by lithography resolution.

摘要翻译： 描述了一种超薄的可扩展MOSFET晶体管和制造方法。 晶体管在薄SOI晶圆上具有完全自对准的升高的源极/漏极结，并且具有低接触电阻，低栅极电阻和良好的器件隔离特性。 不需要额外的光刻掩模步骤，超出传统工艺所需要的步骤。 晶体管完全“包围”或被STI（浅沟槽隔离）包围，提供了SOI晶片上任何其他器件之间的固有隔离。 栅极侧壁间隔物形成在栅极区域的外部，从而可扩展性仅由光刻分辨率限制。

公开(公告)号：US08304912B2

公开(公告)日：2012-11-06

申请号：US12054644

申请日：2008-03-25

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L23/48

CPC分类号： H01L27/1203 ,  H01L21/28114 ,  H01L21/823456 ,  H01L21/84 ,  H01L29/42376 ,  H01L2924/0002 ,  H01L2924/00

摘要： A transistor device and method of forming the same comprises a substrate; a first gate electrode over the substrate; a second gate electrode over the substrate; and a landing pad comprising a pair of flanged ends overlapping the second gate electrode, wherein the structure of the second gate electrode is discontinuous with the structure of the landing pad.

摘要翻译： 晶体管器件及其形成方法包括：衬底; 衬底上的第一栅电极; 在所述衬底上方的第二栅电极; 以及着陆垫，其包括与所述第二栅电极重叠的一对凸缘端，其中所述第二栅极的结构与所述着陆焊盘的结构不连续。

公开(公告)号：US08215074B2

公开(公告)日：2012-07-10

申请号：US12026123

申请日：2008-02-05

申请人： Charles T. Black ,  Timothy J. Dalton ,  Bruce B. Doris ,  Carl Radens

发明人： Charles T. Black ,  Timothy J. Dalton ,  Bruce B. Doris ,  Carl Radens

IPC分类号： E04B2/00

CPC分类号： H01L21/0338 ,  B81B2203/0369 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  B82Y30/00 ,  H01L21/0337 ,  H01L51/0017 ,  Y10S977/882 ,  Y10S977/887 ,  Y10S977/888 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24736 ,  Y10T428/24802

摘要： In one embodiment, Hexagonal tiles encompassing a large are divided into three groups, each containing ⅓ of all hexagonal tiles that are disjoined among one another. Openings for the hexagonal tiles in each group are formed in a template layer, and a set of self-assembling block copolymers is applied and patterned within each opening. This process is repeated three times to encompass all three groups, resulting in a self-aligned pattern extending over a wide area. In another embodiment, the large area is divided into rectangular tiles of two non-overlapping and complementary groups. Each rectangular area has a width less than the range of order of self-assembling block copolymers. Self-assembled self-aligned line and space structures are formed in each group in a sequential manner so that a line and space pattern is formed over a large area extending beyond the range of order.

摘要翻译： 在一个实施例中，包括大的六边形瓦片被分成三组，每组包含彼此分离的所有六边形瓦片的1/3。 每个组中的六边形瓦片的开口形成在模板层中，并且在每个开口内施加并组合一组自组装嵌段共聚物。 该过程重复三次以包含所有三组，导致在大面积上延伸的自对准图案。 在另一个实施例中，大面积被分成两个不重叠和互补组的矩形瓦片。 每个矩形区域的宽度小于自组装嵌段共聚物的顺序范围。 在每组中以顺序的方式形成自组装的自对准线和空间结构，使得在超过有序范围的大面积上形成线和空间图案。

公开(公告)号：US20120129357A1

公开(公告)日：2012-05-24

申请号：US12017598

申请日：2008-01-22

申请人： Timothy J. Dalton ,  Bruce B. Doris ,  Ho-Cheol Kim ,  Carl Radens

发明人： Timothy J. Dalton ,  Bruce B. Doris ,  Ho-Cheol Kim ,  Carl Radens

IPC分类号： H01L21/31 ,  B82Y40/00

CPC分类号： H01L21/0337 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y30/00 ,  H01L21/0338 ,  Y10T428/24612

摘要： A first nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running along a first direction is formed from first self-assembling block copolymers within a first layer. The first layer is filled with a filler material and a second layer is deposited above the first layer containing the first nanoscale nested line structure. A second nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running in a second direction is formed from second self-assembling block copolymers within the second layer. The composite pattern of the first nanoscale nested line structure and the second nanoscale nested line structure is transferred into an underlayer beneath the first layer to form an array of structures containing periodicity in two directions.

摘要翻译： 具有亚光刻宽度和亚光刻距离并沿着第一方向延伸的第一纳米级自对准自组装嵌套线结构由第一层内的第一自组装嵌段共聚物形成。 第一层填充有填充材料，并且第二层沉积在包含第一纳米级嵌套线结构的第一层之上。 具有亚光刻宽度和亚光刻距离并沿第二方向运行的第二纳米级自对准自组装嵌套线结构由第二层内的第二自组装嵌段共聚物形成。 第一纳米级嵌套线结构和第二纳米级嵌套线结构的复合图案被转移到第一层下面的底层中以形成在两个方向上包含周期性的结构阵列。

公开(公告)号：US20110100453A1

公开(公告)日：2011-05-05

申请号：US12915985

申请日：2010-10-29

申请人： Lawrence A. Clevenger ,  Rainer K. Krause ,  Zhengwen O. Li ,  Kevin S. Petrarca ,  Roger A. Quon ,  Carl Radens ,  Brian C. Sapp

发明人： Lawrence A. Clevenger ,  Rainer K. Krause ,  Zhengwen O. Li ,  Kevin S. Petrarca ,  Roger A. Quon ,  Carl Radens ,  Brian C. Sapp

IPC分类号： H01L31/0224 ,  H01L31/18

CPC分类号： H01L31/02164 ,  H01L31/022425 ,  Y02E10/50

摘要： A method for manufacturing one or more electrically contactable grids on at least one surface of a semiconductor substrate for use in a solar cell product includes the following. A heat-sensitive masking agent layer is deposited on the surface of the substrate of the solar cell product. The masking agent layer is locally heated to form a grid mask. Selected parts of the masking agent layer defined by locally heating are removed to form openings in the grid mask. A contact metallization is applied on the grid mask.

摘要翻译： 一种用于在太阳能电池产品中使用的半导体衬底的至少一个表面上制造一个或多个电接触网格的方法包括以下。 在太阳能电池产品的基板的表面上沉积热敏屏蔽剂层。 掩蔽剂层被局部加热以形成栅格掩模。 去除由局部加热限定的掩蔽剂层的选定部分，以在网格掩模中形成开口。 在栅格掩模上施加接触金属化。

公开(公告)号：US07691698B2

公开(公告)日：2010-04-06

申请号：US11358483

申请日：2006-02-21

申请人： Dureseti Chidambarrao ,  Anda C. Mocuta ,  Dan M. Mocuta ,  Carl Radens

发明人： Dureseti Chidambarrao ,  Anda C. Mocuta ,  Dan M. Mocuta ,  Carl Radens

IPC分类号： H01L21/8238

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823878 ,  H01L27/1203 ,  H01L29/165 ,  H01L29/665 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848

摘要： The invention relates to a semiconductor structure and method of manufacturing and more particularly to a CMOS device with at least one embedded SiGe layer in the source/drain region of the PFET, and at least one embedded SiGe layer in the channel region of the NFET. In one embodiment, the structure of the invention enhances the electron mobility in the NFET device, and further enhances the hole mobility in the PFET device. Additionally, by using the fabrication methods and hence achieving the final structure of the invention, it is also possible to construct a PFET and NFET each with embedded SiGe layers on the same substrate.

摘要翻译： 本发明涉及半导体结构和制造方法，更具体地说涉及在PFET的源极/漏极区域中具有至少一个嵌入的SiGe层以及在NFET的沟道区域中至少一个嵌入的SiGe层的CMOS器件。 在一个实施方案中，本发明的结构增强了NFET器件中的电子迁移率，并进一步提高了PFET器件中的空穴迁移率。 此外，通过使用制造方法并因此实现本发明的最终结构，还可以在同一衬底上构造每个具有嵌入的SiGe层的PFET和NFET。

公开(公告)号：US07659160B2

公开(公告)日：2010-02-09

申请号：US11923075

申请日：2007-10-24

申请人： Michael P. Belyansky ,  Dureseti Chidambarrao ,  Lawrence A. Clevenger ,  Kaushik A. Kumar ,  Carl Radens

发明人： Michael P. Belyansky ,  Dureseti Chidambarrao ,  Lawrence A. Clevenger ,  Kaushik A. Kumar ,  Carl Radens

IPC分类号： H01L21/8238

CPC分类号： H01L21/76804 ,  H01L29/6659 ,  H01L29/7833 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to an field effect transistor (FET) comprising an inverted source/drain metallic contact that has a lower portion located in a first, lower dielectric layer and an upper portion located in a second, upper dielectric layer. The lower portion of the inverted source/drain metallic contact has a larger cross-sectional area than the upper portion. Preferably, the lower portion of the inverted source/drain metallic contact has a cross-sectional area ranging from about 0.03 μm2 to about 3.15 μm2, and such an inverted source/drain metallic contact is spaced apart from a gate electrode of the FET by a distance ranging from about 0.001 μm to about 5 μm.

摘要翻译： 本发明涉及一种场效应晶体管（FET），其包括反向的源极/漏极金属接触，其具有位于第一下部电介质层中的下部和位于第二上部电介质层中的上部。 倒置的源极/漏极金属触点的下部具有比上部更大的横截面面积。 优选地，反相源极/漏极金属触点的下部具有约0.03mum2至约3.15mum2的横截面积，并且这种反向的源极/漏极金属触点与FET的栅电极间隔开一个 距离范围从约0.001毫米到约5毫米。

公开(公告)号：US20090117360A1

公开(公告)日：2009-05-07

申请号：US11933760

申请日：2007-11-01

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Habib Hichri ,  Louis L. Hsu ,  Kaushik A. Kumar ,  Carl Radens ,  Shahab Siddiqui ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Habib Hichri ,  Louis L. Hsu ,  Kaushik A. Kumar ,  Carl Radens ,  Shahab Siddiqui ,  Chih-Chao Yang

IPC分类号： G03C1/73 ,  B05D3/00 ,  B32B27/06

CPC分类号： H01L21/0337 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  H01L21/0338

摘要： A non-photosensitive polymeric resist containing at least two immiscible polymeric block components is deposited on the planar surface. The non-photosensitive polymeric resist is annealed to allow phase separation of immiscible components and developed to remove at least one of the at least two polymeric block components. Nanoscale features, i.e., features of nanometer scale, including at least one recessed region having a nanoscale dimension is formed in the polymeric resist. The top surface of the polymeric resist is modified for enhanced etch resistance by an exposure to an energetic beam, which allows the top surface of the patterned polymeric resist to become more resistant to etching processes and chemistries. The enhanced ratio of etch resistance between the two types of surfaces provides improved image contrast and fidelity between areas having the top surface and the at least one recessed region.

摘要翻译： 含有至少两个不混溶的聚合物嵌段组分的非光敏聚合物抗蚀剂沉积在平面上。 将非光敏聚合物抗蚀剂退火以允许不相容组分的相分离并显影以除去至少两种聚合物嵌段组分中的至少一种。 在聚合物抗蚀剂中形成纳米尺度特征，即纳米尺度的特征，包括具有纳米级尺寸的至少一个凹陷区域。 聚合物抗蚀剂的顶表面通过暴露于能量束而被改进以提高耐蚀刻性，这允许图案化聚合物抗蚀剂的顶表面变得更耐蚀刻工艺和化学物质。 两种类型表面之间的增强的耐蚀刻比提供了改善的图像对比度和具有顶表面和至少一个凹陷区域的区域之间的保真度。