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48 条记录 (耗时 0.022 秒)

    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
    41.
    发明授权
    Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained 有权
    微机电装置，特别是光学微动开关的制造方法以及如此获得的微电子机械装置

    公开(公告)号：US08193550B2

    公开(公告)日：2012-06-05

    申请号：US12136722

    申请日：2008-06-10

    申请人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

    发明人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

    IPC分类号： H01L31/0352 ,  G02B26/10

    CPC分类号： H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

    摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

    摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

    Integrated differential pressure sensor and manufacturing process thereof
    44.
    发明授权
    Integrated differential pressure sensor and manufacturing process thereof 有权
    集成差压传感器及其制造工艺

    公开(公告)号：US07763487B2

    公开(公告)日：2010-07-27

    申请号：US11417683

    申请日：2006-05-04

    申请人： Flavio Francesco Villa ,  Pietro Corona ,  Gabriele Barlocchi ,  Lorenzo Baldo

    发明人： Flavio Francesco Villa ,  Pietro Corona ,  Gabriele Barlocchi ,  Lorenzo Baldo

    IPC分类号： H01L21/00 ,  H01L29/84

    CPC分类号： G01L9/0045 ,  G01L13/025

    摘要： A process for manufacturing an integrated differential pressure sensor includes forming, in a monolithic body of semiconductor material having a first face and a second face, a cavity extending at a distance from the first face and delimiting therewith a flexible membrane, forming an access passage in fluid communication with the cavity, and forming, in the flexible membrane, at least one transduction element configured so as to convert a deformation of the flexible membrane into electrical signals. The cavity is formed in a position set at a distance from the second face and delimits, together with the second face, a portion of the monolithic body. In order to form the access passage, the monolithic body is etched so as to form an access trench extending through it.

    摘要翻译： 一种用于制造集成差压传感器的方法，包括在具有第一面和第二面的半导体材料的整体中形成一个与第一面相距一定距离的空腔，并将其限定在柔性膜上，形成入口通道 与空腔流体连通，以及在柔性膜中形成至少一个换能元件，其构造成将柔性膜的变形转换为电信号。 空腔形成在距第二面一定距离处的位置，并与第二面一起界定整体式的一部分。 为了形成进入通道，对整体式主体进行蚀刻以便形成延伸通过其的通道沟槽。

    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
    47.
    发明申请
    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device 有权
    制造三轴压阻加速度计和相对压力监测装置的方法

    公开(公告)号：US20060185428A1

    公开(公告)日：2006-08-24

    申请号：US11338614

    申请日：2006-01-24

    申请人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    发明人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    IPC分类号： B60C23/02

    CPC分类号： G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

    摘要： A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.

    摘要翻译： 半导体压阻加速度计的制造方法包括以下步骤：提供半导体材料的晶片; 在晶片上在腔上提供膜; 将惯性质量刚性耦合到膜上; 并且在晶片中提供对膜的应变敏感的压阻转导元件并产生相应的电信号。 通过在与空腔相对的膜的表面的顶部上形成惯性质量来进行耦合的步骤。 加速度计有利地用于监测车辆的轮胎的压力的装置中。

    Read/write transducer for hard disk drives with optical position measuring system, and manufacturing process thereof
    48.
    发明授权
    Read/write transducer for hard disk drives with optical position measuring system, and manufacturing process thereof 有权
    用于具有光学位置测量系统的硬盘驱动器的读/写传感器及其制造过程

    公开(公告)号：US06924958B2

    公开(公告)日：2005-08-02

    申请号：US10001922

    申请日：2001-11-13

    申请人： Benedetto Vigna ,  Simone Sassolini ,  Sarah Zerbini ,  Lorenzo Baldo

    发明人： Benedetto Vigna ,  Simone Sassolini ,  Sarah Zerbini ,  Lorenzo Baldo

    IPC分类号： G11B5/596

    CPC分类号： G01R33/0286 ,  G11B5/59677

    摘要： Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

    摘要翻译： 这里描述了一种用于具有双驱动级的硬盘驱动器的读/写换能器，包括至少一个硬盘和至少一个承载读/写换能器的悬架。 读/写换能器包括具有基本上平行六面体形状的支撑体，布置在支撑体的前表面上的读/写头和在制造过程中在支撑体的一个侧面上限定的光栅 读/写传感器。 该光栅能够使用激光发射器以光学方式测量读/写换能器相对于相应悬架的位置，该激光发射器向激光束发射和指向光栅;以及激光接收器，被布置成拦截由 光栅并输出位置信号，基于此可以以简单的方式计算读/写换能器相对于相应悬架的位置。